公开(公告)号：US20190033252A1

公开(公告)日：2019-01-31

申请号：US15661969

申请日：2017-07-27

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Jui-Cheng HUANG ,  Yi-Hsien CHANG ,  Chin-Hua WEN ,  Chun-Ren CHENG ,  Shih-Fen HUANG ,  Tung-Tsun CHEN ,  Yu-Jie HUANG ,  Ching-Hui LIN ,  Sean CHENG ,  Hector CHANG

IPC: G01N27/414 ,  H01L41/08 ,  B01F13/00 ,  C12Q1/68 ,  G01N33/543 ,  B01L3/00

Abstract: A bioFET device includes a semiconductor substrate having a first surface and an opposite, parallel second surface and a plurality of bioFET sensors on the semiconductor substrate. Each of the bioFET sensors includes a gate formed on the first surface of the semiconductor substrate and a channel region formed within the semiconductor substrate beneath the gate and between source/drain (S/D) regions in the semiconductor substrate. The channel region includes a portion of the second surface of the semiconductor substrate. An isolation layer is disposed on the second surface of the semiconductor substrate. The isolation layer has an opening positioned over the channel region of more than one bioFET sensor of the plurality of bioFET sensors. An interface layer is disposed on the channel region of the more than one bioFET sensor in the opening.

公开(公告)号：US20170363704A1

公开(公告)日：2017-12-21

申请号：US15691296

申请日：2017-08-30

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Chin-Hua WEN ,  Jui-Cheng Huang ,  Yi-Shao Liu ,  Chun-Wen Cheng ,  Tung-Tsun Chen

IPC: G01R35/00 ,  G01N27/414

CPC classification number: G01R35/00 ,  G01N27/4145

Abstract: A device includes a first biosensor of a biosensor array; a second biosensor of a biosensor array; a readout circuit electrically connected to the biosensor array; a decoder electrically connected to the biosensor array; a voltage generator electrically connected to the biosensor array; and a decision system electrically connected to the voltage generator and the readout circuit.

公开(公告)号：US20210263022A1

公开(公告)日：2021-08-26

申请号：US17314825

申请日：2021-05-07

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Jui-Cheng HUANG ,  Chin-Hua WEN ,  Tung-Tsun CHEN ,  Cheng-Hsiang HSIEH ,  Yu-Jie HUANG ,  Ching-Hui LIN

IPC: G01N33/543 ,  G01N27/416 ,  G01N27/414 ,  B01L3/00 ,  C12Q1/6837

Abstract: A fluidic cartridge and methods of operation are described. The fluidic cartridge includes a substrate having a plurality of contact pads designed to electrically couple with an analyzer, a semiconductor chip having a sensor array, and a reference electrode. The fluidic cartridge includes a first fluidic channel having an inlet and coupled to a second fluidic channel, the second fluidic channel being aligned such that the sensor array and the reference electrode are disposed within the second fluidic channel. A first plug is disposed at the first inlet. The first plug includes a compliant material configured to be punctured by a capillary without leaking fluid through the first plug.

公开(公告)号：US20200371059A1

公开(公告)日：2020-11-26

申请号：US16989458

申请日：2020-08-10

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Chin-Hua WEN ,  Jui-Cheng HUANG

IPC: G01N27/30 ,  B01L3/02 ,  C12Q1/6825 ,  G01N27/414 ,  G01N33/543

Abstract: An apparatus including an integrated reference electrode and a fluid dispenser is described. The reference electrode includes a body and a tip. The fluid dispenser at least partially surrounds the tip of the reference electrode and includes an inlet, a chamber, and an outlet. The fluid dispenser is configured to receive a fluid sample from the inlet to the chamber and form a droplet of the fluid sample through the outlet so that the droplet is in fluidic contact with the tip of the reference electrode and associated with a known potential determined by the reference electrode.

公开(公告)号：US20210116413A1

公开(公告)日：2021-04-22

申请号：US17135498

申请日：2020-12-28

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Jui-Cheng HUANG ,  Yi-Hsien CHANG ,  Chin-Hua WEN ,  Chun-Ren CHENG ,  Shih-Fen HUANG ,  Tung-Tsun CHEN ,  Yu-Jie HUANG ,  Ching-Hui LIN ,  Sean CHENG ,  Hector CHANG

IPC: G01N27/414 ,  H01L41/09 ,  B01L3/00 ,  B01F11/02 ,  B01F13/00 ,  G01N33/543 ,  H01L41/08

Abstract: A bioFET device includes a semiconductor substrate having a first surface and an opposite, parallel second surface and a plurality of bioFET sensors on the semiconductor substrate. Each of the bioFET sensors includes a gate formed on the first surface of the semiconductor substrate and a channel region formed within the semiconductor substrate beneath the gate and between source/drain (S/D) regions in the semiconductor substrate. The channel region includes a portion of the second surface of the semiconductor substrate. An isolation layer is disposed on the second surface of the semiconductor substrate. The isolation layer has an opening positioned over the channel region of more than one bioFET sensor of the plurality of bioFET sensors. An interface layer is disposed on the channel region of the more than one bioFET sensor in the opening.

公开(公告)号：US20180313777A1

公开(公告)日：2018-11-01

申请号：US15725776

申请日：2017-10-05

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Chin-Hua WEN ,  Jui-Cheng HUANG

IPC: G01N27/30 ,  G01N27/414 ,  B01L3/00 ,  C12Q1/68 ,  G01N33/543

CPC classification number: G01N27/301 ,  B01L3/0262 ,  B01L3/502715 ,  B01L2200/06 ,  B01L2200/141 ,  B01L2300/0645 ,  C12Q1/6825 ,  G01N27/414 ,  G01N27/4145 ,  G01N33/5438 ,  C12Q2563/159 ,  C12Q2565/607 ,  C12Q2565/629

Abstract: An apparatus including an integrated reference electrode and a fluid dispenser is described. The reference electrode includes a body and a tip. The fluid dispenser at least partially surrounds the tip of the reference electrode and includes an inlet, a chamber, and an outlet. The fluid dispenser is configured to receive a fluid sample from the inlet to the chamber and form a droplet of the fluid sample through the outlet so that the droplet is in fluidic contact with the tip of the reference electrode and associated with a known potential determined by the reference electrode.