摘要:
An air-fuel ratio control apparatus of the present invention comprises an inverse direction spike introducing section and an inverse direction spike interval setting section. The inverse direction spike introducing section introduces, while an air-fuel ratio correction required by an output of a downstream air-fuel ratio sensor is being carried out, an inverse direction spike which is an air-fuel ratio spike to temporarily change an air-fuel ratio of an exhaust gas toward a direction opposite to a direction of the air-fuel ratio correction with respect to a target control air-fuel ratio. The inverse direction spike interval setting section sets, based on an operating state of an internal combustion engine system, an inverse direction spike interval which is an interval between two of the inverse direction spikes next to each other in time.
摘要:
A light source apparatus includes a discharge lamp including a light-emitting container having a cavity in which a discharge medium is enclosed, and a pair of electrodes disposed such that respective tip portions thereof oppose each other in the cavity, and a driving unit that supplies a driving current to the pair of electrodes. The driving current is generated by modulating amplitude of alternating current having a frequency not lower than 1 kHz and not higher than 10 GHz, such that a first section and a second section in which the amplitude is smaller than in the first section are alternately repeated.
摘要:
A light source device includes an elliptical resonator, an electric discharge lamp that has an electric discharge tube and an electrode connected to the electric discharge tube and is disposed at one of two confocal points of the elliptical resonator, and a power supply antenna that supplies a microwave to the electric discharge lamp and is disposed at the other confocal point.
摘要:
The construction of this invention includes an active matrix substrate, an amorphous selenium layer, a high resistance layer, a gold electrode layer, an insulating layer and an auxiliary plate laminated in this order. In one aspect of the present invention, the insulating layer has an inorganic anion exchanger added thereto in order to provide a radiation detector which prevents void formation and pinhole formation in the amorphous semiconductor layer and carrier selective high resistance film, without accumulating electric charges on the auxiliary plate. The inorganic anion exchanger adsorbs chloride ions in the insulating layer, thereby preventing destruction of X-ray detector due to the chloride ions drawn to the gold electrode layer.
摘要:
A development roller includes a base unit having a base recess and a base projection formed in a predetermined area of a circumference surface of the base unit, and a surface layer formed on the circumference surface of the base unit and having a recess and a projection formed respectively in accordance with the base recess and the base projection of the base unit.
摘要:
A GPS server capable of receiving information for use in determining ionospheric errors using mathematical formulas and sending ionospheric error correction information to GPS receivers that are in a location capable of receiving the ionospheric error correction information.
摘要:
A beam dose computing method includes specifying a matrix of rows and columns of regions as divided from a surface area of a target object to include first, second and third regions of different sizes, the third regions being less in size than the first and second regions, determining first corrected doses of a charged particle beam for correcting fogging effects in the first regions, determining corrected size values for correcting pattern line width deviations occurring due to loading effects in the second regions, using said corrected size values in said second regions to create a map of base doses of the beam in respective ones of said second regions, using said corrected size values to prepare a map of proximity effect correction coefficients in respective ones of said second regions, using the maps to determine second corrected doses of said beam for correction of proximity effects in said third regions, and using the first and second corrected doses to determine an actual beam dose at each position on the surface of said object.
摘要:
A charged-particle beam lithography apparatus includes a charged-particle beam irradiation unit, a deflector which deflects the charged particle beam, a stage which disposes thereon a workpiece for pattern writing and a plurality of marks being regularly laid out in an entire area substantially equal to a pattern writing region of the workpiece, a measurement unit for measuring positions of the marks on the stage through scanning of the charged-particle beam by the deflector, a coefficient calculation unit which uses an approximation equation for correction of a position deviation occurring due to a hardware configuration of the apparatus to perform the fitting of a position deviation amount of each mark by a coordinate system of the apparatus to thereby calculate more than one coefficient of the fitting-applied approximation equation, and a storage unit which performs overwrite-storing whenever the coefficient calculation unit calculates the coefficient.
摘要:
A power saving wireless fire alarm system has a master station and a plurality of battery-powered fire detecting cc terminals linked for wireless communication with each other. Upon detection of a fire occurrence at one of the fire detecting terminals, the fire detecting terminal transmit a fire detection message to a master station which in turn transmit a wake-up message to the other fire detecting terminals and thereafter a fire information message which starts a multiple synchronous communication between the master station and the fire detecting terminals. Each fire detecting terminal has a power controller which selects an intermittent reception mode of activating its own receiver only intermittently until receiving the wake-up message or information indicative of the fire occurrence, and select a constant operation mode thereafter to make the fire detecting terminals be ready for the multiple synchronous communication commenced by the fire information message from the master station.
摘要:
A method for writing a pattern on a workpiece by use of a charged particle beam, the method includes calculating a corrected dose including at least a proximity effect correction dose for correction of proximity effect, calculating a corrected residual difference-corrected dose for correcting a correction residual difference of the corrected dose, calculating a exposure dose of the charged particle beam to be corrected by the corrected dose as corrected by the correction residual difference-corrected dose, and irradiating the charged particle beam onto the workpiece in such a way as to become the exposure dose.