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11.发明授权公开(公告)号：US11002656B2
公开(公告)日：2021-05-11
申请号：US16746118
申请日：2020-01-17
Applicant: TOKYO ELECTRON LIMITED
Inventor： Masato Hayashi , Kohei Noguchi , Koudai Higashi , Makoto Ogata
Abstract: According to one embodiment of the present disclosure, there is provided a substrate processing apparatus comprising: a supply passage through which fluid supplied to a substrate flows; and a foreign substance detector including a channel forming part forming a portion of the supply passage, a light projector irradiating light to the channel forming part, and a light receiver receiving light emitted from the channel forming part as a result of irradiating light to the channel forming part by the light projector, the foreign substance detector being configured to detect a foreign substance in the fluid based on a signal obtained by the light that the light receiver receives, wherein the light projector and the light receiver in the foreign substance detector are disposed in areas that are not opposite to each other in areas in upper, lower, left, right, front and rear directions of the channel forming part.
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公开(公告)号：US20240385538A1
公开(公告)日：2024-11-21
申请号：US18662204
申请日：2024-05-13
Applicant: Tokyo Electron Limited
Inventor： Junnosuke Maki , Masato Hayashi , Nobuyuki Sata , Ryo Konishi
Abstract: An information collection system is configured to acquire information on a substrate processing apparatus having a holder configured to hold a substrate and a functional member located on a rear surface side of the substrate when the substrate is held by the holder. The information collection system includes a main body having a bottom surface allowed to be held by the holder; a radiator fixed to the main body, and configured to radiate a measurement wave to the functional member from obliquely above; a detector fixed to the main body, and configured to detect a response resulting from a radiation of the measurement wave from the radiator; and a calculator configured to acquire information on a distance between the main body and the functional member based on the response detected by the detector.
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公开(公告)号：US11906414B2
公开(公告)日：2024-02-20
申请号：US17809365
申请日：2022-06-28
Applicant: Tokyo Electron Limited
Inventor： Masato Hayashi , Kohei Noguchi , Daisuke Kajiwara , Koudai Higashi
CPC classification number: G01N15/06 , G01N21/51 , G01N21/53 , G01N2015/0687 , G01N2015/0693
Abstract: A foreign substance detection device includes a flow path unit through which a fluid is flown; an optical system configured to flatten a laser light from a laser source to be lengthened in a direction intersecting with a flow direction of the fluid; a laser light irradiation unit provided such that an optical path intersects with the flow direction and configured to irradiate the laser light into the flow path unit; a light detection unit which is provided on the optical path having passed through the flow path unit and includes light receiving elements arranged in a lengthwise direction of a transversal cross section of the optical path; a foreign substance detection unit configured to compare a signal level corresponding to intensity of light received by each light receiving element with a threshold value and configured to detect the foreign substances based on a comparison result.
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公开(公告)号：US11879839B2
公开(公告)日：2024-01-23
申请号：US17386850
申请日：2021-07-28
Applicant: Tokyo Electron Limited
Inventor： Koudai Higashi , Masato Hayashi , Kohei Noguchi
CPC classification number: G01N21/39 , G01N21/85 , G01N2021/392
Abstract: A substrate processing apparatus includes a supply channel through which a liquid to be supplied to a substrate flows; and a foreign substance detecting unit configured to detect a foreign substance in the liquid based on a signal obtained when light, which is near-infrared light, is radiated toward a flow path forming unit constituting a part of the supply channel by a light projector so that light is emitted from the flow path forming unit and a light receiver receives the light emitted from the flow path forming unit.
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公开(公告)号：US20210190661A1
公开(公告)日：2021-06-24
申请号：US16071122
申请日：2017-01-10
Applicant: Tokyo Electron Limited
Inventor： Masato Hayashi , Kohei Noguchi , Daisuke Kajiwara , Koudai Higashi
Abstract: A foreign substance detection device includes a flow path unit through which a fluid is flown; an optical system configured to flatten a laser light from a laser source to be lengthened in a direction intersecting with a flow direction of the fluid; a laser light irradiation unit provided such that an optical path intersects with the flow direction and configured to irradiate the laser light into the flow path unit; a light detection unit which is provided on the optical path having passed through the flow path unit and includes light receiving elements arranged in a lengthwise direction of a transversal cross section of the optical path; a foreign substance detection unit configured to compare a signal level corresponding to intensity of light received by each light receiving element with a threshold value and configured to detect the foreign substance based on a comparison result.
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Patent Agency Ranking
公开(公告)号：US20250093276A1
公开(公告)日：2025-03-20
申请号：US18724335
申请日：2022-12-13
Applicant: Tokyo Electron Limited
Inventor： Masato Hayashi , Koudai Higashi
Abstract: A foreign substance detection device configured to detect a foreign substance contained in a processing liquid configured to process a substrate includes multiple processing liquid flow path forming mechanisms configured to form multiple processing liquid flow paths through which the processing liquid to be supplied to the substrate flows; a radiator configured to radiate radiation light from a light source toward each of the multiple processing liquid flow paths; and a light receiver configured to receive light emitted from the processing liquid flow paths by radiating the radiation light. The radiator includes a light adjuster configured to adjust a light amount of the radiation light radiated to the multiple processing liquid flow paths.
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公开(公告)号：US20240175131A1
公开(公告)日：2024-05-30
申请号：US18427992
申请日：2024-01-31
Applicant: Tokyo Electron Limited
Inventor： Ryo Araki , Junnosuke Maki , Mitsuteru Yano , Masato Hayashi
IPC: C23C16/455 , B05B12/00 , C23C16/46
CPC classification number: C23C16/45563 , B05B12/004 , C23C16/45557 , C23C16/463
Abstract: A substrate processing apparatus configured to process a substrate includes a functional component constituting a part of the substrate processing apparatus; a nozzle, provided on a surface of the functional component, allowing a gas to pass therethrough; a nozzle flow path which is connected to the nozzle of the functional component and through which the gas flows; a flow rate sensor configured to measure a flow rate of the gas flowing through the nozzle flow path; and a controller configured to make a determination upon a state of a distance between an interfering object and the functional component based on a measurement result obtained by the flow rate sensor.
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公开(公告)号：US20220034802A1
公开(公告)日：2022-02-03
申请号：US17386850
申请日：2021-07-28
Applicant: Tokyo Electron Limited
Inventor： Koudai Higashi , Masato Hayashi , Kohei Noguchi
Abstract: A substrate processing apparatus includes a supply channel through which a liquid to be supplied to a substrate flows; and a foreign substance detecting unit configured to detect a foreign substance in the liquid based on a signal obtained when light, which is near-infrared light, is radiated toward a flow path forming unit constituting a part of the supply channel by a light projector so that light is emitted from the flow path forming unit and a light receiver receives the light emitted from the flow path forming unit.
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19.发明授权公开(公告)号：US11048016B2
公开(公告)日：2021-06-29
申请号：US16478908
申请日：2018-01-16
Applicant: Tokyo Electron Limited
Inventor： Masato Hayashi , Kohei Noguchi , Daisuke Kajiwara , Koudai Higashi
Abstract: An apparatus includes flow path units 15A to 15K configured to form flow paths 17A to 17K through which a fluid supplied to a target object W is flown; a laser light irradiator 51 configured to irradiate a laser light into the flow path units such that an optical path intersects with a flow direction of the fluid in the flow path units; light receiving elements 45A and 45B provided at the optical path having passed through the flow path units; a detector 6 configured to detect the foreign substance in the fluid based on a signal from the light receiving elements; and a filter unit 57 provided at the optical path between the light receiving elements and the flow path units, and configured to block a Raman scattered light and allow a Rayleigh scattered light to be transmitted to the light receiving elements.
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20.发明申请公开(公告)号：US20190383963A1
公开(公告)日：2019-12-19
申请号：US16478908
申请日：2018-01-16
Applicant: Tokyo Electron Limited
Inventor： Masato Hayashi , Kohei Noguchi , Daisuke Kajiwara , Koudai Higashi
Abstract: An apparatus includes flow path units 15A to 15K configured to form flow paths 17A to 17K through which a fluid supplied to a target object W is flown; a laser light irradiator 51 configured to irradiate a laser light into the flow path units such that an optical path intersects with a flow direction of the fluid in the flow path units; light receiving elements 45A and 45B provided at the optical path having passed through the flow path units; a detector 6 configured to detect the foreign substance in the fluid based on a signal from the light receiving elements; and a filter unit 57 provided at the optical path between the light receiving elements and the flow path units, and configured to block a Raman scattered light and allow a Rayleigh scattered light to be transmitted to the light receiving elements.
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