MASK FRAME ASSEMBLY, METHOD OF MANUFACTURING THE SAME, AND METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY DEVICE USING THE MASK FRAME ASSEMBLY
    11.
    发明申请
    MASK FRAME ASSEMBLY, METHOD OF MANUFACTURING THE SAME, AND METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY DEVICE USING THE MASK FRAME ASSEMBLY 有权
    遮蔽框架组件,其制造方法以及使用框架组件制造有机发光显示装置的方法

    公开(公告)号:US20120156812A1

    公开(公告)日:2012-06-21

    申请号:US13242521

    申请日:2011-09-23

    IPC分类号: H01L33/00 B23P11/02 B05C11/00

    摘要: A mask frame includes a frame and a mask installed on the frame while being stretched in a first direction. The mask includes a deposition area including a plurality of deposition pattern portions, an edge unit formed to have a thickness greater than a thickness of the deposition area and including a first edge and a second edge that extend in the first direction on two sides of the deposition area, and two or more ribs formed to have a thickness greater than the thickness of the deposition area between deposition pattern portions adjacent to each other in a second direction perpendicular to the first direction.

    摘要翻译: 掩模框架包括框架和安装在框架上的面罩,同时在第一方向上被拉伸。 掩模包括包括多个沉积图案部分的沉积区域,形成为具有大于沉积区域的厚度的厚度的边缘单元,并且包括沿着第一边缘和第二边缘在第一方向延伸的第二边缘 沉积区域和形成为具有大于垂直于第一方向的第二方向上彼此相邻的沉积图案部分之间的沉积区域的厚度的两个或更多个肋。

    Mask assembly, deposition apparatus for flat panel displays including the same, and associated methods
    12.
    发明申请
    Mask assembly, deposition apparatus for flat panel displays including the same, and associated methods 审中-公开
    面罩组件,包括其的平板显示器的沉积装置和相关方法

    公开(公告)号:US20110067630A1

    公开(公告)日:2011-03-24

    申请号:US12659059

    申请日:2010-02-24

    IPC分类号: C23C16/44 G03F1/00 B05C11/00

    摘要: A mask assembly, a deposition apparatus for flat panel displays including the same, and associated methods, the mask assembly including an open mask having a plurality of first openings, and a pattern mask coupled to the open mask, the pattern mask having a plurality of second openings disposed within an area bounded by the first openings, wherein the open mask is formed of a material having a thermal expansion coefficient that is lower than a thermal expansion coefficient of the pattern mask.

    摘要翻译: 掩模组件,包括其的平板显示器的沉积装置和相关方法,所述掩模组件包括具有多个第一开口的开口掩模和耦合到所述开口掩模的图案掩模,所述图案掩模具有多个 第二开口设置在由第一开口限定的区域内,其中,开口掩模由热膨胀系数低于图案掩模的热膨胀系数的材料形成。