公开(公告)号：US20100270277A1

公开(公告)日：2010-10-28

申请号：US12742491

申请日：2008-08-26

申请人： Naoya Matsumoto ,  Takashi Inoue ,  Norihiro Fukuchi ,  Haruyasu Ito ,  Yuu Takiguchi

发明人： Naoya Matsumoto ,  Takashi Inoue ,  Norihiro Fukuchi ,  Haruyasu Ito ,  Yuu Takiguchi

IPC分类号： B23K26/00

CPC分类号： B23K26/00 ,  B23K26/06 ,  B23K26/0624 ,  B23K26/064 ,  B23K26/0661 ,  B23K26/067 ,  B23K26/355 ,  G03H1/2294 ,  G03H2001/0094 ,  G03H2225/32

摘要： A laser machining device 1 comprises a laser light source 10, a spatial light modulator 20, a controller 22, a converging optical system 30, and a shielding member 40. The phase-modulating spatial light modulator 20 inputs a laser beam outputted from the laser light source 10, displays a hologram modulating a phase of the laser beam at each of a plurality of pixels arranged two-dimensionally, and outputs the phase-modulated laser beam. The controller 22 causes the spatial light modulator 20 to display a plurality of holograms sequentially, lets the converging optical system 30 converge the laser beam outputted from the spatial light modulator 20 at converging positions having a fixed number of M, selectively places N converging positions out of the M converging positions into a machining region 91, and machines an object to be machined 90.

摘要翻译： 激光加工装置1包括激光源10，空间光调制器20，控制器22，会聚光学系统30和屏蔽构件40.相位调制空间光调制器20输入从激光器输出的激光束 光源10显示调制在二维排列的多个像素中的每一个处的激光束的相位的全息图，并输出相位调制的激光束。 控制器22使空间光调制器20依次显示多个全息图，使会聚光学系统30将从空间光调制器20输出的激光束会聚在具有固定数量的M的会聚位置，选择性地将N个收敛位置放出 的M个会聚位置进入加工区域91，并且对要加工的物体进行加工90。

公开(公告)号：US20100000978A1

公开(公告)日：2010-01-07

申请号：US12496249

申请日：2009-07-01

申请人： Naoya MATSUMOTO ,  Norihiro Fukuchi ,  Naohisa Mukozaka ,  Takashi Inoue ,  Yuu Takiguchi

发明人： Naoya MATSUMOTO ,  Norihiro Fukuchi ,  Naohisa Mukozaka ,  Takashi Inoue ,  Yuu Takiguchi

IPC分类号： B23K26/38 ,  G03H1/08

CPC分类号： B41J2/442 ,  B23K26/066 ,  B41J2/465 ,  B41M5/24 ,  G02B26/06 ,  G02B27/42 ,  G02B27/4244 ,  G02B27/425 ,  G03H1/0005 ,  G03H1/0236 ,  G03H1/08 ,  G03H1/0808 ,  G03H1/2286 ,  G03H1/2294 ,  G03H2001/0094 ,  G03H2001/0816 ,  G03H2001/2218 ,  G03H2210/52 ,  G03H2225/32 ,  G03H2240/51 ,  G03H2240/53

摘要： A laser machining device is provided with a laser light source, a spatial light modulator, a driving unit, a control unit, and a condensing optical system. The control unit selects a basic hologram corresponding to each basic machining pattern included in a whole machining pattern in a workpiece from a plurality of basic holograms stored by the storage unit, and determines a display region of the basic hologram in the spatial light modulator so that the deviation of the value of “Iη/n” becomes small for the selected respective basic hologram when the intensity of a laser beam input to a display region of the basic hologram in the spatial light modulator is defined as I, the diffraction efficiency of the laser beam in the basic hologram is defined as η, and the number of condensing points in a basic machining pattern corresponding to the basic hologram is defined as n.

摘要翻译： 激光加工装置设置有激光光源，空间光调制器，驱动单元，控制单元和聚光光学系统。 控制单元从由存储单元存储的多个基本全息图中选择对应于工件中的整个加工图案中包括的每个基本加工图案的基本全息图，并且确定空间光调制器中的基本全息图的显示区域，使得 当输入到空间光调制器中的基本全息图的显示区域的激光束的强度被定义为I时，对于所选择的各个基本全息图，“Ieta / n”的值的偏差变小， 将基本全息图中的激光束定义为η，将与基本全息图对应的基本加工图案中的聚光点的数量定义为n。

公开(公告)号：US09383597B2

公开(公告)日：2016-07-05

申请号：US14427068

申请日：2012-09-13

申请人： Naoya Matsumoto ,  Takashi Inoue ,  Yuu Takiguchi

发明人： Naoya Matsumoto ,  Takashi Inoue ,  Yuu Takiguchi

IPC分类号： G02F1/01 ,  G02B26/08 ,  B23K26/03 ,  B23K26/06 ,  B23K26/08 ,  B23K26/02 ,  G02B21/00 ,  G02F1/29 ,  G02F1/1362

CPC分类号： G02F1/292 ,  B23K26/032 ,  B23K26/035 ,  B23K26/0622 ,  B23K26/0643 ,  B23K26/0648 ,  B23K26/0853 ,  G02B21/0024 ,  G02F1/136277

摘要： In controlling light condensing irradiation with laser light using a spatial light modulator, an incident pattern of the laser light and respective refractive indices of first and second propagation media on a propagation path are acquired, the number of light condensing points, and the light condensing position and the light condensing intensity at each light condensing point are set, an aberration condition caused by the first and second propagation media is derived, and by taking the aberration condition into account, a modulation pattern to be presented in the spatial light modulator is designed. Further, in designing the modulation pattern, a design method focusing on an effect of a phase value at one pixel is used, and in evaluating the light condensing state at the light condensing point, a propagation function that takes the aberration condition into account is employed.

摘要翻译： 在使用空间光调制器控制激光的聚光照射时，获取激光的入射图案和传播路径上的第一和第二传播介质的折射率，聚光点数和聚光位置 并且在每个聚光点处的聚光强度被设定，得到由第一和第二传播介质引起的像差条件，考虑到像差条件，设计出在空间光调制器中呈现的调制图案。 此外，在设计调制图案时，使用集中在一个像素上的相位值的效果的设计方法，并且在评估聚光点处的聚光状态时，采用考虑像差条件的传播函数 。