公开(公告)号：US08324529B2

公开(公告)日：2012-12-04

申请号：US12742491

申请日：2008-08-26

申请人： Naoya Matsumoto ,  Takashi Inoue ,  Norihiro Fukuchi ,  Haruyasu Ito ,  Yuu Takiguchi

发明人： Naoya Matsumoto ,  Takashi Inoue ,  Norihiro Fukuchi ,  Haruyasu Ito ,  Yuu Takiguchi

IPC分类号： B23K26/00 ,  B23K26/14 ,  B23K26/16 ,  B23K26/06 ,  B23K26/02

CPC分类号： B23K26/00 ,  B23K26/06 ,  B23K26/0624 ,  B23K26/064 ,  B23K26/0661 ,  B23K26/067 ,  B23K26/355 ,  G03H1/2294 ,  G03H2001/0094 ,  G03H2225/32

摘要： A laser machining device 1 includes a laser light source 10, a spatial light modulator 20, a controller 22, a converging optical system 30, and a shielding member 40. The phase-modulating spatial light modulator 20 inputs a laser beam outputted from the laser light source 10, displays a hologram modulating a phase of the laser beam at each of a plurality of pixels arranged two-dimensionally, and outputs the phase-modulated laser beam. The controller 22 causes the spatial light modulator 20 to display a plurality of holograms sequentially, lets the converging optical system 30 converge the laser beam outputted from the spatial light modulator 20 at converging positions having a fixed number of M, selectively places N converging positions out of the M converging positions into a machining region 91, and machines an object to be machined 90.

摘要翻译： 激光加工装置1包括激光源10，空间光调制器20，控制器22，会聚光学系统30和屏蔽构件40.相位调制用空间光调制器20输入从激光器输出的激光束 光源10显示调制在二维排列的多个像素中的每一个处的激光束的相位的全息图，并输出相位调制的激光束。 控制器22使空间光调制器20依次显示多个全息图，使会聚光学系统30将从空间光调制器20输出的激光束会聚在具有固定数量的M的会聚位置，选择性地将N个收敛位置放出 的M个会聚位置进入加工区域91，并且对要加工的物体进行加工90。

公开(公告)号：US20100270277A1

公开(公告)日：2010-10-28

申请号：US12742491

申请日：2008-08-26

申请人： Naoya Matsumoto ,  Takashi Inoue ,  Norihiro Fukuchi ,  Haruyasu Ito ,  Yuu Takiguchi

发明人： Naoya Matsumoto ,  Takashi Inoue ,  Norihiro Fukuchi ,  Haruyasu Ito ,  Yuu Takiguchi

IPC分类号： B23K26/00

CPC分类号： B23K26/00 ,  B23K26/06 ,  B23K26/0624 ,  B23K26/064 ,  B23K26/0661 ,  B23K26/067 ,  B23K26/355 ,  G03H1/2294 ,  G03H2001/0094 ,  G03H2225/32

摘要： A laser machining device 1 comprises a laser light source 10, a spatial light modulator 20, a controller 22, a converging optical system 30, and a shielding member 40. The phase-modulating spatial light modulator 20 inputs a laser beam outputted from the laser light source 10, displays a hologram modulating a phase of the laser beam at each of a plurality of pixels arranged two-dimensionally, and outputs the phase-modulated laser beam. The controller 22 causes the spatial light modulator 20 to display a plurality of holograms sequentially, lets the converging optical system 30 converge the laser beam outputted from the spatial light modulator 20 at converging positions having a fixed number of M, selectively places N converging positions out of the M converging positions into a machining region 91, and machines an object to be machined 90.

摘要翻译： 激光加工装置1包括激光源10，空间光调制器20，控制器22，会聚光学系统30和屏蔽构件40.相位调制空间光调制器20输入从激光器输出的激光束 光源10显示调制在二维排列的多个像素中的每一个处的激光束的相位的全息图，并输出相位调制的激光束。 控制器22使空间光调制器20依次显示多个全息图，使会聚光学系统30将从空间光调制器20输出的激光束会聚在具有固定数量的M的会聚位置，选择性地将N个收敛位置放出 的M个会聚位置进入加工区域91，并且对要加工的物体进行加工90。

公开(公告)号：US20110058579A1

公开(公告)日：2011-03-10

申请号：US12991271

申请日：2009-05-21

申请人： Yoshiyuki Ohtake ,  Haruyasu Ito ,  Taro Ando ,  Takashi Inoue ,  Naoya Matsumoto ,  Norihiro Fukuchi

发明人： Yoshiyuki Ohtake ,  Haruyasu Ito ,  Taro Ando ,  Takashi Inoue ,  Naoya Matsumoto ,  Norihiro Fukuchi

IPC分类号： H01S3/139

CPC分类号： H01S3/08045 ,  H01S3/0805 ,  H01S3/08059 ,  H01S3/08068 ,  H01S3/105 ,  H01S2301/203

摘要： A laser light source 1 is provided with an output mirror 11, a laser medium 12, a light beam diameter adjuster 13, an aperture 14, a reflection mirror 15, a drive unit 21, and a control unit 22, and outputs laser oscillation light 31 from the output mirror 11 to the outside. The laser resonator is configured so that the reflection mirror 15 and the output mirror 11 are disposed so as to be opposed to each other with the laser medium 12 placed therebetween. The reflection mirror 15 is configured such that it gives amplitude or phase variations to respective positions in the section of a light beam when the light is reflected, and the reflection mirror presents a amplitude or phase variation distribution in accordance with control from the outside, and determines the transverse mode of the laser oscillation light 31 based on the amplitude or phase variation distribution. Thus, a laser light source capable of easily controlling the transverse mode of the laser oscillation light can be realized.

摘要翻译： 激光光源1设置有输出镜11，激光介质12，光束直径调节器13，孔14，反射镜15，驱动单元21和控制单元22，并且输出激光振荡光 31从输出镜11到外部。 激光谐振器被配置为使得反射镜15和输出反射镜11被布置成使激光介质12放置在它们之间彼此相对。 反射镜15被构造成使得当光被反射时，其在光束的部分中的相应位置产生振幅或相位变化，并且反射镜根据来自外部的控制呈现幅度或相位变化分布，以及 基于振幅或相位变化分布确定激光振荡光31的横向模式。 因此，可以实现能够容易地控制激光振荡光的横向模式的激光源。

公开(公告)号：US08295321B2

公开(公告)日：2012-10-23

申请号：US12991268

申请日：2009-05-21

申请人： Taro Ando ,  Haruyasu Ito ,  Yoshiyuki Ohtake ,  Takashi Inoue ,  Naoya Matsumoto ,  Norihiro Fukuchi

发明人： Taro Ando ,  Haruyasu Ito ,  Yoshiyuki Ohtake ,  Takashi Inoue ,  Naoya Matsumoto ,  Norihiro Fukuchi

IPC分类号： H01S3/13 ,  H01S3/082 ,  H01S3/08

CPC分类号： H01S3/0804 ,  H01S3/0805 ,  H01S3/08059 ,  H01S3/08068 ,  H01S3/10053 ,  H01S3/105

摘要： A laser light source 1 is provided with a first reflection mirror 11, a laser medium 12, an aperture 13, an output mirror 14, a half mirror 15, a light beam diameter adjuster 16, and a second reflection mirror 17, and outputs laser oscillation light 31 reflected by the half mirror 15 to the outside. The main resonator is composed by the first reflection mirror 11 and the output mirror 14 disposed so as to be opposed to each other with the laser medium 12 placed therebetween. The external resonator is composed by the output mirror 14 and the second reflection mirror 17 disposed so as to be opposed to each other. The second reflection mirror 17 is configured such that it gives amplitude or phase variations to respective positions in the section of a light beam when the light is reflected, the second reflection mirror presents an amplitude or phase variation distribution, and determines the transverse mode of the laser oscillation light 31 based on the amplitude or phase variation distribution. Thus, a laser light source capable of easily controlling the transverse mode of the laser oscillation light can be realized.

摘要翻译： 激光光源1设置有第一反射镜11，激光介质12，孔13，输出镜14，半透半反镜15，光束直径调节器16和第二反射镜17，并且输出激光 由半反射镜15反射到外部的振荡光31。 主谐振器由第一反射镜11和输出反射镜14构成，其中激光介质12位于它们之间，以彼此相对。 外部谐振器由输出反射镜14和设置为彼此相对设置的第二反射镜17组成。 第二反射镜17被构造成使得当光被反射时，其对光束的部分中的相应位置给出幅度或相位变化，第二反射镜呈现振幅或相位变化分布，并且确定第二反射镜17的横向模式 基于振幅或相位变化分布的激光振荡光31。 因此，可以实现能够容易地控制激光振荡光的横向模式的激光源。

公开(公告)号：US08867113B2

公开(公告)日：2014-10-21

申请号：US13060614

申请日：2009-08-24

申请人： Naoya Matsumoto ,  Takashi Inoue ,  Norihiro Fukuchi ,  Haruyasu Ito

发明人： Naoya Matsumoto ,  Takashi Inoue ,  Norihiro Fukuchi ,  Haruyasu Ito

IPC分类号： G02B5/32 ,  B23K3/00 ,  B23K26/06

CPC分类号： G02B5/32 ,  B23K26/032 ,  B23K26/064 ,  B23K26/0643 ,  B23K26/066 ,  G03H1/2294 ,  G03H2001/0094 ,  G03H2210/452 ,  G03H2225/32 ,  G03H2240/51

摘要： A laser processing device includes a laser light source, a spatial light modulator, a control section, and a condensing optical system. The spatial light modulator, presents a hologram for modulating the phase of the laser light in each of a plurality of two-dimensionally arrayed pixels, and outputs the phase-modulated laser light. The control section causes a part of the phase-modulated laser light (incident light) to be condensed at a condensing position in a processing region as a laser light (contribution light) having a constant energy not less than a predetermined threshold X. The control section causes a laser light (unnecessary light) other than the contribution light condensed to the condensing position existing in the processing region to be dispersed and condensed at a condensing position existing in a non-processing region as a plurality of laser lights (non-contribution lights) having an energy less than the predetermined threshold.

摘要翻译： 激光加工装置包括激光光源，空间光调制器，控制部和聚光系统。 空间光调制器提供用于调制多个二维排列的像素中的每一个中的激光的相位的全息图，并输出相位调制的激光。 控制部使相位调制激光（入射光）的一部分在作为具有恒定能量的预定阈值X以上的激光（贡献光）的处理区域中的聚光位置聚光。控制部 在不存在于非处理区域的聚光位置处，使存在于处理区域中的聚光位置聚光的贡献光之外的激光（不必要的光）作为多个激光（非贡献 光）具有小于预定阈值的能量。

公开(公告)号：US20110181929A1

公开(公告)日：2011-07-28

申请号：US13060614

申请日：2009-08-24

申请人： Naoya Matsumoto ,  Takashi Inoue ,  Norihiro Fukuchi ,  Haruyasu Ito

发明人： Naoya Matsumoto ,  Takashi Inoue ,  Norihiro Fukuchi ,  Haruyasu Ito

IPC分类号： G02B5/32

CPC分类号： G02B5/32 ,  B23K26/032 ,  B23K26/064 ,  B23K26/0643 ,  B23K26/066 ,  G03H1/2294 ,  G03H2001/0094 ,  G03H2210/452 ,  G03H2225/32 ,  G03H2240/51

摘要： A laser processing device 1 includes a laser light source 10, a spatial light modulator 20, a control section 22, and a condensing optical system 30. The spatial light modulator 20 is input with a laser light output from the laser light source 10, presents a hologram for modulating the phase of the laser light in each of a plurality of two-dimensionally arrayed pixels, and outputs the phase-modulated laser light. The control section 22 causes a part of the phase-modulated laser light (incident light) to be condensed at a condensing position existing in a processing region as a laser light (contribution light) having a constant energy not less than a predetermined threshold X. On the other hand, the control section 22 causes a laser light (unnecessary light) other than the contribution light condensed to the condensing position existing in the processing region to be dispersed and condensed at a condensing position existing in a non-processing region as a plurality of laser lights (non-contribution lights) having an energy less than the predetermined threshold X.

摘要翻译： 激光加工装置1包括激光光源10，空间光调制器20，控制部22和聚光光学系统30.空间光调制器20以从激光光源10输出的激光输入，呈现 用于调制多个二维排列的像素中的每一个中的激光的相位的全息图，并输出相位调制的激光。 控制部分22使得相位调制激光（入射光）的一部分在存在于处理区域中的聚光位置处被冷凝为具有不小于预定阈值X的恒定能量的激光（贡献光）。 另一方面，控制部22使存在于处理区域中的聚光位置的会聚光以外的激光（不必要的光）在存在于非处理区域的聚光位置分散并浓缩为 具有能量小于预定阈值X的多个激光（非贡献光）。

公开(公告)号：US07961371B2

公开(公告)日：2011-06-14

申请号：US12516416

申请日：2007-09-14

申请人： Taro Ando ,  Yoshiyuki Ohtake ,  Norihiro Fukuchi ,  Naoya Matsumoto ,  Haruyasu Ito

发明人： Taro Ando ,  Yoshiyuki Ohtake ,  Norihiro Fukuchi ,  Naoya Matsumoto ,  Haruyasu Ito

IPC分类号： G02F1/01

CPC分类号： G02B27/09 ,  G02B5/3025 ,  G02B21/32 ,  G02B26/06

摘要： The light beam generator 1 is provided with a laser light source 10, an optical phase modulation element 15 and others. The optical phase modulation element 15 receives coherent light output from the laser light source 10 and passed through a beam splitter 14 to modulate a phase of the light depending on a position on the beam cross section of the light, and outputs the light after the phase modulation to the beam splitter 14. A polar coordinate system (r, θ) in which a predetermined position is given as an origin is set on the beam cross section of the light input in the optical phase modulation element 15, and when (p+1) domains divided by p (number of pieces) circumferences in which the predetermined position is given as a center are set, of these (p+1) domains, a phase modulation amount φ at each position inside an even numbered domain counted from the inside is expressed by a formula of “φ=qθ”, and a phase modulation amount φ at each position inside an odd numbered domain counted from the inside is expressed by a formula of “φ=qθ+π”.

摘要翻译： 光束发生器1设置有激光光源10，光相位调制元件15等。 光相位调制元件15接收从激光光源10输出的相干光，并通过分束器14，根据光束横截面上的位置调制光的相位，并输出相位后的光 在光学相位调制元件15中的光输入的光束横截面上设置有以原点被赋予预定位置的极坐标系（r，θ），并且当（p +1）域除以这些（p + 1）域的p（个数）周期，其中给定预定位置为中心的相位调制量＆phgr; 在从内部计数的偶数域内的每个位置由“＆phgr; = q＆thetas”的公式表示，并且相位调制量＆phgr; 在内部计数的奇数域内的每个位置由公式“＆phgr; = q＆thetas; +＆pgr”表示。

公开(公告)号：US20100060969A1

公开(公告)日：2010-03-11

申请号：US12516416

申请日：2007-09-14

申请人： Taro Ando ,  Yoshiyuki Ohtake ,  Norihiro Fukuchi ,  Naoya Matsumoto ,  Haruyasu Ito

发明人： Taro Ando ,  Yoshiyuki Ohtake ,  Norihiro Fukuchi ,  Naoya Matsumoto ,  Haruyasu Ito

IPC分类号： G02F1/01

CPC分类号： G02B27/09 ,  G02B5/3025 ,  G02B21/32 ,  G02B26/06

摘要： The light beam generator 1 is provided with a laser light source 10, an optical phase modulation element 15 and others. The optical phase modulation element 15 receives coherent light output from the laser light source 10 and passed through a beam splitter 14 to modulate a phase of the light depending on a position on the beam cross section of the light, and outputs the light after the phase modulation to the beam splitter 14. A polar coordinate system (r, θ) in which a predetermined position is given as an origin is set on the beam cross section of the light input in the optical phase modulation element 15, and when (p+1) domains divided by p (number of pieces) circumferences in which the predetermined position is given as a center are set, of these (p+1) domains, a phase modulation amount φ at each position inside an even numbered domain counted from the inside is expressed by a formula of “φ=q θ”, and a phase modulation amount φ at each position inside an odd numbered domain counted from the inside is expressed by a formula of “φ=q θ+π”.

摘要翻译： 光束发生器1设置有激光光源10，光相位调制元件15等。 光相位调制元件15接收从激光光源10输出的相干光，并通过分束器14，根据光束横截面上的位置调制光的相位，并输出相位后的光 在光学相位调制元件15中的光输入的光束横截面上设置有以原点被赋予预定位置的极坐标系（r，θ），并且当（p +1）域除以这些（p + 1）域的p（个数）周期，其中给定预定位置为中心的相位调制量＆phgr; 在从内部计数的偶数域内的每个位置由“＆phgr; = q＆thetas”的公式表示，并且相位调制量＆phgr; 在内部计数的奇数域内的每个位置由公式“＆phgr; = q＆thetas; +＆pgr”表示。

公开(公告)号：US20110267679A1

公开(公告)日：2011-11-03

申请号：US13131186

申请日：2009-11-26

申请人： Haruyasu Ito ,  Takashi Inoue ,  Naoya Matsumoto

发明人： Haruyasu Ito ,  Takashi Inoue ,  Naoya Matsumoto

IPC分类号： G02B26/00

CPC分类号： G02B26/0833 ,  G02B5/285 ,  G02F2203/02 ,  G02F2203/055 ,  G02F2203/12 ,  G03B15/02 ,  G03B15/03 ,  G03B15/05 ,  G03B2215/0567 ,  G03B2215/0571 ,  G03B2215/0592 ,  H04N9/3161

摘要： A light modulating device (101A) comprises a reflective SLM (107) for modulating a laser beam (Lr) entering along a first optical path extending in a first direction; a dielectric multilayer film mirror (106), formed on a light transmitting member (105) transparent to illumination light (Li), for reflecting the laser beam (Lr) incident on a front face thereof from the reflective SLM (107) onto a second optical path extending in a second direction intersecting the first direction, and transmitting the illumination light (Li) incident on a rear face thereof onto the second optical path; and a light collecting lens (109) for receiving the illumination light (Li) and laser beam (Lr) from the dielectric multilayer film mirror (106) and converging the illumination light (Li) and laser beam (Lr).

摘要翻译： 光调制装置（101A）包括用于调制沿沿第一方向延伸的第一光路进入的激光束（Lr）的反射SLM（107） 形成在对照明光（Li）透明的透光部件（105）上的电介质多层膜反射镜（106），用于将入射到其正面的激光束（Lr）从反射型SLM（107）反射到第二 光路沿与第一方向相交的第二方向延伸，并将入射到其后表面上的照明光（Li）传输到第二光路上; 以及用于从电介质多层膜反射镜（106）接收照明光（Li）和激光束（Lr）并会聚照明光（Li）和激光束（Lr）的聚光透镜（109）。

公开(公告)号：US20110193269A1

公开(公告)日：2011-08-11

申请号：US13061438

申请日：2009-08-27

申请人： Haruyasu Ito ,  Naoya Matsumoto ,  Takashi Inoue

发明人： Haruyasu Ito ,  Naoya Matsumoto ,  Takashi Inoue

IPC分类号： B23K26/073 ,  G02F1/01

CPC分类号： G02B27/0025 ,  B23K26/00 ,  B23K26/03 ,  B23K26/032 ,  B23K26/06 ,  B23K26/064 ,  B23K26/36 ,  B23K26/364 ,  B23K26/38 ,  B23K26/40 ,  B23K26/53 ,  B23K26/57 ,  B23K2101/40 ,  B23K2103/50 ,  G02B5/1876 ,  G02B5/32 ,  G02B21/0032 ,  G02B21/02 ,  G02B21/06 ,  G02B21/361 ,  G02B27/0068 ,  G02F1/01 ,  G02F2203/18

摘要： In an aberration-correcting method according to an embodiment of the present invention, in an aberration-correcting method for a laser irradiation device 1 which focuses a laser beam on the inside of a transparent medium 60, aberration of a laser beam is corrected so that a focal point of the laser beam is positioned within a range of aberration occurring inside the medium. This aberration range is not less than n×d and not more than n×d+Δs from an incidence plane of the medium 60, provided that the refractive index of the medium 60 is defined as n, a depth from an incidence plane of the medium 60 to the focus of the lens 50 is defined as d, and aberration caused by the medium 60 is defined as Δs.

摘要翻译： 在根据本发明实施例的像差校正方法中，在将激光束聚焦在透明介质60的内部的激光照射装置1的像差修正方法中，校正激光束的像差，使得 激光束的焦点位于介质内发生的像差范围内。 该像差范围不小于介质60的入射面的n×d且不大于n×d +＆Dgr·s，条件是介质60的折射率定义为n，入射面的深度 将介质60到透镜50的焦点定义为d，并且由介质60引起的像差被定义为＆Dgr; s。