公开(公告)号：US20060271225A1

公开(公告)日：2006-11-30

申请号：US11379092

申请日：2006-04-18

申请人： Uwe Schulze ,  Uwe Knappe

发明人： Uwe Schulze ,  Uwe Knappe

IPC分类号： G06F19/00

CPC分类号： G05B13/048

摘要： A controller and a method of controlling a process tool is provided, in which machine constants used for calibrating manipulated variables of the control algorithm are explicitly introduced into the process model, thereby providing an enhanced controller behavior immediately after the introduction of new measurement values of the machine constants.

摘要翻译： 提供了一种控制器和控制处理工具的方法，其中用于校准控制算法的操纵变量的机器常数被明确地引入到过程模型中，从而在引入新的测量值之后立即提供增强的控制器行为 机器常数。

公开(公告)号：US20070178699A1

公开(公告)日：2007-08-02

申请号：US11538860

申请日：2006-10-05

申请人： Matthias Schaller ,  Uwe Schulze ,  Mathias Baranyai

发明人： Matthias Schaller ,  Uwe Schulze ,  Mathias Baranyai

IPC分类号： H01L21/302

CPC分类号： H01L21/76808 ,  H01L22/20 ,  H01L2924/0002 ,  Y10T156/1168 ,  H01L2924/00

摘要： By controlling the flow rate of one or more gaseous components of an etch ambient during the formation of metal lines and vias on the basis of feedback measurement data from critical dimensions, process variations may be reduced, thereby enhancing performance and reliability of the respective metallization structure.

摘要翻译： 通过在基于关键尺寸的反馈测量数据的基础上控制在形成金属线和通孔期间蚀刻环境的一个或多个气体组分的流量，可以减少工艺变化，从而提高各个金属化结构的性能和可靠性 。

公开(公告)号：US07810237B2

公开(公告)日：2010-10-12

申请号：US10555111

申请日：2004-04-01

申请人： Anja Lange ,  Jens Lange ,  Uwe Schulze

发明人： Anja Lange ,  Jens Lange ,  Uwe Schulze

IPC分类号： B23P6/00

CPC分类号： B23P6/005 ,  B33Y80/00 ,  F01D5/005 ,  Y10T29/49318 ,  Y10T29/49336 ,  Y10T29/49716 ,  Y10T29/4973 ,  Y10T29/49732 ,  Y10T29/49734

摘要： A method is for repairing and/or modifying component parts of a gas turbine. First, at least one, particularly damaged section of the component part that is to be repaired is cut out of the component part. In addition, if it does not exist, a data record is generated for a replacement part that is to be produced. The replacement part is subsequently produced with the aid of a rapid manufacturing process. Subsequently, the replacement part produced is integrated into the component part that is to be repaired.

摘要翻译： 一种用于修理和/或修改燃气轮机的部件的方法。 首先，将要修复的部件的至少一个特别受损部分从部件切出。 另外，如果不存在，则生成要生成的替换部的数据记录。 随后通过快速制造工艺生产更换部件。 随后，将所制造的替换部件集成到待修理的部件中。

公开(公告)号：US07704889B2

公开(公告)日：2010-04-27

申请号：US11538860

申请日：2006-10-05

申请人： Matthias Schaller ,  Uwe Schulze ,  Mathias Baranyai

发明人： Matthias Schaller ,  Uwe Schulze ,  Mathias Baranyai

IPC分类号： H01L21/302

CPC分类号： H01L21/76808 ,  H01L22/20 ,  H01L2924/0002 ,  Y10T156/1168 ,  H01L2924/00

摘要： By controlling the flow rate of one or more gaseous components of an etch ambient during the formation of metal lines and vias on the basis of feedback measurement data from critical dimensions, process variations may be reduced, thereby enhancing performance and reliability of the respective metallization structure.

摘要翻译： 通过在基于关键尺寸的反馈测量数据的基础上控制在形成金属线和通孔期间蚀刻环境的一个或多个气体组分的流量，可以减少工艺变化，从而提高各个金属化结构的性能和可靠性 。

公开(公告)号：US20080203791A1

公开(公告)日：2008-08-28

申请号：US11917651

申请日：2006-05-20

申请人： Lars Hennig ,  Axel Posnien ,  Uwe Schulze

发明人： Lars Hennig ,  Axel Posnien ,  Uwe Schulze

IPC分类号： B60N2/60 ,  B60N2/48

CPC分类号： A47C7/386 ,  B60N2/5883

摘要： A profile (9) which can be connected to a cover (4) serves to fasten the cover (4) on a supporting body (2). According to the invention, it is provided that the profile has a recess (17) for receiving a connecting region, in particular a seam (6), of cover segments (5.1, 5.2) of an at least two-piece cover.

摘要翻译： 可以连接到盖（4）的轮廓（9）用于将盖（4）紧固在支撑体（2）上。 根据本发明，轮廓具有用于容纳至少两件式盖的盖段（5.1,5.2）的连接区域，特别是接缝（6）的凹部（17）。

公开(公告)号：US20070239285A1

公开(公告)日：2007-10-11

申请号：US11278840

申请日：2006-04-06

申请人： Richard Good ,  Kevin Chamness ,  Uwe Schulze

发明人： Richard Good ,  Kevin Chamness ,  Uwe Schulze

IPC分类号： G05B15/00

CPC分类号： G05B19/41865 ,  G05B13/048 ,  G05B2219/32053 ,  G05B2219/37532 ,  G05B2219/45031 ,  Y02P90/20

摘要： A method for estimating a state associated with a process includes receiving a state observation associated with the process. The state observation has an associated process time. A weighting factor to discount the state observation is generated based on the process time. A state estimate is generated based on the discounted state observation. A system includes a process tool, a metrology tool, and a process controller. The process tool is operable to perform a process in accordance with an operating recipe. The metrology tool is operable to generate a state observation associated with the process. The process controller is operable to receive the state observation, the state observation having an associated process time, generate a weighting factor to discount the state observation based on the process time, generate a state estimate based on the discounted state observation, and determine at least one parameter of the operating recipe based on the state estimate.

摘要翻译： 用于估计与过程相关联的状态的方法包括接收与该过程相关联的状态观察。 状态观察具有相关的处理时间。 基于处理时间生成打折状态观察的权重因子。 基于贴现状态观察来生成状态估计。 系统包括处理工具，计量工具和过程控制器。 处理工具可操作以根据操作配方执行处理。 计量工具可操作以产生与该过程相关联的状态观察。 过程控制器可操作以接收状态观察，具有相关联的处理时间的状态观察，基于处理时间生成加权因子以折扣状态观察，基于打折状态观察生成状态估计，并且至少确定 基于状态估计的操作配方的一个参数。

公开(公告)号：US08388062B2

公开(公告)日：2013-03-05

申请号：US11917651

申请日：2006-05-20

申请人： Lars Hennig ,  Axel Posnien ,  Uwe Schulze

发明人： Lars Hennig ,  Axel Posnien ,  Uwe Schulze

IPC分类号： A47C31/02

CPC分类号： A47C7/386 ,  B60N2/5883

摘要： A profile (9) which can be connected to a cover (4) serves to fasten the cover (4) on a supporting body (2). According to the invention, it is provided that the profile has a recess (17) for receiving a connecting region, in particular a seam (6), of cover segments (5.1, 5.2) of an at least two-piece cover.

摘要翻译： 可以连接到盖（4）的轮廓（9）用于将盖（4）紧固在支撑体（2）上。 根据本发明，轮廓具有用于容纳至少两件式盖的盖段（5.1,5.2）的连接区域，特别是接缝（6）的凹部（17）。

公开(公告)号：US07542880B2

公开(公告)日：2009-06-02

申请号：US11278840

申请日：2006-04-06

申请人： Richard P. Good ,  Kevin A. Chamness ,  Uwe Schulze

发明人： Richard P. Good ,  Kevin A. Chamness ,  Uwe Schulze

IPC分类号： G06F19/00 ,  H03F1/26 ,  H04B15/00 ,  G01N37/00 ,  G06F15/00 ,  G06F17/18 ,  G06F11/30 ,  G21C17/00 ,  G05B13/02 ,  G06F7/60 ,  G06F17/10

CPC分类号： G05B19/41865 ,  G05B13/048 ,  G05B2219/32053 ,  G05B2219/37532 ,  G05B2219/45031 ,  Y02P90/20

摘要： A method for estimating a state associated with a process includes receiving a state observation associated with the process. The state observation has an associated process time. A weighting factor to discount the state observation is generated based on the process time. A state estimate is generated based on the discounted state observation. A system includes a process tool, a metrology tool, and a process controller. The process tool is operable to perform a process in accordance with an operating recipe. The metrology tool is operable to generate a state observation associated with the process. The process controller is operable to receive the state observation, the state observation having an associated process time, generate a weighting factor to discount the state observation based on the process time, generate a state estimate based on the discounted state observation, and determine at least one parameter of the operating recipe based on the state estimate.

摘要翻译： 用于估计与过程相关联的状态的方法包括接收与该过程相关联的状态观察。 状态观察具有相关的处理时间。 基于处理时间生成打折状态观察的权重因子。 基于贴现状态观察来生成状态估计。 系统包括处理工具，计量工具和过程控制器。 处理工具可操作以根据操作配方执行处理。 计量工具可操作以产生与该过程相关联的状态观察。 过程控制器可操作以接收状态观察，具有相关联的处理时间的状态观察，基于处理时间生成加权因子以折扣状态观察，基于打折状态观察生成状态估计，并且至少确定 基于状态估计的操作配方的一个参数。

公开(公告)号：US07233835B2

公开(公告)日：2007-06-19

申请号：US11383005

申请日：2006-05-12

申请人： Richard Paul Good ,  Uwe Schulze

发明人： Richard Paul Good ,  Uwe Schulze

IPC分类号： G06F19/00

CPC分类号： G05B19/41875 ,  G05B2219/45031 ,  Y02P90/22

摘要： An APC controller is configured to operate on a segregated data structure during its normal operation and to establish a control state during an initializing event for a non-initialized manufacturing context on the basis of other initialized or non-initialized manufacturing contexts. Thus, the processing of pilot substrates may be reduced or the processing of the pilot substrates may be initiated on the basis of reliably established process parameters.

摘要翻译： APC控制器被配置为在其正常操作期间对分离的数据结构进行操作，并且在初始化事件期间，在未初始化的制造上下文的基础上，基于其它初始化或未初始化的制造上下文来建立控制状态。 因此，可以基于可靠地建立的工艺参数来降低先导衬底的处理或引导衬底的处理。

公开(公告)号：US20070027568A1

公开(公告)日：2007-02-01

申请号：US11383005

申请日：2006-05-12

申请人： Richard Good ,  Uwe Schulze

发明人： Richard Good ,  Uwe Schulze

IPC分类号： G06F19/00

CPC分类号： G05B19/41875 ,  G05B2219/45031 ,  Y02P90/22

摘要： An APC controller is configured to operate on a segregated data structure during its normal operation and to establish a control state during an initializing event for a non-initialized manufacturing context on the basis of other initialized or non-initialized manufacturing contexts. Thus, the processing of pilot substrates may be reduced or the processing of the pilot substrates may be initiated on the basis of reliably established process parameters.

摘要翻译： APC控制器被配置为在其正常操作期间对分离的数据结构进行操作，并且在初始化事件期间，在未初始化的制造上下文的基础上，基于其它初始化或未初始化的制造上下文来建立控制状态。 因此，可以基于可靠地建立的工艺参数来降低先导衬底的处理或引导衬底的处理。