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公开(公告)号：US07078862B2
公开(公告)日：2006-07-18
申请号：US10797596
申请日：2004-03-11
申请人： Akira Fukuda , Akio Shibata , Hirokuni Hiyama , Katsunori Ichiki , Kazuo Yamauchi , Seiji Samukawa
发明人： Akira Fukuda , Akio Shibata , Hirokuni Hiyama , Katsunori Ichiki , Kazuo Yamauchi , Seiji Samukawa
CPC分类号： H01J37/321 , H01J37/32357
摘要： A beam source has a plasma generating chamber, an antenna for generating plasma in the plasma generating chamber, a first electrode disposed in the plasma generating chamber, and a second electrode disposed in the plasma generating chamber. Both of the antenna and the second electrode face the first electrode. The beam source also includes a power supply for applying a voltage between the first electrode and the second electrode to extract particles from the plasma generated by the antenna. The beam source applies various kinds of beams having a large diameter, such as a positive ion beam, a negative ion beam, and a neutral particle beam, uniformly to a workpiece.
摘要翻译： 光束源具有等离子体产生室，用于在等离子体产生室中产生等离子体的天线，设置在等离子体发生室中的第一电极和设置在等离子体产生室中的第二电极。 天线和第二电极都面向第一电极。 光束源还包括用于在第一电极和第二电极之间施加电压从而从天线产生的等离子体中提取粒子的电源。 光束源对工件均匀地施加各种具有大直径的光束，例如正离子束，负离子束和中性粒子束。
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公开(公告)号：US06861642B2
公开(公告)日：2005-03-01
申请号：US10451633
申请日：2002-03-22
IPC分类号： C23C14/32 , G21K1/14 , H01J37/317 , H01J37/32 , H01L21/302 , H01L21/3065 , H01L21/31 , H05H1/46 , H05H3/00 , H05H3/02
CPC分类号： H01J37/32357 , G21K1/14 , H01J37/3178 , H05H3/02
摘要： A neutral particle beam processing apparatus comprises a workpiece holder (20) for holding a workpiece (X), a plasma generator for generating a plasma in a vacuum chamber (3), an orifice electrode (5) disposed between the workpiece holder (20) and the plasma generator, and a grid electrode (4) disposed upstream of the orifice electrode (5) in the vacuum chamber (3). The orifice electrode (5) has orifices (5a) defined therein. The neutral particle beam processing apparatus further comprises a voltage applying unit for applying a voltage between the orifice electrode (5) and the grid electrode (4) via a dielectric (5b) to extract positive ions from the plasma generated by the plasma generator and pass the extracted positive ions through the orifices (5a) in the orifice electrode (5).
摘要翻译： 中性粒子束处理装置包括用于保持工件（X）的工件保持器（20），用于在真空室（3）中产生等离子体的等离子体发生器，设置在工件保持器（20）之间的孔电极（5） 和等离子体发生器，以及设置在真空室（3）中的孔电极（5）的上游的栅电极（4）。 孔口电极（5）具有限定在其中的孔口（5a）。 中性粒子束处理装置还包括电压施加单元，用于通过电介质（5b）在孔电极（5）和栅电极（4）之间施加电压，以从等离子体发生器产生的等离子体中提取正离子并通过 通过孔电极（5）中的孔（5a）提取的正离子。
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公开(公告)号：US08436616B2
公开(公告)日：2013-05-07
申请号：US12849998
申请日：2010-08-04
申请人： Yuki Endo , Katsuya Hioka , Kazuo Yamauchi
发明人： Yuki Endo , Katsuya Hioka , Kazuo Yamauchi
CPC分类号： G01R33/307
摘要： A solid-state NMR sample tube and method of using same which can be spun stably and at high speed while suppressing its bending resonance. A solid sample to be investigated by solid-state NMR spectroscopy can be sealed in the sample tube. The sample tube includes a hollow cylinder having opposite ends. At least one of the ends is open. The sample tube has a length L, an outside diameter D, and an inside diameter d which satisfy a given relationship disclosed herein.
摘要翻译： 一种固态NMR样品管及其使用方法，其可以在抑制其弯曲共振的同时稳定且高速旋转。 通过固体NMR光谱研究的固体样品可以密封在样品管中。 样品管包括具有相对端的中空圆柱体。 至少有一个是打开的。 样品管具有满足本文公开的给定关系的长度L，外径D和内径d。
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公开(公告)号：US08067729B2
公开(公告)日：2011-11-29
申请号：US12767135
申请日：2010-04-26
IPC分类号： B01D59/44
CPC分类号： H01J49/0036 , G06F19/703 , Y10T436/24
摘要： In a mass analysis data analyzing apparatus, centroid data is used as mass spectrum data to be analyzed. First, peaks on the centroid data are specified in order of intensity as a standard peak for identifying an isotopic cluster. The isotopic cluster is detected by comparing an emerging pattern of peaks near the standard peak and an emerging pattern of peaks of an expected isotopic cluster in the case where each valence is assumed. The valence of the determined isotopic cluster is set as the valence of the peaks belonging to the isotopic cluster, and the peak at the forefront of cluster is selected as a monoisotopic peak. With such a mass analysis data analyzing apparatus, it is possible to determine the valence of each peak and identify the monoisotopic peak in a mass spectrum.
摘要翻译： 在质量分析数据分析装置中，质心数据用作要分析的质谱数据。 首先，质心数据的峰值以强度的顺序指定为用于识别同位素簇的标准峰。 通过比较在假定每个化合价的情况下，标准峰附近出现的峰出现和预期同位素簇的峰出现模式，可以检测同位素簇。 确定的同位素簇的价态被设置为属于同位素簇的峰的价态，并且选择簇的最前沿的峰作为单同位素峰。 利用这样的质量分析数据分析装置，可以确定每个峰的价态并识别质谱中的单同位素峰。
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公开(公告)号：USRE32357E
公开(公告)日：1987-02-17
申请号：US768187
申请日：1985-08-23
申请人： Syuji Nagao , Ryoichi Nakai , Kazuo Yamauchi
发明人： Syuji Nagao , Ryoichi Nakai , Kazuo Yamauchi
CPC分类号： G01C21/3667 , G01S1/047
摘要： A moving body track indicating system for displaying the track of a moving body along with latitude and longitude line markers and cursors on an indicating device such as a cathode-ray tube. The displayed pattern can be automatically magnified or reduced and shifted to a desired position. Cursor markers are displayed parallel to the latitude and longitude line markers with identifying symbols displayed along with the cursor markers. A reference point is automatically readjusted wherein the moving body, a ship in the preferred embodiment, moves beyond the edge of the display surface.
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公开(公告)号：US08013293B2
公开(公告)日：2011-09-06
申请号：US12601949
申请日：2008-04-14
申请人： Kazuo Yamauchi , Takao Okado
发明人： Kazuo Yamauchi , Takao Okado
CPC分类号： G01N27/62 , H01J49/0009 , H01J49/40
摘要： A shift of mass axis that occurs when the temperature of a vacuum container consisting of a vacuum chamber (15) and IT block (16) or that of a TOF power unit (20) for applying an ion acceleration voltage is changed, is respectively measured beforehand, and parameters expressing a transfer function based on its response are stored in a transfer function memory (24). During an analysis, a mass shift predicting operation section (25) estimates the current shift length of the mass axis from the current temperatures of the IT block (16) and TOF power unit (20) obtained by first and second temperature sensors (34 and 35) as well as from the two transfer functions stored in the memory (24). A mass shift correcting section (29) corrects the mass axis of the mass spectrum according to the estimated shift length. Thus, if the ambient temperature suddenly changes, the shift of the mass axis of the mass spectrum due to the temperature change is corrected with high accuracy, so that a mass spectrum with a high level of mass accuracy can be created.
摘要翻译： 分别测量当由真空室（15）和IT块（16）组成的真空容器的温度或用于施加离子加速电压的TOF功率单元（20）的温度改变时发生的质量轴的偏移 并且将表示基于其响应的传递函数的参数存储在传递函数存储器（24）中。 在分析中，质量偏移预测运算部25根据由第一和第二温度传感器34获得的IT块（16）和TOF功率单元（20）的当前温度估计质量轴的当前移动长度， 35）以及存储在存储器（24）中的两个传递函数。 质量位移校正部（29）根据估计的移动长度来校正质谱的质量轴。 因此，如果环境温度突然变化，则以高精度校正由于温度变化引起的质谱质量轴的偏移，从而可以产生质量精度高的质谱。
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公开(公告)号：US07060946B1
公开(公告)日：2006-06-13
申请号：US10994346
申请日：2004-11-23
申请人： Kazuo Yamauchi
发明人： Kazuo Yamauchi
IPC分类号： H05B1/02
CPC分类号： G05D23/1931
摘要： An analytical device includes a heat output portion for heating an interior of a housing with which an analyzing portion is surrounded; a first temperature sensor for measuring a temperature of the analyzing portion; a second temperature sensor for measuring a temperature of an interior of the housing; and a control portion. The control portion determines a setting value of the temperature in the housing according to a transfer function of a PID control based on a difference between a preset temperature of the analyzing portion and the temperature measured by the first temperature sensor. Further, the control portion determines an output value of the heat output portion according to a transfer function of PID control based on a difference between the setting value of the temperature in the housing and the temperature measured by the second temperature sensor.
摘要翻译： 分析装置包括用于加热壳体内部的热输出部分，分析部分与壳体内部包围; 用于测量分析部分的温度的第一温度传感器; 第二温度传感器，用于测量壳体内部的温度; 和控制部。 控制部根据分析部的预定温度与由第一温度传感器测定的温度的差，根据PID控制的传递函数，决定壳体内的温度的设定值。 此外，控制部根据外壳温度的设定值与第二温度传感器测定的温度之差，根据PID控制的传递函数来决定热输出部的输出值。
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公开(公告)号：US4400780A
公开(公告)日：1983-08-23
申请号：US142793
申请日：1980-04-22
申请人： Syuji Nagao , Ryoichi Nakai , Kazuo Yamauchi
发明人： Syuji Nagao , Ryoichi Nakai , Kazuo Yamauchi
CPC分类号： G01C21/3667 , G01S1/047
摘要： A moving body track indicating system for displaying the track of a moving body along with latitude and longitude line markers and cursors on an indicating device such as a cathode-ray tube. The displayed pattern can be automatically magnified or reduced and shifted to a desired position. Cursor markers are displayed parallel to the latitude and longitude line markers with identifying symbols displayed along with the cursor markers. A reference point is automatically readjusted wherein the moving body, a ship in the preferred embodiment, moves beyond the edge of the display surface.
摘要翻译： 一种用于在诸如阴极射线管的指示装置上显示运动物体的轨迹以及纬度和经度线标记物和光标的移动体轨迹指示系统。 显示的图案可以被自动放大或缩小并转移到期望的位置。 光标标记与纬度和经度线标记平行显示，标识符与光标标记一起显示。 自动重新调整参考点，其中在优选实施例中的船舶移动超过显示表面的边缘。
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公开(公告)号：US20100228498A1
公开(公告)日：2010-09-09
申请号：US12767135
申请日：2010-04-26
CPC分类号： H01J49/0036 , G06F19/703 , Y10T436/24
摘要： In a mass analysis data analyzing apparatus, centroid data is used as mass spectrum data to be analyzed. First, peaks on the centroid data are specified in order of intensity as a standard peak for identifying an isotopic cluster. The isotopic cluster is detected by comparing an emerging pattern of peaks near the standard peak and an emerging pattern of peaks of an expected isotopic cluster in the case where each valence is assumed. The valence of the determined isotopic cluster is set as the valence of the peaks belonging to the isotopic cluster, and the peak at the forefront of cluster is selected as a monoisotopic peak. With such a mass analysis data analyzing apparatus, it is possible to determine the valence of each peak and identify the monoisotopic peak in a mass spectrum.
摘要翻译： 在质量分析数据分析装置中，质心数据用作要分析的质谱数据。 首先，质心数据的峰值以强度的顺序指定为用于识别同位素簇的标准峰。 通过比较在假定每个化合价的情况下，标准峰附近出现的峰出现和预期同位素簇的峰出现模式，可以检测同位素簇。 确定的同位素簇的价态被设置为属于同位素簇的峰的价态，并且选择簇的最前沿的峰作为单同位素峰。 利用这样的质量分析数据分析装置，可以确定每个峰的价态并识别质谱中的单同位素峰。
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公开(公告)号：US20070088266A1
公开(公告)日：2007-04-19
申请号：US11496638
申请日：2006-08-01
IPC分类号： A61M37/00
CPC分类号： A61M5/14216 , A61M5/16854
摘要： A residual liquid quantity in a syringe is reduced to the minimum. There are detected with high precision malfunctions due to chokes in pipes and incomplete switchings of an electromagnetic valve and a broken valve without a contamination problem produced. When a syringe pump is powered on, a motor is driven at low speed so that liquid in a syringe is discharged completely. When a desynchronization of the motor is detected by comparing motor driving pulses obtained by a rotary encoder with motor driving pulses supplied to the motor, a stop signal is supplied to a motor driver and the position of a rod is memorized as the origin of the syringe pump in an origin sensor. While the syringe pump is in a normal operating state, the position of the rod is detected to be at the origin to supply a stop signal to the motor driver.
摘要翻译： 注射器中的残留液量减少到最小。 检测到由于管道中的扼流圈和电磁阀的不完全切换以及不产生污染问题的断开阀而导致的高精度故障。 当注射器泵通电时，电机以低速驱动，使注射器中的液体完全排出。 当通过将由旋转编码器获得的电动机驱动脉冲与提供给电动机的电动机驱动脉冲进行比较来检测电动机的同步时，将停止信号提供给电动机驱动器，并且将杆的位置存储为注射器的原点 泵入原点传感器。 当注射器泵处于正常运行状态时，检测到杆的位置在原点，以向马达驱动器提供停止信号。
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