公开(公告)号：US08461050B2

公开(公告)日：2013-06-11

申请号：US13157938

申请日：2011-06-10

申请人： Hironori Araki ,  Yoshitaka Sasaki ,  Hiroyuki Ito ,  Kazuki Sato ,  Shigeki Tanemura ,  Yukinori Ikegawa

发明人： Hironori Araki ,  Yoshitaka Sasaki ,  Hiroyuki Ito ,  Kazuki Sato ,  Shigeki Tanemura ,  Yukinori Ikegawa

IPC分类号： H01L21/311

CPC分类号： G11B5/314 ,  G11B5/3163 ,  G11B2005/0021 ,  H01L21/31116

摘要： A method of taper-etching a layer to be etched that is made of SiO2 or SiON and has a top surface. The method includes the step of forming an etching mask with an opening on the top surface of the layer to be etched, and the step of taper-etching a portion of the layer to be etched, the portion being exposed from the opening, by reactive ion etching so that a groove having two wall faces that intersect at a predetermined angle is formed in the layer to be etched. The etching mask is formed of a material containing elemental Al. The step of taper-etching employs an etching gas that contains a main component gas, which contributes to the etching of the layer to be etched, and N2.

摘要翻译： 一种由SiO 2或SiON制成并具有顶表面的蚀刻层的蚀刻方法。 该方法包括以下步骤：在待蚀刻层的顶表面上形成具有开口的蚀刻掩模;以及将待蚀刻层的一部分从开口暴露的部分，通过反应 离子蚀刻，使得在被蚀刻层中形成具有以预定角度相交的两个壁面的凹槽。 蚀刻掩模由含有元素Al的材料形成。 锥蚀刻的步骤使用包含有助于蚀刻蚀刻层的主要成分气体和N 2的蚀刻气体。

公开(公告)号：US08454848B2

公开(公告)日：2013-06-04

申请号：US13235856

申请日：2011-09-19

申请人： Yoshitaka Sasaki ,  Hiroyuki Ito ,  Shigeki Tanemura ,  Hironori Araki ,  Kazuki Sato ,  Kazumasa Yasuda

发明人： Yoshitaka Sasaki ,  Hiroyuki Ito ,  Shigeki Tanemura ,  Hironori Araki ,  Kazuki Sato ,  Kazumasa Yasuda

IPC分类号： B29D11/00

CPC分类号： G11B5/314 ,  G11B5/3163 ,  G11B5/6088 ,  G11B2005/0021

摘要： A method of manufacturing the plasmon generator includes the steps of: forming a base part made of a dielectric material; forming a metal film that is to later become the plasmon generator; and forming a filler layer made of a dielectric material. The base part includes a base surface and a protruding part that protrudes from the base surface. The protruding part has a top surface that is different in level from the base surface, and a first sidewall connecting the top surface of the protruding part to the base surface. The metal film includes an adhesion part adhering to the first sidewall. The filler layer has a second sidewall disposed such that the adhesion part is interposed between the first sidewall and the second sidewall.

摘要翻译： 制造等离子体发生器的方法包括以下步骤：形成由电介质材料制成的基部; 形成以后成为等离子体发生器的金属膜; 并形成由介电材料制成的填充层。 基部包括基部表面和从基部表面突出的突出部分。 突出部分具有与基部表面不同的顶表面，以及将突出部分的顶表面连接到基部表面的第一侧壁。 金属膜包括附着在第一侧壁上的粘合部。 填料层具有第二侧壁，该第二侧壁设置成使得粘合部分插入在第一侧壁和第二侧壁之间。

公开(公告)号：US09406318B2

公开(公告)日：2016-08-02

申请号：US14832230

申请日：2015-08-21

申请人： Yoshitaka Sasaki ,  Kazuki Sato ,  Hiroyuki Ito ,  Hironori Araki ,  Shigeki Tanemura ,  Kazumasa Yasuda

发明人： Yoshitaka Sasaki ,  Kazuki Sato ,  Hiroyuki Ito ,  Hironori Araki ,  Shigeki Tanemura ,  Kazumasa Yasuda

IPC分类号： G11B5/11 ,  G11B5/31 ,  G11B5/127 ,  G11B5/17 ,  G11B5/39

CPC分类号： G11B5/1278 ,  G11B5/11 ,  G11B5/1272 ,  G11B5/17 ,  G11B5/3116 ,  G11B5/315 ,  G11B5/3163 ,  G11B5/3967 ,  Y10T29/49048

摘要： A first side shield has a first sidewall and a second sidewall. A second side shield has a third sidewall and a fourth sidewall. The distance between the first sidewall and the third sidewall decreases with increasing proximity to the top surface of a substrate. The second and fourth sidewalls are close to perpendicular to the top surface of the substrate. Each of the second and fourth sidewalls has an edge farthest from the top surface of the substrate, the edge being parallel to the medium facing surface. The main pole has a first, a second, a third and a fourth side surface. The first side surface is opposed to the first sidewall. A portion of the second side surface is opposed to the second sidewall. The third side surface is opposed to the third sidewall. A portion of the fourth side surface is opposed to the fourth sidewall.

摘要翻译： 第一侧屏蔽件具有第一侧壁和第二侧壁。 第二侧屏蔽件具有第三侧壁和第四侧壁。 第一侧壁和第三侧壁之间的距离随着靠近衬底顶表面的增加而减小。 第二和第四侧壁靠近垂直于基板的顶表面。 第二和第四侧壁中的每一个具有距衬底顶表面最远的边缘，该边缘平行于介质面向表面。 主极具有第一，第二，第三和第四侧面。 第一侧表面与第一侧壁相对。 第二侧表面的一部分与第二侧壁相对。 第三侧面与第三侧壁相对。 第四侧面的一部分与第四侧壁相对。

公开(公告)号：US09230568B1

公开(公告)日：2016-01-05

申请号：US14688450

申请日：2015-04-16

申请人： Yukinori Ikegawa ,  Yoshitaka Sasaki ,  Hiroyuki Ito ,  Kazuki Sato ,  Shigeki Tanemura ,  Hironori Araki

发明人： Yukinori Ikegawa ,  Yoshitaka Sasaki ,  Hiroyuki Ito ,  Kazuki Sato ,  Shigeki Tanemura ,  Hironori Araki

IPC分类号： G11B5/127 ,  G11B5/17 ,  G11B5/187

CPC分类号： G11B5/1278 ,  G11B5/17 ,  G11B5/187 ,  G11B5/3116 ,  G11B5/3123 ,  G11B5/3163

摘要： A magnetic head includes a coil, a main pole, a trailing shield, a gap section, a return path section, and a coil underlayer. The main pole has a top surface including a first inclined portion and a flat portion. The coil includes a specific coil element. The specific coil element has a bottom surface facing toward the top surface of the main pole, and a front end face inclined with respect to a medium facing surface. The coil underlayer lies under the specific coil element, and has a front end face. The trailing shield includes a portion interposed between the front end face of the coil underlayer and the medium facing surface. The bottom surface of the specific coil element includes a second inclined portion.

摘要翻译： 磁头包括线圈，主极，后屏蔽，间隙部分，返回路径部分和线圈底层。 主极具有包括第一倾斜部和平坦部的顶面。 线圈包括特定的线圈元件。 特定线圈元件具有面向主极的顶表面的底表面和相对于介质面向表面倾斜的前端面。 线圈底层位于特定线圈元件下方，并具有前端面。 后挡板包括插入在线圈底层的前端面与介质面对表面之间的部分。 特定线圈元件的底面包括第二倾斜部分。

公开(公告)号：US09082422B2

公开(公告)日：2015-07-14

申请号：US14107701

申请日：2013-12-16

申请人： Yoshitaka Sasaki ,  Hiroyuki Ito ,  Kazuki Sato ,  Shigeki Tanemura ,  Yukinori Ikegawa ,  Hironori Araki ,  Tatsuya Shimizu

发明人： Yoshitaka Sasaki ,  Hiroyuki Ito ,  Kazuki Sato ,  Shigeki Tanemura ,  Yukinori Ikegawa ,  Hironori Araki ,  Tatsuya Shimizu

IPC分类号： G11B5/127 ,  G11B5/11 ,  G11B5/17 ,  G11B5/31

CPC分类号： G11B5/11 ,  G11B5/1278 ,  G11B5/17 ,  G11B5/3116 ,  G11B5/315 ,  G11B5/3163

摘要： A magnetic head includes a main pole, a write shield, and first and second nonmagnetic layers. The main pole has a top surface including an inclined surface portion. The write shield includes an inclined portion facing toward the top surface of the main pole. The first nonmagnetic layer is interposed between the inclined surface portion and the inclined portion. The second nonmagnetic layer is interposed between the first nonmagnetic layer and the inclined portion. The first nonmagnetic layer has a first front end located in a medium facing surface. The second nonmagnetic layer has a second front end that is located closest to but at a distance from the medium facing surface.

摘要翻译： 磁头包括主极，写屏蔽以及第一和第二非磁性层。 主极具有包括倾斜表面部分的顶表面。 写入屏蔽包括面向主极的顶表面的倾斜部分。 第一非磁性层插入在倾斜表面部分和倾斜部分之间。 第二非磁性层介于第一非磁性层和倾斜部分之间。 第一非磁性层具有位于介质相对表面中的第一前端。 第二非磁性层具有位于与介质相对表面最近但距离介质相对表面一定距离的第二前端。

公开(公告)号：US08792209B2

公开(公告)日：2014-07-29

申请号：US13722025

申请日：2012-12-20

申请人： Yoshitaka Sasaki ,  Hiroyuki Ito ,  Kazuki Sato ,  Shigeki Tanemura ,  Hironori Araki ,  Tatsuya Shimizu

发明人： Yoshitaka Sasaki ,  Hiroyuki Ito ,  Kazuki Sato ,  Shigeki Tanemura ,  Hironori Araki ,  Tatsuya Shimizu

IPC分类号： G11B5/17 ,  G11B5/127 ,  G11B5/31

CPC分类号： G11B5/1278 ,  G11B5/3123 ,  G11B5/315

摘要： A magnetic head includes a coil, a main pole, a write shield, and a return path section. The return path section includes a yoke layer located on the front side in the direction of travel of a recording medium relative to the main pole, and a coupling part coupling the main pole and the yoke layer to each other. The coupling part includes a plurality of magnetic path portions that separate a magnetic flux into a plurality of fluxes and allow the fluxes to pass therethrough in parallel. The coil includes a plurality of winding portions disposed around the plurality of magnetic path portions, respectively.

摘要翻译： 磁头包括线圈，主极，写入屏蔽和返回路径部分。 返回路径部分包括位于记录介质相对于主极的行进方向的前侧上的轭层，以及将主极和轭层彼此耦合的联接部。 耦合部分包括将磁通分离成多个磁通并允许磁通平行通过的多个磁路部分。 线圈包括分别设置在多个磁路部分周围的多个绕组部分。

公开(公告)号：US08701273B2

公开(公告)日：2014-04-22

申请号：US13456932

申请日：2012-04-26

申请人： Yoshitaka Sasaki ,  Hiroyuki Ito ,  Hironori Araki ,  Seiichiro Tomita ,  Kazuki Sato ,  Shigeki Tanemura ,  Tatsuya Shimizu

发明人： Yoshitaka Sasaki ,  Hiroyuki Ito ,  Hironori Araki ,  Seiichiro Tomita ,  Kazuki Sato ,  Shigeki Tanemura ,  Tatsuya Shimizu

IPC分类号： G11B5/127 ,  H04R31/00 ,  G11B5/265 ,  G11B5/31 ,  G11B5/17

CPC分类号： G11B5/1278 ,  G11B5/1276 ,  G11B5/17 ,  G11B5/265 ,  G11B5/2651 ,  G11B5/2658 ,  G11B5/3116 ,  G11B5/3123 ,  G11B5/315 ,  G11B5/3153 ,  G11B5/3163 ,  Y10T29/49032 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A method of manufacturing a magnetic head includes the step of forming an accommodation part and the step of forming a return path section. The return path section lies between a main pole and a top surface of a substrate, and connects a shield and part of the main pole away from a medium facing surface to each other so that a space through which part of a coil passes is defined. The accommodation part accommodates at least part of the return path section. The step of forming the return path section forms first to third portions simultaneously. The first portion is located closer to the top surface of the substrate than is the space. The second portion is located closer to the medium facing surface than is the space. The third portion is located farther from the medium facing surface than is the space.

摘要翻译： 制造磁头的方法包括形成容纳部的步骤和形成返回路径部的步骤。 返回路径部分位于基板的主极和顶表面之间，并且将屏蔽和主极的一部分远离介质相对表面彼此连接，从而限定线圈通过的空间。 容纳部分容纳返回路径部分的至少一部分。 形成返回路径部分的步骤同时形成第一至第三部分。 第一部分位于比空间更靠近衬底顶表面的位置。 第二部分比空间更靠近介质面向表面。 第三部分位于比介质相对表面更远离空间。

公开(公告)号：US08619517B1

公开(公告)日：2013-12-31

申请号：US13584185

申请日：2012-08-13

申请人： Yoshitaka Sasaki ,  Hiroyuki Ito ,  Shigeki Tanemura ,  Kazuki Sato ,  Hironori Araki

发明人： Yoshitaka Sasaki ,  Hiroyuki Ito ,  Shigeki Tanemura ,  Kazuki Sato ,  Hironori Araki

IPC分类号： G11B11/00

CPC分类号： G11B5/6088 ,  B82Y20/00 ,  G02B6/1226 ,  G11B5/3116 ,  G11B5/314 ,  G11B5/3163 ,  G11B2005/0021

摘要： A thermally-assisted magnetic recording head includes a waveguide having a core and a cladding, and a plasmon generator. The core has an evanescent light generating surface. The plasmon generator has a plasmon exciting part opposed to the evanescent light generating surface. Assuming a virtual straight line that passes internally through the core and that is parallel to the direction of travel of light propagating through the core, at least part of the evanescent light generating surface and at least part of the plasmon exciting part are both inclined relative to the virtual straight line such that the distance from the virtual straight line decreases with increasing proximity to the medium facing surface.

摘要翻译： 热辅助磁记录头包括具有芯和包层的波导和等离子体发生器。 核心具有ev逝的光生成面。 等离子体发生器具有与瞬逝光产生表面相对的等离子体激元部分。 假设虚拟直线在内部通过芯并且平行于传播通过芯的光的行进方向，至少部分渐逝光产生表面和至少部分等离子体激元部分都相对于 虚拟直线使得距离虚拟直线的距离随着与介质面对表面的接近程度的增加而减小。

公开(公告)号：US08385019B1

公开(公告)日：2013-02-26

申请号：US13472981

申请日：2012-05-16

申请人： Yoshitaka Sasaki ,  Hiroyuki Ito ,  Kazuki Sato ,  Shigeki Tanemura ,  Hironori Araki ,  Tatsuya Shimizu

发明人： Yoshitaka Sasaki ,  Hiroyuki Ito ,  Kazuki Sato ,  Shigeki Tanemura ,  Hironori Araki ,  Tatsuya Shimizu

IPC分类号： G11B5/127

CPC分类号： G11B5/3123 ,  G11B5/1278 ,  G11B5/3116

摘要： A magnetic head includes a coil, a main pole, a write shield, a gap part, and a return path section. The return path section is located on the front side in the direction of travel of a recording medium relative to the main pole, and connects the write shield and part of the main pole away from a medium facing surface to each other. The coil includes a specific coil element. The main pole has a top surface including an inclined portion and a flat portion. The write shield has an inclined surface. The inclined surface includes a first portion opposed to the inclined portion with the gap part therebetween, and a second portion located farther from the medium facing surface than the first portion. The specific coil element includes a portion interposed between the flat portion and the second portion.

摘要翻译： 磁头包括线圈，主极，写屏蔽，间隙部分和返回路径部分。 返回路径部分位于记录介质相对于主极的行进方向的前侧上，并且将写入屏蔽和主极的一部分远离介质相对表面彼此连接。 线圈包括特定的线圈元件。 主极具有包括倾斜部分和平坦部分的顶表面。 写屏蔽具有倾斜表面。 倾斜表面包括与其间具有间隙部分的倾斜部分相对的第一部分和位于比介质相对表面比第一部分更远的第二部分。 特定线圈元件包括插入在平坦部分和第二部分之间的部分。

公开(公告)号：US10586558B1

公开(公告)日：2020-03-10

申请号：US16267803

申请日：2019-02-05

申请人： Yoshitaka Sasaki ,  Hiroyuki Ito ,  Kazuki Sato ,  Shigeki Tanemura ,  Hironori Araki ,  Atsushi Yamaguchi ,  Kei Hirata

发明人： Yoshitaka Sasaki ,  Hiroyuki Ito ,  Kazuki Sato ,  Shigeki Tanemura ,  Hironori Araki ,  Atsushi Yamaguchi ,  Kei Hirata

IPC分类号： G11B5/31 ,  G11B5/11 ,  G11B5/127 ,  G11B5/02

摘要： A magnetic head includes a main pole and a write shield. The write shield includes a bottom shield, a first side shield and a second side shield. The first side shield has first and second sidewalls. The second side shield has third and fourth sidewalls. Each of the second and fourth sidewalls has a top edge farthest from a top surface of a substrate. The top edge of each of the second and fourth sidewalls is parallel to a medium facing surface. A portion of a top surface of the bottom shield, the first sidewall, and the third sidewall define a receiving section to receive a portion of the main pole. The receiving section has a bottom including a first inclined portion, a second inclined portion, and a third inclined portion.