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公开(公告)号：US06931698B2
公开(公告)日：2005-08-23
申请号：US10096059
申请日：2002-03-12
申请人： Yukihisa Takeuchi , Tsutomu Nanataki , Koji Kimura
发明人： Yukihisa Takeuchi , Tsutomu Nanataki , Koji Kimura
IPC分类号： G02B26/08 , H01L41/04 , H01L41/08 , H01L41/09 , H01L41/314 , H01L41/338 , H02N2/02 , H04R17/00
CPC分类号： G02B26/0858 , H01L41/094 , H01L41/0946 , H01L41/314 , H01L41/338 , Y10T29/42 , Y10T29/49002 , Y10T29/49005 , Y10T29/4902 , Y10T29/4908
摘要： A piezoelectric/electrostrictive device is provided including a functional element. The functional element includes a base portion, a deformable portion assuming the form of a thin plate and extending from the base portion to thereby form a plane, a piezoelectric/electrostrictive element formed on the deformable portion, and a reflective portion extending from the deformable portion so as to form an active plane intersecting with the plane of the deformable portion and having a light-reflecting member disposed on the active plane. Operation of the piezoelectric/electrostrictive element causes the deformable portion to be deformed in a direction substantially perpendicular to the plane of the deformable portion to thereby change a reflection angle of light reflected from the reflective portion.
摘要翻译： 提供了包括功能元件的压电/电致伸缩器件。 功能元件包括基部，呈现薄板形状并从基部延伸形成平面的可变形部分，形成在可变形部分上的压电/电致伸缩元件以及从可变形部分延伸的反射部分 以便形成与可变形部分的平面相交并且具有设置在有效平面上的光反射部件的有源平面。 压电/电致伸缩元件的操作使得可变形部分在基本上垂直于可变形部分的平面的方向上变形，从而改变从反射部分反射的光的反射角度。
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公开(公告)号：US06671939B2
公开(公告)日：2004-01-06
申请号：US10099671
申请日：2002-03-15
申请人： Yukihisa Takeuchi , Tsutomu Nanataki , Koji Kimura
发明人： Yukihisa Takeuchi , Tsutomu Nanataki , Koji Kimura
IPC分类号： H04R1700
CPC分类号： H01L41/0946 , H01L41/27 , Y10T29/42 , Y10T29/49005 , Y10T29/49126 , Y10T29/49128 , Y10T29/49574 , Y10T29/49789 , Y10T29/49798
摘要： A piezoelectric/electrostrictive device includes a pair of mutually opposing thin plate sections, a movable section, and a fixation section for supporting the thin plate sections and the movable section. One or more piezoelectric/electrostrictive elements are arranged on the pair of thin plate sections. A hole is formed by both inner walls of the pair of thin plate sections, an inner wall of the movable section, and an inner wall of the fixation section. At least one thin plate section of the pair of thin plate sections is previously bent in a direction to make mutual approach so that it has an inwardly convex configuration to the hole.
摘要翻译： 压电/电致伸缩装置包括一对相互相对的薄板部分，可移动部分和用于支撑薄板部分和可移动部分的固定部分。 一对或多个压电/电致伸缩元件设置在一对薄板部分上。 由一对薄板部分的内壁，可移动部分的内壁和固定部分的内壁两个孔形成一个孔。 该一对薄板部分中的至少一个薄板部分预先沿着相互接近的方向弯曲，使得其具有朝向该孔的向内凸起的构造。
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公开(公告)号：US06472799B2
公开(公告)日：2002-10-29
申请号：US10072189
申请日：2002-02-07
申请人： Yukihisa Takeuchi , Tsutomu Nanataki , Koji Kimura
发明人： Yukihisa Takeuchi , Tsutomu Nanataki , Koji Kimura
IPC分类号： H01L4108
CPC分类号： H01L41/0946 , H01L41/0831 , H01L41/22 , H01L41/27 , H01L41/273 , H01L41/314
摘要： A piezoelectric/electrostrictive device including a pair of mutually opposing thin plate sections, a movable section, and a fixation section for supporting the thin plate sections and the movable section. At least one piezoelectric/electrostrictive element is arranged on the pair of thin plate section, and a hole is formed by both inner walls of the pair of thin plate sections, an inner wall of the movable section, and an inner wall of the fixation section. The pair of thin plate sections are previously bent in directions to make mutual separation so that they have an outwardly convex configuration.
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公开(公告)号：US06404109B1
公开(公告)日：2002-06-11
申请号：US09544013
申请日：2000-04-06
申请人： Yukihisa Takeuchi , Tsutomu Nanataki , Koji Kimura
发明人： Yukihisa Takeuchi , Tsutomu Nanataki , Koji Kimura
IPC分类号： H01L4109
CPC分类号： H01L41/0946 , H01L41/0831 , H01L41/22 , H01L41/27 , H01L41/273 , H01L41/314
摘要： A piezoelectric/electrostrictive device including a pair of mutually opposing thin plate sections, a movable section, and a fixation section for supporting the thin plate sections and the movable section. At least one piezoelectric/electrostrictive element is arranged on the pair of thin plate sections, and a hole is formed by both inner walls of the pair of thin plate sections, an inner wall of the movable section, and an inner wall of the fixation section. The pair of thin plate sections are previously bent in directions to make mutual separation so that they have an outwardly convex configuration.
摘要翻译： 一种压电/电致伸缩装置，包括一对相互相对的薄板部分，可移动部分和用于支撑薄板部分和可移动部分的固定部分。 至少一个压电/电致伸缩元件设置在一对薄板部分上，并且由一对薄板部分的内壁，可移动部分的内壁和固定部分的内壁形成孔 。 预先将一对薄板部分弯曲成相互分离的方向，使得它们具有向外凸起的构造。
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15.发明授权Piezoelectric/electrostrictive device having mutually opposing thin plate portions 有权具有相互相对的薄板部分的压电/电致伸缩器件公开(公告)号：US06396193B1
公开(公告)日：2002-05-28
申请号：US09628232
申请日：2000-07-28
IPC分类号： H01L4108
CPC分类号： H01L41/43 , H01L41/0946 , H01L41/31
摘要： A piezoelectric/electrostrictive device includes a driving portion, a movable portion and a fixing portion. The driving portion includes a pair of mutually opposing thin plate portions and a piezoelectric/electrostrictive (P/E) element. A P/E operating portion of the P/E element is arranged on at least a part of an outer surface of at least one of the thin plate portions, such that one end thereof exists on the fixing portion or the movable portion and the other end thereof is arranged on the thin plate portion. At least one end of a P/E layer of the P/E element exists on the fixing portion or the movable portion, and the other end is arranged on the thin plate portion.
摘要翻译： 压电/电致伸缩器件包括驱动部分，可动部分和固定部分。 驱动部分包括一对相互相对的薄板部分和压电/电致伸缩（P / E）元件。 P / E元件的AP / E操作部分布置在至少一个薄板部分的外表面的至少一部分上，使得其一端存在于固定部分或可移动部分上，另一端 布置在薄板部分上。 P / E元件的P / E层的至少一端存在于固定部或可动部上，另一端配置在薄板部上。
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公开(公告)号：US06263552B1
公开(公告)日：2001-07-24
申请号：US09567067
申请日：2000-05-08
IPC分类号： B23P1500
CPC分类号： H01L41/0973 , H01L41/1875 , H01L41/314 , H04R17/08 , Y10T29/42
摘要： A piezoelectric and/or electrostrictive film-type element comprises a zirconia substrate with a thin-walled diaphragm section provided integrally to cover and close a window to serve as a hollow space, and a film-shaped piezoelectric and/or electrostrictive operating section composed of a lower electrode, a piezoelectric and/or electrostrictive layer, and an upper electrode which are successively provided in a layered configuration on an outer surface of the diaphragm section in accordance with a film-forming method, wherein at least a part of a peripheral edge portion of the piezoelectric and/or electrostrictive layer extends laterally beyond a corresponding peripheral edge portion of the lower electrode to construct an overhang section located opposingly over the diaphragm section, and the overhang section is in a state of incomplete connection with respect to a partial region of the diaphragm section located just under by the aid of particles of an alumina-magnesia compound such as spinel particles allowed to intervene therebetween.
摘要翻译： 压电和/或电致伸缩膜型元件包括具有薄壁隔膜部分的氧化锆基底，其整体地设置成覆盖和闭合窗口以用作中空空间;以及膜状压电和/或电致伸缩操作部分，其由 根据成膜方法在隔膜部分的外表面上依次设置成层状构造的下电极，压电和/或电致伸缩层和上电极，其中至少一部分周缘 压电和/或电致伸缩层的一部分横向延伸超过下电极的相应的周缘部分，以构成相对于隔膜部分设置的伸出部分，并且伸出部分处于与部分区域不完全连接的状态 通过氧化铝 - 氧化镁化合物的颗粒正好在其下的隔膜部分 允许尖晶石颗粒介入其间。
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公开(公告)号：US5889352A
公开(公告)日：1999-03-30
申请号：US727083
申请日：1996-10-08
申请人： Yukihisa Takeuchi , Koji Kimura , Tsutomu Nanataki
发明人： Yukihisa Takeuchi , Koji Kimura , Tsutomu Nanataki
CPC分类号： G01L9/008 , H01L41/0973 , H04R17/00 , H04R17/08
摘要： A piezo-electric/electrostrictive film type element is constituted of a ceramic substrate including a spacer plate having at least one window, and a thin closure plate for closing the window, integrally joined to the spacer plate, and a piezo-electric/electrostrictive working portion having a lower electrode, a piezo-electric/electrostrictive layer and an upper electrode disposed in turn in the form of a layer at a closure position of the window on the outer surface of the closure plate by a film formation method. The piezo-electric/electrostrictive layer is arranged so as to cover a part only of the area of the window in a plan view. Since at the end portions of the void, the piezo-electric/electrostrictive working portion does not pick up fluctuation and vibration which would contain noise at the end portions of the void, the noise at the time of sensing, filtering or acoustic oscillation can be remarkably minimized, and a gap between the characteristics of a simulation at the time of design and those of the actual product can be remarkably reduced.
摘要翻译： 压电/电致伸缩薄膜型元件由包括具有至少一个窗口的间隔板和用于闭合窗口的薄封闭板，整体连接到间隔板的陶瓷基板和压电/电致伸缩工作 具有下电极的部分，压电/电致伸缩层和上电极，其通过成膜方法依次设置在封闭板的外表面上的窗口的封闭位置处的层的形式。 压电/电致伸缩层被布置成在平面图中仅覆盖窗口区域的一部分。 由于在空隙的端部，压电/电致伸缩工作部分不会吸收在空隙的端部处将包含噪声的波动和振动，所以在感测，滤波或声振荡时的噪声可以是 显着地最小化，并且在设计时的仿真特性与实际产品的特性之间的差距可以显着降低。
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公开(公告)号：US6091182A
公开(公告)日：2000-07-18
申请号：US965239
申请日：1997-11-06
CPC分类号： G09G3/3433 , G02B26/08 , G09F9/305 , H01L41/0973 , G09G3/2014 , G09G3/2022 , G09G3/3493
摘要： Disclosed is a piezoelectric/electrostrictive element composed of an actuator section of a uni-morph type comprising a main actuator element including a piezoelectric/electrostrictive layer and a pair of electrodes formed on a first principal surface of the piezoelectric/electrostrictive layer; a vibrating section which contacts with a second principal surface of the piezoelectric/electrostrictive layer for supporting the main actuator element; and a fixed section for supporting the vibrating section in a vibrative manner; wherein a relationship of y=ax is satisfied, and an expression of 1/10.ltoreq.a.ltoreq.100 is satisfied provided that x represents a distance between the pair of electrodes (1 .mu.m.ltoreq.x.ltoreq.200 .mu.m), and y represents a thickness of the piezoelectric/electrostrictive layer (1 .mu.m.ltoreq.y.ltoreq.100 .mu.m). Accordingly, it is possible to greatly increase the relative displacement amount between the no-voltage-loaded state and the voltage-applied state and the relative displacement amount between the states in which mutually opposite electric fields are applied, making it possible to realize easy control when the element is utilized for actuators and improvement in sensitivity when the element is utilized for sensors.
摘要翻译： 本发明公开了一种压电/电致伸缩元件，由压电/电致伸缩层的第一主表面上形成的包括压电/电致伸缩层的主致动器元件和形成在第一主表面上的一对电极组成的单态致动器部分构成。 与所述压电/电致伸缩层的第二主表面接触以支撑所述主致动器元件的振动部分; 以及用于以振动方式支撑所述振动部分的固定部分; 其中满足y = ax的关系，并且满足+ E，fra 1/10 + EE a = 100的表达式，只要x表示一对电极之间的距离（1μm） = x <200μm），y表示压电/电致伸缩层的厚度（1μm×y =100μm）。 因此，可以大幅提高无负荷状态与施加电压之间的相对位移量和施加相互相反的电场的状态之间的相对位移量，从而可以实现易于控制 当元件用于传感器时，该元件被用于致动器和提高灵敏度。
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公开(公告)号：US20050082946A1
公开(公告)日：2005-04-21
申请号：US10896769
申请日：2004-07-22
CPC分类号： B81B3/0018 , B81B2201/032 , G02B26/0841 , G02B26/0858 , H01L41/0474 , H01L41/0973 , H04R17/005 , H04R2201/003
摘要： An actuator element has a plate member, a piezoelectric/electrostrictive body disposed in facing, relation to the plate member, and a beam disposed between the plate member and the piezoelectric/electrostrictive body and fixing the piezoelectric/electrostrictive body to the plate member. The piezoelectric/electrostrictive body has a piezoelectric/electrostrictive layer, an upper electrode formed on a surface of the piezoelectric/electrostrictive layer which faces the plate member, and a lower electrode formed on a surface of the piezoelectric/electrostrictive layer which is opposite to the surface thereof facing the plate member. When an electric field is applied to the upper electrode and the lower electrode, a portion of the piezoelectric/electrostrictive body is displaced toward or away from the plate member.
摘要翻译： 致动器元件具有板构件，与板构件相对设置的面对的压电/电致伸缩体，以及设置在板构件和压电/电致伸缩体之间的梁，并将压电/电致伸缩体固定到板构件。 压电/电致伸缩体具有压电/电致伸缩层，形成在压电/电致伸缩层的面向板构件的表面上的上电极和形成在与压电/电致伸缩层相对的压电/电致伸缩层的表面上的下电极 其表面面向板构件。 当电场施加到上电极和下电极时，压电/电致伸缩体的一部分朝向或远离板构件移动。
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公开(公告)号：US06476539B1
公开(公告)日：2002-11-05
申请号：US09642861
申请日：2000-08-21
IPC分类号： H01L4108
CPC分类号： H01L41/43 , H01L41/0946
摘要： Provided is a piezoelectric/electrostrictive device comprising a driving portion to be driven by a displacement of a piezoelectric/electrostrictive element, a movable portion to be operated based on a drive of the driving portion, and a fixing portion for holding the driving portion and the movable portion, the fixing portion and the movable portions being coupled via the driving portion, and a hole being formed by an inner wall of the driving portion, inner wall of the movable portion, and inner walls of the fixing portion. The driving portion comprises a pair of mutually opposing thin plate portions and at least two piezoelectric/electrostrictive elements each comprising at least one or more pairs of electrodes and a piezoelectric/electrostrictive layer provided on the thin plate portions.
摘要翻译： 本发明提供一种压电/电致伸缩器件，其特征在于，包括：驱动部，其通过压电/电致伸缩元件的位移驱动;基于所述驱动部的驱动而被驱动的可动部，以及用于保持所述驱动部和 可动部分，固定部分和可动部分经由驱动部分联接，以及由驱动部分的内壁，可移动部分的内壁和固定部分的内壁形成的孔。 驱动部分包括一对相互相对的薄板部分和至少两个压电/电致伸缩元件，每个压电/电致伸缩元件包括至少一对或多对电极和设置在薄板部分上的压电/电致伸缩层。
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