公开(公告)号：US08351048B2

公开(公告)日：2013-01-08

申请号：US12856723

申请日：2010-08-16

Applicant: James E. Millerd

Inventor： James E. Millerd

IPC: G01B9/02

CPC classification number: G01B9/0201 ,  G01B9/02057 ,  G01B9/02065 ,  G01B9/02079 ,  G01B9/0209 ,  G01B11/2441 ,  G01B11/25 ,  G01B2290/70

Abstract: A phase-difference sensor measures the spatially resolved difference in phase between orthogonally polarized reference and test wavefronts. The sensor is constructed as a linear-carrier phase-mask aligned to and imaged on a linear-carrier detector array. Mireau and Fizeau polarization interferometric objectives are implemented with a thin conductive wire grid optically coupled to the objective beam splitter.

Abstract translation: 相位差传感器测量正交极化参考和测试波前的相位的空间分辨差异。 传感器被构造为与线性载波检测器阵列对准并成像的线性载波相位掩模。 Mireau和Fizeau偏振干涉仪目标通过光学耦合到物镜分束器的薄导电网格实现。

公开(公告)号：US20100134801A1

公开(公告)日：2010-06-03

申请号：US12701535

申请日：2010-02-06

Applicant: JAMES E. MILLERD ,  MICHAEL NORTH-MORRIS

Inventor： JAMES E. MILLERD ,  MICHAEL NORTH-MORRIS

IPC: G01B9/02

CPC classification number: G01B9/02057 ,  G01B9/02002 ,  G01B9/02045 ,  G01B9/02065 ,  G01B9/0209 ,  G01B2290/70

Abstract: An optical device for characterizing a test surface combines a Fizeau interferometer with a polarization frequency-shifting element. Two substantially collinear, orthogonally polarized beams having respective frequencies differing by a predetermined frequency shift are generated by the polarization frequency-shifting element and projected into the Fizeau optical cavity to produce a pair of test beams and a pair of reference beams, wherein the beams in each pair have orthogonal polarization states and have frequencies differing by the predetermined frequency shift. A second, substantially equal frequency shift is introduced in the Fizeau cavity on either one of the pairs of test and reference beams, thereby generating a four-beam collinear output that produces an interferogram without tilt or short-coherence light. The invention may also be implemented by reversing the order of the Fizeau cavity and the polarization frequency-shifting element in the optical train.

Abstract translation: 用于表征测试表面的光学装置将Fizeau干涉仪与偏振频移元件组合。 通过偏振频移元件产生具有不同频率预定频移的两个基本上共线的正交偏振光束，并投射到菲索光学腔中以产生一对测试光束和一对参考光束，其中光束 每对具有正交偏振状态并且具有与预定频移不同的频率。 第二个基本上相等的频移在Fizeau腔中的任一个测试和参考光束中被引入，从而产生产生没有倾斜或短相干光的干涉图的四光束共线输出。 本发明还可以通过使光纤列中的Fizeau腔和极化频移元件的顺序颠倒来实现。

公开(公告)号：US20080062428A1

公开(公告)日：2008-03-13

申请号：US11899883

申请日：2007-09-07

Applicant: James E. Millerd ,  Michael North-Morris

Inventor： James E. Millerd ,  Michael North-Morris

IPC: G01B9/02

CPC classification number: G01B9/02057 ,  G01B9/02002 ,  G01B9/02045 ,  G01B9/02065 ,  G01B9/0209 ,  G01B2290/70

Abstract: An optical device for characterizing a test surface combines a Fizeau interferometer with a polarization frequency-shifting element. Two substantially collinear, orthogonally polarized beams having respective frequencies differing by a predetermined frequency shift are generated by the polarization frequency-shifting element and projected into the Fizeau optical cavity to produce a pair of test beams and a pair of reference beams, wherein the beams in each pair have orthogonal polarization states and have frequencies differing by the predetermined frequency shift. A second, substantially equal frequency shift is introduced in the Fizeau cavity on either one of the pairs of test and reference beams, thereby generating a four-beam collinear output that produces an interferogram without tilt or short-coherence light. The invention may also be implemented by reversing the order of the Fizeau cavity and the polarization frequency-shifting element in the optical train.

Abstract translation: 用于表征测试表面的光学装置将Fizeau干涉仪与偏振频移元件组合。 通过偏振频移元件产生具有不同频率预定频移的两个基本上共线的正交偏振光束，并投射到菲索光学腔中以产生一对测试光束和一对参考光束，其中光束 每对具有正交偏振状态并且具有与预定频移不同的频率。 第二个基本上相等的频移在Fizeau腔中的任一个测试和参考光束中被引入，从而产生产生没有倾斜或短相干光的干涉图的四光束共线输出。 本发明还可以通过使光纤列中的Fizeau腔和极化频移元件的顺序颠倒来实现。

公开(公告)号：US20070211256A1

公开(公告)日：2007-09-13

申请号：US11800840

申请日：2007-05-08

Applicant: Brian Medower ,  James Millerd

Inventor： Brian Medower ,  James Millerd

IPC: G01B9/02

CPC classification number: G01B9/0201 ,  G01B9/02022 ,  G01B9/02057 ,  G01B9/02065 ,  G01B9/02079 ,  G01B9/0209 ,  G01B9/02098 ,  G01B11/2441 ,  G01B11/25 ,  G01B2290/70 ,  G06T7/521

Abstract: A phase-difference sensor measures the spatially resolved difference in phase between orthogonally polarized reference and test wavefronts. The sensor is constructed as a linear-carrier phase-mask aligned to and imaged on a linear-carrier detector array. Each adjacent element of the phase-mask measures a predetermined relative phase shift between the orthogonally polarized reference and test beams. Thus, multiple phase-shifted interferograms can be synthesized at the same time by combining pixels with identical phase-shifts. The multiple phase-shifted interferograms can be combined to calculate standard parameters such as modulation index or average phase step. Any configuration of interferometer that produces orthogonally polarized reference and object beams may be combined with the phase-difference sensor of the invention to provide single-shot, simultaneous phase-shifting measurements.

Abstract translation: 相位差传感器测量正交极化参考和测试波前的相位的空间分辨差异。 传感器被构造为与线性载波检测器阵列对准并成像的线性载波相位掩模。 相位掩模的每个相邻元件测量正交极化参考和测试光束之间的预定相对相移。 因此，通过组合具有相同相移的像素，可以同时合成多个相移干涉图。 可以组合多个相移干涉图以计算标准参数，例如调制指数或平均相位步长。 可以将产生正交偏振的参考和物体光束的干涉仪的任何配置与本发明的相位差传感器组合以提供单次，同时的相移测量。

公开(公告)号：US07230718B2

公开(公告)日：2007-06-12

申请号：US11430447

申请日：2006-05-09

Applicant: James E. Millerd ,  James C. Wyant

Inventor： James E. Millerd ,  James C. Wyant

IPC: G01B9/02

CPC classification number: G01B9/02057 ,  G01B9/02003 ,  G01B9/02091 ,  G01B11/303 ,  G01B2290/45 ,  G01B2290/50 ,  G01B2290/70

Abstract: The tilted relationship between the reference and test mirrors (24,26) of a Fizeau interferometer is used to spatially separate the reflections (R,T) from the two surfaces. The separate beams (R,T) are filtered through a spatial polarization element (32) that provides different states of polarization to the beams. The beams (R,T) are subsequently recombined to form a substantially collinear beam that is processed using a spatial-phase-shift interferometer (44) that permits quantitative phase measurement in a single video frame. Alternatively, two beams (104,106) with orthogonal polarization are injected into the Fizeau cavity (20) at different angles, such that after reflection from the reference and test optics (24,26) they are substantially collinear. Unwanted reflections are blocked at the focal plane through the use of a circular aperture (112). Short coherence length light and a delay line (84) may be used to mitigate stray reflections, reduce measurement integration times, and implement temporal phase averaging.

Abstract translation: 使用Fizeau干涉仪的参考和测试镜（24,26）之间的倾斜关系在空间上分离两个表面的反射（R，T）。 单独的光束（R，T）通过空间偏振元件（32）被滤波，该空间偏振元件（32）向光束提供不同的偏振状态。 光束（R，T）随后重新组合以形成使用允许在单个视频帧中进行定量相位测量的空间相移干涉仪（44）来处理的基本上共线的光束。 或者，具有正交偏振的两个光束（104,106）以不同的角度注入到Fizeau腔（20）中，使得在来自参考和测试光学器件（24,26）的反射之后，它们基本上共线。 不需要的反射通过使用圆形孔径（112）在焦平面处被阻挡。 短相干长度光和延迟线（84）可用于减轻杂散反射，减少测量积分时间，并实现时间相位平均。