公开(公告)号：US10004113B2

公开(公告)日：2018-06-19

申请号：US14401762

申请日：2013-05-10

Applicant: KSM COMPONENT CO., LTD

Inventor： Yun Ho Kim

IPC: H05B3/28 ,  H05B3/18 ,  H01L21/67 ,  H05B3/16 ,  H05B3/74

CPC classification number: H05B3/283 ,  H01L21/67103 ,  H05B3/16 ,  H05B3/18 ,  H05B3/748 ,  H05B2203/014

Abstract: Provided is a heating wire arrangement for a ceramic heater, which is an arrangement of a heating wire on a ceramic substrate in a ceramic heater and emits heat. The heating wire arrangement for the ceramic heater includes a heating wire that is a metal wire member extending in a longitudinal direction and is two-dimensionally arranged on a virtual two-dimensional (2D) plane that is substantially parallel to a top surface of the ceramic substrate.Thus, a uniform heat density may be maintained and a rapid temperature ramp-up may be enabled, unlike a conventional heating wire of a three-dimensional (3D) type.

公开(公告)号：US11355377B2

公开(公告)日：2022-06-07

申请号：US16629709

申请日：2018-05-15

Applicant: KSM COMPONENT CO., LTD.

Inventor： Yun Ho Kim ,  Joo Hwan Kim

IPC: H01L21/683 ,  C04B35/581 ,  C04B35/645 ,  C04B35/626

Abstract: One embodiment of the present invention discloses an electrostatic chuck made of an aluminum nitride sintered body, wherein the aluminum nitride sintered body comprises aluminum nitride and a composite oxide formed along the grain boundaries of the aluminum nitride, wherein the composite oxide comprises at least two kinds of rare earth metals which have a solid-solution relationship with each other, and wherein the composite oxide comprises a collection area having a higher oxygen content than a surrounding area.

公开(公告)号：US20210285104A1

公开(公告)日：2021-09-16

申请号：US17258071

申请日：2019-07-03

Applicant: KSM COMPONENT CO., LTD.

Inventor： Joo Hwan KIM

IPC: C23C16/455 ,  H01J37/32 ,  C23C16/505

Abstract: A shower head for a chemical vapor deposition system and a chemical vapor deposition device including the shower head are disclosed. The shower head includes a chamber; a process gas inlet for the chamber; a second gas distributor plate provided at the bottom of the chamber; and a first gas distributor plate stacked on the upper surface of the second gas distributor plate, wherein the first gas distributor plate includes multiple gas distribution holes, the second gas distributor plate includes multiple gas injection holes, and a distribution channel is arranged at the boundary surface between the first gas distributor plate and the second gas distributor plate so as to distribute a process gas, introduced through each gas distribution hole of the first gas distributor plate, to 2 to 8 gas injection holes of the second gas distributor plate.

公开(公告)号：US20210249260A1

公开(公告)日：2021-08-12

申请号：US16973112

申请日：2019-10-31

Applicant: KSM COMPONENT CO., LTD. ,  FLOWSERVE KSM CO., LTD.

Inventor： Yun Ho KIM ,  Joo Hwan KIM ,  Ki Ryong LEE

IPC: H01L21/02

Abstract: Disclosed are: an electrostatic chuck having a high volume resistivity so as to reduce a leakage current, thereby improving the adsorption and desorption response characteristics of a semiconductor wafer; and a manufacturing method therefor. The electrostatic chuck is a sintered body in which an electrode is impregnated so as to fix a semiconductor wafer by electrostatic force, and comprises alumina, a sintering aid, and a rare earth composite oxide comprising two to five different rare earth metals, has adsorption and desorption response characteristics of a semiconductor wafer of two seconds or less, and has a volume resistivity at room temperature of 1.0E+16 Ω·cm to 1.0E+17 Ω·cm.

公开(公告)号：USD849810S1

公开(公告)日：2019-05-28

申请号：US29565638

申请日：2016-05-23

Applicant: KSM COMPONENT CO., LTD.

Designer： Joo Hwan Kim

公开(公告)号：US20150173127A1

公开(公告)日：2015-06-18

申请号：US14401762

申请日：2013-05-10

Applicant: KSM COMPONENT CO., LTD

Inventor： Yun Ho Kim

IPC: H05B3/28 ,  H05B3/16

CPC classification number: H05B3/283 ,  H01L21/67103 ,  H05B3/16 ,  H05B3/18 ,  H05B3/748 ,  H05B2203/014

Abstract: Provided is a heating wire arrangement for a ceramic heater, which is an arrangement of a heating wire on a ceramic substrate in a ceramic heater and emits heat. The heating wire arrangement for the ceramic heater includes a heating wire that is a metal wire member extending in a longitudinal direction and is two-dimensionally arranged on a virtual two-dimensional (2D) plane that is substantially parallel to a top surface of the ceramic substrate.Thus, a uniform heat density may be maintained and a rapid temperature ramp-up may be enabled, unlike a conventional heating wire of a three-dimensional (3D) type.

Abstract translation: 提供一种用于陶瓷加热器的加热丝布置，陶瓷加热器是陶瓷加热器中的陶瓷基板上的加热丝布置，并且发热。 用于陶瓷加热器的加热线布置包括：加热丝，其是在纵向方向上延伸的金属丝构件，并且二维布置在基本上平行于陶瓷的顶表面的虚拟二维（2D）平面上 基质。 因此，与三维（3D）类型的常规加热丝不同，可以保持均匀的热密度并且可以实现快速的温度上升。