公开(公告)号：US08339563B2

公开(公告)日：2012-12-25

申请号：US12885836

申请日：2010-09-20

Applicant: Herb He Huang

Inventor： Herb He Huang

IPC: G02F1/1345 ,  G02F1/1339

CPC classification number: G03F7/0007

Abstract: The disclosed LCOS device comprises a transparent composite plate, a planar liquid crystal cell, a base plate which contains an active matrix driving circuitry. In the basic embodiment, the planar liquid crystal cell comprises a conductive seal ring which encloses liquid crystal filling and connects the transparent conductive layer underneath the transparent composite plate with the base plate and the active matrix driving circuitry. In the extended embodiment, the base plate further incorporates a set of thru-substrate via and backside bond pads. The set of thru-substrate via electrically connect a set of input-output pads of the active matrix driving circuitry to the bottom bond pads underneath the base plate. In addition, the conductive seal ring electrically connects the transparent conductive film placed underneath the transparent front plane plate, preferably made of glass, to the active matrix driving circuitry on the base plate. Electrostatically charged between the transparent conductive coating and an electrode array layer including a planar array of reflective pixel electrodes on top of the base plate, planar liquid crystal cell is operated to produce spatial light modulation to incident illumination. The method of wafer level process and packaging of the disclosed LCOS imagers is further disclosed.

Abstract translation: 所公开的LCOS器件包括透明复合板，平面液晶单元，含有有源矩阵驱动电路的基板。 在基本实施例中，平面液晶单元包括封装液晶填充并将透明复合板下方的透明导电层与基板和有源矩阵驱动电路连接的导电密封环。 在扩展实施例中，基板还包括一组通孔基板通孔和背面接合焊盘。 通过将有源矩阵驱动电路的一组输入输出焊盘电连接到底板下方的底部接合焊盘，该组通孔基板经过。 此外，导电密封环将布置在透明前平面板下方的透明导电膜电连接到基板上的有源矩阵驱动电路，优选由玻璃制成。 在透明导电涂层和包括在基板顶部上的反射像素电极的平面阵列的电极阵列层之间静电充电，操作平面液晶单元以对入射照明产生空间光调制。 进一步公开了所公开的LCOS成像器的晶片级处理和封装的方法。

公开(公告)号：US08338205B2

公开(公告)日：2012-12-25

申请号：US12873172

申请日：2010-08-31

Applicant: Herb He Huang

Inventor： Herb He Huang

IPC: B81C1/00 ,  H01L23/29

CPC classification number: B81C1/00333 ,  B81C2203/0136 ,  B81C2203/0145

Abstract: A method of fabricating and encapsulating MEMS devices is disclosed, using least two carbon films as the dual sacrificial layers sandwiching a MEMS structural film which is anchored onto a substrate and covered by an encapsulating film containing a plurality of thru-film sacrificial release holes. The dual sacrificial carbon films are selectively removed via plasma-enhanced oxygen or nitrogen ashing through the thru-film sacrificial release holes for releasing the MEMS structural film inside a cavity formed between the encapsulating film and the substrate. The thru-film sacrificial release holes, preferably with a relative high asperity ratio, are then sealed off by depositing a hole-sealing film in a physical vapor deposition process or a chemical vapor deposition process or combination.

Abstract translation: 公开了一种制造和封装MEMS器件的方法，使用最少两个碳膜作为夹持MEMS结构膜的双牺牲层，该MEMS结构膜锚定在衬底上并由包含多个穿透膜牺牲释放孔的封装膜覆盖。 双重牺牲碳膜通过等离子体增强的氧气或氮气灰化通过穿过膜牺牲释放孔而被选择性地去除，用于将MEMS结构膜释放在形成在封装膜和衬底之间的空腔内。 然后通过在物理气相沉积工艺或化学气相沉积工艺或组合中沉积空穴密封膜来密封优选具有相对高的凹凸比的透膜牺牲释放孔。

公开(公告)号：US08319915B2

公开(公告)日：2012-11-27

申请号：US12849216

申请日：2010-08-03

Applicant: Herb He Huang

Inventor： Herb He Huang

IPC: G02F1/1343 ,  G02F1/1335

CPC classification number: G02F1/133536 ,  G02F1/13439 ,  G02F1/136277 ,  G02F2001/133548 ,  G02F2203/02

Abstract: The present invention relates to a liquid crystal on silicon imager. The imager includes a backplane substrate, a reflective polarization electrode array, a planar liquid crystal cell, a transparent conductive film and a transparent plate. The reflective polarization electrode array is placed onto the backplane substrate, consists of a plurality of reflective polarization electrodes, and a pattern of each of the reflective polarization electrodes is configured in a planar arrangement having regularly spaced and electrically isolated gaps in parallel to each other. The planar liquid crystal cell is placed above the reflective polarization electrode array. The transparent conductive film is placed above the planar liquid crystal cell. The transparent plate is placed on the transparent conductive film and facing incident light. Through embedding the reflective polarization electrodes, only one polarization portion could be reflected back, while the residual polarization portion is let pass but not reflected back as desired, thereby decreasing the loss in contrast ratio of the imager.

Abstract translation: 本发明涉及硅成像仪上的液晶。 成像器包括背板基板，反射极化电极阵列，平面液晶单元，透明导电膜和透明板。 反射极化电极阵列被放置在背板基板上，由多个反射偏振电极组成，并且每个反射偏振电极的图案被配置成具有彼此平行的规则间隔和电隔离间隙的平面布置。 平面液晶单元放置在反射极化电极阵列的上方。 透明导电膜放置在平面液晶单元的上方。 透明板放置在透明导电膜上并面向入射光。 通过嵌入反射型极化电极，只有一个偏振部分能够被反射回来，同时残留偏振部分通过但没有根据需要被反射回来，从而降低了成像器的对比度损失。

公开(公告)号：US08035885B2

公开(公告)日：2011-10-11

申请号：US12698854

申请日：2010-02-02

Applicant: Herb He Huang

Inventor： Herb He Huang

IPC: G02B26/00

CPC classification number: G02B5/201 ,  G02B26/001

Abstract: A tri wavelength diffracting modulation (TWDM) element, a TWDM imager, and methods of temporally and spatially modulating by using the same are disclosed. The TWDM element includes first and second sets of movable reflective rigid plates under independent electrical actuation, provides four different spatial configurations for reflecting and selectively diffracting incident radiation of three distinguished wavelengths. The TWDM imager is formed with a plurality of the TWDM elements in a regularly spaced planar array configuration on a planar substrate. Incident visible light is spatially modulated by the TWDM imager, either in a time sequential mode or via spatial combination with help of an aligned color filter array.

Abstract translation: 公开了三波长衍射调制（TWDM）元件，TWDM成像器以及通过使用它们进行时间和空间调制的方法。 TWDM元件包括在独立电驱动下的第一组和第二组可移动反射刚性板，提供用于反射和选择性衍射三种不同波长的入射辐射的四种不同的空间配置。 TWDM成像器在平面基板上以规则间隔的平面阵列配置形成有多个TWDM元件。 事件可见光由TWDM成像仪进行空间调制，无论是在时序模式下还是通过空间组合，借助于对准的滤色器阵列。

公开(公告)号：US20110141545A1

公开(公告)日：2011-06-16

申请号：US12965009

申请日：2010-12-10

Applicant: HERB HE HUANG

Inventor： HERB HE HUANG

IPC: G02B26/00

CPC classification number: G02B26/001 ,  G02B26/0816 ,  G02B26/0841

Abstract: The present invention relates to a tri wavelength interference modulator (TWIM) and a method of tri wavelength interference modulation. The tri wavelength interference modulator includes: a stationary substrate with a bottom electrode plate formed on top of the stationary substrate; a first electrode plate comprising a first suspended beam suspended in parallel above the stationary substrate and a first connection electrically connected onto the stationary substrate; and a second electrode plate comprising a second suspended beam suspended in parallel above the first electrode plate and a second connection electrically connected onto the stationary substrate. The inference modulator and the method for inference modulation are suitable to projection system.

Abstract translation: 本发明涉及三波长干扰调制器（TWIM）和三波长干扰调制方法。 三波长干涉调制器包括：固定基板，其具有形成在固定基板上的底电极板; 第一电极板，包括平行地悬挂在固定基板上的第一悬挂梁和电连接到固定基板上的第一连接; 以及第二电极板，包括平行地悬挂在第一电极板上方的第二悬挂梁和电连接到固定基板上的第二连接。 推理调制器和推理调制方法适用于投影系统。

公开(公告)号：US08375791B2

公开(公告)日：2013-02-19

申请号：US12834250

申请日：2010-07-12

Applicant: Herb He Huang

Inventor： Herb He Huang

IPC: G01C19/56

CPC classification number: G01C19/5712

Abstract: A capacitive MEMS gyroscope and a method of making the same are disclosed. The capacitive MEMS gyroscope comprises a semiconductor substrate and a suspended composite wheel. The semiconductor substrate comprises: a read-out circuitry; at least one bottom electrode disposed on top of the semiconductor substrate, centered to a rotation axis and electrically connected to the read-out circuitry; at least one contact pad disposed on the top of the semiconductor substrate, electrically to the read-out circuitry; the composite wheel, partially made of dielectric film and configured in suspension above and in parallel to the semiconductor substrate and centered to the rotation axis, comprises: at least one top electrode disposed on the composite wheel, aligned vertically with one of the bottom electrode, electrically to the read-out circuitry; at least one circumferential spring centered to the rotation axis, bridging the composite wheel and the semiconductor substrate and consisting of at least one top electrode which electrically connects the top electrode to the contact pad on the semiconductor substrate. The gyroscope of the present invention formed by depositing and photolithographically patterning has miniaturized size, low tolerance scope and high sensing accuracy, as well as low fabrication costs owing to special bulk MEMS fabrication device unnecessary.

Abstract translation: 公开了一种电容式MEMS陀螺仪及其制造方法。 电容式MEMS陀螺仪包括半导体衬底和悬挂复合轮。 半导体衬底包括：读出电路; 设置在所述半导体衬底的顶部上的至少一个底部电极，其以旋转轴为中心并电连接到所述读出电路; 至少一个接触焊盘，设置在所述半导体衬底的顶部上，电读取电路; 部分地由电介质膜制成并且被配置为悬挂在半导体衬底上方并与半导体衬底并居于旋转轴线的复合轮包括：设置在复合轮上的至少一个顶电极，与底电极之一垂直排列， 电读取电路; 至少一个以旋转轴为中心的周向弹簧，桥接复合轮和半导体衬底，并且由至少一个顶部电极组成，该顶部电极将顶部电极电连接到半导体衬底上的接触焊盘。 通过沉积和光刻图案形成的本发明的陀螺仪由于不需要特殊的体积MEMS制造装置而具有小型化，低容差范围和高感测精度以及低制造成本。

公开(公告)号：US08282216B2

公开(公告)日：2012-10-09

申请号：US12683144

申请日：2010-01-06

Applicant: Herb He Huang

Inventor： Herb He Huang

IPC: G03B21/14 ,  G03B21/28 ,  G02F1/1335 ,  F21V9/14 ,  H04N9/69

CPC classification number: G02B27/283 ,  H04N9/3167

Abstract: A single-imager projection engine assembly includes a light source, a reflective polarization modulation imager, a reflective quarter wave composite plate, a projection lens system, and a PBS assembly which includes a first polarization beam splitting film and a second polarization beam splitting film in a V-notch pairing configuration. The first polarization beam splitting film reflects the illumination light in first polarization state to the reflective polarization modulation imager, while the second polarization beam splitting film and the reflective quarter wave composite plate in conjunction convert the illumination light in second polarization state passing through the first polarization beam splitting film to first polarization state and reflects the converted to the reflective polarization modulation imager. Combined illumination is modulated, polarization rotated and reflected by the reflective polarization modulation imager back to the PBS assembly for projection through the projection lens.

Abstract translation: 单成像投影引擎组件包括光源，反射偏振调制成像器，反射四分之一波复合板，投影透镜系统和PBS组件，其包括第一偏振分束膜和第二偏振分束膜 V形槽配对配置。 第一偏振分束膜将第一偏振态的照明光反射到反射偏振调制成像器，而第二偏振分束膜和反射四分之一波长复合板一起转换通过第一偏振的第二偏振态的照明光 将分束膜分解为第一极化状态并将其转换成反射偏振调制成像器。 组合的照明被调制，偏振旋转并由反射偏振调制成像器反射回PBS组件以通过投影透镜投射。

公开(公告)号：US08270065B2

公开(公告)日：2012-09-18

申请号：US12833243

申请日：2010-07-09

Applicant: Herb He Huang

Inventor： Herb He Huang

IPC: G02B26/00

CPC classification number: G02F1/167 ,  G02F2001/1676 ,  G02F2203/34 ,  G09G3/3446

Abstract: A colored electrophoretic display includes a transparent substrate, a transparent conductive layer, a planar electrophoretic cell, and a backplane substrate in sequence of receiving an incident light. The backplane substrate includes a first block reflective electrode, a second block reflective electrode and a third block reflective electrode, tiled in a planar arrangement perpendicular to the incident light and electrically connected to a driving circuitry in the backplane substrate. The driving circuitry electrically drives the first block reflective electrode, the second block reflective electrode and the third block reflective electrode individually as well as the transparent conductive layer to form spatially colored reflective light modulation.

Abstract translation: 彩色电泳显示器包括透明基板，透明导电层，平面电泳池和背板基板，以接收入射光。 背板基板包括第一块反射电极，第二块反射电极和第三块反射电极，它们被平铺在与入射光垂直的平面布置中并电连接到背板基板中的驱动电路。 驱动电路单独地驱动第一块反射电极，第二块反射电极和第三块反射电极以及透明导电层，以形成空间有色的反射光调制。

公开(公告)号：US08134109B2

公开(公告)日：2012-03-13

申请号：US12613209

申请日：2009-11-05

Applicant: Deming Tang

Inventor： Deming Tang

IPC: H01L27/00

CPC classification number: G03B35/26 ,  G02B5/3058 ,  G02B27/26 ,  G02B27/283 ,  H04N9/3167 ,  H04N13/363 ,  H04N13/365

Abstract: An optical projection engine device uses a symmetrical wire grid polarizing beam splitter (PBS) that splits incident illumination to a symmetrical pair of polarized light beams in two orthogonal polarization states, one by reflection and the other by transmission, for illuminating a pair of reflective modulation imagers respectively. In identical geometric configuration, the two synchronized reflective modulation imagers polarization modulate polarized light beams as received, and reflect them back towards the PBS, which through transmission and reflection respectively, combines and projects two modulated light beams through a projection lens system to form a pair of spatially overlapped illumination images of aligned pixels with the same image in two orthogonal polarization states on a projection screen. The device jointly provides improvement optical efficiency and expanded function to three dimensional stereoscopic displays.

Abstract translation: 光学投影引擎装置使用对称的线栅偏振分束器（PBS），其将入射照明分成两对正交偏振状态的对称偏振光束，一个通过反射而另一个通过透射来照射一对反射调制 成像仪分别。 在相同的几何结构中，两个同步的反射调制成像器极化地调制收到的偏振光束，并将其反射回PBS，通过透射和反射分别通过投影透镜系统组合投影两个调制光束，形成一对 在投影屏幕上的两个正交偏振状态下具有相同图像的对准像素的空间重叠照明图像。 该设备联合为三维立体显示提供光学效率和扩展功能。

公开(公告)号：US08098339B2

公开(公告)日：2012-01-17

申请号：US12821918

申请日：2010-06-23

Applicant: Herb He Huang

Inventor： Herb He Huang

IPC: G02F1/1335

CPC classification number: G02B27/283

Abstract: The present invention discloses an integrated single-panel projection engine (500) including a collimated light source (400), a main polarization beam splitter (200), a supporting polarization beam splitter (210), a reflective quarter wave plate (150), a mirror plate (160), an LCOS imager (100) and a projection lens system (300), which provides substantial improvement in optical efficiency of LCOS micro projection display.

Abstract translation: 本发明公开了一种包括准直光源（400），主偏振光束分离器（200），支撑偏振分束器（210），反射四分之一波片（150）等的集成单面投影引擎（500） 镜板（160），LCOS成像器（100）和投影透镜系统（300），其提供LCOS微投影显示器的光学效率的实质性改进。