公开(公告)号：US20130155487A1

公开(公告)日：2013-06-20

申请号：US13816031

申请日：2011-01-26

Applicant: Jianhong Mao ,  Deming Tang ,  Fengqin Han

Inventor： Jianhong Mao ,  Deming Tang ,  Fengqin Han

IPC: G02B26/00

CPC classification number: G02B26/001 ,  G02B26/02 ,  G02B26/0808

Abstract: A light modulator pixel unit and the manufacturing method thereof are provided. The pixel unit includes a top electrode formed on a substrate, a movable electrode and a bottom electrode. Under the control of a control circuit, the position of the movable electrode would deflect. When the movable electrode is positioned in a first position, a first light is diffracted on the top electrode; when the movable electrode is positioned in a second position, a second light is diffracted on the top electrode; when the movable electrode is positioned in a third position, a third light is diffracted on the top electrode. The said first light, second light and third light are lights of three primary colors. The light modulator pixel unit of the present invention can modulate lights of three colors and is applicable in the field of micro-display system.

Abstract translation: 提供了光调制器像素单元及其制造方法。 像素单元包括形成在基板上的顶部电极，可动电极和底部电极。 在控制电路的控制下，可动电极的位置将会偏转。 当可动电极位于第一位置时，第一光在顶部电极上衍射; 当可动电极位于第二位置时，第二光在顶部电极上衍射; 当可动电极位于第三位置时，第三光在顶部电极上衍射。 所述第一光，第二光和第三​​光是三原色的光。 本发明的光调制器像素单元可以调制三种颜色的光，并且可应用于微显示系统领域。

公开(公告)号：US20130107349A1

公开(公告)日：2013-05-02

申请号：US13810107

申请日：2011-01-26

Applicant: Jianhong Mao ,  Deming Tang ,  Fengqin Han

Inventor： Jianhong Mao ,  Deming Tang ,  Fengqin Han

IPC: G02B26/00

CPC classification number: G02B26/001 ,  G02B26/02 ,  G02B26/0808 ,  Y10T29/49117

Abstract: A light modulator pixel unit and a method for manufacturing the same are provided. The light modulator pixel unit includes top, movable and bottom electrodes. Under control of a control circuit, the movable electrode may shift to first, second and third positions corresponding to modulations of first, second and third monochromatic lights, respectively. When the movable electrode is at a certain position, the incident light corresponding to the position may be divided into two parts, one is reflected by the top electrode, and the other one may bypass the top electrode and be reflected by the movable electrode. The two parts may interfere destructively. The light modulator pixel unit of the present invention can control monochromatic lights of three special wavelengths by time division, and enable color control and gray control. The unit is applicable in the field of projection display and panel system.

Abstract translation: 提供了一种光调制器像素单元及其制造方法。 光调制器像素单元包括顶部，可移动和底部电极。 在控制电路的控制下，可移动电极可分别转换到对应于第一，第二和第三单色光的调制的第一，第二和第三位置。 当可动电极处于一定位置时，对应于该位置的入射光可分为两部分，一部分被顶部电极反射，另一部分可能旁路顶部电极并被可动电极反射。 这两个部分可能会破坏性地干扰。 本发明的光调制器像素单元可以通过时分控制三种特殊波长的单色光，并且能够进行颜色控制和灰度控制。 该单元适用于投影显示和面板系统领域。

公开(公告)号：US20110241766A1

公开(公告)日：2011-10-06

申请号：US12846415

申请日：2010-07-29

Applicant: Lei Zhang ,  Deming Tang

Inventor： Lei Zhang ,  Deming Tang

IPC: G05F3/02

CPC classification number: H02M3/07

Abstract: A charge pump includes a first voltage input node, a second voltage input node, a voltage output node, at least a flying capacitor, an energy reserve capacitor, a first MEMS switches group controlled by a controlling signal, a second MEMS switches group controlled by the controlling signal, a third MEMS switches group controlled by the controlling signal and a forth MEMS switches group controlled by the controlling signal. The flying capacitor is connected with the first voltage input node and the second voltage input node via the first MEMS switches group. The flying capacitor is connected with the first voltage input node or the second voltage input node via the second MEMS switches group. The energy reserve capacitor is connected with the flying capacitor via the third MEMS switches group. The energy reserve capacitor is connected with the voltage output node and the second voltage input node. When a clock controls the first MEMS switches group to turn on, and the second MEMS switches group and the third MEMS switches group to turn off, the flying capacitor is charged up through the first voltage input node and the second voltage input node. When the clock controls the first MEMS switches group to turn off, and the second MEMS switches group and the third MEMS switches group to turn on, the energy reserve capacitor is charged up through the flying capacitor and the second voltage input node. Through MEMS technology, miniaturization and integration of the charge pump are achieved, and power consumption is reduced, and energy conversion efficiency is improved.

Abstract translation: 电荷泵包括第一电压输入节点，第二电压输入节点，电压输出节点，至少飞跨电容器，能量储备电容器，由控制信号控制的第一MEMS开关组，第二MEMS开关组由第 控制信号，由控制信号控制的第三MEMS开关组和由控制信号控制的第四MEMS开关组。 飞跨电容器经由第一MEMS开关组与第一电压输入节点和第二电压输入节点连接。 飞跨电容器经由第二MEMS开关组与第一电压输入节点或第二电压输入节点连接。 储能电容器通过第三个MEMS开关组与飞跨电容器连接。 储能电容器与电压输出节点和第二电压输入节点相连。 当时钟控制第一MEMS开关组导通时，第二MEMS开关组和第三MEMS开关分组关闭，飞跨电容器通过第一电压输入节点和第二电压输入节点充电。 当时钟控制第一MEMS开关组关闭时，第二个MEMS开关组和第三个MEMS开关组导通，储能电容器通过飞跨电容器和第二电压输入节点充电。 通过MEMS技术，实现了电荷泵的小型化和集成化，降低了功耗，提高了能量转换效率。

公开(公告)号：US06576044B1

公开(公告)日：2003-06-10

申请号：US09722802

申请日：2000-11-27

Applicant: Dustin Wenpin Ho ,  Deming Tang ,  Walter H. Whitlock

Inventor： Dustin Wenpin Ho ,  Deming Tang ,  Walter H. Whitlock

IPC: B01D53047

CPC classification number: B01D53/02 ,  B01D53/0462 ,  B01D53/047 ,  B01D53/0476 ,  B01D53/261 ,  B01D2253/202 ,  B01D2257/302 ,  B01D2257/308 ,  B01D2257/40 ,  B01D2257/404 ,  B01D2257/504 ,  B01D2257/80 ,  B01D2259/40052 ,  B01D2259/4006 ,  B01D2259/40081 ,  B01D2259/40084 ,  B01D2259/4009 ,  B01D2259/4533 ,  B01J20/261 ,  C01B21/24 ,  C01P2006/80 ,  Y02C10/08 ,  Y02C20/10 ,  Y02P20/152 ,  Y02P20/153

Abstract: A gas mixture comprised of nitric oxide and one or more impurities selected from nitrous oxide, nitrogen dioxide, nitrous acid, sulfur dioxide, carbonyl sulfide, water vapor and carbon dioxide is purified by pressure swing adsorption or temperature swing adsorption using a porous, metal-free polymer adsorbent that does not promote the disproportionation of nitric oxide to nitrogen dioxide and nitrogen or nitrous oxide. The adsorption step is preferably carried out at tempereatures in the range of about −120 to about 0° C.

Abstract translation: 由一氧化氮和一种或多种选自一氧化二氮，二氧化氮，亚硝酸，二氧化硫，硫化碳，水蒸汽和二氧化碳的杂质组成的气体混合物通过变压吸附或变温吸附来纯化，使用多孔金属 - 游离聚合物吸附剂不会促进一氧化氮歧化到二氧化氮和氮或一氧化二氮。 吸附步骤优选在约-120至约0℃范围内的温度下进行。

公开(公告)号：US08854712B2

公开(公告)日：2014-10-07

申请号：US14112165

申请日：2011-12-29

Applicant: Jianhong Mao ,  Deming Tang

Inventor： Jianhong Mao ,  Deming Tang

IPC: G02B26/00 ,  G02B26/02 ,  G02B26/08 ,  G02B26/04 ,  G09G3/34 ,  H04M1/00 ,  H01L29/66

CPC classification number: G02B26/02 ,  G02B26/04 ,  G02B26/0841 ,  G09G3/34 ,  G09G3/3433 ,  H01L29/66742 ,  H04M1/00

Abstract: A display device provided with an MEMS light valve, comprising: a substrate, a fixed optical grating located on the substrate, an MEMS light valve for controlling the opening and closing of the fixed optical grating, the MEMS light valve comprises a first light valve and a second light valve; the opening and closing of the fixed optical grating is controlled via controlling the movement of the first light valve and the second light valve, and the moving directions of the first light valve and the second light valve are opposite. Also disclosed is a method for forming a display device provided with an MEMS light valve. Thus the sensitivity of the MEMS light valve is improved.

Abstract translation: 一种设置有MEMS光阀的显示装置，包括：基板，位于基板上的固定光栅，用于控制固定光栅的打开和关闭的MEMS光阀，MEMS光阀包括第一光阀和 第二个光阀; 通过控制第一光阀和第二光阀的移动来控制固定光栅的打开和关闭，并且第一光阀和第二光阀的移动方向相反。 还公开了一种形成具有MEMS光阀的显示装置的方法。 因此，提高了MEMS光阀的灵敏度。

公开(公告)号：US20140111842A1

公开(公告)日：2014-04-24

申请号：US14112211

申请日：2011-12-28

Applicant: Jianhong Mao ,  Deming Tang

Inventor： Jianhong Mao ,  Deming Tang

IPC: G02B26/02 ,  B81C1/00

CPC classification number: G02B26/02 ,  B81B3/0021 ,  B81C1/00246 ,  G02B26/0841 ,  G09G3/3466 ,  G09G2300/0426

Abstract: A display device provided with an MEMS light valve, comprising: a substrate, a fixed grating located on the substrate, an MEMS light valve for controlling the opening and closing of the fixed grating; a guide is disposed on the substrate. The MEMS light valve comprises: a movable grating, a movable electrode and fixed electrodes; the moveable grating is located in the guide and is electrically connected to the guide when contacting the guide; one end of the movable electrode is fixedly connected with the movable grating, and the other end is suspended; and the fixed electrodes and the movable electrode form a capacitor. When a potential difference forms between the fixed electrodes and the movable electrode, the movable electrode drives the movable grating to move in the guide, thereby opening and closing the fixed grating. Therefore, the MEMS light valve sensitivity can be enhanced and reliability is improved.

Abstract translation: 一种设置有MEMS光阀的显示装置，包括：基板，位于基板上的固定光栅，用于控制固定光栅的打开和关闭的MEMS光阀; 引导件设置在基板上。 MEMS光阀包括：可移动光栅，可动电极和固定电极; 可移动光栅位于引导件中，并在与引导件接触时电连接到引导件; 可动电极的一端与可动光栅固定连接，另一端悬挂; 并且固定电极和可动电极形成电容器。 当在固定电极和可动电极之间形成电位差时，可动电极驱动可动光栅在引导件中移动，从而打开和关闭固定光栅。 因此，可以提高MEMS光阀的灵敏度，提高可靠性。

公开(公告)号：US20140029077A1

公开(公告)日：2014-01-30

申请号：US14112165

申请日：2011-12-29

Applicant: Jianhong Mao ,  Deming Tang

Inventor： Jianhong Mao ,  Deming Tang

IPC: G02B26/02 ,  H01L29/66

CPC classification number: G02B26/02 ,  G02B26/04 ,  G02B26/0841 ,  G09G3/34 ,  G09G3/3433 ,  H01L29/66742 ,  H04M1/00

Abstract: A display device provided with an MEMS light valve, comprising: a substrate, a fixed optical grating located on the substrate, an MEMS light valve for controlling the opening and closing of the fixed optical grating, the MEMS light valve comprises a first light valve and a second light valve; the opening and closing of the fixed optical grating is controlled via controlling the movement of the first light valve and the second light valve, and the moving directions of the first light valve and the second light valve are opposite. Also disclosed is a method for forming a display device provided with an MEMS light valve. Thus the sensitivity of the MEMS light valve is improved.

Abstract translation: 一种设置有MEMS光阀的显示装置，包括：基板，位于基板上的固定光栅，用于控制固定光栅的打开和关闭的MEMS光阀，MEMS光阀包括第一光阀和 第二个光阀; 通过控制第一光阀和第二光阀的移动来控制固定光栅的打开和关闭，并且第一光阀和第二光阀的移动方向相反。 还公开了一种形成具有MEMS光阀的显示装置的方法。 因此，提高了MEMS光阀的灵敏度。

公开(公告)号：US20130309797A1

公开(公告)日：2013-11-21

申请号：US13882337

申请日：2011-05-19

Applicant: Jianhong Mao ,  Deming Tang

Inventor： Jianhong Mao ,  Deming Tang

IPC: B81C1/00

CPC classification number: B81C1/0015 ,  B81B2203/0118 ,  B81B2207/07 ,  B81C1/00293 ,  B81C2201/0109 ,  B81C2201/0125 ,  B81C2203/0145 ,  G01P15/0802 ,  G01P2015/0828 ,  H03H3/0072

Abstract: A method for manufacturing a micro-electro-mechanical system (MEMS) device is provided. The method comprises: providing a semiconductor substrate, the semiconductor substrate having a metal interconnection structure (100) formed therein; forming a first sacrificial layer (201) on the surface of the semiconductor substrate, the material of the first sacrificial layer is amorphous carbon; etching the first sacrificial layer to form a first recess (301); covering and forming a first dielectric layer (401) on the surface of the first sacrificial layer; thinning the first dielectric layer by a chemical mechanical polishing (CMP) process, until exposing the first sacrificial layer; forming a micromechanical structure layer (500) on the surface of the first sacrificial layer and exposing the first sacrificial layer, wherein a part of the micromechanical structure layer is connected to the first dielectric layer. The method avoids polishing the amorphous carbon, shortens the period of production, and improves the production efficiency

Abstract translation: 提供了一种用于制造微机电系统（MEMS）装置的方法。 该方法包括：提供半导体衬底，其中形成有金属互连结构（100）的半导体衬底; 在所述半导体衬底的表面上形成第一牺牲层（201），所述第一牺牲层的材料是无定形碳; 蚀刻第一牺牲层以形成第一凹部（301）; 在第一牺牲层的表面上覆盖并形成第一介电层（401）; 通过化学机械抛光（CMP）工艺使第一介电层变薄，直到暴露出第一牺牲层; 在所述第一牺牲层的表面上形成微机械结构层（500）并暴露所述第一牺牲层，其中所述微机械结构层的一部分连接到所述第一介电层。 该方法避免抛光无定形碳，缩短生产周期，提高生产效率

公开(公告)号：US08507385B2

公开(公告)日：2013-08-13

申请号：US12435835

申请日：2009-05-05

Applicant: Deming Tang

Inventor： Deming Tang

IPC: H01L21/311

CPC classification number: B81C1/0015

Abstract: A method for processing a thin film micro device on a substrate includes: 1) depositing a carbon film on the substrate as a sacrificial layer; 2) photolithographically defining a first predetermined pattern in the carbon film; 3) etching an unwanted portion of the carbon film outside the first predetermined pattern; 4) depositing a structural film including a single or multiple layers of solid state materials; 5) photolithographically defining a second predetermined pattern in the structural film; 6) etching the discarded portion of the structural film outside the second predetermined pattern; 7) selectively removing the remaining portion of the sacrificial carbon film by using a selective etch process gas in a reactor chamber, so that the overlapped portion of the remaining structural element with the first predetermined pattern is suspended above an underneath cavity above the substrate.

Abstract translation: 一种在衬底上处理薄膜微器件的方法包括：1）在衬底上沉积碳膜作为牺牲层; 2）光刻地限定碳膜中的第一预定图案; 3）在第一预定图案之外蚀刻碳膜的不想要的部分; 4）沉积包括单层或多层固态材料的结构膜; 5）光刻地限定结构膜中的第二预定图案; 6）在第二预定图案之外蚀刻结构膜的废弃部分; 7）通过在反应器室中使用选择性蚀刻工艺气体来选择性地去除牺牲碳膜的剩余部分，使得具有第一预定图案的剩余结构元件的重叠部分悬浮在衬底上方的下方空腔的上方。

公开(公告)号：US20130139594A1

公开(公告)日：2013-06-06

申请号：US13703568

申请日：2011-01-26

Applicant: Jianhong Mao ,  Fengqin Han ,  Deming Tang

Inventor： Jianhong Mao ,  Fengqin Han ,  Deming Tang

IPC: G01P15/08 ,  H01L29/84

CPC classification number: G01P15/08 ,  B81B3/0078 ,  B81B2201/0235 ,  B81B2201/0242 ,  G01C19/5733 ,  G01C25/00 ,  G01P15/0802 ,  G01P15/125 ,  G01P15/18 ,  G01P2015/0854 ,  H01L29/84

Abstract: An inertia MEMS sensor and a manufacturing method are provided. The inertia MEMS sensor includes a main body and a weight block relatively removable. The main body includes a first main body with a first surface and a second main body vertically connecting with the first surface. A first electrode parallel to the first surface is in the first main body. A second electrode perpendicular to the first surface is in the second main body. The weight block is suspended in a space defined by the first and second main bodies. The weight block includes a third electrode parallel to the first surface, a forth electrode is perpendicular to the first surface, and a weight layer. The third electrode connects with the forth electrode to form a U-shaped groove for accommodating the weight layer, thereby increasing the weight block weight, improving precision and reducing the cost.

Abstract translation: 提供惯性MEMS传感器和制造方法。 惯性MEMS传感器包括主体和相对可拆卸的重量块。 主体包括具有第一表面的第一主体和与第一表面垂直连接的第二主体。 平行于第一表面的第一电极在第一主体中。 垂直于第一表面的第二电极在第二主体中。 重物块悬挂在由第一和第二主体限定的空间中。 重量块包括平行于第一表面的第三电极，第四电极垂直于第一表面和重量层。 第三电极与第四电极连接以形成用于容纳重量层的U形槽，从而增加重量块重量，提高精度并降低成本。