公开(公告)号：US09758366B2

公开(公告)日：2017-09-12

申请号：US14969329

申请日：2015-12-15

Applicant: Bucknell C. Webb

Inventor： Bucknell C. Webb

IPC: H01L21/00 ,  H01L43/14 ,  H01L43/10 ,  B81C1/00 ,  B81B3/00

CPC classification number: B81B3/0056 ,  B81B2201/012 ,  B81B2201/014 ,  B81B2203/0118 ,  B81B2203/0315 ,  B81B2203/04 ,  B81B2207/07 ,  B81C1/0015 ,  B81C1/00619 ,  B81C2201/0112 ,  B81C2201/0132 ,  B81C2201/0178 ,  B81C2203/0109 ,  B81C2203/0136 ,  H01H59/0009 ,  H01H2001/0078

Abstract: Deep via technology is used to construct an integrated silicon cantilever and cavity oriented in a vertical plane which creates an electrostatically-switched MEMS switch in a small wafer area. Another embodiment is a small wafer area electrostatically-switched, vertical-cantilever MEMS switch wherein the switch cavity is etched within a volume defined by walls grown internally within a silicon substrate using through vias.

公开(公告)号：US20150076923A1

公开(公告)日：2015-03-19

申请号：US14027818

申请日：2013-09-16

Applicant: Michael Y. Frankel ,  John P. Mateosky

Inventor： Michael Y. Frankel ,  John P. Mateosky

IPC: B81B7/00 ,  H04Q11/00 ,  B81B7/04

CPC classification number: B81B7/008 ,  B81B7/04 ,  B81B2201/012 ,  H01H59/0009 ,  H04Q11/00 ,  H04Q11/0005 ,  H04Q2011/0039 ,  H04Q2213/1302 ,  H04Q2213/1304 ,  Y10T307/747

Abstract: A Microelectromechanical systems (MEMS)-based N×M cross-point switch, a MEMS-based system, and a method provide MEMS-based cross-point electrical switching for a Layer 0 flow-based switch. The N×M cross-point switch includes N inputs each at least 10 Gbps, M output each at least 10 Gbps, a plurality of Radio Frequency (RF) MEMS switches selectively interconnecting the N inputs to the M outputs; and control and addressing circuitry to selectively control the plurality of RF MEMS switches to switch each of the N inputs to a corresponding output of the M outputs. The systems and methods provide an electrical switching fabric for flow-based switching of wavelengths that can be part of a Reconfigurable Electrical Add/Drop Multiplexer (READM) with similar functionality as a ROADM in the electronic domain.

Abstract translation: 基于微机电系统（MEMS）的N×M交叉点开关，基于MEMS的系统和方法为基于层0的基于流的交换机提供基于MEMS的交叉点电气交换。 N×M交叉点开关包括每个至少10Gbps的N个输入，每个至少10Gbps的M个输出;多个射频（RF）MEMS开关，其将N个输入选择性地互连到M个输出; 以及控制和寻址电路，以选择性地控制多个RF MEMS开关以将N个输入中的每一个切换到M个输出的相应输出。 这些系统和方法提供了用于基于流的基于波长的交换的电交换结构，其可以是具有与电子域中的ROADM类似的功能的可重构电附加多路复用器（READM）的一部分。