公开(公告)号：US20140202260A1

公开(公告)日：2014-07-24

申请号：US14000673

申请日：2013-02-12

Applicant: Panasonic Corporation

Inventor： Kunihiko Nakamura

IPC: G01L1/16 ,  B81B3/00

CPC classification number: G01L1/162 ,  B81B3/0021 ,  G01L9/0019 ,  G01L21/20

Abstract: A pressure sensor including: a MEMS resonator; a sweeping unit which sweeps a frequency of an excitation signal in a predetermined direction of sweeping, over a predetermined frequency range including a resonance frequency f0 of a vibrator in the MEMS resonator, while outputting the excitation signal to the MEMS resonator; an integrating unit which inputs a vibrating-state information signal as a characteristic amount indicative of a vibrating state of the vibrator from the MEMS resonator while the sweeping unit sweeps the frequency, integrates a plurality of the vibrating-state information signals at different frequencies of the excitation signal, and outputs the integrated value; and a conversion unit adapted to determine a pressure acting on the MEMS resonator, based on the integrated value.

Abstract translation: 一种压力传感器，包括：MEMS谐振器; 扫描单元，其在包括MEMS谐振器中的振动器的共振频率f0的预定频率范围内沿预定扫描方向扫描激励信号的频率，同时将激励信号输出到MEMS谐振器; 积分单元，其在扫描单元扫描频率时输入作为表示来自MEMS谐振器的振动器的振动状态的特征量的振动状态信息信号，将多个振动状态信息信号以不同频率 励磁信号，并输出积分值; 以及转换单元，其适于基于所述积分值来确定作用在所述MEMS谐振器上的压力。

公开(公告)号：US08677830B2

公开(公告)日：2014-03-25

申请号：US13721697

申请日：2012-12-20

Applicant: Airbus Operations GmbH

Inventor： Thomas Becker ,  Martin Kluge ,  Michael Schneider ,  Ulrich Schmid ,  Achim Bittner

IPC: G01B5/00

CPC classification number: G01L1/20 ,  B64D2045/0085 ,  G01B7/16 ,  G01L1/162 ,  G01M5/0041 ,  G01M5/0066

Abstract: A device for acquiring mechanical loads on mechanically loaded bodies is provided. The device exhibits a resonance-capable micro-bridge structure, an alternating voltage source with a variable frequency, an impedance measuring device for acquiring the impedance of the micro-bridge structure and an electronic unit for receiving determined impedance values and changing the frequency of the alternating voltage source. By exciting the micro-bridge structure and measuring its impedance, a conclusion can be drawn as to the expansion-dependent resonance frequency, which in return makes it possible to determine the expansion, and hence the mechanical load. Such a device is sufficiently accurate, and largely independent of outside influences.

Abstract translation: 提供了用于获取机械负载体上的机械载荷的装置。 该装置具有可谐振的微桥结构，具有可变频率的交流电压源，用于获取微桥结构的阻抗的阻抗测量装置和用于接收确定的阻抗值并改变频率的电子单元 交流电压源。 通过激发微桥结构并测量其阻抗，可以得出关于膨胀相关共振频率的结论，作为回报，可以确定膨胀，并因此确定机械载荷。 这种装置足够精确，并且在很大程度上独立于外部影响。

公开(公告)号：US20140062258A1

公开(公告)日：2014-03-06

申请号：US14018438

申请日：2013-09-05

Applicant: NIHON DEMPA KOGYO CO., LTD.

Inventor： MITSUAKI KOYAMA ,  TAKERU MUTOH

IPC: G01L1/16

CPC classification number: G01L1/162 ,  G01L9/0022

Abstract: External force detection equipment according to the present disclosure includes a container, a supporting portion, one excitation electrode, another excitation electrode, an oscillation circuit, a movable electrode, a fixed electrode, a frequency information detecting unit, and a conductor. An oscillation loop is formed from the oscillation circuit to pass through the one excitation electrode, the other excitation electrode, the movable electrode, and the fixed electrode, and return to the oscillation circuit. The frequency information detected by the frequency information detecting unit is used for estimating an external force acting on the piezoelectric plate.

Abstract translation: 根据本公开的外力检测装置包括容器，支撑部，一个激励电极，另一个激励电极，振荡电路，可动电极，固定电极，频率信息检测单元和导体。 由振荡电路形成振荡回路，通过一个激励电极，另一个激励电极，可动电极和固定电极，返回振荡电路。 由频率信息检测单元检测的频率信息用于估计作用在压电板上的外力。

公开(公告)号：US20130255402A1

公开(公告)日：2013-10-03

申请号：US13853077

申请日：2013-03-29

Applicant: NIHON DEMPA KOGYO CO., LTD.

Inventor： MITSUAKI KOYAMA ,  TAKERU MUTOH

IPC: G01L1/16

CPC classification number: G01L1/162 ,  G01P5/02 ,  G01P15/097 ,  G01P15/18 ,  G01P2015/0871 ,  G01P2015/0874

Abstract: An external force detection sensor includes a piezoelectric piece, excitation electrodes, an oscillation circuit, a movable electrode, and a fixed electrode. The fixed electrode forms variable capacitance with variation in capacitance between the fixed electrode and the movable electrode that is caused by deflection of the piezoelectric piece. The piezoelectric piece, the excitation electrode, the movable electrode, and the fixed electrode constitute combinations of a first combination and a second combination. The first combination constitutes a first sensor unit by disposing a first piezoelectric piece on a first crystal plane of the crystalline body. The second combination constitutes a second sensor unit by disposing a second piezoelectric piece on a second crystal plane. The second crystal plane does not opposite to the first crystal plane of the crystalline body. A relative position of the second crystal plane with respect to the first crystal plane is obtained.

Abstract translation: 外力检测传感器包括压电片，激励电极，振荡电路，可动电极和固定电极。 固定电极形成可变电容，其由固定电极和可动电极之间的电容变化引起，该电容由压电片的偏转引起。 压电片，激励电极，可动电极和固定电极构成第一组合和第二组合的组合。 第一组合通过在晶体的第一晶面上设置第一压电片构成第一传感器单元。 第二组合通过在第二晶体平面上设置第二压电片构成第二传感器单元。 第二个晶面与晶体的第一个晶面不相反。 获得第二晶面相对于第一晶面的相对位置。

公开(公告)号：US20130068032A1

公开(公告)日：2013-03-21

申请号：US13580276

申请日：2011-03-14

Applicant: Jean-Pierre Nikolovski

Inventor： Jean-Pierre Nikolovski

IPC: G01L1/16

CPC classification number: G01L1/162 ,  H01L41/0825 ,  H01L41/1132 ,  H02N2/18 ,  H02N2/188 ,  Y02B10/30

Abstract: A detector including: a control device configured to provide an electrical control signal in response to a mechanical stress; an emission transducer configured to convert the electrical control signal into a detection signal; a supply piezoelectric element connected electrically to the control device and configured to provide, when mechanically excited, an electrical supply energy to the control device; and a device for mechanically exciting the supply piezoelectric element using the mechanical stress.

Abstract translation: 一种检测器，包括：控制装置，被配置为响应于机械应力提供电控制信号; 发射换能器，被配置为将所述电控信号转换成检测信号; 电源压电元件，其电连接到所述控制装置，并且被配置为在机械激励时向所述控制装置提供电能; 以及使用机械应力机械激励供给压电元件的装置。

公开(公告)号：US20120257473A1

公开(公告)日：2012-10-11

申请号：US13503044

申请日：2010-10-20

Applicant: Martin Rzehorska ,  Jerome Gruaz ,  Klaus-Christoph Harms ,  Rüdiger Teichmann

Inventor： Martin Rzehorska ,  Jerome Gruaz ,  Klaus-Christoph Harms ,  Rüdiger Teichmann

IPC: G01R31/28

CPC classification number: G01L9/0022 ,  G01L1/162 ,  G01L9/08 ,  G01L27/007 ,  G01R31/2829

Abstract: For operating an electromechanical transducer system with at least one piezoelectric transducer element, if necessary at least one identification element and an electronic control unit, on the one hand, the wanted signals of a certain utility operating range defined by the frequency band and time window thereof, assigned to at least one piezoelectric transducer element, as well as, on the other hand, inquiry signals and response signals for the functional testing of the transducer system are transmitted via a line system with only one electrical signal line.In order to thereby render possible a simple and reliable diagnosis method for the input circuit of cable break, with a corresponding increase in operational reliability, reduction of error search times and simplification of operation, at least one inquiry signal located outside the utility operating range of the transducer element is transmitted to the transducer system and from the resulting response signal at least one characteristic value is formed and at least one previously determined criterion is queried, wherein in the event of non-fulfillment of the criterion, an error message is generated.

Abstract translation: 为了操作具有至少一个压电换能器元件的机电换能器系统，如果需要，至少一个识别元件和电子控制单元，一方面由其频带和时间窗定义的某个公用事业操作范围的有用信号 ，分配给至少一个压电换能器元件，另一方面，用于换能器系统的功能测试的询问信号和响应信号通过仅具有一个电信号线的线路系统传输。 为了使电缆断裂的输入电路成为可能的简单可靠的诊断方法，随着操作可靠性的相应增加，错误搜索时间的减少和操作的简化，至少一个位于公用事业操作范围之外的询问信号 换能器元件被传送到换能器系统，并从所得到的响应信号中形成至少一个特征值，并且查询至少一个先前确定的标准，其中在不满足标准的情况下，产生错误消息。

公开(公告)号：US07958788B2

公开(公告)日：2011-06-14

申请号：US12064680

申请日：2006-08-25

Applicant: Michael William Ford

Inventor： Michael William Ford

IPC: G01L1/00

CPC classification number: G01L1/10 ,  G01L1/162 ,  G01P15/097

Abstract: A force sensor (10) is forced from a vibrating beam (11), an excitation piezoelectric device (12) to cause a vibration in the beam at its resonate frequency and a measurement piezoelectric device (12) to measure the frequencies being indication of the force applied to the beam (11). The excitation and measurement piezoelectric devices (12) are attached to the beam adjacent to each other at one end of the beam (11).

Abstract translation: 迫使力传感器（10）从振动梁（11），激励压电装置（12）以其谐振频率引起振动，测量压电装置（12）测量频率是指示 施加到梁（11）上的力。 励磁和测量压电装置（12）在梁（11）的一端附接到彼此相邻的梁。

公开(公告)号：US20060081071A1

公开(公告)日：2006-04-20

申请号：US11071856

申请日：2005-03-03

Applicant: Seth Kessler ,  Kristin Jugenheimer ,  Aaron Size ,  Christopher Dunn

Inventor： Seth Kessler ,  Kristin Jugenheimer ,  Aaron Size ,  Christopher Dunn

IPC: G01L5/04

CPC classification number: G01L1/162 ,  G01M5/0033 ,  G01M5/0066 ,  H01L41/1132

Abstract: A device for use in detecting structural damage comprises at least one piezoelectric wafer including a sensor, and an actuator in-plane with the sensor. At least one of the sensor and the actuator at least partially surrounds the other of the sensor and the actuator such that the piezoelectric wafer provides radial detection of structural occurrences in a material.

Abstract translation: 用于检测结构损坏的装置包括至少一个包括传感器的压电晶片和与传感器平行的致动器。 传感器和致动器中的至少一个至少部分地围绕传感器和致动器中的另一个，使得压电晶片提供材料中结构出现的径向检测。

公开(公告)号：US06763726B2

公开(公告)日：2004-07-20

申请号：US10329507

申请日：2002-12-27

Applicant: Muneharu Yamashita

Inventor： Muneharu Yamashita

IPC: G01L700

CPC classification number: G01P15/097 ,  G01L1/162 ,  G01P15/09

Abstract: A mechanical-force sensor includes two piezoelectric vibrators which are arranged such that stresses in mutually opposite directions are applied thereto by a mechanical force such as an acceleration. A current-voltage converter and signal-summing circuit converts current signals that flow through the two piezoelectric vibrators into voltage signals. A voltage-amplifier and amplitude limiter circuit amplifies a sum signal of the two voltage signals, and provides a positive feedback of a voltage signal that is in phase with the current signals, thereby causing an oscillating operation. A phase difference-voltage converter circuit generates a voltage signal that is proportional to the phase difference between the voltage signals yielded by the conversion. An amplifier and filter circuit DC-amplifies the voltage signal and removes unwanted frequency components therefrom.

Abstract translation: 机械力传感器包括两个压电振动器，它们被布置成使得通过诸如加速度的机械力将相互相反方向的应力施加到其上。 电流 - 电压转换器和信号求和电路将流经两个压电振动器的电流信号转换为电压信号。 电压放大器和幅度限制器电路放大两个电压信号的和信号，并提供与电流信号同相的电压信号的正反馈，从而引起振荡操作。 相位差电压转换器电路产生与转换产生的电压信号之间的相位差成比例的电压信号。 放大器和滤波器电路对电压信号进行直流放大，并从其中去除不需要的频率分量。

公开(公告)号：US06450032B1

公开(公告)日：2002-09-17

申请号：US09524752

申请日：2000-03-14

Applicant: William C. Albert

Inventor： William C. Albert

IPC: G01P1510

CPC classification number: G01P15/097 ,  G01L1/162

Abstract: A two-piece vibrating beam force sensor is created by utilizing one thickness of quartz for the outer mounting structure. This outer mounting structure in the case of a pressure sensor includes the mounting structure, the flexure beams and the lever arm and, in the case of an acceleration sensor, includes the mounting structure, the parallel flexure beams and the proof mass. An inner quartz structure made of a double-ended tuning fork vibrating beam assembly which provides an electrical output indicative of tension or compression applied to the beam assembly. The vibrating beam assembly is mounted on the outer quartz structure with epoxy resin or low melting temperature glass frit and suitable electrodes for stimulating the vibrating beams into vibration are provided. The resultant structure is an inexpensive, easily produced, yet highly accurate vibrating beam force sensor.

Abstract translation: 通过利用一个厚度的石英作为外部安装结构，创建了两片振动梁力传感器。 在压力传感器的情况下，该外部安装结构包括安装结构，弯曲梁和杠杆臂，并且在加速度传感器的情况下，包括安装结构，平行挠曲梁和检验质量块。 由双端音叉振动梁组件制成的内部石英结构，其提供指示施加到梁组件的张力或压缩的电输出。 振动梁组件安装在具有环氧树脂或低熔点玻璃料的外部石英结构上，并提供用于刺激振动梁进入振动的合适电极。 所得到的结构是廉价的，容易制造的，但是高精度的振动束力传感器。