Plasma treatment of processing gases
    11.
    发明授权
    Plasma treatment of processing gases 失效
    处理气体的等离子体处理

    公开(公告)号:US06685803B2

    公开(公告)日:2004-02-03

    申请号:US09888191

    申请日:2001-06-22

    Abstract: The present invention provides a DBD cell (500) including ring shaped electrodes (512 and 514) that are positioned side-by-side on a dielectric tube (516). An AC power supply (518) is provided such that the cell and the power supply form a DBD treatment device (540) for abatement of noxious gases for example FCs that can be discharged from semiconductor fabricating devices. Additionally, one or more sensors (822) and/or one or more gas addition ports (816) can be included in a DBD cell (800) of the present invention. Several DBD cells (1030, 1036 and 1042) of the present invention can be combined to form a DBD reactor (1010) of the present invention. AC power supplies (1012, 1014 and 1016) are utilized to energize the cells (1030, 1036 and 1042).

    Abstract translation: 本发明提供了一种包括环形电极(512和514)的DBD电池(500),它们并排设置在电介质管(516)上。 提供AC电源(518),使得电池和电源形成用于减少有害气体(例如可从半导体制造装置放电的FC)的DBD处理装置(540)。 另外,在本发明的DBD单元(800)中可以包括一个或多个传感器(822)和/或一个或多个气体添加端口(816)。 本发明的几个DBD细胞(1030,1036和1042)可以组合形成本发明的DBD反应器(1010)。 交流电源(1012,1014和1016)用于激励电池(1030,1036和1042)。

    Apparatus for generating ozone and anion
    12.
    发明授权
    Apparatus for generating ozone and anion 失效
    用于产生臭氧和阴离子的装置

    公开(公告)号:US06652816B2

    公开(公告)日:2003-11-25

    申请号:US09956072

    申请日:2001-09-20

    Inventor: Hyeon-Bae Hwang

    CPC classification number: C01B13/11 A61L9/015 A61L9/22 C01B2201/90 Y02W10/37

    Abstract: An apparatus for generating ozone and anion capable of respectively controlling an ozone generator and an anion generator is disclosed. The apparatus includes an ozone generator, an ozone generator-driving portion, a second power source supplying power to the ozone generator-driving portion, an anion generator, an anion generator-driving portion, a circulating fan circulating the generated anion, a first power source supplying power to the anion generator-driving portion, a selecting valve selectively discharging the anion generated from the anion generator to a water purifier 100 or an ozone container, an activated carbon filter removing smell of the ozone introduce through the selecting valve into the water purifier, a controlling portion controlling the anion generator-driving portion and the ozone generator-driving portion, an operating portion inputting an external instruction to the controlling portion, and a timer controlling a reserving function of the operating portion.

    Abstract translation: 公开了一种用于产生分别控制臭氧发生器和阴离子发生器的臭氧和阴离子的装置。 该装置包括臭氧发生器,臭氧发生器驱动部分,向臭氧发生器驱动部分供电的第二电源,阴离子发生器,阴离子发生器驱动部分,循环产生的阴离子的循环风扇,第一功率 源极向阴离子发生器驱动部分供电;选择阀选择性地将从阴离子发生器产生的阴离子排放到净水器100或臭氧容器;除去臭氧气体的活性炭过滤器通过选择阀引入水中 净化器,控制阴离子发生器驱动部分和臭氧发生器驱动部分的控制部分,向控制部分输入外部指令的操作部分和控制操作部分的保留功能的定时器。

    Method and apparatus for purifying a gas containing contaminants

    公开(公告)号:US06620385B2

    公开(公告)日:2003-09-16

    申请号:US09853762

    申请日:2001-05-14

    Applicant: Toshiaki Fujii

    Inventor: Toshiaki Fujii

    Abstract: A method and an apparatus for purifying a gas containing contaminants are disclosed. The gas is irradiated with an ultraviolet ray and/or a radiation ray so as to produce microparticles of the contaminants. The resultant microparticles of the contaminants are contacted with a photocatalyst. Then, the photocatalyst is irradiated with light so as to decompose the contaminants held in contact with the photocatalyst. Organic compounds, organosilicon compounds, basic gas and the like can be decomposed by the action of the photocatalyst. Even when these species are present at a low concentration, they can be concentrated locally by transforming into microparticles, and hence can be removed.

    Highly efficient compact capacitance coupled plasma reactor/generator and method
    15.
    发明授权
    Highly efficient compact capacitance coupled plasma reactor/generator and method 有权
    高效紧凑型电容耦合等离子体反应器/发电机和方法

    公开(公告)号:US06576202B1

    公开(公告)日:2003-06-10

    申请号:US09553696

    申请日:2000-04-21

    Abstract: A compact capacitively coupled electrode structure for use in a gas plasma reactor/generator is disclosed. The electrode structure comprises a parallel plate type anode and cathode spaced to define a gas flow path or volume therebetween. A plurality of electrically conductive fin elements are interposed in the space between the anode and cathode. The fin elements substantially increase the ratio of electrode surface area to volume, and subdivide the gas flow path or volume, thereby substantially increasing the efficiency of plasma gas processing that is possible over a broad range of operating parameters, without substantially increasing the spacing between the anode and cathode. Static or closed operation is also disclosed. Also disclosed is a multi-anode/multi-cathode electrode assembly embodying the basic electrode structure and a highly efficient and compact gas plasma reactor/generator employing the assembly.

    Abstract translation: 公开了一种用于气体等离子体反应器/发生器的紧凑的电容耦合电极结构。 电极结构包括平行板型阳极和阴极间隔开以限定其间的气体流动路径或体积。 多个导电鳍元件插入在阳极和阴极之间的空间中。 翅片元件大大增加了电极表面积与体积的比率,并且细分了气体流动路径或体积,从而基本上提高了在宽范围的操作参数中可能的等离子体气体处理的效率,而基本上不增加 阳极和阴极。 还公开了静态或闭合操作。 还公开了一种体现基本电极结构的多阳极/多阴极电极组件和采用该组件的高效紧凑的气体等离子体反应器/发生器。

    Method and device for forming a calcium phosphate film on a substrate

    公开(公告)号:US06569292B2

    公开(公告)日:2003-05-27

    申请号:US09825728

    申请日:2001-04-04

    CPC classification number: A61L27/32 A61K9/0009 C23C24/08 C23C26/00

    Abstract: A method of forming thin porous layers of calcium phosphate upon a silicon wafer surface using a high voltage spark. The outer layer of calcium phosphate is the inorganic component of bone and is anchored to the underlying substrate of silicon. The silicon is compatible with existing integrated circuit processing methods. The morphology and thickness of the calcium phosphate film can be controlled by the duration of the spark and the distance between the affected surface and the counterelectrode utilized. The resultant porous layer can be impregnated with medicinally useful substances which then can be subsequently released to the surroundings through an electrical actuator.

    Water treatment apparatus
    17.
    发明授权
    Water treatment apparatus 失效
    水处理设备

    公开(公告)号:US06555071B2

    公开(公告)日:2003-04-29

    申请号:US09926647

    申请日:2001-11-28

    CPC classification number: C02F1/48 C02F2209/44

    Abstract: An apparatus for generating an electromagnetic field in water. The apparatus comprises a set of spaced electrically conductive rings, which are respectively positively charged (rings 2, 6) and negatively charged (rings 3, 5). The rings are on a common axis between a negative plate (1) and a positive plate (7) and have precise spacings and dimensions. A central neutral ring (4) separates the pairs of rings. The electromagnetic field generated is such as to produce increases in the organic electrolytic functionality of living cellular material which is contacted with the water.

    Abstract translation: 一种用于在水中产生电磁场的装置。 该装置包括一组隔开的导电环,它们分别带正电(环2,6)和带负电(环3,5)。 环在负极板(1)和正极板(7)之间的共同轴线上,具有精确的间距和尺寸。 中心中心环(4)分离成对的环。 产生的电磁场使得与水接触的活细胞材料的有机电解功能的增加。

    Apparatus for the irradiation of a liquid

    公开(公告)号:US06540967B2

    公开(公告)日:2003-04-01

    申请号:US09759607

    申请日:2001-01-12

    CPC classification number: A61L2/10 A61L2/24 C02F1/325 C02F2201/3223

    Abstract: The invention relates to an apparatus for the irradiation, in particular UV irradiation, of a liquid. The irradiation takes place in this case under precisely defined and reproducible operating conditions. The apparatus has a rotating cylinder with an upper inflow, a lower outflow and an irradiation unit, the cylinder forming an angle of inclination (&agr;) with the horizontal. The lower outflow also has two connections for passing on the liquid, one connection being closable with the aid of a first control unit if the irradiation of the liquid deviates from the defined conditions.

    Ozone storage/recovery system
    19.
    发明授权
    Ozone storage/recovery system 失效
    臭氧储存/回收系统

    公开(公告)号:US06528024B2

    公开(公告)日:2003-03-04

    申请号:US09804755

    申请日:2001-03-13

    Abstract: An ozone storage/recovery method comprises a process for supplying an ozone-containing gas, generated by an ozone generator, to an ozone adsorbent tank filled with an ozone adsorbent contained at least one high-silica material selected from the group consisting of a high-silica pentasil zeolite, a dealumination faujasite and a mesoporous silicate, causing the adsorbent to adsorb ozone at a temperature of 0° C. or below, and storing the ozone, and a process for desorbing the ozone adsorbed by the adsorbent in the ozone adsorbent tank and recovering the ozone from the adsorbent tank, whereby ozone can be supplied as required.

    Abstract translation: 一种臭氧储存/回收方法包括将由臭氧发生器产生的含臭氧气体供给到填充有臭氧吸附剂的臭氧吸附剂的方法,所述臭氧吸附剂含有至少一种选自高分子量的高二氧化硅材料, 二氧化硅pentasil沸石,脱铝八面沸石和介孔硅酸盐,使吸附剂在0℃或更低的温度下吸附臭氧,并储存臭氧,以及解吸吸附剂在臭氧吸附剂罐中吸附的臭氧的方法 并从吸附剂罐中回收臭氧,从而根据需要提供臭氧。

    Ozone generating apparatus and corona generating apparatus
    20.
    发明授权
    Ozone generating apparatus and corona generating apparatus 失效
    臭氧发生装置和电晕发生装置

    公开(公告)号:US06528022B1

    公开(公告)日:2003-03-04

    申请号:US09714957

    申请日:2000-11-20

    Inventor: Yukio Kinoshita

    Abstract: One of the electrodes is covered an insulated material outer skin and is formed with a long wire shape, a band shape or a plate shape. Another of the electrodes is formed with a bare wire by suiting the various shapes and is formed along another insulated core wire and is arranged closely contact with a parallel shape, a right angle shape, a spiral shape, a net shape or a zigzag shape. Accordingly it is possible to lower the voltage. The both electrodes are separated electrically and mechanically using an insulated material and in an ozone generation portion the both electrodes are separated completely.

    Abstract translation: 电极中的一个被绝缘材料外皮覆盖,并且形成为长线状,带状或板状。 另一个电极通过适合各种形状的裸线形成,并且沿着另一绝缘芯线形成,并且被布置成与平行形状,直角形状,螺旋形状,网状或锯齿形紧密接触。 因此,可以降低电压。 两个电极使用绝缘材料进行电气和机械分离,并且在臭氧产生部分中,两个电极完全分离。

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