公开(公告)号：US3453475A

公开(公告)日：1969-07-01

申请号：US3453475D

申请日：1967-03-06

Applicant: EVGENY BORISOVICH ISSERLIN ,  JURY ALEXANDROVICH BYSTROV

Inventor： ISSERLIN EVGENY BORISOVICH ,  BYSTROV JURY ALEXANDROVICH

IPC: G01R15/20 ,  G01R19/00 ,  H01J21/18 ,  H01J1/50 ,  H01J3/32

CPC classification number: G01R19/0092 ,  G01R15/148 ,  H01J21/18

公开(公告)号：US12125678B2

公开(公告)日：2024-10-22

申请号：US16880221

申请日：2020-05-21

Applicant: SEMES CO., LTD.

Inventor： Ogsen Galstyan ,  Hyo Seong Seong ,  Byeung Geon Jeon ,  Jong Hwan An

IPC: H01J3/32 ,  H01J37/32 ,  H01L21/683 ,  H03H7/01 ,  H01L21/67

CPC classification number: H01J37/32174 ,  H01J37/32724 ,  H01L21/6833 ,  H03H7/0115 ,  H03H7/0153 ,  H01J2237/334 ,  H01L21/67069

Abstract: A substrate treating apparatus is disclosed. The substrate treating apparatus may include a chamber having a treating space defined therein, a support unit for supporting the substrate in the treating space, a heater power source for applying electric power to a heater in the support unit, a high-frequency power source for applying high-frequency power to a lower electrode in the support unit, and a filter unit installed at a line for connecting the heater power source with the heater to prevent high-frequency inflow. The filter unit may include a housing, one or more coils in the housing, and an adjustment member disposed between the housing and the coil. The adjustment member may be made of a non-magnetic material. The adjustment member may be spaced from the coil at a predefined spacing, and spaced apart from an inner wall of the housing or in contact with the housing inner wall.

公开(公告)号：US11515122B2

公开(公告)日：2022-11-29

申请号：US16357731

申请日：2019-03-19

Applicant: Tokyo Electron Limited

Inventor： Barton Lane

IPC: H01J3/32 ,  H01L21/67 ,  H01J37/32

Abstract: This disclosure relates to a plasma processing system for VHF plasma processing using a transmission antenna designed to enable a resonant VHF standing wave inside a plasma process chamber used to manufacture semiconductor devices. The system includes a transmission element capable of being electromagnetically coupled to incoming power lines connected to a power source. The transmission element, power transmission lines, and power source form a resonant circuit capable of enabling a VHF standing wave on the transmission element. The transmission element is folded back on itself to reduce the footprint of the antenna, such that the transmission element(s) can be located inside the plasma process chamber. The transmission antenna has three portions, with the first being electromagnetically coupled to the power transmission line, the second being coupled to plasma, and the third being a folded portion that reduces the transmission element's footprint.

公开(公告)号：US09550280B1

公开(公告)日：2017-01-24

申请号：US13431475

申请日：2012-03-27

Applicant: Robert Mishler ,  Robert Gainer ,  Laurens Nunnink

Inventor： Robert Mishler ,  Robert Gainer ,  Laurens Nunnink

IPC: B25B9/02 ,  B25B13/50 ,  H01J3/32 ,  G03B17/56

CPC classification number: B25B9/02 ,  B25B13/06 ,  B25B13/48 ,  B25B13/50 ,  B25B13/5008 ,  G03B17/56 ,  H01J3/32

Abstract: This invention provides a tool for tightening and loosening lenses with respect to camera bodies. The tool includes a body that defines a cavity that is slightly larger in diameter than the sidewalls of the lens adjacent the lens face. Within the cavity is a thin, high-friction, elastomeric material that resides between the edges of the lens when the cavity is pressurably engaged over the lens face. The material frictionally couples the tool body to the lens face and adjacent side walls, thereby allowing a predetermined level of torque to be applied to tighten or loosen the lens. The tool can be adapted for attachment to a handle, such as a torque wrench or can include a handle specifically adapted/contoured for grasping by a user's hand.

Abstract translation: 本发明提供了一种用于相对于照相机体收紧和松开透镜的工具。 该工具包括一个主体，该主体限定了一个直径略大于邻近透镜面的透镜侧壁的空腔。 在空腔内部是薄的，高摩擦的弹性体材料，当空腔被加压地接合在透镜面上时，它们位于透镜的边缘之间。 该材料将工具主体摩擦地连接到透镜面和相邻的侧壁上，从而允许施加预定水平的扭矩以拧紧或松开透镜。 工具可以适于附接到手柄，例如扭矩扳手，或者可以包括特别适于/轮廓以由用户抓住的手柄的手柄。

公开(公告)号：US08896191B2

公开(公告)日：2014-11-25

申请号：US13179596

申请日：2011-07-11

Applicant: Philip E. Moskowitz

Inventor： Philip E. Moskowitz

IPC: H01J1/02 ,  H01J7/24 ,  H01J61/52 ,  H01K1/58 ,  H01J1/50 ,  H01J3/20 ,  H01J3/32 ,  H01J23/10 ,  H01J29/76 ,  H01J65/04

CPC classification number: H01J65/048

Abstract: The present invention provides a low pressure metal halide fluorescent lamp. The metal halide fluorescent lamp may have an oblate spheroid cavity discharge vessel filled with an ionizable metal halide surrounding an exciter housing. An exciter within the exciter housing may drive the ionizable metal halide in an inductively coupled electrode-less manner. One or more embodiments may include one or more heat spreaders and/or thermal transfer pipes for transferring heat from the exciter to a surface of the oblate discharge vessel.

Abstract translation: 本发明提供一种低压金属卤化物荧光灯。 金属卤化物荧光灯可以具有填充有围绕励磁机壳体的可电离金属卤化物的扁圆球体放电容器。 激励器壳体内的激励器可以以电感耦合无电极的方式驱动可电离的金属卤化物。 一个或多个实施例可以包括一个或多个散热器和/或热传递管，用于将热量从激励器传递到扁平放电容器的表面。

公开(公告)号：US5132544A

公开(公告)日：1992-07-21

申请号：US575498

申请日：1990-08-29

Applicant: Hilton F. Glavish

Inventor： Hilton F. Glavish

IPC: C23C14/48 ,  G21K1/093 ,  H01F3/02 ,  H01F7/20 ,  H01J3/32 ,  H01J29/76 ,  H01J37/147 ,  H01J37/317 ,  H01L21/265

CPC classification number: G21K1/093 ,  H01F3/02 ,  H01F7/202 ,  H01J29/76 ,  H01J3/32 ,  H01J37/147 ,  H01J37/1475 ,  H01J37/3171

Abstract: System for irradiating the surface of a substrate with atomic or molecular ions by rapid scanning of a beam in two dimensions over the surface of the substrate. A scanning system is shown for deflecting the beam in two dimensions relative to a reference axis and a magnetic ion beam transport system following the scanning system is arranged to receive the beam from the scanning system over the range of two dimensional deflections of the scanning system and constructed to impose magnetic field conditions along the beam path of characteristics selected to reorient the two-dimensionally deflected beam to a direction having a predetermined desired relationship with the axis in the two dimensions at the desired instantaneous two dimensional displacement of the beam from the axis, to produce the desired scan of the beam over the substrate. One scanning system includes sequential first and second time-variable-field magnetic scanners, the first scanner having a magnetic gap of volume smaller than that of the second scanner and constructed to scan the beam more rapidly than the second scanner. In another system, the scanners are superposed. The magnetic ion beam transport system presently preferred is a system producing a sequence of three or more quadrupole fields, implemented by a sequence of quadrupoles. Alternate structures are disclosed. The system is capable of depositing atomic or molecular ions with a desired angular and positional uniformity over a wide range of perveance including perveance above 0.02/M[amu].sup.1/2 (mA//keV.sup.3/2) with a constant, adjustable spot size and small beam spread.

公开(公告)号：US3506870A

公开(公告)日：1970-04-14

申请号：US3506870D

申请日：1968-03-27

Applicant: MACHLETT LAB INC

Inventor： SINGER BARRY M ,  JOHNSON CARL T

IPC: H01J19/34 ,  H01J21/18 ,  H01J1/50 ,  H01J3/20 ,  H01J3/32 ,  H01J23/10 ,  H01J29/76

CPC classification number: H01J21/18 ,  H01J19/34 ,  H01J2893/0003

公开(公告)号：US11545328B2

公开(公告)日：2023-01-03

申请号：US17208047

申请日：2021-03-22

Applicant: SUMITOMO HEAVY INDUSTRIES, LTD.

Inventor： Hiromichi Sakai

IPC: H01J3/32 ,  G21K5/02

Abstract: An irradiation control device which controls irradiation of charged particles to a target that includes a substance that generates neutrons by being irradiated with a charged particle beam, includes: a deflector that deflects the charged particles; and a controller that controls the deflector such that a plurality of peaks of heat density formed by the beam are formed between a center of an irradiation surface of the target and an end portion of the irradiation surface by moving the beam of the charged particles on the irradiation surface.

公开(公告)号：US08575831B2

公开(公告)日：2013-11-05

申请号：US13147225

申请日：2010-03-10

Applicant: Walter P. Lapatovich ,  Scott J. Butler

Inventor： Walter P. Lapatovich ,  Scott J. Butler

IPC: H01J1/50 ,  H01J3/20 ,  H01J3/32 ,  H01J23/10 ,  H01J29/76

CPC classification number: H01J65/044

Abstract: There is described an EHID lamp that comprises a field applicator, a means for coupling RF power to the field applicator, and a discharge vessel; the discharge vessel being disposed within the field applicator and containing a discharge medium; the field applicator being comprised of a solid, transparent or translucent dielectric material and having an optical control surface and a conductive coating that substantially covers its external surfaces. By combining functions served by otherwise individual components, the EHID lamp of this invention has the potential for reducing parts count, improving RF coupling to the plasma, reducing shadowing, and improving reliability.

Abstract translation: 描述了一种EHID灯，其包括场施加器，用于将RF功率耦合到场施加器的装置和放电容器; 放电容器设置在场施加器内并容纳放电介质; 场施加器由固体，透明或半透明的介电材料组成，并具有基本上覆盖其外表面的光学控制表面和导电涂层。 通过组合由其他单独部件所提供的功能，本发明的EHID灯具有减少部件数量，改善与等离子体的RF耦合，减少遮蔽和提高可靠性的潜力。

公开(公告)号：US20120145917A1

公开(公告)日：2012-06-14

申请号：US12968221

申请日：2010-12-14

Applicant: ZHONGWEI CHEN ,  WEIMING REN ,  KENICHI KANAI ,  XUEDONG LIU

Inventor： ZHONGWEI CHEN ,  WEIMING REN ,  KENICHI KANAI ,  XUEDONG LIU

IPC: H01J3/32

CPC classification number: H01J37/141 ,  H01J37/28 ,  H01J2237/1035 ,  H01J2237/1415 ,  H01J2237/1534

Abstract: An apparatus basically uses a simple and compact multi-axis magnetic lens to focus each of a plurality of charged particle beams on sample surface at the same time. In each sub-lens module of the multi-axis magnetic lens, two magnetic rings are respectively inserted into upper and lower holes with non-magnetic radial gap. Each gap size is small enough to keep a sufficient magnetic coupling and large enough to get a sufficient axial symmetry of magnetic scale potential distribution in the space near to its optical axis. This method eliminates the non-axisymmetric transverse field in each sub-lens and the round lens field difference among all sub-lenses at the same time; both exist inherently in a conventional multi-axis magnetic lens. In the apparatus, some additional magnetic shielding measures such as magnetic shielding tubes, plates and house are used to eliminate the non-axisymmetric transverse field on the charged particle path from each charged particle source to the entrance of each sub-lens and from the exit of each sub-lens to the sample surface.