公开(公告)号：US20060145107A1

公开(公告)日：2006-07-06

申请号：US11363993

申请日：2006-03-01

Applicant: Akinori Masamura ,  Shigeru Osugi

Inventor： Akinori Masamura ,  Shigeru Osugi

IPC: F16K31/143

CPC classification number: F16K7/14 ,  F16K31/1221 ,  F16K41/12

Abstract: A chemical liquid valve is arranged such that a diaphragm coupled to a piston rod is brought into/out of contact with a valve seat provided between an inlet port and an outlet port. To achieve a chemical liquid valve providing stable sealing strength, the diaphragm includes an engagement part whose top end is formed in semispherical shape, which is inserted and engaged in a recess of the piston rod so that the engagement part of the diaphragm comes into point contact with an inner wall of the recess of the piston rod. Thus, the piston rod swingably holds the diaphragm.

Abstract translation: 化学液体阀被布置成使得联接到活塞杆的隔膜与设置在入口和出口之间的阀座接触/脱离接触。 为了实现提供稳定的密封强度的化学液体阀，隔膜包括一个接合部分，其顶端形成为半球形，该接合部分插入并接合在活塞杆的凹部中，使得隔膜的接合部分进入点接触 具有活塞杆的凹部的内壁。 因此，活塞杆可摆动地保持隔膜。

公开(公告)号：US20060145106A1

公开(公告)日：2006-07-06

申请号：US11378541

申请日：2006-03-20

Applicant: Hideyuki Takeda ,  Takahisa Toho ,  Yasushi Hirako

Inventor： Hideyuki Takeda ,  Takahisa Toho ,  Yasushi Hirako

IPC: F16K31/12

CPC classification number: F16K31/143 ,  F16K35/00

Abstract: A combined valve is constructed by integrating a manual valve operating as a safety mechanism and a pilot valve. When a handle of a knob of the manual valve is in a safety mechanism release position, a valve mechanism can be opened and closed depending on whether or not there is air supply to an operation port. When the handle is in the safety mechanism release position and the valve mechanism is even in a valve open state, the valve mechanism can be forcibly brought to a valve closed state by rotating the handle to a safety mechanism set position. Further, when the handle is in the safety mechanism set position, the valve mechanism can always be kept in the valve closed state irrespective of air supply to the operation port.

Abstract translation: 组合阀门通过集成一个作为安全机构操作的手动阀和先导阀构成。 当手动阀的手柄的手柄处于安全机构释放位置时，可以根据是否存在对操作口的空气供给来打开和关闭阀机构。 当手柄处于安全机构释放位置并且阀机构处于阀打开状态时，通过将手柄旋转到安全机构设定位置，阀机构可被强制地进入阀关闭状态。 此外，当手柄处于安全机构设定位置时，不管供给操作口的空气如何，阀机构始终可以保持在阀关闭状态。

公开(公告)号：US20020166985A1

公开(公告)日：2002-11-14

申请号：US10114243

申请日：2002-04-03

Applicant: CKD CORPORATION

Inventor： Katsunori Hirose ,  Takashi Yajima

IPC: F16K035/00

CPC classification number: F16K35/06 ,  F16K27/003 ,  Y10T137/7131

Abstract: A hand-operated valve with a locking mechanism is disclosed. This valve includes: a valve main body including a valve body, a valve seat, and a screw mechanism which is actuated to bring the valve body into contact/noncontact with the valve seat; a locking mechanism for preventing actuation of the screw mechanism during a time when the valve body is in contact with the valve seat to close the valve; an operating member connected to the valve main body, for actuating the screw mechanism for contact/noncontact operation of the valve body with respect to the valve seat to thereby close/open the valve; and a play providing mechanism interposed in a connection between the operating member and the valve main body, for preventing the actuation of the screw mechanism during a predetermined stage of operation of the operating member.

Abstract translation: 公开了一种具有锁定机构的手动阀。 该阀包括：阀主体，其包括阀体，阀座和螺杆机构，其被致动以使阀体与阀座接触/不接触; 用于在阀体与阀座接触以关闭阀的时间期间防止螺杆机构致动的锁定机构; 连接到阀主体的操作构件，用于致动螺杆机构，用于相对于阀座接触/非接触操作阀体，从而关闭/打开阀; 以及插入在操作构件和阀主体之间的连接中的游戏提供机构，用于在操作构件的预定操作阶段期间防止螺钉机构的致动。

公开(公告)号：US20010028049A1

公开(公告)日：2001-10-11

申请号：US09825950

申请日：2001-04-05

Applicant: CKD CORPORATION

Inventor： Mitsuru Mamyo

IPC: F16K031/143 ,  F16K031/163 ,  F16K031/363 ,  F16K031/383 ,  F16K001/00 ,  F16K015/00

CPC classification number: F16K31/1226 ,  F16K7/14 ,  F16K31/1221

Abstract: A high-temperature gas control valve for controlling a flow of a high-temperature gas, includes a valve seat made of metal, a diaphragm made of metal, which is brought into contact with or separated from the valve seat by operation of an actuator, thereby opening and closing the valve. At least one of the diaphragm and the valve seat is coated with an amorphous-carbon film.

Abstract translation: 用于控制高温气体流动的高温气体控制阀包括由金属制成的阀座，由金属制成的隔膜，其通过致动器的操作与阀座接触或分离， 从而打开和关闭阀门。 隔膜和阀座中的至少一个涂覆有非晶碳膜。

公开(公告)号：US6109303A

公开(公告)日：2000-08-29

申请号：US296671

申请日：1999-04-22

Applicant: Hiroshi Itafuji ,  Toshiyasu Inagaki

Inventor： Hiroshi Itafuji ,  Toshiyasu Inagaki

IPC: F16K27/00 ,  F16K51/00 ,  F16K11/20

CPC classification number: F16K27/003 ,  Y10T137/5109 ,  Y10T137/87885

Abstract: A process gas supply unit includes an upper module block provided with flow passages, a passage block provided with flow passages connected with the flow passages of the upper module block, and a base block provided with a connection passage connected with the flow passages of the passage block. The upper module block is attached with a component used for the supply of process gas and is down mounted on the passage block by bolts. The base block is mounted underneath the adjacent passage blocks. Accordingly, a sequence of the components are communicated through the flow passages of the upper module block and the passage block, and the connection passage of the base block.

Abstract translation: 一种处理气体供应单元，包括设置有流动通道的上部模块块，设置有与上部模块块的流动通道连接的流动通道的通道块，以及设置有与通道的流动通道连接的连接通道的基座 块。 上部模块块附有用于供应工艺气体的部件，并通过螺栓下降安装在通道块上。 基座安装在相邻通道块的下方。 因此，这些部件的顺序通过上部模块块和通道块的流动通道以及基础块的连接通道进行连通。

公开(公告)号：US5848188A

公开(公告)日：1998-12-08

申请号：US524625

申请日：1995-09-07

Applicant: Susumu Shibata ,  Katsunori Ishigure ,  Yukio Sato

Inventor： Susumu Shibata ,  Katsunori Ishigure ,  Yukio Sato

IPC: G01B11/02 ,  G01B11/25 ,  G06K9/46

CPC classification number: G01B11/2518 ,  G01B11/024

Abstract: Disclosed herein is a high-resolution shape measuring device having a scanning device capable of scanning an object to be measured at a high constant rotational speed. The shape measuring device includes a laser light source for generating flashing laser light, a pattern memory storing different flash patterns of the laser light, a polygon mirror as the scanning device, and a CCD camera for picking up an image formed on the object by the scanning of the laser light, wherein the shape of the object is computed according to image data obtained by the CCD camera. The shape measuring device further includes a motor for rotating the polygon mirror and a photodetector for generating a PD signal when the phase of rotation of the polygon mirror becomes a specific phase. The polygon mirror is rotated so as to scan the object plural times in a pickup time per frame of the CCD camera by using one of the flash patterns, and the flash pattern used is reset by the PD signal and is repeatedly used during the pickup time per frame. Further, the number of times of scanning for actually directing the laser light onto the object can be selected from the number of plural times of scanning performed in the pickup time per frame in order to adjust laser light quantity.

Abstract translation: 这里公开了一种高分辨率形状测量装置，其具有能够以高恒定旋转速度扫描被测量物体的扫描装置。 形状测量装置包括用于产生闪光激光的激光源，存储不同闪光图案的激光的图案存储器，作为扫描装置的多面镜，以及用于拾取由物体形成的图像的CCD照相机 扫描激光，其中根据由CCD照相机获得的图像数据计算物体的形状。 形状测量装置还包括用于旋转多面镜的马达和用于当多角镜的旋转相位变为特定相位时产生PD信号的光电检测器。 旋转多面镜，以便通过使用闪光灯图案之一在CCD照相机的每帧的拾取时间中多次扫描物体，并且所使用的闪光图案由PD信号复位，并且在拾取时间期间重复使用 每帧 此外，为了将激光实际引导到物体上的扫描次数可以从在每帧的拾取时间中执行的多次扫描的次数中选择，以便调节激光量。

公开(公告)号：US5401065A

公开(公告)日：1995-03-28

申请号：US57572

申请日：1993-05-06

Applicant: Katsuya Okumura ,  Kenichi Goshima

Inventor： Katsuya Okumura ,  Kenichi Goshima

IPC: F16L19/03 ,  F16L19/06 ,  F16L25/00

CPC classification number: F16L19/06 ,  Y10S285/906

Abstract: A fluid coupling provides a cap nut having an internal screw formed inside, a pipe having a mirror-finished surface formed at an end face and a groove in an outer periphery, a device for preventing rotation of the pipe together with the cap nut, in contact with the inner end face of the cap nut, a ferrule fitted in the groove formed in the outer periphery of the pipe, in contact with the device for preventing the rotation of the pipe together with the cap nut, the ferrule which transmits to the pipe a thrust of the cap nut in the pipe's longitudinal direction, a gasket fitted on an end part of the pipe, with the end face of the pipe in contact with the gasket through the entire circumference, and a body mirror-finished at the end face and provided with an external screw formed on the outer periphery, wherein the end face of the body is in contact with one side of the gasket the other side of which is in contact with the pipe, and the external screw of the body and the internal screw of the cap nut is tightened to a specific torque.

Abstract translation: 流体联轴器提供具有内部形成的内螺纹的盖螺母，具有在端面形成的镜面加工表面的管和外周的槽，用于防止管与盖螺母一起旋转的装置， 与盖螺母的内端面接触，配合在形成在管的外周的槽中的套圈与用于防止管与盖螺母一起旋转的装置接触，该套圈传递到 在管道的纵向方向管道盖螺母的推力，安装在管的端部上的垫圈，管的端面通过整个圆周与垫圈接触，并且在末端镜面加工 并且设置有形成在外周上的外螺纹，其中所述主体的端面与所述垫圈的另一侧与所述管接触的所述垫圈的一侧接触，并且所述主体的外螺纹和所述外螺纹 内螺丝 盖螺母拧紧到一个特定的扭矩。

公开(公告)号：US5394755A

公开(公告)日：1995-03-07

申请号：US128086

申请日：1993-09-29

Applicant: Yoshihisa Sudo ,  Minoru Ito

Inventor： Yoshihisa Sudo ,  Minoru Ito

IPC: G01F1/00 ,  F17D3/01 ,  G01F1/34 ,  G05D7/06

CPC classification number: G01F1/34

Abstract: In a flow quantity test system for a mass flow controller, a gas source for measurement is provided to supply gas for measurement. A cutoff valve for start of measurement is connected at its inlet port to the gas source for measurement and is connected at its outlet port to an inlet port of the mass flow controller. The cutoff valve for start of measurement is opened to flow the gas for measurement therethrough and closed to block the flow of the gas for measurement therethrough. A pressure gauge is provided to detect pressure of the gas for measurement appearing at the outlet port side of the cutoff valve for start of measurement. A microcomputer is provided to close the process gas cutoff valve and open the cutoff valve for start of measurement to change pressure detected by the pressure gauge. The microcomputer further closes the cutoff valve for start of measurement after pressure detected by the pressure gauge has reached predetermined pressure and measures lowering of pressure detected by the pressure gauge dependent on lapse of time after closing of the cutoff valve for start of measurement. Thereafter the microcomputer tests measuring precision of the mass flow controller in accordance with the measured lowering of the detected pressure.

Abstract translation: 在用于质量流量控制器的流量测试系统中，提供用于测量的气体源供应用于测量的气体。 用于开始测量的截止阀在其入口处连接到用于测量的气体源，并且在其出口处连接到质量流量控制器的入口。 打开测量开始的截止阀，使待测量的气体流过并关闭，以阻止用于测量的气体的流动。 提供压力计用于检测出现在截止阀的出口侧的用于测量的气体的压力，用于开始测量。 提供微型计算机以关闭处理气体截止阀并打开截止阀以开始测量，以改变由压力计检测到的压力。 微型计算机进一步关闭由压力表检测到的压力达到预定压力后的测量开始的截止阀，并且在关闭用于开始测量的截止阀之后根据压力计检测到的压力测量值降低。 此后，微型计算机根据检测到的压力的测量下降来测量质量流量控制器的测量精度。

公开(公告)号：US5293812A

公开(公告)日：1994-03-15

申请号：US972497

申请日：1993-02-05

Applicant: Daiju Maki ,  Kazutoshi Ito ,  Kenji Matsuo ,  Junji Mutsuura

Inventor： Daiju Maki ,  Kazutoshi Ito ,  Kenji Matsuo ,  Junji Mutsuura

IPC: F15B15/08 ,  F15B15/26 ,  F15B15/14

CPC classification number: F15B15/262 ,  F15B15/082 ,  F15B15/265

Abstract: Disclosed is a braking apparatus for a rod-less cylinder. A transfer member (3) arranged outside a cylinder body (1) is coupled to a piston (2) disposed movably within the cylinder body (1), and moves together with the piston (2). A brake rail (8) is arranged on the outer side surface of the cylinder body (1), extending in parallel to the moving direction of the piston (2). A braking member (16) faces the brake rail (8) in such a manner as to be engageable therewith, and disengageable therefrom, and is moved to a contact position where it engages the brake rail (8), and a release position where it disengages from the brake rail (8) by an operation member (17), to accomplish the braking and unbraking of the transfer member (3).

Abstract translation: PCT No.PCT / JP91 / 01484第 371日期：1993年2月5日 102（e）日期1993年2月5日PCT 1991年10月31日PCT PCT。 第WO92 / 08057号公报 日期为1992年5月14日。公开的是无杆缸的制动装置。 布置在筒体（1）的外侧的传送构件（3）与活塞（2）联接，活塞（2）可移动地设置在缸体（1）内，与活塞（2）一起移动。 在缸体（1）的外侧面上配置有与活塞（2）的移动方向平行地延伸的制动导轨（8）。 制动构件（16）以与其可接合的方式面对制动轨道（8）并与其脱离接合，并且移动到其接合制动轨道（8）的接触位置，并且其中的释放位置 通过操作构件（17）从制动器轨道（8）脱离，以实现传递构件（3）的制动和取消制动。

公开(公告)号：US5134962A

公开(公告)日：1992-08-04

申请号：US524378

申请日：1990-05-16

Applicant: Haruo Amada ,  Akihiro Kojima ,  Hiroshi Kagohashi ,  Atsuyuki Sakai ,  Katsumasa Shimura ,  Hisamitsu Maekawa

Inventor： Haruo Amada ,  Akihiro Kojima ,  Hiroshi Kagohashi ,  Atsuyuki Sakai ,  Katsumasa Shimura ,  Hisamitsu Maekawa

IPC: G03F7/16 ,  B05C5/00 ,  B05C11/08 ,  B05C11/10 ,  G11B5/842 ,  H01L21/00 ,  H01L21/027 ,  H01L21/30

CPC classification number: H01L21/6715 ,  B05C11/08

Abstract: The present invention relates to a spin coating apparatus for feeding a clean liquid at a fixed rate. In any of the feeding apparatus in the prior art, no constituent other than a filter has the function of eliminating foreign matter, and the operation of feeding a liquid under precise control is not attained. This results in the problem of the mixing of the foreign matter (and air bubbles) in the feed liquid, and the problem of nonuniformity in a feed speed as well as a feed amount. As expedients for solving these problems, the present invention provides the functions of automatically sensing and excluding factors for the appearances of the foreign matters, and devices for automatically and precisely controlling feed control elements such as a pump, thereby feeding the clean liquid in a constant amount and at a constant speed.

Abstract translation: 本发明涉及一种用于以固定速率供给清洁液体的旋涂装置。 在现有技术中的任何一个进料装置中，除了过滤器之外的其它成分都不具有消除异物的功能，并且不能实现在精确控制下供给液体的操作。 这导致进料液体中异物（和气泡）的混合以及进料速度不均匀以及进料量的问题。 作为解决这些问题的方法，本发明提供了自动检测和排除外来物质的因素的功能，以及用于自动和精确地控制诸如泵的进料控制元件的装置，由此将清洁液体进料恒定 数量和恒定速度。