公开(公告)号：US06661557B2

公开(公告)日：2003-12-09

申请号：US10302222

申请日：2002-11-22

Applicant: Tsuyoshi Kouchi ,  Takashi Mitsuma

Inventor： Tsuyoshi Kouchi ,  Takashi Mitsuma

IPC: G02F103

CPC classification number: G02F1/025 ,  G02F2201/066 ,  G02F2201/07

Abstract: There is provided an optical modulator in which positive holes produced in the valence band are not piled up, the electrostatic capacity can be decreased, the frequency response characteristic is improved, and which is capable of operating at a high speed. In an optical modulator comprising: an n-type clad layer; a stripe-like modulation layer elongated in the direction of light propagation and formed on the top surface of the n-type clad layer; a buffer layer formed on the top surface of the modulation layer; and a p-type clad layer formed on the top surface of the buffer layer, the buffer layer has its composition the band gap energy of which is higher by an energy due to a p-type acceptor level than that of the modulation layer, thereby to remove a difference in band gap energy between the modulation layer and the buffer layer.

公开(公告)号：US06654534B1

公开(公告)日：2003-11-25

申请号：US09709646

申请日：2000-11-13

Applicant: Kelvin Prosyk ,  Ronald S Moore ,  Robert Foster ,  Marcel Boudreau

Inventor： Kelvin Prosyk ,  Ronald S Moore ,  Robert Foster ,  Marcel Boudreau

IPC: G02B610

CPC classification number: G02F1/025 ,  G02F2201/07 ,  G02F2203/21

Abstract: An optical device, such as an electro-absorption modulator, has a waveguide formed onto a base. Electrodes adjacent the waveguide are used to selectively apply an electric field to the device in order to control the passage of light through the device. To prevent overheating of the device in a region near the point of optical entry, the electrode, which acts as a thermal conduit to dissipate heat from the waveguide is extended over the region. To prevent undesirable electrical contact between the electrode and the region, the normally electrically conducting contact layer between the electrode and the waveguide is removed in that region and replaced by an isolation dielectric.

Abstract translation: 诸如电吸收调制器的光学器件具有形成在基底上的波导。 与波导相邻的电极用于选择性地将电场施加到装置，以便控制光通过装置的通过。 为了防止在光入口附近的区域中的器件的过热，用作热导管以散发来自波导的热的电极在该区域上延伸。 为了防止电极和区域之间不期望的电接触，在该区域中去除电极和波导之间的正常导电接触层，并由隔离电介质代替。

公开(公告)号：US20030156474A1

公开(公告)日：2003-08-21

申请号：US10302052

申请日：2002-11-22

Applicant: JDS Uniphase Corporation

Inventor： Gary Gibson

IPC: G11C007/00

CPC classification number: G02F1/225 ,  G02B2006/12159 ,  G02F2201/07 ,  G02F2203/21

Abstract: The present invention relates to optical devices and, more particularly, to optical waveguide devices in which characteristics of a light signal are modulated or changed in accordance with an applied electric field. Conventionally, in such devices, such as, for example, a Mach-Zehnder modulator, DC drift problems, as are well known within the art, must be surmounted if the optical device is to meet minimum performance criteria. Suitably the present invention provides a layer of an oxide of silicon, preferably substantially, free of metallic impurities, where the ratio of oxygen to silicon is greater than 2 and is preferably greater than or equal to 2.2.

Abstract translation: 本发明涉及光学装置，更具体地说，涉及根据所施加的电场调制或改变光信号的特性的光波导装置。 通常，在这种诸如马赫 - 策德尔调制器的装置中，如果光学装置要达到最低性能标准，则必须克服本技术领域众所周知的直流漂移问题。 本发明适当地提供一层硅，优选基本上不含金属杂质，其中氧与硅的比例大于2，优选大于或等于2.2。

公开(公告)号：US20030133637A1

公开(公告)日：2003-07-17

申请号：US10050244

申请日：2002-01-16

Inventor： Zhenan Bao ,  Christopher A. Bower ,  Sungho Jin ,  Kevin Cyrus Robinson ,  Yiu-Man Wong ,  Wei Zhu

IPC: G02B006/10

CPC classification number: G02F1/0356 ,  G02B6/132 ,  G02B2006/1204 ,  G02B2006/12169 ,  G02F2201/07 ,  G02F2203/21

Abstract: An electrooptic device and method for making the same, including one or more of substrate, a buffer layer, a charge dissipation layer, and electrodes. An Fnull containing active trapping layer is deposited at the substrate/buffer interface, within the buffer layer, and/or on top of the buffer layer. The active Fnull ions in the Fnull containing active trapping layer react with positive ions, such as Linull from the substrate to form stable compounds such as LiF. Porous material such as carbon nanotubes may be used in place of or in addition to the Fnull containing active trapping layer. The reduced number of Linull ions reduces the DC drift of the associated electrooptic device. The profile of the implanted ions may be adjusted to control and/or optimize the properties of the electrooptic device. Fluorine is particularly advantageous because it also lowers the dielectric constant thereby facilitating higher frequency operation.

Abstract translation: 一种电光装置及其制造方法，包括基板，缓冲层，电荷耗散层和电极中的一个或多个。 在衬底/缓冲液界面，缓冲层内和/或在缓冲层顶部沉积含F活性俘获层。 含F活性捕获层中的活性F离子与来自底物的正离子如Li +反应，形成稳定的化合物如LiF。 可以使用诸如碳纳米管的多孔材料代替含氟活性捕获层或除了含F的活性捕获层。 减少的Li +离子数量减少了相关电光器件的直流漂移。 可以调整注入离子的轮廓以控制和/或优化电光装置的性质。 氟是特别有利的，因为它也降低了介电常数，从而便于更高频率的操作。

公开(公告)号：US20030031400A1

公开(公告)日：2003-02-13

申请号：US10185903

申请日：2002-06-27

Inventor： Valerio Pruneri

IPC: G02B006/12

CPC classification number: G02F1/035 ,  G02F1/2255 ,  G02F2201/07 ,  G02F2203/21

Abstract: An integrated optical waveguide device, for example an optical phase modulator or an optical intensity modulator or a frequency converter, comprises a substrate (10) of a ferroelectric material having a first (11) and a second (12) surfaces perpendicular to a direction of spontaneous polarization of the ferroelectric material. At least the second surface is substantially inactive with respect to an operation of applying an externally generated electric field to the substrate. The device has at least one waveguide (18,19) integrated in the substrate in correspondence of the first surface thereof. At least a longitudinal waveguide section of the at least one waveguide is formed in a respective first substrate region (14,15;50) having a first orientation of spontaneous polarization. At least one second substrate region (15,14;51,52) is provided on the first surface adjacent to the first substrate region transversally to the longitudinal waveguide section. The second substrate regions has a second orientation of spontaneous polarization, opposite to the first orientation, so as to develop an electric field component tangential to the first surface in consequence to polarization or free charges generated by one or more of the pyroelectric, piezoelectric and photovoltaic effects. A material layer (117) is associated with the first surface and contains mobile charges so that, under the action of the tangential electric field component, a displacement of the mobile charges is induced which substantially compensates the polarization or free charges in the substrate to significantly reduce an electric field component perpendicular to the first surface at least where the longitudinal waveguide section is integrated.

Abstract translation: 集成光波导器件，例如光学相位调制器或光强度调制器或变频器，包括铁电材料的衬底（10），其具有与第一（11）和第二（12）表面垂直的方向 铁电材料的自发极化。 至少第二表面相对于将外部产生的电场施加到衬底的操作基本上是无效的。 该装置具有与其第一表面相对应的集成在基板中的至少一个波导（18,19）。 在具有自发极化的第一取向的相应的第一衬底区域（14,15; 50）中形成至少一个波导的至少一个纵向波导部分。 至少一个第二基板区域（15,14; 51,52）设置在横向于纵向波导部分的与第一基板区域相邻的第一表面上。 第二衬底区域具有与第一取向相反的自发极化的第二取向，从而由于由一个或多个热电，压电和光​​电产生的极化或自由电荷而产生与第一表面相切的电场分量 效果。 材料层（117）与第一表面相关联并且包含移动电荷，使得在切向电场分量的作用下，引起移动电荷的位移，其基本上补偿了衬底中的极化或自由电荷以显着地 至少在纵向波导部分整合的情况下减小垂直于第一表面的电场分量。

公开(公告)号：US06198855B1

公开(公告)日：2001-03-06

申请号：US09400130

申请日：1999-09-21

Applicant: Peter Hallemeier ,  Alfredo Yi-Yan ,  Chris Hussell ,  Karl Kissa ,  Jack Lin

Inventor： Peter Hallemeier ,  Alfredo Yi-Yan ,  Chris Hussell ,  Karl Kissa ,  Jack Lin

IPC: G02B600

CPC classification number: G02F1/035 ,  G02F1/0356 ,  G02F1/2255 ,  G02F2201/07 ,  G02F2203/21

Abstract: An electro-optic device such as a Mach-Zehnder interferometer that includes a lithium niobate substrate having an optical waveguide that is formed in an upper surface of the substrate is described. The device includes a polymer buffer layer formed on the upper surface of the substrate. The polymer may be non-conductive or conductive. An electrode is formed on an upper surface of the buffer layer and is positioned to receive an RF signal that induces an electrical field in the optical waveguide. A conductive charge bleed-off layer may be formed between the buffer layer and the electrode in order to bleed-off pyroelectric charge. A semiconductor charge bleed-off layer may be formed between the substrate and the buffer layer.

Abstract translation: 描述了诸如马赫 - 策德尔干涉仪的电光装置，其包括具有形成在基板的上表面中的光波导的铌酸锂基板。 该器件包括形成在衬底的上表面上的聚合物缓冲层。 聚合物可以是非导电或导电的。 电极形成在缓冲层的上表面上并且被定位成接收在光波导中引起电场的RF信号。 可以在缓冲层和电极之间形成导电电荷泄漏层，以便排出热释电。 可以在衬底和缓冲层之间形成半导体电荷放出层。

公开(公告)号：US6156483A

公开(公告)日：2000-12-05

申请号：US175285

申请日：1998-10-20

Applicant: Michael Anthony McCoy ,  Ian Croston

Inventor： Michael Anthony McCoy ,  Ian Croston

IPC: G02F1/035 ,  G03C5/00 ,  H01L41/04

CPC classification number: G02F1/035 ,  G02F2201/07

Abstract: In a method of manufacturing an integrated optical device using a wafer of lithium niobate, an optical waveguide is formed in the wafer by diffusing from a surface thereof a metal such as titanium, nickel or zinc and which changes the refractive index of the lithium niobate. A chemical vapor deposition process is used to deposit on the wafer surface a silicon dioxide buffer layer, the process being operated with the temperature of the wafer substantially in the region of about 170.degree. C. to 225.degree. C. A metallic electrode array is deposited on the silicon dioxide buffer layer, and then the wafer is mounted in a package, with suitable optic and electric connections being made thereto. The package is hermetically sealed to protect the connected wafer from the environment.

Abstract translation: 在使用铌酸锂晶片的集成光学器件的制造方法中，通过从其表面扩散诸如钛，镍或锌的金属并且改变铌酸锂的折射率而在晶片中形成光波导。 使用化学气相沉积工艺在晶片表面上沉积二氧化硅缓冲层，该工艺在晶片的温度基本上在约170℃至225℃的范围内操作。沉积金属电极阵列 在二氧化硅缓冲层上，然后将晶片安装在封装中，其上形成适当的光学和电连接。 封装密​​封，以保护连接的晶片免受环境影响。

公开(公告)号：US5680497A

公开(公告)日：1997-10-21

申请号：US350894

申请日：1994-12-07

Applicant: Minoru Seino ,  Tadao Nakazawa ,  Takashi Yamane ,  Yoshinobu Kubota ,  Masaharu Doi ,  Kunio Sugeta ,  Teruo Kurahashi

Inventor： Minoru Seino ,  Tadao Nakazawa ,  Takashi Yamane ,  Yoshinobu Kubota ,  Masaharu Doi ,  Kunio Sugeta ,  Teruo Kurahashi

IPC: G02B6/12 ,  G02F1/01 ,  G02F1/035 ,  G02B6/10

CPC classification number: G02F1/035 ,  G02F1/0123 ,  G02F2201/07 ,  G02F2203/21

Abstract: This invention aims at providing an optical waveguide device capable of stably operating for an extended period of time. The optical waveguide device comprises an optical waveguide path formed inside a surface of an electro-optical substrate, a buffer layer formed on the optical waveguide path, and a driving electrode for impressing an electric field so as to change a refractive index of the optical waveguide path, wherein the buffer layer is made of a transparent dielectric or insulator of a mixture between silicon dioxide and an oxide of at least one element selected from the group consisting of the metal elements of the Groups III to VIII, Ib and IIb of the Periodic Table and semiconductor elements other than silicon, or a transparent dielectric or insulator of an oxide between silicon and at least one of the metal elements and semiconductor elements described above.

Abstract translation: 本发明的目的在于提供能够长时间稳定运行的光波导装置。 光波导装置包括形成在电光基板的表面内的光波导路径，形成在光波导路径上的缓冲层，以及用于施加电场以驱动光波导的折射率的驱动电极 路径，其中所述缓冲层由二氧化硅和至少一种元素的氧化物之间的混合物的透明电介质或绝缘体制成，所述至少一种元素选自元素周期表III-VIII，Ib和IIb族的金属元素 除了硅之外的表格和半导体元件，或硅与至少一个上述金属元件和半导体元件之间的氧化物的透明电介质或绝缘体。

公开(公告)号：US5153930A

公开(公告)日：1992-10-06

申请号：US460759

申请日：1990-01-04

Applicant: Richard E. DuPuy ,  Harold R. Gilles ,  Edwin Boyd Osgood

Inventor： Richard E. DuPuy ,  Harold R. Gilles ,  Edwin Boyd Osgood

IPC: G02F1/035 ,  G02F1/225 ,  G02F1/313

CPC classification number: G02F1/035 ,  G02F1/225 ,  G02F1/3132 ,  G02F2201/066 ,  G02F2201/07 ,  G02F2202/20 ,  G02F2203/21

Abstract: An article is manufactured from a substrate of a material that exhibits the pyroelectric effect by depositing a film containing a selected material in a first state over a front surface of the substrate. At least one electrode is formed on the film, portions of the film being exposed around the electrode. The exposed portions of the film are subjected to a treatment such that they are converted from the first state to a second state, in which the material has a resistivity that lies within a desired range of values.

Abstract translation: 通过在衬底的前表面上沉积包含选定材料的膜在第一状态下，通过从表现出热电效应的材料的衬底制造制品。 在膜上形成至少一个电极，膜的部分暴露在电极周围。 对膜的暴露部分进行处理，使得它们从第一状态转变为第二状态，其中材料具有位于期望值范围内的电阻率。

公开(公告)号：US4775208A

公开(公告)日：1988-10-04

申请号：US906931

申请日：1986-09-15

Applicant: William C. Robinson ,  Norman A. Sanford

Inventor： William C. Robinson ,  Norman A. Sanford

IPC: G02B6/12 ,  G02F1/01 ,  G02F1/035 ,  G02B6/10 ,  G02B5/30

CPC classification number: G02F1/035 ,  G02F2201/066 ,  G02F2201/07

Abstract: A planar waveguide device including metallic electrodes has a buffer layer of reduced ordinary index of refraction formed in a substrate between its waveguide and electrodes. The device is preferably formed by first fabricating the waveguide in an x-or y-cut substrate of crystalline material, subsequently overcoating the substrate, including the waveguide, with a layer of magnesium, oxidizing the magnesium at temperature to form the buffer layer and then laying the electrodes over the buffer layer. Alternatively, the buffer layer may be formed by a proton exchange process.

Abstract translation: 包括金属电极的平面波导器件具有在其波导和电极之间的衬底中形成的具有降低的普通折射率的缓冲层。 优选地，该器件通过首先在晶体材料的x或y切割衬底中制造波导来形成，随后用包含该镁的镁层将衬底（包括波导）外涂，在温度下氧化镁以形成缓冲层，然后 将电极放置在缓冲层上。 或者，缓冲层可以通过质子交换工艺形成。