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公开(公告)号:US11222957B2
公开(公告)日:2022-01-11
申请号:US16907986
申请日:2020-06-22
Applicant: STMicroelectronics (Crolles 2) SAS
Inventor: Magali Gregoire
IPC: H01L29/45 , H01L21/321 , H01L21/285 , H01L21/3213 , H01L29/06 , H01L29/08 , H01L29/161
Abstract: A NiPt layer with a Pt atom concentration equal to 15% plus or minus 1% is deposited on a semiconductor region (which may, for example, be a source/drain region of a MOS transistor). An anneal is then performed at a temperature of 260° C. plus or minus 20° C., for a duration in the range from 20 to 60 seconds, in order to produce, from the Nickle-Platinum (NiPt) layer and the semiconductor material of said semiconductor region, an intermetallic layer. Advantageously, the intermetallic layer possesses a structure of heteroepitaxy with the semiconductor material, and includes free Pt atoms.
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公开(公告)号:US11171034B2
公开(公告)日:2021-11-09
申请号:US16707614
申请日:2019-12-09
Applicant: STMicroelectronics (Crolles 2) SAS
Inventor: Pascal Gouraud , Delia Ristoiu
IPC: H01L21/00 , H01L21/762 , H01L29/06
Abstract: A substrate includes a first solid semiconductor region and a second semiconductor on insulator region. First and second cavities are simultaneously formed in the first and second regions, respectively, of the substrate using etching processes in two steps which form an upper portion and a lower portion of each cavity. The first and second cavities will each have a step at a level of an upper surface of the insulator of the second semiconductor on insulator region. A further oxidation of the first cavity produces a rounded or cut-off area for the upper portion.
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公开(公告)号:US11165220B2
公开(公告)日:2021-11-02
申请号:US16757308
申请日:2017-10-19
Applicant: CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE , STMicroelectronics (Crolles 2) SAS , Universite Paris-Saclay
Inventor: Anas Elbaz , Moustafa El Kurdi , Abdelhanin Aassime , Philippe Boucaud , Frederic Boeuf
Abstract: A structure includes a semiconductor support, a semiconductor region overlying the semiconductor support, a silicon nitride layer surrounding and straining the semiconductor region, and a metal foot separating the silicon nitride layer from the semiconductor support. The semiconductor region includes germanium. The semiconductor region can be a resonator of a laser or a waveguide.
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公开(公告)号:US11131808B2
公开(公告)日:2021-09-28
申请号:US16549843
申请日:2019-08-23
Inventor: Charles Baudot , Sylvain Guerber , Patrick Le Maitre
Abstract: In one embodiment, a waveguide includes an upstream portion, a downstream portion, and an intermediate portion between the upstream portion and the downstream portion. A first band is disposed on an insulating layer, the first band oriented along a first direction. A first lateral strip and a second lateral strip are disposed on either side of the first band, the first lateral strip and the second lateral strip being thinner or interrupted along the intermediate portion.
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公开(公告)号:US20210280779A1
公开(公告)日:2021-09-09
申请号:US17328917
申请日:2021-05-24
Inventor: Philippe BOIVIN , Simon JEANNOT
Abstract: A memory cell includes a selection transistor having a control gate and a first conduction terminal connected to a variable-resistance element. The memory cell is formed in a wafer comprising a semiconductor substrate covered with a first insulating layer, the insulating layer being covered with an active layer made of a semiconductor. The gate is formed on the active layer and has a lateral flank covered with a second insulating layer. The variable-resistance element includes a first layer covering a lateral flank of the active layer in a trench formed through the active layer along the lateral flank of the gate and reaching the first insulating layer, and a second layer made of a variable-resistance material.
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266.
公开(公告)号:US20210272915A1
公开(公告)日:2021-09-02
申请号:US17325999
申请日:2021-05-20
Inventor: Eric SABOURET , Krysten ROCHEREAU , Olivier HINSINGER , Flore PERSIN-CRELEROT
IPC: H01L23/00 , H05K3/34 , H01L23/498 , H01L21/66
Abstract: An integrated circuit includes a solder pad which includes, in a superposition of metallization levels, an underlying structure formed by a network of first regular metal tracks that are arranged for reinforcing the mechanical strength of the underlying structure and electrically connecting between an upper metallization level and a lower metallization level of the underlying structure. The underlying structure further includes a detection electrical path formed by second metal tracks passing between the first metal tracks in the metallization levels, the detection electrical path having an input terminal and an output terminal. Electrical sensing of the detection electrical path is made to supply a measurement which is indicative of the presence of cracks in the underlying structure.
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267.
公开(公告)号:US11075177B2
公开(公告)日:2021-07-27
申请号:US16278313
申请日:2019-02-18
Applicant: STMicroelectronics (Crolles 2) SAS
Inventor: Didier Dutartre
IPC: H01L23/60 , H01L23/66 , H01L21/762 , H01L29/06
Abstract: An integrated circuit includes a substrate having at least one first domain and at least one second domain that is different from the at least one first domain. A trap-rich region is provided in the substrate at the locations of the at least one second domain only. Locations of the at least one first domain do not include the trap-rich region.
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公开(公告)号:US20210225757A1
公开(公告)日:2021-07-22
申请号:US17226324
申请日:2021-04-09
Inventor: Abderrezak MARZAKI , Arnaud REGNIER , Stephan NIEL
IPC: H01L23/522 , H01L49/02 , H01L27/11524
Abstract: First and second wells are formed in a semiconductor substrate. First and second trenches in the first second wells, respectively, each extend vertically and include a central conductor insulated by a first insulating layer. A second insulating layer is formed on a top surface of the semiconductor substrate. The second insulating layer is selectively thinned over the second trench. A polysilicon layer is deposited on the second insulating layer and then lithographically patterned to form: a first polysilicon portion over the first well that is electrically connected to the central conductor of the first trench to form a first capacitor plate, a second capacitor plate formed by the first well; and a second polysilicon portion over the second well forming a floating gate electrode of a floating gate transistor of a memory cell having an access transistor whose control gate is formed by the central conductor of the second trench.
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269.
公开(公告)号:US20210193708A1
公开(公告)日:2021-06-24
申请号:US17122394
申请日:2020-12-15
Applicant: STMicroelectronics (Crolles 2) SAS
Inventor: Francois ROY
IPC: H01L27/146
Abstract: A back side illuminated image sensor includes a pixel formed by three doped photosensitive regions that are superposed vertically in a semiconductor substrate. Each photosensitive region is laterally framed by a respective vertical annular gate. The vertical annular gates are biased by a control circuit during an integration phase so as to generate an electrostatic potential comprising potential wells in the central portion of the volume of each doped photosensitive region and a potential barrier at each interface between two neighboring doped photosensitive regions.
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公开(公告)号:US20210175422A1
公开(公告)日:2021-06-10
申请号:US17112842
申请日:2020-12-04
Applicant: STMicroelectronics (Crolles 2) SAS , Commissariat A L'Energie Atomique Et Aux Energies Alternatives
Inventor: Jean-Philippe REYNARD , Sylvie DEL MEDICO , Philippe Brun
Abstract: A method for manufacturing an interconnection structure for an integrated circuit is provided. The integrated circuit includes a first insulating layer, a second insulating layer, and a third insulating layer. Electrical contacts pass through the first insulating layer, and a component having an electrical contact region is located in the second insulating layer. The method includes etching a first opening in the third layer, vertically aligned with the contact region. A fourth insulating layer is deposited to fill in the opening, and a second opening is etched to the contact region by passing through the opening in the third insulating layer. A metal level is formed by filling in the second opening with a metal.
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