公开(公告)号：US20140255831A1

公开(公告)日：2014-09-11

申请号：US14200264

申请日：2014-03-07

Applicant: Carl Zeiss SMS GmbH

Inventor： Thorsten Hofmann ,  Tristan Bret ,  Petra Spies ,  Nicole Auth ,  Michael Budach ,  Dajana Cujas

IPC: G03F1/72

CPC classification number: G03F1/72

Abstract: The invention refers to a method and apparatus for protecting a substrate during a processing by at least one particle beam. The method comprises the following steps: (a) applying a locally restrict limited protection layer on the substrate; (b) etching the substrate and/or a layer arranged on the substrate by use of the at least one particle beam and at least one gas; and/or (c) depositing material onto the substrate by use of the at least one particle beam and at least one precursor gas; and (d) removing the locally limited protection layer from the substrate.

Abstract translation: 本发明涉及用于通过至少一个粒子束在处理期间保护衬底的方法和装置。 该方法包括以下步骤：（a）在基板上施加局部限制的有限保护层; （b）通过使用至少一个粒子束和至少一种气体来蚀刻衬底和/或布置在衬底上的层; 和/或（c）通过使用所述至少一个粒子束和至少一种前体气体将材料沉积到所述衬底上; 和（d）从衬底去除局部限制的保护层。

公开(公告)号：US08769709B2

公开(公告)日：2014-07-01

申请号：US13954617

申请日：2013-07-30

Applicant: Carl Zeiss SMS GmbH

Inventor： Christof Baur ,  Klaus Edinger ,  Thorsten Hofmann ,  Gabriel Baralia

IPC: G01Q10/00

CPC classification number: G01Q10/00 ,  G01Q70/06 ,  G01Q80/00 ,  G03F1/72 ,  G03F1/82

Abstract: The invention refers to a probe assembly for a scanning probe microscope which comprises at least one first probe-adapted for analyzing a specimen, at least one second probe adapted for modifying the specimen and at least one motion element associated with the probe assembly and adapted for scanning one of the probes being in a working position across a surface of the specimen so that the at least one first probe interacts with the specimen whereas the at least one second probe is in a neutral position in which it does not interact with the specimen and to bring the at least one second probe into a position so that the at least one second probe can modify a region of the specimen analyzed with the at least one first probe.

Abstract translation: 本发明涉及一种用于扫描探针显微镜的探针组件，其包括至少一个适用于分析样本的第一探针，至少一个适于修改样本的第二探针和与该探针组件相关联的至少一个运动元件， 扫描探针中的一个位于穿过试样的表面的工作位置，使得至少一个第一探针与试样相互作用，而至少一个第二探针处于其不与试样相互作用的中性位置， 以使至少一个第二探针进入位置，使得至少一个第二探针可以修改用至少一个第一探针分析的样本的区域。

公开(公告)号：US20140007306A1

公开(公告)日：2014-01-02

申请号：US13954617

申请日：2013-07-30

Applicant: Carl Zeiss SMS GmbH

Inventor： Christof Baur ,  Klaus Edinger ,  Thorsten Hofmann ,  Gabriel Baralia

IPC: G01Q10/00

CPC classification number: G01Q10/00 ,  G01Q70/06 ,  G01Q80/00 ,  G03F1/72 ,  G03F1/82

Abstract: The invention refers to a probe assembly for a scanning probe microscope which comprises at least one first probe-adapted for analyzing a specimen, at least one second probe adapted for modifying the specimen and at least one motion element associated with the probe assembly and adapted for scanning one of the probes being in a working position across a surface of the specimen so that the at least one first probe interacts with the specimen whereas the at least one second probe is in a neutral position in which it does not interact with the specimen and to bring the at least one second probe into a position so that the at least one second probe can modify a region of the specimen analyzed with the at least one first probe.

Abstract translation: 本发明涉及一种用于扫描探针显微镜的探针组件，其包括至少一个适用于分析样本的第一探针，至少一个适于修改样本的第二探针和与该探针组件相关联的至少一个运动元件， 扫描探针中的一个位于穿过试样的表面的工作位置，使得至少一个第一探针与试样相互作用，而至少一个第二探针处于其不与试样相互作用的中性位置， 以使至少一个第二探针进入位置，使得至少一个第二探针可以修改用至少一个第一探针分析的样本的区域。

公开(公告)号：US20130321609A1

公开(公告)日：2013-12-05

申请号：US13908192

申请日：2013-06-03

Applicant: Carl Zeiss AG ,  Carl Zeiss SMS GmbH

Inventor： Holger Seitz ,  Thomas Frank ,  Thomas Trautzsch ,  Norbert Kerwien

IPC: G02B21/00 ,  G02B21/36

CPC classification number: G02B21/0016 ,  G02B21/06 ,  G02B21/361 ,  G02B21/364 ,  G02B21/365

Abstract: A microscope includes an illumination unit for illuminating a mask at a predetermined non-axial illumination angle, an imaging unit for imaging an aerial image of the mask within a predetermined defocus region, and an imaging field stop, in which as a result of the lateral displacement of the aerial image depending on the position within the defocus region and on the non-axial illumination angle, the opening of the imaging field stop is dimensioned such that the aerial image is either completely encompassed or circumferentially cut within the defocus region.A method for characterizing a mask having a structure includes illuminating the mask at at least one illumination angle using monochromatic illumination radiation such that a diffraction image of the structure is created, recording the diffraction image, establishing the intensities of the maxima of the adjacent orders of diffraction, and establishing an intensity ratio of the intensities.

Abstract translation: 显微镜包括用于以预定的非轴向照明角度照射掩模的照明单元，用于在预定的散焦区域内对掩模的空间图像进行成像的成像单元和成像场停止，其中作为横向 取决于散焦区域内的位置和非轴向照射角度的空间图像的位移，成像场停止件的开口的尺寸被设计成使得空间图像在散焦区域内完全包围或周向切割。 用于表征具有结构的掩模的方法包括：使用单色照射辐射以至少一个照明角度照射掩模，使得产生该结构的衍射图像，记录衍射图像，建立相邻阶数的最大值的强度 衍射，并建立强度的强度比。

公开(公告)号：US20130293962A1

公开(公告)日：2013-11-07

申请号：US13872356

申请日：2013-04-29

Applicant: CARL-ZEISS SMS GMBH

Inventor： Dietmar Schnier

IPC: G03F7/20 ,  G02B5/18

CPC classification number: G03F7/70133 ,  G02B5/1861 ,  G03F1/84 ,  G03F7/70775

Abstract: An irradiation module for a measuring apparatus is provided. The irradiation module is light-conductive, is configured as a cohesive body and comprises a beam-splitting surface arranged within the irradiation module for splitting an incoming measuring beam into two partial beams. Furthermore, the irradiation module comprises an optical diffraction grating for interaction with a first of the two partial beams and a reflection surface for reflecting the second partial beam.

Abstract translation: 提供了一种用于测量装置的照射模块。 照射模块是导光的，被构造为内聚体，并且包括布置在照射模块内的分束表面，用于将进入的测量光束分成两个部分光束。 此外，照射模块包括用于与两个部分光束中的第一个相互作用的光学衍射光栅和用于反射第二部分光束的反射表面。

公开(公告)号：US20130269406A1

公开(公告)日：2013-10-17

申请号：US13915743

申请日：2013-06-12

Applicant: SMS Meer GmbH

Inventor： Anthony James CORDER

IPC: B21C1/22

CPC classification number: B21C1/22 ,  B21C1/24 ,  B21C1/30 ,  B21C1/34 ,  B21C3/04 ,  B21C3/14 ,  B21C3/16 ,  B21C51/00

Abstract: In order to allow a more targeted intervention in a drawing procedure, in particular on a linear drawing device, the invention proposes a linear drawing machine for the linear drawing of a workpiece through a drawing ring, a drawing unit, in which one or more drawing tools grasp the workpiece and draw it linearly in the drawing direction, being situated behind the drawing ring, the linear drawing device being distinguished in particular by a drawing ring which is situated fixed in relation to the drawing direction during the drawing procedure, preferably perpendicularly, and by a workpiece guide situated in front of the drawing ring in the drawing direction, which is displaceable perpendicular to the drawing direction.

Abstract translation: 为了允许在绘图过程中更具针对性地介入，特别是在线性绘图装置上，本发明提出一种线性拉丝机，用于通过拉伸环直线拉伸工件，拉伸单元，其中一个或多个拉伸 工具抓住工件并沿拉伸方向线性地拉伸，位于拉伸环的后面，线性拉伸装置特别地通过在拉伸过程中相对于牵引方向固定的拉伸环，优选垂直地， 以及位于拉伸环前方的工件导向件，该拉伸方向可垂直于拉拔方向移动。

公开(公告)号：US20040228204A1

公开(公告)日：2004-11-18

申请号：US10738677

申请日：2003-12-17

Applicant: Buss SMS GmbH Verfahrenstechnik

Inventor： Hans Peters ,  Rainer Naf

IPC: B01F007/02

CPC classification number: B01F13/1013 ,  B01F7/025 ,  B01F7/042 ,  B01F13/1016 ,  B01F15/0289 ,  B01J2219/00166 ,  B01J2219/00173

Abstract: A large-volume reactor (10) for treating a free-flowing material, having a housing (12) which surrounds an interior space (14), a material feed (11) at one end of the housing (12) and a material discharge (13) at the other end of the housing (12). A rotor shaft (22), which is driven in rotation about its axis and conveys the material in the direction from the material feed (11) to the material discharge (13), is arranged in the interior space (14). A partition (16) in the interior space (14) defines two separate process spaces (18null, 18null) from one another, and the partition (16) includes a build-up system (24) having a build-up system passage (26) which leads from an inlet opening (40) which opens out into the first process space (18null), to an outlet opening (42) which opens out into the second process space (18null). The build-up system passage (26) is configured to pass the material from the first process space (18null) into the second process space (18null) and so that the flowing material forms a barrier which effectively prevents gas from passing through the passage.

Abstract translation: 一种用于处理自由流动材料的大容量反应器（10），其具有围绕内部空间（14）的壳体（12），在壳体（12）的一端处的材料进料（11）和材料排出 （13）在壳体（12）的另一端。 转动轴（22）被布置在内部空间（14）中，该转子轴（22）围绕其轴线旋转并沿材料进给（11）的方向传送到材料排出口（13）。 内部空间（14）中的分隔件（16）限定了彼此分开的两个分开的处理空间（18'，18“），分隔件（16）包括一个积聚系统（24） 从通向第一处理空间（18'）的入口开口（40）通向通向第二处理空间（18“）的出口（42）的通道（26）。 积聚系统通道（26）被配置成将材料从第一处理空间（18'）传送到第二处理空间（18“）中，使得流动的材料形成屏障，其有效地防止气体通过 通道。

公开(公告)号：US20040144148A1

公开(公告)日：2004-07-29

申请号：US10743548

申请日：2003-12-22

Applicant: SMS Meer GmbH

Inventor： Herrmann-Josef Klingen ,  Thomas Winterfeldt ,  Lothar Luckhof

IPC: B21D003/00

CPC classification number: B21B13/008 ,  B21B31/08

Abstract: A roll shaft assembly especially for a planetary cross roll rolling mill for tubing and the like has the roll shaft and mill roll connected by a conical centering arrangement and a screw, preferably coaxial therewith with the torque transfer being effected by tooth rings on the ends of the shaft and roll and having interdigitating teeth.

Abstract translation: 专门用于管材等的行星式横轧机的辊轴组件具有通过锥形定心装置连接的辊轴和轧辊，优选与其同轴的螺杆，转矩传递由位于 轴和辊并具有交叉齿。

公开(公告)号：US20020189314A1

公开(公告)日：2002-12-19

申请号：US10143726

申请日：2002-05-09

Applicant: SMS Meer GmbH

Inventor： Hermann-Josef Klingen ,  Norbert Zillekens ,  Karl-Heinz Hausler

IPC: B21C001/30

CPC classification number: B21C1/16 ,  B21C1/30 ,  B21C1/305

Abstract: A drawing apparatus is assembled from modular units utilizing modular path-forming members and holder modules which can carry the drawing die and drawing carriages shiftable on the guide modules. The drives for the carriages are individual linear motors whose stationary components are the modular path-forming members disposed end-to-end.

Abstract translation: 使用模块化路径形成构件和保持器模块的模块化单元组装绘图装置，该模块可承载可在导向模块上移动的拉丝模和拉丝托架。 滑架的驱动器是单独的线性电动机，其固定部件是端对端设置的模块化路径形成部件。

公开(公告)号：US20020104357A1

公开(公告)日：2002-08-08

申请号：US10062298

申请日：2002-02-01

Applicant: SMS DEMAG AKTIENGESELLSCHAFT

Inventor： Hubert Muller ,  Michael Kruse ,  Alfred Muller

IPC: B21B041/04

CPC classification number: B21B1/18 ,  B21B39/18 ,  B21B2013/003 ,  B21B2201/06

Abstract: Between an intermediate roll unit and a dimensioning finishing roll unit of a continuous light-section or wire rod rolling train, a multifunctional section is provided with three parallel lines and at least the first and second rolling lines having rolling blocks and substantially all of the lines including cooling sections and/or temperature equalization sections. Via distributing guides and 180null loop forming path segments, the workpieces are selectively directable from the first line to the dimensioning finishing rolling unit without traveling over the second and third lines and to the dimensioning finishing rolling unit after travelling over all or part of the second and third lines.

Abstract translation: 在中间辊单元和连续光线或线材轧制列车的尺寸精加工辊单元之间，多功能部分设置有三条平行线，并且至少第一和第二轧制线具有轧制块和基本上所有的线 包括冷却段和/或温度均衡段。 通过分配引导件和180°环形成路径段，工件可以从第一线选择性地定向到尺寸精加工滚动单元，而不会在第二和第三线之间移动，并且在经过所有或部分第二线 和第三行。