公开(公告)号：US20110168279A1

公开(公告)日：2011-07-14

申请号：US12965235

申请日：2010-12-10

Applicant: Yasunori NISHIMURA

Inventor： Yasunori NISHIMURA

IPC: F16K31/02

CPC classification number: F16K31/0655 ,  F16K1/42 ,  G05D7/0635 ,  Y10T137/7761

Abstract: A flow rate controller is arranged such that a control circuit controls a proportional electromagnetic valve so that a flow rate detected by a flow rate sensor reaches a target flow rate. The proportional electromagnetic valve includes a coil supported in a holder, a bobbin and a fixed core, a valve element and a plate spring placed on a movable core, the valve seat, lead-in path, lead-out path, and orifice being formed in a body. The movable core is displaced by balance between an attractive force of the fixed core generated by excitation of the coil and an urging force of the plate spring, thereby adjusting the position of the valve element with respect to the valve seat to adjust the flow rate of a fluid. The orifice has an inside diameter set to a value of “φ1 mm or more” and an axial length set to a value to have a ratio of “from 0.1 to 0.6 inclusive” to the inside diameter. The lead-out path has an inside diameter set to be larger than the inside diameter of the orifice.

Abstract translation: 流量控制器被布置成使得控制电路控制比例电磁阀，使得由流量传感器检测的流量达到目标流量。 比例电磁阀包括支撑在保持器中的线圈，线轴和固定芯，安装在可动芯上的阀元件和板簧，形成阀座，导入路径，引出路径和孔口 在一个身体。 可动铁芯通过由线圈的激励产生的固定铁芯的吸引力与板簧的推压之间的平衡而平移，由此调节阀元件相对于阀座的位置，以调节 流体 孔口的内径设定为“＆phgr; 1mm以上”的值，轴向长度设定为具有“0.1〜0.6”的比例与内径的值。 引出路径的内径设定为大于孔口的内径。

公开(公告)号：US07950619B2

公开(公告)日：2011-05-31

申请号：US12379997

申请日：2009-03-05

Applicant: Hideyuki Takeda ,  Tetsuya Ishihara

Inventor： Hideyuki Takeda ,  Tetsuya Ishihara

IPC: F16M1/00

CPC classification number: H01L21/67028 ,  B25B27/10 ,  F16L23/06 ,  F16L23/08 ,  F16L47/14

Abstract: A fluid device mounting structure is provided for installing a plurality of fluid devices on a support assembly. The support assembly includes a support member for supporting connecting portions of the fluid devices by the support assembly, so that the fluid devices are freely disposed in three dimensions.

Abstract translation: 提供流体装置安装结构，用于将多个流体装置安装在支撑组件上。 支撑组件包括用于通过支撑组件支撑流体装置的连接部分的支撑构件，使得流体装置在三维空间中自由地设置。

公开(公告)号：US07904257B2

公开(公告)日：2011-03-08

申请号：US12219287

申请日：2008-07-18

Applicant: Akiko Nakada ,  Kazutoshi Itoh ,  Akihito Sugino

Inventor： Akiko Nakada ,  Kazutoshi Itoh ,  Akihito Sugino

IPC: G01F1/34

CPC classification number: G01F1/34 ,  G05D7/0635

Abstract: A flow verification system is adapted to verify flow characteristics just after a flow control device starts flow control by verifying a flow rate in a gas piping system which includes a first cutoff valve, the flow control device installed downstream from the first cutoff valve, and a pressure sensor for measuring pressure downstream from the flow control device, flow verification is made based on the pressure measured by the pressure sensor. The flow verification system also includes a benchmark storage device for storing a benchmark which is calculated by integrating the pressure values measured by the pressure sensor during a normal flow control operation, and an abnormality detection device for detecting an abnormal flow of process gas.

Abstract translation: 流量验证系统适于在流量控制装置通过验证气体管道系统中的流量之后验证流量特性，该气体管道系统包括第一截止阀，安装在第一截止阀下游的流量控制装置和 压力传感器，用于测量流量控制装置下游的压力，根据压力传感器测量的压力进行流量验证。 流量验证系统还包括：基准存储装置，用于存储在通常的流量控制动作期间积分由压力传感器测定的压力值而计算的基准;以及异常检测装置，用于检测处理气体的异常流量。

公开(公告)号：US07862002B2

公开(公告)日：2011-01-04

申请号：US11907222

申请日：2007-10-10

Applicant: Masahiro Naitoh ,  Michinori Ikuji ,  Shin Ito ,  Makoto Iwata

Inventor： Masahiro Naitoh ,  Michinori Ikuji ,  Shin Ito ,  Makoto Iwata

IPC: F16K31/00

CPC classification number: F16K51/02 ,  F16K31/1221

Abstract: To provide a vacuum valve with an improved endurance of a bellows, a vacuum valve comprises: a valve section including a first port, a second port, a valve seat provided between the first and second ports, and a valve element movable into or out of contact with the valve seat; an actuator section including an orifice through which an operating fluid is supplied to the actuator section, and a piston coupled to the valve element, the piston being allowed to operate according to changes of pressure of the operating fluid to apply a driving force to the valve section; and a bellows which can be contracted and elongated as the valve element vertically moves upward and downward. The orifice is designed to have an effective sectional area determined so that an operating speed of the valve element and the piston is controlled to a predetermined speed for preventing damage of the bellows.

Abstract translation: 为了提供具有改进的波纹管耐久性的真空阀，真空阀包括：阀部分，其包括第一端口，第二端口，设置在第一和第二端口之间的阀座和可移入或移出 与阀座接触; 致动器部分，其包括孔口，工作流体通过该孔口供应到致动器部分;以及活塞，其联接到阀元件，活塞被允许根据工作流体的压力变化来操作以向阀门施加驱动力 部分; 以及当阀元件垂直向上和向下移动时可以收缩和伸长的波纹管。 孔口被设计成具有确定的有效截面面积，使得阀元件和活塞的操作速度被控制到预定速度以防止损坏波纹管。

公开(公告)号：US20100194855A1

公开(公告)日：2010-08-05

申请号：US12669433

申请日：2008-07-18

Applicant: Takahiro Mamiya

Inventor： Takahiro Mamiya

IPC: H04N13/00

CPC classification number: G01B11/25 ,  G01N21/95684 ,  H05K1/0269 ,  H05K3/3484

Abstract: A three-dimensional measuring device includes an irradiation means capable of irradiating a striped light pattern used for a spatial encoding method and a striped light pattern used for a phase shift method on a measurement object part on a board main body, an imaging means capable of imaging a measurement object part irradiated by the light pattern, an image control means for controlling imaging by the imaging means, a first calculation means for calculating a height of the measurement object part according to the phase shift method based on a multiplicity of image data imaged by the imaging means, and a second calculation means capable of using the spatial encoding method to identify a line corresponding to the measurement object part from among the image data at a time of calculation by the first calculation means by the phase shift method based on the image data.

Abstract translation: 三维测量装置包括能够将用于空间编码方法的条纹光图案和用于相位移方法的条纹光图案照射在板主体上的测量对象部分上的照射装置，能够 对由光图案照射的测量对象部分进行成像，用于控制成像装置的成像的图像控制装置，用于根据成像的多个图像数据根据相移方法计算测量对象部分的高度的第一计算装置 以及第二计算装置，所述第二计算装置能够使用所述空间编码方法，在所述第一计算装置计算时，根据所述第一计算装置的相移方法，从所述图像数据中识别与所述测量对象部分相对应的线 图像数据。

公开(公告)号：US07748684B2

公开(公告)日：2010-07-06

申请号：US11921510

申请日：2006-06-20

Applicant: Akihiro Ito ,  Naotsugu Seko ,  Yoshihiro Matsuoka ,  Manami Niwa

Inventor： Akihiro Ito ,  Naotsugu Seko ,  Yoshihiro Matsuoka ,  Manami Niwa

IPC: F16K31/02

CPC classification number: G01F1/684 ,  F16K31/0658 ,  G01F1/6842 ,  G01F5/00 ,  G01F15/00 ,  G05D7/0635

Abstract: The invention has been made to provide a flow control valve capable of preventing adhesion between a fixed core and a movable core and increasing an attractive force, so that flow control can be performed with high accuracy. In a flow control valve 10, a first fixed core 23a is fixed in an upper part of a coil bobbin 21, a second fixed core 23b is fixed in a lower part of the coil bobbin 21, and the movable core 24 is formed at its lower end with a flange 24a having a diameter larger than an inner diameter of the coil bobbin 21. The movable core 24 is placed inside a cylindrical part 28a of the flared pipe 28 so that a distance D1 between the first fixed core 23a and the movable core 24 is larger than a distance D2 between the flange 24a and a disc part 28b of the flared pipe 28.

Abstract translation: 本发明是为了提供能够防止固定铁心与可动铁芯之间的粘接，增加吸引力的流量控制阀，能够高精度地进行流量控制。 在流量控制阀10中，第一固定铁芯23a固定在线圈架21的上部，第二固定铁芯23b固定在线圈架21的下部，可动铁心24形成在其中 下端具有直径大于线圈架21的内径的凸缘24a。可动芯24放置在扩口管28的圆柱形部分28a内，使得第一固定芯23a和可动 芯24大于凸缘24a与扩口管28的盘部28b之间的距离D2。

公开(公告)号：US07716993B2

公开(公告)日：2010-05-18

申请号：US12223808

申请日：2007-02-22

Applicant: Yukio Ozawa ,  Minoru Ito ,  Hiroki Doi ,  Akiko Nakada

Inventor： Yukio Ozawa ,  Minoru Ito ,  Hiroki Doi ,  Akiko Nakada

IPC: G01F1/00 ,  G01F25/00 ,  G01F1/34

CPC classification number: G01F1/383 ,  G01F1/50 ,  G01F15/005 ,  G01F25/0007 ,  Y10T137/0379 ,  Y10T137/87249

Abstract: A gas flow rate verification unit capable of enhancing reliability of gas flow rate verification. The gas flow rate verification unit has a first cutoff valve that is connected to a flow rate control device and to which gas is inputted, a second cutoff valve for discharging the gas, a communication member for allowing the first cutoff valve and the second cutoff valve to communicate with each other, a pressure sensor for detecting the pressure of the gas supplied between the first cutoff valve and the second cutoff valve, a temperature detector for detecting the temperature of the gas supplied between the first cutoff valve and the second cutoff valve, and a control means for verifying the flow of the gas flowing in the flow control device, the verification being performed by using both the result of the pressure detected by the pressure sensor and the result of the temperatures detected by the temperature detector. The volume (Vk) between the valve seat of the first cutoff valve and the valve seat of the second cutoff valve is equal to or less than the volume (Ve) between the outlet of the flow control device and the valve seat of the first cutoff valve.

Abstract translation: 一种气体流量验证单元，能够提高气体流量验证的可靠性。 气体流量验证单元具有连接到流量控制装置并输入气体的第一截止阀，用于排出气体的第二截止阀，用于允许第一截止阀和第二截止阀的连通构件 相互通信的压力传感器，用于检测在第一截止阀和第二截止阀之间供应的气体的压力的压力传感器，用于检测在第一截流阀和第二截止阀之间供应的气体的温度的温度检测器， 以及用于验证在流量控制装置中流动的气体的流量的控制装置，通过使用由压力传感器检测到的压力的结果和由温度检测器检测的温度的结果来执行验证。 第一截止阀的阀座与第二截止阀的阀座之间的体积（Vk）等于或小于流量控制装置的出口与第一截止阀的阀座之间的体积（Ve） 阀。

公开(公告)号：US20100090137A1

公开(公告)日：2010-04-15

申请号：US12561120

申请日：2009-09-16

Applicant: Takashi Kato

Inventor： Takashi Kato

IPC: F16K31/00 ,  F16K15/00

CPC classification number: G05D7/0635 ,  Y10T137/7837

Abstract: The flow rate control device is equipped with a pilot regulator that applies operating pressure by using air supplied to one surface of a diaphragm provided in the regulator and adjusts the flow rate of a chemical liquid contacting the opposite surface, and with an electropneumatic regulator that controls supply and discharge of air to adjust the operating pressure for the pilot regulator. The flow rate control device is equipped with an air passage that connects and passes air between the pilot regulator and electropneumatic regulator, and an orifice that enables adjustment of operating pressure by the electropneumatic regulator while discharging air from the air passage.

Abstract translation: 流量控制装置配备有先导调节器，其通过使用供应到设置在调节器中的隔膜的一个表面的空气来施加操作压力，并且调节与相对表面接触的化学液体的流量，以及控制的电动气动调节器 空气供应和排放调节先导调节器的工作压力。 流量控制装置配备有在先导调节器和电动气动调节器之间连接并通过空气的空气通道，以及能够在从空气通道排出空气的同时由电动气动调节器调节操作压力的孔口。

公开(公告)号：US20090250561A1

公开(公告)日：2009-10-08

申请号：US12379997

申请日：2009-03-05

Applicant: Hideyuki Takeda ,  Tetsuya Ishihara

Inventor： Hideyuki Takeda ,  Tetsuya Ishihara

IPC: F16L3/22 ,  F16L55/07

CPC classification number: H01L21/67028 ,  B25B27/10 ,  F16L23/06 ,  F16L23/08 ,  F16L47/14

Abstract: A fluid device mounting structure is provided for installing a plurality of fluid devices on a support assembly. The support assembly includes a support member for supporting connecting portions of the fluid devices by the support assembly, so that the fluid devices are freely disposed in three dimensions.

Abstract translation: 提供流体装置安装结构，用于将多个流体装置安装在支撑组件上。 支撑组件包括用于通过支撑组件支撑流体装置的连接部分的支撑构件，使得流体装置在三维空间中自由地设置。

公开(公告)号：US20090019943A1

公开(公告)日：2009-01-22

申请号：US12223808

申请日：2007-02-22

Applicant: Yukio Ozawa ,  Minoru Ito ,  Hiroki Doi ,  Akiko Nakada

Inventor： Yukio Ozawa ,  Minoru Ito ,  Hiroki Doi ,  Akiko Nakada

IPC: G01F1/00

CPC classification number: G01F1/383 ,  G01F1/50 ,  G01F15/005 ,  G01F25/0007 ,  Y10T137/0379 ,  Y10T137/87249

Abstract: A gas flow rate verification unit capable of enhancing reliability of gas flow rate verification. The gas flow rate verification unit has a first cutoff valve that is connected to a flow rate control device and to which gas is inputted, a second cutoff valve for discharging the gas, a communication member for allowing the first cutoff valve and the second cutoff valve to communicate with each other, a pressure sensor for detecting the pressure of the gas supplied between the first cutoff valve and the second cutoff valve, a temperature detector for detecting the temperature of the gas supplied between the first cutoff valve and the second cutoff valve, and a control means for verifying the flow of the gas flowing in the flow control device, the verification being performed by using both the result of the pressure detected by the pressure sensor and the result of the temperatures detected by the temperature detector. The volume (Vk) between the valve seat of the first cutoff valve and the valve seat of the second cutoff valve is equal to or less than the volume (Ve) between the outlet of the flow control device and the valve seat of the first cutoff valve.

Abstract translation: 一种气体流量验证单元，能够提高气体流量验证的可靠性。 气体流量验证单元具有连接到流量控制装置并输入气体的第一截止阀，用于排出气体的第二截止阀，用于允许第一截止阀和第二截止阀的连通构件 相互通信的压力传感器，用于检测在第一截止阀和第二截止阀之间供应的气体的压力的压力传感器，用于检测在第一截流阀和第二截止阀之间供应的气体的温度的温度检测器， 以及用于验证在流量控制装置中流动的气体的流量的控制装置，通过使用由压力传感器检测到的压力的结果和由温度检测器检测的温度的结果来执行验证。 第一截止阀的阀座与第二截止阀的阀座之间的体积（Vk）等于或小于流量控制装置的出口与第一截止阀的阀座之间的体积（Ve） 阀。