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53 条记录 (耗时 0.017 秒)

    Belt conveyor for use with semiconductor containers
    21.
    发明授权
    Belt conveyor for use with semiconductor containers 有权
    带式输送机用于半导体容器

    公开(公告)号：US07472788B2

    公开(公告)日：2009-01-06

    申请号：US11484218

    申请日：2006-07-10

    申请人： Anthony C. Bonora ,  Michael Krolak ,  Roger G. Hine

    发明人： Anthony C. Bonora ,  Michael Krolak ,  Roger G. Hine

    IPC分类号： B65G15/10

    CPC分类号： H01L21/67763 ,  B65G15/12 ,  B65G43/10 ,  B65G47/268 ,  B65G2201/0297 ,  H01L21/67706 ,  H01L21/6773

    摘要： The present invention comprises a conveyor for moving a semiconductor containers throughout a fabrication facility. In one embodiment, the conveyor comprises a plurality of individually controlled conveyor zones. Each conveyor zone includes a first belt, a second belt, a drive assembly for rotating the first belt and the second belt at substantially the same speed. The first belt and the second belt are driven at substantially the same speed and movably support the container's bottom plate as the container moves along the conveyor. In another embodiment, the conveyor includes sensors to determine, among other things, the position of the container.

    摘要翻译： 本发明包括用于在整个制造设施中移动半导体容器的输送机。 在一个实施例中，输送机包括多个独立控制的输送带。 每个传送带包括第一带，第二带，用于以基本上相同的速度旋转第一带和第二带的驱动组件。 第一带和第二带以大致相同的速度驱动，并且随着容器沿着输送机移动，可移动地支撑容器的底板。 在另一个实施例中，输送机包括用于确定容器位置的传感器。

    Universal modular wafer transport system
    22.
    发明授权
    Universal modular wafer transport system 有权
    通用模块化晶圆输送系统

    公开(公告)号：US07293950B2

    公开(公告)日：2007-11-13

    申请号：US10234640

    申请日：2002-09-03

    申请人： Anthony C. Bonora ,  Richard H. Gould ,  Roger G. Hine ,  Michael Krolak ,  Jerry A. Speasl

    发明人： Anthony C. Bonora ,  Richard H. Gould ,  Roger G. Hine ,  Michael Krolak ,  Jerry A. Speasl

    IPC分类号： B65G54/02

    CPC分类号： H01L21/67778 ,  H01L21/67766 ,  H01L21/67775 ,  H01L21/68707 ,  Y10S414/139

    摘要： The present invention is a wafer transfer system that transports individual wafers between chambers within an isolated environment. In one embodiment, a wafer is transported by a wafer shuttle that travel within a transport enclosure. The interior of the transport enclosure is isolated from the atmospheric conditions of the surrounding wafer fabrication facility. Thus, an individual wafer may be transported throughout the wafer fabrication facility without having to maintain a clean room environment for the entire facility. The wafer shuttle may be propelled by various technologies, such as, but not limited to, magnetic levitation or air bearings. The wafer shuttle may also transport more than one wafer simultaneously. The interior of the transport enclosure may also be under vacuum, gas-filled, or subject to filtered air.

    摘要翻译： 本发明是一种晶片传送系统，其在隔离环境中的室之间输送各个晶片。 在一个实施例中，晶片由在运输箱内传播的晶片梭运送。 运输箱的内部与周围的晶片制造设备的大气条件隔离。 因此，单个晶片可以在整个晶片制造设备中运输，而不必为整个设备保持洁净室环境。 晶片梭可以通过各种技术来推动，例如但不限于磁悬浮或空气轴承。 晶片梭可能同时传送多于一个晶片。 运输箱的内部也可以在真空下，充满气体，或经过过滤的空气。

    Ultra low contact area end effector
    23.
    发明授权
    Ultra low contact area end effector 有权
    超低接触面末端执行器

    公开(公告)号：US07293811B2

    公开(公告)日：2007-11-13

    申请号：US11404536

    申请日：2006-04-14

    申请人： Anthony C. Bonora ,  Roger G. Hine

    发明人： Anthony C. Bonora ,  Roger G. Hine

    IPC分类号： A47J45/00

    CPC分类号： H01L21/6838 ,  H01L21/68707 ,  Y10S414/141

    摘要： The present invention comprises a vacuum end effector having workpiece supports that work in conjunction with distorted workpiece surfaces. In one embodiment, each workpiece support has the ability to gimbal and conform the workpiece surface in contact with an outer edge of the support. Each workpiece support preferably provides a knife-like contact edge to minimize the contact area between the support and the workpiece while still providing an effective vacuum area to hold the wafer securely on the support. In another embodiment, each workpiece support is replaceable without having to remove the end effector from the robot assembly

    摘要翻译： 本发明包括具有工件支撑件的真空端部执行器，其与变形的工件表面一起工作。 在一个实施例中，每个工件支撑件具有万向架和使工件表面与支撑件的外边缘接触的能力。 每个工件支撑件优选地提供刀形接触边缘以最小化支撑件和工件之间的接触面积，同时仍然提供有效的真空区域以将晶片牢固地保持在支撑件上。 在另一个实施例中，每个工件支撑件是可更换的，而不必从机器人组件移除端部执行器

    Active edge grip rest pad
    24.
    发明授权
    Active edge grip rest pad 有权
    主动边缘抓地垫

    公开(公告)号：US07290813B2

    公开(公告)日：2007-11-06

    申请号：US11014401

    申请日：2004-12-16

    申请人： Anthony C. Bonora ,  Roger G. Hine ,  D. Wayne Nobles, Jr. ,  Norma B. Riley

    发明人： Anthony C. Bonora ,  Roger G. Hine ,  D. Wayne Nobles, Jr. ,  Norma B. Riley

    IPC分类号： B65G49/07

    CPC分类号： H01L21/68707 ,  Y10S294/902 ,  Y10S414/141

    摘要： The present invention comprises a distal rest pad for supporting a portion of a wafer seated on an end effector. In one embodiment, the rest pad includes a bottom support pad and an edge stop. Each element is mounted separately to the distal end of a support plate. The bottom support pad includes an inclined surface that transitions to a substantially horizontal surface at its distal end. The edge stop has a substantially vertical wafer contact surface that the peripheral edge of a wafer eventually contacts as the wafer is urged towards the distal rest pad. In another embodiment, the bottom support pad comprises an inclined surface. In yet another embodiment, the distal rest pad comprises a single structure. This distal rest pad includes a backstop portion and a bottom support separated by a particle collection groove. The bottom support may include an inclined lead-in surface that transitions into a flat contact surface or only comprise an inclined lead-in surface.

    摘要翻译： 本发明包括用于支撑位于末端执行器上的晶片的一部分的远端休息垫。 在一个实施例中，休息垫包括底部支撑垫和边缘止动件。 每个元件分别安装到支撑板的远端。 底部支撑垫包括在其远端处转变到基本水平的表面的倾斜表面。 边缘止动器具有基本垂直的晶片接触表面，当晶片被推向远侧支撑垫时，晶片的周边边缘最终接触。 在另一个实施例中，底部支撑垫包括倾斜表面。 在另一个实施例中，远侧支撑垫包括单个结构。 该远端休息垫包括由颗粒收集槽分隔的止挡部分和底部支撑件。 底部支撑件可以包括倾斜的导入表面，其转变成平坦的接触表面或仅包括倾斜的导入表面。

    Apparatus and methods for viewing identification marks on semiconductor wafers
    25.
    发明授权
    Apparatus and methods for viewing identification marks on semiconductor wafers 失效
    用于查看半导体晶片上的识别标记的装置和方法

    公开(公告)号：US5831738A

    公开(公告)日：1998-11-03

    申请号：US179678

    申请日：1994-01-11

    申请人： Roger G. Hine

    发明人： Roger G. Hine

    IPC分类号： G06K7/10 ,  H01L21/02 ,  H01L21/68 ,  G01B11/00

    CPC分类号： G06K7/10861

    摘要： Apparatus and method for reading an identification mark on a semi-conductor wafer. The wafer includes a marking area which bears a relief mark. The marking area is illuminated by a segmented light source and is viewed by a viewing device. The viewing device sees a dark segment and an adjacent lighted segment which preferably surrounds the dark segment, and the mark appears as a light image in the dark segment. Preferably the segmented light source is a diffuse light source with an opaque patch at its center. The method is particularly effective for reading soft marks with low profiles.

    摘要翻译： 用于读取半导体晶片上的识别标记的装置和方法。 晶片包括带有浮雕标记的标记区域。 标记区域由分段光源照亮，并由观察装置观看。 观察装置看到暗区段和优选围绕暗区段的相邻点亮区段，并且该标记在黑暗区段中呈现为光图像。 优选地，分段光源是在其中心处具有不透明贴片的漫射光源。 该方法对于读取具有低轮廓的软痕特别有效。

    Wave-Powered Devices Configured for Nesting
    26.
    发明申请
    Wave-Powered Devices Configured for Nesting 审中-公开
    配置用于嵌套的波浪式设备

    公开(公告)号：US20160186716A1

    公开(公告)日：2016-06-30

    申请号：US14841468

    申请日：2015-08-31

    申请人： Roger G. Hine ,  Derek L. Hine

    发明人： Roger G. Hine ,  Derek L. Hine

    IPC分类号： F03B13/20 ,  G05D1/02 ,  B63B21/66 ,  B63H19/04

    CPC分类号： F03B13/20 ,  B63B21/66 ,  B63H19/02 ,  B63H19/04 ,  F03B13/1885 ,  F05B2240/931 ,  F05B2260/02 ,  G05D1/0206 ,  Y02E10/38 ,  Y02T70/59

    摘要： A wave-powered water vehicle includes a) a first component which is a float that travels on or near the water surface; b) a second component which is wave actuated and travels below the first component; and c) a means whereby the first component engages the second component and/or the second component engages the first component; wherein the engagement means provides lateral support of one component for the other, and thereby minimizes lateral movement of one against the other when the components are fitted together.

    摘要翻译： 波浪式水车辆包括：a）第一部件，其是在水面上或附近行进的浮子; b）第二部件，其被波动地驱动并在第一部件下方移动; 和c）第一部件接合第二部件和/或第二部件接合第一部件的装置; 其中所述接合装置为另一个部件提供一个部件的横向支撑，从而当所述部件装配在一起时，一个部件的横向移动最小化。

    Universal modular wafer transport system
    27.
    发明授权
    Universal modular wafer transport system 有权
    通用模块化晶圆输送系统

    公开(公告)号：US08851817B2

    公开(公告)日：2014-10-07

    申请号：US12943198

    申请日：2010-11-10

    申请人： Anthony C. Bonora ,  Richard H. Gould ,  Roger G. Hine ,  Michael Krolak ,  Jerry A. Speasl

    发明人： Anthony C. Bonora ,  Richard H. Gould ,  Roger G. Hine ,  Michael Krolak ,  Jerry A. Speasl

    IPC分类号： H01L21/677 ,  H01L21/687

    CPC分类号： H01L21/67778 ,  H01L21/67766 ,  H01L21/67775 ,  H01L21/68707 ,  Y10S414/139

    摘要： The present invention is a wafer transfer system that transports individual wafers between chambers within an isolated environment. In one embodiment, a wafer is transported by a wafer shuttle that travel within a transport enclosure. The interior of the transport enclosure is isolated from the atmospheric conditions of the surrounding wafer fabrication facility. Thus, an individual wafer may be transported throughout the wafer fabrication facility without having to maintain a clean room environment for the entire facility. The wafer shuttle may be propelled by various technologies, such as, but not limited to, magnetic levitation or air bearings. The wafer shuttle may also transport more than one wafer simultaneously. The interior of the transport enclosure may also be under vacuum, gas-filled, or subject to filtered air.

    摘要翻译： 本发明是一种晶片传送系统，其在隔离环境中的室之间输送各个晶片。 在一个实施例中，晶片由在运输箱内传播的晶片梭运送。 运输箱的内部与周围的晶片制造设备的大气条件隔离。 因此，单个晶片可以在整个晶片制造设备中运输，而不必为整个设备保持洁净室环境。 晶片梭可以通过各种技术来推动，例如但不限于磁悬浮或空气轴承。 晶片梭可能同时传送多于一个晶片。 运输箱的内部也可以在真空下，充满气体，或经过过滤的空气。