公开(公告)号：USD344752S

公开(公告)日：1994-03-01

申请号：US2723

申请日：1992-12-17

申请人： Kenji Watanabe ,  Takanobu Kameda ,  Takeyasu Suzuki ,  Yuichiro Taniguchi ,  Atsuko Yamaguchi ,  Machiko Kano ,  Chieko Aida

设计人： Kenji Watanabe ,  Takanobu Kameda ,  Takeyasu Suzuki ,  Yuichiro Taniguchi ,  Atsuko Yamaguchi ,  Machiko Kano ,  Chieko Aida

公开(公告)号：US09183622B2

公开(公告)日：2015-11-10

申请号：US13882141

申请日：2011-10-26

申请人： Yasutaka Toyoda ,  Norio Hasegawa ,  Ryoichi Matsuoka ,  Atsuko Yamaguchi

发明人： Yasutaka Toyoda ,  Norio Hasegawa ,  Ryoichi Matsuoka ,  Atsuko Yamaguchi

IPC分类号： G06K9/00 ,  G06T7/00 ,  H01J37/22 ,  H01J37/28 ,  G01N21/00 ,  H01L21/66

CPC分类号： G06T7/0004 ,  G06T7/001 ,  G06T2207/30141 ,  G06T2207/30152 ,  H01J37/222 ,  H01J37/28 ,  H01J2237/24578 ,  H01J2237/24592 ,  H01J2237/2817 ,  H01L22/12 ,  H01L2924/0002 ,  H01L2924/00

摘要： An object of the present invention is to provide an image processing apparatus and a computer program which detects a defect such as a scum at high speed and with high precision. In order to accomplish the above-described object, the present invention proposes an image processing apparatus and a computer program which acquires image data, and detects edge branch points from this image data. Here, at each of the edge branch points, an edge associated therewith branches off in at least three or more directions. According to this configuration, it becomes possible to detect a defect such as a scum without utilizing the reference-pattern image. As a consequence, it becomes possible to detect the scum at high speed and with high precision.

摘要翻译： 本发明的目的是提供一种图像处理装置和计算机程序，其以高速和高精度检测浮渣等缺陷。 为了实现上述目的，本发明提出一种图像处理装置和计算机程序，其获取图像数据，并从该图像数据检测边缘分支点。 这里，在每个边缘分支点处，与其相关联的边缘在至少三个或更多个方向上分支。 根据该结构，能够在不利用基准图案图像的情况下检测浮渣等缺陷。 因此，可以高速，高精度地检测浮渣。

公开(公告)号：US20110188695A1

公开(公告)日：2011-08-04

申请号：US12929127

申请日：2011-01-03

申请人： Atsuko Yamaguchi ,  Keita Shimizu

发明人： Atsuko Yamaguchi ,  Keita Shimizu

IPC分类号： H04R1/02

CPC分类号： H04R1/02

摘要： A microphone-unit supporting structure comprises a microphone unit and a holder. The microphone unit includes a substantially-cylindrical microphone element, a printed circuit board fixed to a back of the microphone element, and at least two projections extending radially outward from the printed circuit board and being circumferentially spaced at such an angular interval that when one of the projections is assumed to be on a reference line for line symmetry, the other projection or projections are off the reference line. The holder includes a microphone-unit supporting portion for supporting the microphone unit. The holder has a first groove for receiving first one of the projections, and a second groove for receiving second one of the projections. The first groove is open in a backward direction. The second groove is open in a frontward direction.

摘要翻译： 麦克风单元支撑结构包括麦克风单元和保持器。 麦克风单元包括基本上圆柱形的麦克风元件，固定到麦克风元件的背面的印刷电路板，以及至少两个从印刷电路板径向向外延伸的凸起，并且以这样一个角度间隔周向间隔开， 假设投影在线对称的参考线上，另一个投影或投影离开参考线。 保持器包括用于支撑麦克风单元的麦克风单元支撑部分。 保持器具有用于接收第一个突起的第一槽和用于接收第二个突起的第二槽。 第一槽沿向后方向打开。 第二槽向前方开口。

公开(公告)号：US20080226177A1

公开(公告)日：2008-09-18

申请号：US12125444

申请日：2008-05-22

申请人： Atsuko Yamaguchi ,  Hiroshi Fukuda ,  Osamu Komuro ,  Hiroki Kawada

发明人： Atsuko Yamaguchi ,  Hiroshi Fukuda ,  Osamu Komuro ,  Hiroki Kawada

IPC分类号： G06K9/48

CPC分类号： G01N23/2251

摘要： A quantity (or dispersion value) of a distribution of edge position due to random noise is expected to be reduced statistically to 1/N when N edge position data items are averaged. Using this property, the single page image is averaged in a vertical direction with various values of parameter S, and then the edge roughness index is calculated. The S-dependence of the edge roughness index is analyzed and a term of a dispersion value directly proportional to 1/S is determined as being due to noise.

摘要翻译： 当N个边缘位置数据项被平均时，由于随机噪声导致的边缘位置分布的数量（或色散值）预期在统计上降低到1 / N。 使用该属性，将单页图像在垂直方向上与参数S的各种值进行平均，然后计算边缘粗糙度指数。 分析边缘粗糙度指数的S依赖性，并将与1 / S成正比的色散值的项确定为由噪声引起的。

公开(公告)号：US07405835B2

公开(公告)日：2008-07-29

申请号：US11808627

申请日：2007-06-12

申请人： Atsuko Yamaguchi ,  Hiroshi Fukuda ,  Osamu Komuro ,  Hiroki Kawada

发明人： Atsuko Yamaguchi ,  Hiroshi Fukuda ,  Osamu Komuro ,  Hiroki Kawada

IPC分类号： G01B11/24 ,  G01N23/00 ,  G06K9/46

CPC分类号： G01N23/2251

摘要： A quantity (or dispersion value) of a distribution of edge position due to random noise is expected to be reduced statistically to 1/N when N edge position data items are averaged. Using this property, the single page image is averaged in a vertical direction with various values of parameter S, and then the edge roughness index is calculated. The S-dependence of the edge roughness index is analyzed and a term of a dispersion value directly proportional to 1/S is determined as being due to noise.

摘要翻译： 当N个边缘位置数据项被平均时，由于随机噪声导致的边缘位置分布的数量（或色散值）预期在统计上降低到1 / N。 使用该属性，将单页图像在垂直方向上与参数S的各种值进行平均，然后计算边缘粗糙度指数。 分析边缘粗糙度指数的S依赖性，并将与1 / S成正比的色散值的项确定为由噪声引起的。

公开(公告)号：US07049589B2

公开(公告)日：2006-05-23

申请号：US10752527

申请日：2004-01-08

申请人： Atsuko Yamaguchi ,  Hiroshi Fukuda ,  Ryuta Tsuchiya ,  Hiroki Kawada ,  Shozo Yoneda

发明人： Atsuko Yamaguchi ,  Hiroshi Fukuda ,  Ryuta Tsuchiya ,  Hiroki Kawada ,  Shozo Yoneda

IPC分类号： G01N23/00

CPC分类号： G01B15/04 ,  G01B15/08

摘要： The present invention may include a pattern inspection method of extracting a pattern edge shape from an image obtained by a scanning microscope and inspecting the pattern. A control section and a computer of the scanning microscope process the intensity distribution of reflected electrons or secondary electrons, find the distribution of gate lengths in a single gate from data about edge positions, estimate the transistor performance by assuming a finally fabricated transistor to be a parallel connection of a plurality of transistors having various gate lengths, and determine the pattern quality and grade based on an estimated result. In this manner, it is possible to highly, accurately and quickly estimate an effect of edge roughness on the device performance and highly accurately and efficiently inspect patterns in accordance with device specifications.

摘要翻译： 本发明可以包括从由扫描显微镜获得的图像中提取图案边缘形状并检查图案的图案检查方法。 扫描显微镜的控制部分和计算机处理反射电子或二次电子的强度分布，从关于边缘位置的数据中找到单个栅极中栅极长度的分布，通过假设最终制造的晶体管为 具有各种栅极长度的多个晶体管的并联连接，并且基于估计结果确定图案质量和等级。 以这种方式，可以高度，准确和快速地估计边缘粗糙度对器件性能的影响，并且根据器件规格高精度和有效地检查图案。

公开(公告)号：US06644756B1

公开(公告)日：2003-11-11

申请号：US10166606

申请日：2002-06-12

申请人： Akio Handa ,  Hideo Yanai ,  Bunzo Seki ,  Atsuko Yamaguchi

发明人： Akio Handa ,  Hideo Yanai ,  Bunzo Seki ,  Atsuko Yamaguchi

IPC分类号： B60B2100

CPC分类号： B60B3/044 ,  B60B3/08 ,  B60B3/16 ,  B60B21/021 ,  B60B21/023 ,  B60B21/028 ,  B60B21/04 ,  B60B21/104 ,  B60B25/002

摘要： A large-diameter part, the diameter of which is larger than the diameter in the center, is provided at the edges of a rim via parts having a difference in a level. Curled parts are provided on both edges of the rim by curling the large-diameter part. Each end face of the curled parts is touched to the parts having a difference in a level. The rigidity of the side of the edge of the rim can be enhanced by providing the parts having a difference in a level to the rim. As a result, the rigidity of the whole wheel can be enhanced and in addition, as a disc and the rim are not required to be thickened, the weight of the wheel can be prevented from being increased.

摘要翻译： 直径大于中心直径的大直径部分通过具有水平差的部件设置在轮辋的边缘。 通过卷曲大直径部分，在边缘的两个边缘上设置弯曲部分。 卷曲部分的每个端面被触摸到具有不同级别的部分。 可以通过提供具有与轮辋的水平差的部件来增强轮缘边缘的刚性。 结果，可以提高整个车轮的刚度，此外，由于盘和轮辋不需要加厚，所以可以防止车轮的重量增加。

公开(公告)号：US06457004B1

公开(公告)日：2002-09-24

申请号：US09145155

申请日：1998-09-01

申请人： Shingo Nishioka ,  Makoto Iwayama ,  Kazuhiro Ono ,  Akihiko Takano ,  Yoshiki Niwa ,  Atsuko Yamaguchi

发明人： Shingo Nishioka ,  Makoto Iwayama ,  Kazuhiro Ono ,  Akihiko Takano ,  Yoshiki Niwa ,  Atsuko Yamaguchi

IPC分类号： G06F1730

CPC分类号： G06F17/30696 ,  G06F17/3061 ,  Y10S707/99933 ,  Y10S707/99934 ,  Y10S707/99935 ,  Y10S707/99936 ,  Y10S707/99945

摘要： A document retrieval assistance method has a user interface with an interactive guidance function. In response to a search query, search results including a title list of retrieved documents is displayed alongside a separate display of topic words extracted from the retrieved documents which reflect the search results. In particular, a topic-word graph is displayed alongside a list of titles of the retrieved documents and the interface enables browsing of the documents using the topic words. Further, the interface permits emphasized display of the list of titles of the documents through direct selection of the titles displayed in the list or through selection of the topic words. Further, an associative search can be executed using a selected document to refine the original search results and develop updated displays of the search results and topic words contained in the documents.

摘要翻译： 文档检索辅助方法具有具有交互引导功能的用户界面。 响应于搜索查询，包括检索到的文档的标题列表的搜索结果显示在从反映搜索结果的检索到的文档中提取的主题词的单独显示。 特别地，主题词图形显示在检索到的文档的标题列表旁边，并且该界面使得能够使用主题词浏览文档。 此外，界面允许通过直接选择列表中显示的标题或通过选择主题词来强调显示文档的标题列表。 此外，可以使用所选择的文档来执行关联搜索，以细化原始搜索结果并开发文档中包含的搜索结果和主题词的更新显示。

公开(公告)号：US08369602B2

公开(公告)日：2013-02-05

申请号：US12190818

申请日：2008-08-13

申请人： Atsuko Yamaguchi ,  Jiro Yamamoto ,  Hiroki Kawada

发明人： Atsuko Yamaguchi ,  Jiro Yamamoto ,  Hiroki Kawada

IPC分类号： G06K9/00

CPC分类号： G06K9/4604 ,  G06T7/0006 ,  G06T7/13 ,  G06T7/60 ,  G06T2207/10061 ,  G06T2207/30148

摘要： Disclosed herewith is a length measurement system, which obtains a value closer to its true one when figuring out the size and edge roughness of a pattern from a noise-included pattern image. Among plural band-like regions representing a portion around an edge in an image respectively, the system calculates the dependency of the edge point position on the image processing parameter at each of a narrow width band-like portion and a wide width band-like portion to calculate an image processing condition that calculates each measured value closer to its true value or estimates the true value itself.

摘要翻译： 本文公开了一种长度测量系统，当从包含噪声的图案图像中确定图案的尺寸和边缘粗糙度时，其获得接近其真实值的值。 在分别表示图像中的边缘周围的多个带状区域中，系统计算边缘点位置对窄幅带状部分和宽幅带状部分中的每一个处的图像处理参数的依赖性 以计算更接近其真实值的每个测量值的图像处理条件或估计真实值本身。

公开(公告)号：US07684937B2

公开(公告)日：2010-03-23

申请号：US12078840

申请日：2008-04-07

申请人： Atsuko Yamaguchi ,  Hiroshi Fukuda ,  Hiroki Kawada ,  Tatsuya Maeda

发明人： Atsuko Yamaguchi ,  Hiroshi Fukuda ,  Hiroki Kawada ,  Tatsuya Maeda

IPC分类号： G01B5/28

CPC分类号： G01B15/08 ,  G01N23/2251 ,  G03F7/70625 ,  H01J2237/223 ,  H01J2237/2817

摘要： Equipment extracts components of spatial frequency that need to be evaluated in manufacturing a device or in analyzing a material or process out of edge roughness on fine line patterns and displays them as indexes. The equipment acquires data of edge roughness over a sufficiently long area, integrates components corresponding to a spatial frequency region being set on a power spectrum by the operator, and displays them on a length measuring SEM. Alternatively, the equipment divides the edge roughness data of the sufficiently long area, computes long-period roughness and short-period roughness that correspond to an arbitrary inspection area by performing statistical processing and fitting based on theoretical calculation, and displays them on the length measuring SEM.

摘要翻译： 设备提取在制造设备时需要评估的空间频率的组件，或者在细线图案上分析材料或工艺的边缘粗糙度并将其显示为索引。 设备在足够长的区域上获取边缘粗糙度的数据，对与操作者在功率谱上设置的空间频率区域相对应的分量进行积分，并将其显示在长度测量SEM上。 或者，设备对足够长的区域的边缘粗糙度数据进行分割，通过进行基于理论计算的统计处理和拟合来计算与任意检查区域相对应的长周期粗糙度和短周期粗糙度，并将其显示在长度测量 SEM。