Optical scanning device
    21.
    发明授权
    Optical scanning device 失效
    光学扫描装置

    公开(公告)号:US07184387B2

    公开(公告)日:2007-02-27

    申请号:US10528677

    申请日:2003-09-18

    IPC分类号: G11B7/135 G02B5/30

    CPC分类号: G11B7/1367

    摘要: An optical scanning device for scanning an optical record carrier comprising an information layer. Crosstalk cancellation is provided using a phase modulating element (40, 140) for generating a non-rotationally-symmetric phase profile in a subsidiary radiation beam. The phase profile varies with an azimuthal angle measured about the optical axis of the beam portion, the phase profile varying such that successively different phases are introduced in at least five locations which are each at successive azimuthal angles (φ1, φ2, φN) and each at a given radial distance from the optical axis, wherein the phase profile is such that the phases introduced, when taken in modulo 2π form, successively cycle through 0 to 2π at least twice, whereby the subsidiary beam spot is provided with an intensity distribution on the information layer which overlaps that of the side-lobe of the main beam spot.

    摘要翻译: 一种用于扫描包括信息层的光学记录载体的光学扫描装置。 使用用于在辅助辐射束中产生非旋转对称相位轮廓的相位调制元件(40,140)来提供串扰消除。 相位轮廓随着围绕光束部分的光轴测量的方位角而变化,相位轮廓变化使得连续不同的相位被引入至少五个位置,每个位置处于连续的方位角(phi <1 / 并且各自在距离光轴的给定的径向距离处,其中相位轮廓使得当以2×2pi为单位时引入的相位 形成,连续地循环0至2pi至少两次,由此辅助光束点在信息层上提供与主光束点的旁瓣重叠的强度分布。

    Device for reconstructing a runlength constrained sequence
    22.
    发明授权
    Device for reconstructing a runlength constrained sequence 失效
    用于重建游程长约束序列的设备

    公开(公告)号:US06980606B2

    公开(公告)日:2005-12-27

    申请号:US09969002

    申请日:2001-10-02

    CPC分类号: H04L1/0054

    摘要: A branch metric calculation unit calculates a set of branch metric values for subsequent samples of the sampled input signal. Each of the set of branch metric values is an indication for the likelihood that an amplitude value of a sample corresponds to a particular state, a state being defined as a sequence of n-ary digits. A delay unit, which forms part of a delay chain of delay units, includes a first delay unit of the delay chain which is coupled to the branch metric calculation unit. A path metric calculation chain of path metric calculation units includes one or more path metric calculation units having first inputs coupled to a delay unit and second inputs coupled to a preceding path metric calculation unit. The path metric calculation unit calculates the path metric values from the branch metric values, a path metric value being on indication for the likelihood that a sequence of samples corresponds to a sequence of states.

    摘要翻译: 支路量度计算单元计算采样输入信号的后续采样的一组支路量度值。 一组分支量度值中的每一个是对样本的幅度值对应于特定状态的可能性的指示,状态被定义为n位数的序列。 形成延迟单元的延迟链的一部分的延迟单元包括延迟链的第一延迟单元,其连接到分支量度计算单元。 路径度量计算单元的路径度量计算链包括具有耦合到延迟单元的第一输入和耦合到先前路径量度计算单元的第二输入的一个或多个路径度量计算单元。 路径度量计算单元从分支度量值计算路径度量值,路径度量值正在指示样本序列对应于状态序列的可能性。

    Detector, reproduction system, receiver and method
    23.
    发明授权
    Detector, reproduction system, receiver and method 失效
    检测器,再现系统,接收器和方法

    公开(公告)号:US06731699B2

    公开(公告)日:2004-05-04

    申请号:US09860308

    申请日:2001-05-18

    IPC分类号: H04L2706

    摘要: A detector (30) is described for detecting a digital signal (Bio) out of an input information signal (Ai) which represents a runlength limited sequence, the runlength having a minimal value m. The detector (30) generates (60, 62) a preliminary binary signal (Bi) out of the input information signal (Ai). A composed sequence of subsequent bits is identified (86) within the preliminary binary signal (Bi) which subsequently includes at least a first neighboring bit of a run of length greater or equal than m+1, one or more further runs of length m and at least a second neighboring bit of a run of length greater or equal than intl. A set of sequences are generated (84, 86). These sequences can be obtained from said composed sequence by changing polarities of binary values within the composed sequence without violating the runlength constraint. The set includes the composed sequence obtained from the preliminary binary signal. A path metric (D) is calculated (94, 96) for two or more sequences of the set, said path metric (D) being the sum of the branch metrics (d) for the path through the trellis corresponding to the sequence of binary values. The sequence from the set which has the highest likelihood of corresponding to the input sequence represented by the input information signal (Ai) is identified (86, 98, 100) on the basis of the path metric.

    摘要翻译: 描述了一种检测器(30),用于检测表示游程受限序列的输入信息信号(Ai)中的数字信号(Bio),该游程长度具有最小值m。 检测器(30)从输入信息信号(Ai)中产生(60,62)初步二进制信号(Bi)。 在初始二进制信号(Bi)内识别(86)的后续比特的组合序列,其随后包括长度大于或等于m + 1的游程的至少第一相邻比特,长度为m的一个或多个另外的游程, 长度大于或等于intl的游程的至少第二相邻位。 生成一组序列(84,86)。 可以通过改变组合序列内的二进制值的极性而不违反游程长度约束从所述组合序列获得这些序列。 该集合包括从初步二进制信号获得的合成序列。 对于集合的两个或多个序列计算路径度量(D)(94,96),所述路径度量(D)是通过与二进制序列对应的网格的路径的分支度量(d)之和, 价值观。 基于路径度量来识别具有与由输入信息信号(Ai)表示的输入序列相对应的最高似然度的集合的序列(86,98,100)。

    Device and method for processing a digital information signal
    24.
    发明授权
    Device and method for processing a digital information signal 失效
    用于处理数字信息信号的装置和方法

    公开(公告)号:US06700509B1

    公开(公告)日:2004-03-02

    申请号:US09702347

    申请日:2000-10-31

    IPC分类号: H03M700

    摘要: A device and associated method for processing a digital information signal from a channel signal. The digital information signal is runlength limited with one or more constraints. The device comprises receiving means for receiving the channel signal and means for comparing a detected runlength with a predetermined value indicative of a minimum runlength constraint or a maximum runlength constraint of the channel signal and for generating a control signal when the detected runlength violates said constraint. The device further comprises substitute means for in response to the control signal deleting or inserting an element in the channel signal.

    摘要翻译: 一种用于从信道信号处理数字信息信号的装置和相关方法。 数字信息信号是由一个或多个约束限制的游程长度。 该装置包括用于接收信道信号的接收装置和用于将检测到的游程长度与指示信道信号的最小游程长度约束或最大游程长度约束的预定值进行比较的装置,并且用于当检测到的游程长度违反所述约束时产生控制信号。 该设备还包括用于响应于控制信号删除或插入信道信号中的元素的替代装置。

    METHOD OF CONVERTING A STREAM OF DATABITS OF A BINARY INFORMATION SIGNAL INTO A STREAM OF DATABITS OF A CONSTRAINED BINARY CHANNEL SIGNAL, DEVICE FOR ENCODING, SIGNAL COMPRISING A STREAM OF DATABITS OF A CONSTRAINED BINARY CHANNEL SIGNAL, RECORD CARRIER AND DEVICE FOR DECODING
    25.
    发明授权
    METHOD OF CONVERTING A STREAM OF DATABITS OF A BINARY INFORMATION SIGNAL INTO A STREAM OF DATABITS OF A CONSTRAINED BINARY CHANNEL SIGNAL, DEVICE FOR ENCODING, SIGNAL COMPRISING A STREAM OF DATABITS OF A CONSTRAINED BINARY CHANNEL SIGNAL, RECORD CARRIER AND DEVICE FOR DECODING 失效
    将二进制信息信号的数据流转换成约束二进制信道信号的数据流的方法,用于编码的信号,包含受约束的二进制信道信号的数据流的信号,记录载体和用于解码的装置的方法

    公开(公告)号:US06469645B2

    公开(公告)日:2002-10-22

    申请号:US09757119

    申请日:2001-01-08

    IPC分类号: H03M700

    CPC分类号: H03M13/31 G11B20/1426

    摘要: A method of converting a stream of databits of a binary information signal into a stream of databits of a constrained binary channel signal. This stream of databits of the information signal is divided into n-bit information words. These information words are converted into m1-bit channel words in accordance with a channel code C1, or m2-bit channel words in accordance with a channel code C2, where m1, m2, and n are intergers such that m2>m1≧n. The m2-bit channel word is chosen from of at least two m2-bit channel words, at least two of which have opposite parities. The concatenated m1-bit channel words and the m2-bit channel words comply with a runlength constraint of the constrained binary channel signal. The constrained binary channel signal may be recorded on a record carrier.

    摘要翻译: 一种将二进制信息信号的数据位流转换成受限二进制信道信号的数据位流的方法。 该信息信号的数据流流被分成n位信息字。 这些信息字根据信道码C1或m2位信道字根据信道码C2转换成m1位信道字,其中m1,m2和n是间隔,使得m2> m1> = n 。 从至少两个m2位通道字中选择m2位通道字,其中至少两个通道字具有相反的奇偶校验。 级联的m1位通道字和m2位通道字符合受限二进制通道信号的游程长度约束。 受限二进制信道信号可以被记录在记录载体上。

    Methods and patterning devices for measuring phase aberration
    26.
    发明授权
    Methods and patterning devices for measuring phase aberration 有权
    用于测量相位差的方法和图案形成装置

    公开(公告)号:US09201311B2

    公开(公告)日:2015-12-01

    申请号:US13533082

    申请日:2012-06-26

    摘要: A method of measuring a phase difference between two regions in an aberration function: Reference structures are produced on a substrate using illumination that minimizes effects of phase aberration. A grating is produced on the substrate using a phase-shift grating reticle to produce, in the exit pupil, a pair of diffracted non-zero orders, while forbidding other diffracted orders and produces interference fringes formed by interference between the pair. The interference contributes to a first grating on the substrate. Overlay error is measured between the grating and the reference structure using diffraction-based or image-based overlay measurements. A phase aberration function for the exit pupil of the lithographic apparatus can then be determined from the measured overlay errors.

    摘要翻译: 测量像差功能中的两个区域之间的相位差的方法:使用最小化相位差的影响的照明在基板上产生参考结构。 使用相移光栅掩模板在基板上产生光栅,以在出射光瞳中产生一对衍射的非零阶,同时禁止其它衍射级并产生由该对之间的干涉形成的干涉条纹。 该干涉有助于衬底上的第一光栅。 使用基于衍射或基于图像的覆盖测量,在光栅和参考结构之间测量叠加误差。 然后可以从测量的重叠误差确定光刻设备的出射光瞳的相位差函数。

    Methods and Patterning Devices For Measuring Phase Aberration
    27.
    发明申请
    Methods and Patterning Devices For Measuring Phase Aberration 有权
    用于测量相位偏差的方法和图案化设备

    公开(公告)号:US20130010306A1

    公开(公告)日:2013-01-10

    申请号:US13533082

    申请日:2012-06-26

    IPC分类号: G01B11/14

    摘要: A method of measuring a phase difference between two regions in an aberration function: Reference structures are produced on a substrate using illumination that minimizes effects of phase aberration. A grating is produced on the substrate using a phase-shift grating reticle to produce, in the exit pupil, a pair of diffracted non-zero orders, while forbidding other diffracted orders and produces interference fringes formed by interference between the pair. The interference contributes to a first grating on the substrate. Overlay error is measured between the grating and the reference structure using diffraction-based or image-based overlay measurements. A phase aberration function for the exit pupil of the lithographic apparatus can then be determined from the measured overlay errors.

    摘要翻译: 测量像差功能中的两个区域之间的相位差的方法:使用最小化相位差的影响的照明在基板上产生参考结构。 使用相移光栅掩模板在基板上产生光栅,以在出射光瞳中产生一对衍射的非零阶,同时禁止其它衍射级并产生由该对之间的干涉形成的干涉条纹。 该干涉有助于衬底上的第一光栅。 使用基于衍射或基于图像的覆盖测量,在光栅和参考结构之间测量叠加误差。 然后可以从测量的重叠误差确定光刻设备的出射光瞳的相位差函数。

    Modulation Coding with Rll (1,K) and Mtr (2) Constraints
    28.
    发明申请
    Modulation Coding with Rll (1,K) and Mtr (2) Constraints 审中-公开
    用Rll(1,K)和Mtr(2)约束的调制编码

    公开(公告)号:US20080316071A1

    公开(公告)日:2008-12-25

    申请号:US11575078

    申请日:2005-09-09

    IPC分类号: H03M7/46

    摘要: This invention relates to a method of converting a user bitstream into a coded bitstream by means of a runlengh limited (d, k) channel code where the channel code has a constraint of d=1. In order to ensure an improvement in bit detection performance an additional RMTR constraint of r=2 is imposed limiting to two the maximum number of minimum runs allowed by the d=1 constraint. An additional advantage of such a code is a limitation of the back-tracking depth of a Viterbi bit-detector Based on two different k constraints the construction of such d=1 and r=2 codes is disclosed.

    摘要翻译: 本发明涉及一种通过利用限制(d,k)信道码将用户比特流转换为编码比特流的方法,其中信道码具有d = 1的约束。 为了确保位检测性能的提高,r = 2的附加RMTR约束被强制限制为由d = 1约束允许的最大最小数目的两个。 这种代码的另外的优点是维特比比特检测器的反向跟踪深度的限制基于两个不同的k约束,公开了这样的d = 1和r = 2代码的构造。

    Method of storing or decoding a stream of bits
    30.
    发明授权
    Method of storing or decoding a stream of bits 失效
    存储或解码比特流的方法

    公开(公告)号:US07174497B2

    公开(公告)日:2007-02-06

    申请号:US09933791

    申请日:2001-08-21

    IPC分类号: H03M13/00

    摘要: The invention relates to a method of storing a number of data bits of a secondary channel (30) in the frame of a main channel (20) and to a method of decoding a stream of bits relating to a secondary channel (30) embedded in the frames of a main channel (20) into a stream of data bits (62). In order to enable a certain synchronization and to guarantee a fixed amount of storage capacity in the secondary channel as well as to be able to correct deletions or insertions of bits in the secondary channel it is proposed according to the invention to form a secondary frame (11) having a fixed number of frame bits, to fill a fixed part of the secondary frame (11) with data bits (113), an end-bit (114) set to a first bit-value and, if necessary, with filling bits (115) set to a second bit-value, to encode the secondary frame (11) producing encoded data bits (113) and parity bits (112), which are finally embedded in the frame of the main channel (20). The invention relates also to a device for storing a number of data bits of the secondary channel (30) in the frame of a main channel (20) and to a device for decoding a stream of bits of relating to a secondary channel (30) embedded in the frames of a main channel (20).

    摘要翻译: 本发明涉及一种在主信道(20)的帧中存储辅助信道(30)的多个数据位的方法,以及一种解码与嵌入在第二信道(30)中的辅助信道(30)有关的位流的方法 主通道(20)的帧转换成数据位流(62)。 为了实现一定的同步并且保证次级信道中的固定量的存储容量以及能够纠正次级信道中的位的删除或插入,根据本发明提出了形成辅助帧( 11)具有固定数量的帧比特,以数据比特(113)填充辅助帧(11)的固定部分,将终端位(114)设置为第一比特值,并且如果需要,填充 位(115)被设置为第二位值,以编码产生编码数据位(113)和奇偶校验位(112)的辅助帧(11),其最终嵌入在主通道(20)的帧中。 本发明还涉及一种用于在主信道(20)的帧中存储辅助信道(30)的多个数据比特的装置和用于解码与次信道(30)有关的比特流的装置, 嵌入在主通道(20)的框架中。