公开(公告)号：US08498182B1

公开(公告)日：2013-07-30

申请号：US13490283

申请日：2012-06-06

申请人： Hamid Balamane ,  Jordan A. Katine ,  Neil L. Robertson ,  Matteo Staffaroni ,  Barry C. Stipe

发明人： Hamid Balamane ,  Jordan A. Katine ,  Neil L. Robertson ,  Matteo Staffaroni ,  Barry C. Stipe

IPC分类号： G11B11/00

CPC分类号： G11B5/3116 ,  G02B6/107 ,  G11B5/314 ,  G11B2005/0021

摘要： The presented embodiments generally relate to designing an antenna of an optical transducer (e.g., a near-field transducer or near-field optical source) that focuses the optical energy of a radiation source (e.g., a laser) onto a magnetic media, thereby heating the media. Specifically, the antenna is designed to wrap-around an aperture of the optical transducer such that at least a portion of the antenna is between a main pole of a write head and a surface of the aperture that faces the main pole. Moreover, the antenna may wrap-around the aperture such that it directly contacts the main pole.

摘要翻译： 所提出的实施例通常涉及将辐射源（例如，激光）的光能聚焦到磁性介质上的光学换能器（例如，近场换能器或近场光源）的天线的设计，从而加热 媒体。 具体地说，天线被设计成环绕光学换能器的孔径，使得天线的至少一部分位于写入头的主极和面对主极的孔的表面之间。 此外，天线可以环绕孔径使得其直接接触主极。

公开(公告)号：US07765677B2

公开(公告)日：2010-08-03

申请号：US11407320

申请日：2006-04-18

申请人： Hamid Balamane ,  Yvette Chung Nga Winton ,  Yi Zheng

发明人： Hamid Balamane ,  Yvette Chung Nga Winton ,  Yi Zheng

IPC分类号： G11B5/193

CPC分类号： G11B5/3163 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/4906

摘要： A method of manufacturing a write pole that prevents P2 pedestal consumption during ion milling removal of coil and pole seed layers. The write head can be constructed by forming a first pole and then forming a magnetic pedestal (P2) over the first pole. A protective layer of, for example, alumina is deposited over a portion of the pedestal in the pole tip region, leaving a portion of the pedestal uncovered in the flare region. A coil seed layer can then be deposited and a coil formed. When the coil seed layer is removed, such as by ion milling, the pole tip region of the pedestal is protected from the ion milling by the protective layer. Similarly, a top pole can be deposited by first depositing an electrically conductive, magnetic seed layer and then plating the top pole. When the top pole seed layer is removed by ion milling, the pole tip region of the pedestal is protected from removal by the protective layer.

摘要翻译： 一种制造写入极的方法，该写入极在离子铣除去线圈和极种子层期间防止P2基座消耗。 写头可以通过形成第一极，然后在第一极上形成磁性基座（P2）来构造。 例如氧化铝的保护层沉积在极尖区域中的基座的一部分上，使基座的一部分露出在扩口区域中。 然后可以沉积线圈种子层并形成线圈。 当线圈种子层被去除时，例如通过离子铣削，底座的极尖区域被保护层防止离子铣削。 类似地，可以通过首先沉积导电的磁性种子​​层然后电镀顶极来沉积顶极。 当通过离子研磨去除顶极种子层时，保护基座的极尖区域被保护层除去。

公开(公告)号：US20100163521A1

公开(公告)日：2010-07-01

申请号：US12345715

申请日：2008-12-30

申请人： Hamid Balamane ,  Thomas Dudley Boone, JR. ,  Jordan Asher Katine ,  Barry Cushing Stipe

发明人： Hamid Balamane ,  Thomas Dudley Boone, JR. ,  Jordan Asher Katine ,  Barry Cushing Stipe

IPC分类号： B44C1/22 ,  B05D5/12

CPC分类号： G11B5/314 ,  G11B5/3163 ,  G11B5/6088 ,  G11B2005/0021

摘要： A method of fabricating a c-aperture or E-antenna plasmonic near field source for thermal assisted recording applications in hard disk drives is disclosed. A c-aperture or E-antenna is built for recording head applications. The technique employs e-beam lithography, partial reactive ion etching and metal refill to build the c-apertures. This process strategy has the advantage over other techniques in the self-alignment of the c-aperture notch to the c-aperture internal diameter, the small number of process steps required, and the precise and consistent shape of the c-aperture notch itself.

摘要翻译： 公开了一种在硬盘驱动器中制造用于热辅助记录应用的c孔径或E-antenna等离激元近场源的方法。 C孔径或E天线用于记录头部应用。 该技术采用电子束光刻，部分反应离子蚀刻和金属填充来构建c-孔。 该过程策略相对于c孔径切口对c孔径内径的自对准，所需的少量工艺步骤以及c孔口凹口本身的精确且一致的形状具有优于其它技术的优点。

公开(公告)号：US20090154027A1

公开(公告)日：2009-06-18

申请号：US11957466

申请日：2007-12-16

申请人： Hamid Balamane ,  Jeffrey R. Childress ,  Robert E. Fontana, JR. ,  Jordan A. Katine ,  Neil Smith

发明人： Hamid Balamane ,  Jeffrey R. Childress ,  Robert E. Fontana, JR. ,  Jordan A. Katine ,  Neil Smith

IPC分类号： G11B5/33

CPC分类号： G11B5/3932 ,  B82Y10/00 ,  B82Y25/00 ,  G11B5/3912 ,  G11B2005/3996

摘要： Read sensors and associated methods of fabrication are disclosed. A read sensor as disclosed herein includes a first shield, a sensor stack including an antiparallel (AP) free layer, and insulating material disposed on the sensor stack. A aperture is formed through the insulating material above the sensor stack so that a subsequently deposited second shield is electrically coupled to the sensor stack through the aperture. The width of the aperture controls the current density that is injected into the top of the sensor stack. Also, hard bias structures may be formed to be electrically coupled to the sensor stack. The electrical coupling of the sensor stack and the hard bias structures allows current to laterally spread out as it passes through the sensor stack, and hence, provides a non-uniform current density.

摘要翻译： 公开了传感器和相关的制造方法。 本文公开的读取传感器包括第一屏蔽层，包括反平行（AP）自由层的传感器堆叠以及设置在传感器堆叠上的绝缘材料。 通过传感器堆叠上方的绝缘材料形成孔，使得随后沉积的第二屏蔽件通过孔电耦合到传感器堆叠。 光圈的宽度控制注入到传感器叠层顶部的电流密度。 此外，可以形成硬偏置结构以电耦合到传感器堆叠。 传感器堆叠和硬偏置结构的电耦合允许电流在其通过传感器堆叠时横向展开，因此提供不均匀的电流密度。

公开(公告)号：US07449790B2

公开(公告)日：2008-11-11

申请号：US10928466

申请日：2004-08-26

申请人： Yi Zheng ,  Howard Zolla ,  Nian-Xiang Sun ,  Hamid Balamane

发明人： Yi Zheng ,  Howard Zolla ,  Nian-Xiang Sun ,  Hamid Balamane

IPC分类号： H01L23/544

CPC分类号： G03F9/708 ,  G03F9/7076 ,  G03F9/7084

摘要： Methods and systems of enhancing stepper alignment signals and metrology alignment target signals. In one embodiment, a plurality of alternating rows comprising a first material of a first height and a second material of a second height are constructed. The first material and the second material are selected to enhance the contrast of the mark when imaged for alignment of photolithographic structures.

摘要翻译： 增强步进对准信号和计量校准目标信号的方法和系统。 在一个实施例中，构造了包括第一高度的第一材料和第二高度的第二材料的多个交替排。 选择第一材料和第二材料以增强对于光刻结构的对准成像时的标记的对比度。

公开(公告)号：US20060043615A1

公开(公告)日：2006-03-02

申请号：US10928466

申请日：2004-08-26

申请人： Yi Zheng ,  Howard Zolla ,  Nian-Xiang Sun ,  Hamid Balamane

发明人： Yi Zheng ,  Howard Zolla ,  Nian-Xiang Sun ,  Hamid Balamane

IPC分类号： H01L23/544

CPC分类号： G03F9/708 ,  G03F9/7076 ,  G03F9/7084

摘要： Methods and systems of enhancing stepper alignment signals and metrology alignment target signals. In one embodiment, a plurality of alternating rows comprising a first material of a first height and a second material of a second height are constructed. The first material and the second material are selected to enhance the contrast of the mark when imaged for alignment of photolithographic structures.

摘要翻译： 增强步进对准信号和计量校准目标信号的方法和系统。 在一个实施例中，构造了包括第一高度的第一材料和第二高度的第二材料的多个交替排。 选择第一材料和第二材料以增强对于光刻结构的对准成像时的标记的对比度。

公开(公告)号：US08335056B2

公开(公告)日：2012-12-18

申请号：US11957466

申请日：2007-12-16

申请人： Hamid Balamane ,  Jeffrey R. Childress ,  Robert E. Fontana, Jr. ,  Jordan A. Katine ,  Neil Smith

发明人： Hamid Balamane ,  Jeffrey R. Childress ,  Robert E. Fontana, Jr. ,  Jordan A. Katine ,  Neil Smith

IPC分类号： G11B5/39

CPC分类号： G11B5/3932 ,  B82Y10/00 ,  B82Y25/00 ,  G11B5/3912 ,  G11B2005/3996

摘要： Read sensors and associated methods of fabrication are disclosed. A read sensor as disclosed herein includes a first shield, a sensor stack including an antiparallel (AP) free layer, and insulating material disposed on the sensor stack. A aperture is formed through the insulating material above the sensor stack so that a subsequently deposited second shield is electrically coupled to the sensor stack through the aperture. The width of the aperture controls the current density that is injected into the top of the sensor stack. Also, hard bias structures may be formed to be electrically coupled to the sensor stack. The electrical coupling of the sensor stack and the hard bias structures allows current to laterally spread out as it passes through the sensor stack, and hence, provides a non-uniform current density.

摘要翻译： 公开了传感器和相关的制造方法。 本文公开的读取传感器包括第一屏蔽层，包括反平行（AP）自由层的传感器堆叠以及设置在传感器堆叠上的绝缘材料。 通过传感器堆叠上方的绝缘材料形成孔，使得随后沉积的第二屏蔽件通过孔电耦合到传感器堆叠。 光圈的宽度控制注入到传感器叠层顶部的电流密度。 此外，可以形成硬偏置结构以电耦合到传感器堆叠。 传感器堆叠和硬偏置结构的电耦合允许电流在其通过传感器堆叠时横向展开，因此提供不均匀的电流密度。

公开(公告)号：US20120070784A1

公开(公告)日：2012-03-22

申请号：US13306582

申请日：2011-11-29

申请人： Hamid Balamane ,  Thomas Dudley Boone, JR. ,  Jordan Asher Katine ,  Barry Cushing Stipe

发明人： Hamid Balamane ,  Thomas Dudley Boone, JR. ,  Jordan Asher Katine ,  Barry Cushing Stipe

IPC分类号： G03F7/20

CPC分类号： G11B5/314 ,  G11B5/3163 ,  G11B5/6088 ,  G11B2005/0021

摘要： A method of fabricating a c-aperture or E-antenna plasmonic near field source for thermal assisted recording applications in hard disk drives is disclosed. A c-aperture or E-antenna is built for recording head applications. The technique employs e-beam lithography, partial reactive ion etching and metal refill to build the c-apertures. This process strategy has the advantage over other techniques in the self-alignment of the c-aperture notch to the c-aperture internal diameter, the small number of process steps required, and the precise and consistent shape of the c-aperture notch itself.

摘要翻译： 公开了一种在硬盘驱动器中制造用于热辅助记录应用的c孔径或E-antenna等离激元近场源的方法。 C孔径或E天线用于记录头部应用。 该技术采用电子束光刻，部分反应离子蚀刻和金属填充来构建c-孔。 该过程策略相对于c孔径切口对c孔径内径的自对准，所需的少量工艺步骤以及c孔口凹口本身的精确且一致的形状具有优于其它技术的优点。

公开(公告)号：US08092704B2

公开(公告)日：2012-01-10

申请号：US12345715

申请日：2008-12-30

申请人： Hamid Balamane ,  Thomas Dudley Boone, Jr. ,  Jordan Asher Katine ,  Barry Cushing Stipe

发明人： Hamid Balamane ,  Thomas Dudley Boone, Jr. ,  Jordan Asher Katine ,  Barry Cushing Stipe

IPC分类号： B44C1/22 ,  B23P15/00

CPC分类号： G11B5/314 ,  G11B5/3163 ,  G11B5/6088 ,  G11B2005/0021

摘要： A method of fabricating a c-aperture or E-antenna plasmonic near field source for thermal assisted recording applications in hard disk drives is disclosed. A c-aperture or E-antenna is built for recording head applications. The technique employs e-beam lithography, partial reactive ion etching and metal refill to build the c-apertures. This process strategy has the advantage over other techniques in the self-alignment of the c-aperture notch to the c-aperture internal diameter, the small number of process steps required, and the precise and consistent shape of the c-aperture notch itself.

摘要翻译： 公开了一种在硬盘驱动器中制造用于热辅助记录应用的c孔径或E-antenna等离激元近场源的方法。 C孔径或E天线用于记录头部应用。 该技术采用电子束光刻，部分反应离子蚀刻和金属填充来构建c-孔。 该过程策略相对于c孔径切口对c孔径内径的自对准，所需的少量工艺步骤以及c孔口凹口本身的精确且一致的形状具有优于其它技术的优点。

公开(公告)号：US20070242389A1

公开(公告)日：2007-10-18

申请号：US11407320

申请日：2006-04-18

申请人： Hamid Balamane ,  Yvette Winton ,  Yi Zheng

发明人： Hamid Balamane ,  Yvette Winton ,  Yi Zheng

IPC分类号： G11B5/147

CPC分类号： G11B5/3163 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/4906

摘要： A method of manufacturing a write pole that prevents P2 pedestal consumption during ion milling removal of coil and pole seed layers. The write head can be constructed by forming a first pole and then forming a magnetic pedestal (P2) over the first pole. A protective layer of, for example, alumina is deposited over a portion of the pedestal in the pole tip region, leaving a portion of the pedestal uncovered in the flare region. A coil seed layer can then be deposited and a coil formed. When the coil seed layer is removed, such as by ion milling, the pole tip region of the pedestal is protected from the ion milling by the protective layer. Similarly, a top pole can be deposited by first depositing an electrically conductive, magnetic seed layer and then plating the top pole. When the top pole seed layer is removed by ion milling, the pole tip region of the pedestal is protected from removal by the protective layer.

摘要翻译： 一种制造写入极的方法，该写入极在离子铣除去线圈和极种子层期间防止P2基座消耗。 写头可以通过形成第一极，然后在第一极上形成磁性基座（P2）来构造。 例如氧化铝的保护层沉积在极尖区域中的基座的一部分上，使基座的一部分露出在扩口区域中。 然后可以沉积线圈种子层并形成线圈。 当线圈种子层被去除时，例如通过离子铣削，底座的极尖区域被保护层防止离子铣削。 类似地，可以通过首先沉积导电的磁性种子​​层然后电镀顶极来沉积顶极。 当通过离子研磨去除顶极种子层时，保护基座的极尖区域被保护层除去。