公开(公告)号：US07449790B2

公开(公告)日：2008-11-11

申请号：US10928466

申请日：2004-08-26

申请人： Yi Zheng ,  Howard Zolla ,  Nian-Xiang Sun ,  Hamid Balamane

发明人： Yi Zheng ,  Howard Zolla ,  Nian-Xiang Sun ,  Hamid Balamane

IPC分类号： H01L23/544

CPC分类号： G03F9/708 ,  G03F9/7076 ,  G03F9/7084

摘要： Methods and systems of enhancing stepper alignment signals and metrology alignment target signals. In one embodiment, a plurality of alternating rows comprising a first material of a first height and a second material of a second height are constructed. The first material and the second material are selected to enhance the contrast of the mark when imaged for alignment of photolithographic structures.

摘要翻译： 增强步进对准信号和计量校准目标信号的方法和系统。 在一个实施例中，构造了包括第一高度的第一材料和第二高度的第二材料的多个交替排。 选择第一材料和第二材料以增强对于光刻结构的对准成像时的标记的对比度。

公开(公告)号：US20060043615A1

公开(公告)日：2006-03-02

申请号：US10928466

申请日：2004-08-26

申请人： Yi Zheng ,  Howard Zolla ,  Nian-Xiang Sun ,  Hamid Balamane

发明人： Yi Zheng ,  Howard Zolla ,  Nian-Xiang Sun ,  Hamid Balamane

IPC分类号： H01L23/544

CPC分类号： G03F9/708 ,  G03F9/7076 ,  G03F9/7084

摘要： Methods and systems of enhancing stepper alignment signals and metrology alignment target signals. In one embodiment, a plurality of alternating rows comprising a first material of a first height and a second material of a second height are constructed. The first material and the second material are selected to enhance the contrast of the mark when imaged for alignment of photolithographic structures.

摘要翻译： 增强步进对准信号和计量校准目标信号的方法和系统。 在一个实施例中，构造了包括第一高度的第一材料和第二高度的第二材料的多个交替排。 选择第一材料和第二材料以增强对于光刻结构的对准成像时的标记的对比度。

公开(公告)号：US20070115584A1

公开(公告)日：2007-05-24

申请号：US11286077

申请日：2005-11-23

申请人： Hamid Balamane ,  Yimin Hsu ,  Aron Pentek ,  Yi Zheng

发明人： Hamid Balamane ,  Yimin Hsu ,  Aron Pentek ,  Yi Zheng

IPC分类号： G11B5/147

CPC分类号： G11B5/3163 ,  G11B5/112 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/3146 ,  G11B5/315 ,  Y10T29/49021

摘要： A perpendicular write head having a wrap around trailing shield for reducing stray field writing and adjacent track interference. A method for constructing such a write head allows for excellent control of side shield gap thickness and trailing shield gap thickness, and allows the ratio of side gap to trailing gap thicknesses to be maintained at about two to one as desired. The method includes depositing forming a write pole by constructing a mask which may include a bi-layer hard mask, and then ion milling to form the write pole. Once the write pole has been formed, a layer of alumina or some other non-magnetic material can be conformally deposited. A reactive ion mill (RIM) can be performed to open up the top of the write pole (remove the horizontally disposed portions of the alumina layer). Then, a second layer of alumina or some other non-magnetic material can be deposited, and the write pole can be plated. The thickness of the side shield gaps is defined by the sum of the final thicknesses of the first and second alumina layers, while the thickness of the first magnetic layer defines the thickness of the trailing shield gap.

摘要翻译： 垂直写头，其具有围绕后屏蔽的卷绕，用于减少杂散场写入和相邻轨道干涉。 用于构造这样的写头的方法允许对侧屏蔽间隙厚度和后屏蔽间隙厚度的优良控制，并且允许侧间隙与后间隙厚度的比率根据需要保持在大约二对一。 该方法包括通过构成可包括双层硬掩模的掩模沉积形成写入极，然后进行离子铣削以形成写入极。 一旦形成了写极，就可以共形沉积一层氧化铝或其它非磁性材料。 可以执行反应离子磨（RIM）以打开写柱的顶部（去除氧化铝层的水平放置的部分）。 然后，可以沉积第二层氧化铝或一些其它非磁性材料，并且可以对写入极进行电镀。 侧屏蔽间隙的厚度由第一和第二氧化铝层的最终厚度之和限定，而第一磁性层的厚度限定了后屏蔽间隙的厚度。

公开(公告)号：US07765677B2

公开(公告)日：2010-08-03

申请号：US11407320

申请日：2006-04-18

申请人： Hamid Balamane ,  Yvette Chung Nga Winton ,  Yi Zheng

发明人： Hamid Balamane ,  Yvette Chung Nga Winton ,  Yi Zheng

IPC分类号： G11B5/193

CPC分类号： G11B5/3163 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/4906

摘要： A method of manufacturing a write pole that prevents P2 pedestal consumption during ion milling removal of coil and pole seed layers. The write head can be constructed by forming a first pole and then forming a magnetic pedestal (P2) over the first pole. A protective layer of, for example, alumina is deposited over a portion of the pedestal in the pole tip region, leaving a portion of the pedestal uncovered in the flare region. A coil seed layer can then be deposited and a coil formed. When the coil seed layer is removed, such as by ion milling, the pole tip region of the pedestal is protected from the ion milling by the protective layer. Similarly, a top pole can be deposited by first depositing an electrically conductive, magnetic seed layer and then plating the top pole. When the top pole seed layer is removed by ion milling, the pole tip region of the pedestal is protected from removal by the protective layer.

摘要翻译： 一种制造写入极的方法，该写入极在离子铣除去线圈和极种子层期间防止P2基座消耗。 写头可以通过形成第一极，然后在第一极上形成磁性基座（P2）来构造。 例如氧化铝的保护层沉积在极尖区域中的基座的一部分上，使基座的一部分露出在扩口区域中。 然后可以沉积线圈种子层并形成线圈。 当线圈种子层被去除时，例如通过离子铣削，底座的极尖区域被保护层防止离子铣削。 类似地，可以通过首先沉积导电的磁性种子​​层然后电镀顶极来沉积顶极。 当通过离子研磨去除顶极种子层时，保护基座的极尖区域被保护层除去。

公开(公告)号：US07587811B2

公开(公告)日：2009-09-15

申请号：US11411561

申请日：2006-04-25

申请人： Hamid Balamane ,  Christian Rene Bonhote ,  Yimin Hsu ,  Aaron Neuhaus ,  Aron Pentek ,  Yi Zheng

发明人： Hamid Balamane ,  Christian Rene Bonhote ,  Yimin Hsu ,  Aaron Neuhaus ,  Aron Pentek ,  Yi Zheng

IPC分类号： G11B5/127 ,  H04R31/00

CPC分类号： G11B5/3163 ,  G11B5/1278 ,  G11B5/3116 ,  Y10T29/49021 ,  Y10T29/49032 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A method for manufacturing a magnetic write head for perpendicular magnetic recording having a write pole with a very narrow track width and well controlled critical dimensions. The write pole is formed by depositing an electrically conductive seed layer over a substrate, and then depositing a photo resist layer over the seed layer. The photo resist layer is photolithographically exposed and developed to form an opening or trench in the photoreist layer, the opening defining the pattern of the write pole. A magnetic material is then plated into the opening in the photoresist layer. The photo resist layer can then be removed by a chemical lift off, and portions of the seed layer that are not covered by the write pole can be removed by ion milling.

摘要翻译： 一种制造用于垂直磁记录的磁写头的方法，其具有具有非常窄的轨道宽度和良好控制的临界尺寸的写极。 写极通过在衬底上沉积导电种子层，然后在种子层上沉积光致抗蚀剂层而形成。 光致抗蚀剂层被光刻地曝光和显影以在光致镜层中形成开口或沟槽，该开口限定写入极的图案。 然后将磁性材料电镀在光致抗蚀剂层的开口中。 然后可以通过化学剥离除去光致抗蚀剂层，并且可以通过离子铣削除去未被写入极覆盖的种子层的部分。

公开(公告)号：US20080002291A1

公开(公告)日：2008-01-03

申请号：US11411561

申请日：2006-04-25

申请人： Hamid Balamane ,  Christian Bonhote ,  Yimin Hsu ,  Aaron Neuhaus ,  Aron Pentek ,  Yi Zheng

发明人： Hamid Balamane ,  Christian Bonhote ,  Yimin Hsu ,  Aaron Neuhaus ,  Aron Pentek ,  Yi Zheng

IPC分类号： G11B5/127 ,  H04R31/00

CPC分类号： G11B5/3163 ,  G11B5/1278 ,  G11B5/3116 ,  Y10T29/49021 ,  Y10T29/49032 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A method for manufacturing a magnetic write head for perpendicular magnetic recording having a write pole with a very narrow track width and well controlled critical dimensions. The write pole is formed by depositing an electrically conductive seed layer over a substrate, and then depositing a photo resist layer over the seed layer. The photo resist layer is photolithographically exposed and developed to form an opening or trench in the photoreist layer, the opening defining the pattern of the write pole. A magnetic material is then plated into the opening in the photoresist layer. The photo resist layer can then be removed by a chemical lift off, and portions of the seed layer that are not covered by the write pole can be removed by ion milling.

摘要翻译： 一种制造用于垂直磁记录的磁写头的方法，其具有具有非常窄的轨道宽度和良好控制的临界尺寸的写极。 写极通过在衬底上沉积导电种子层，然后在种子层上沉积光致抗蚀剂层而形成。 光致抗蚀剂层被光刻地曝光和显影以在光致镜层中形成开口或沟槽，该开口限定写入极的图案。 然后将磁性材料电镀在光致抗蚀剂层的开口中。 然后可以通过化学剥离去除光致抗蚀剂层，并且可以通过离子铣削除去未被写入极覆盖的种子层的部分。

公开(公告)号：US20070242389A1

公开(公告)日：2007-10-18

申请号：US11407320

申请日：2006-04-18

申请人： Hamid Balamane ,  Yvette Winton ,  Yi Zheng

发明人： Hamid Balamane ,  Yvette Winton ,  Yi Zheng

IPC分类号： G11B5/147

CPC分类号： G11B5/3163 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/4906

摘要： A method of manufacturing a write pole that prevents P2 pedestal consumption during ion milling removal of coil and pole seed layers. The write head can be constructed by forming a first pole and then forming a magnetic pedestal (P2) over the first pole. A protective layer of, for example, alumina is deposited over a portion of the pedestal in the pole tip region, leaving a portion of the pedestal uncovered in the flare region. A coil seed layer can then be deposited and a coil formed. When the coil seed layer is removed, such as by ion milling, the pole tip region of the pedestal is protected from the ion milling by the protective layer. Similarly, a top pole can be deposited by first depositing an electrically conductive, magnetic seed layer and then plating the top pole. When the top pole seed layer is removed by ion milling, the pole tip region of the pedestal is protected from removal by the protective layer.

摘要翻译： 一种制造写入极的方法，该写入极在离子铣除去线圈和极种子层期间防止P2基座消耗。 写头可以通过形成第一极，然后在第一极上形成磁性基座（P2）来构造。 例如氧化铝的保护层沉积在极尖区域中的基座的一部分上，使基座的一部分露出在扩口区域中。 然后可以沉积线圈种子层并形成线圈。 当线圈种子层被去除时，例如通过离子铣削，底座的极尖区域被保护层防止离子铣削。 类似地，可以通过首先沉积导电的磁性种子​​层然后电镀顶极来沉积顶极。 当通过离子研磨去除顶极种子层时，保护基座的极尖区域被保护层除去。

公开(公告)号：US20070236832A1

公开(公告)日：2007-10-11

申请号：US11399820

申请日：2006-04-07

申请人： Hamid Balamane ,  Jyh-Shuey Lo ,  Yi Zheng

发明人： Hamid Balamane ,  Jyh-Shuey Lo ,  Yi Zheng

IPC分类号： G11B5/147

CPC分类号： G11B5/3163 ,  G11B5/1278 ,  Y10T29/49043

摘要： A lift-off method for forming write pole of a magnetic write head and write pole formed thereby is disclosed. A write pole including a hard mask on a top portion of the write pole is formed. A layer of material for reinforcing sidewall fencing of the write pole is deposited. Portions of the layer of material on top of the write pole are removed while the layer of material at the sidewall fencing is -left to provide support to the sidewall fencing.

摘要翻译： 公开了一种用于形成磁写头和由此形成的写磁极的写极的剥离方法。 形成在写入极的顶部包括硬掩模的写入极。 一层用于加强写柱的侧壁围栏的材料被沉积。 去除写磁极顶部的材料层的部分，同时侧壁围栏处的材料层是左侧，以向侧壁围栏提供支撑。

公开(公告)号：US08054586B2

公开(公告)日：2011-11-08

申请号：US11286077

申请日：2005-11-23

申请人： Hamid Balamane ,  Yimin Hsu ,  Aron Pentek ,  Yi Zheng

发明人： Hamid Balamane ,  Yimin Hsu ,  Aron Pentek ,  Yi Zheng

IPC分类号： G11B5/33 ,  G11B5/127

CPC分类号： G11B5/3163 ,  G11B5/112 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/3146 ,  G11B5/315 ,  Y10T29/49021

摘要： A perpendicular write head having a wrap around trailing shield for reducing stray field writing and adjacent track interference. A method for constructing such a write head allows for excellent control of side shield gap thickness and trailing shield gap thickness, and allows the ratio of side gap to trailing gap thicknesses to be maintained at about two to one as desired. The method includes depositing forming a write pole by constructing a mask which may include a bi-layer hard mask, and then ion milling to form the write pole. Once the write pole has been formed, a layer of alumina or some other non-magnetic material can be conformally deposited. A reactive ion mill (RIM) can be performed to open up the top of the write pole (remove the horizontally disposed portions of the alumina layer). Then, a second layer of alumina or some other non-magnetic material can be deposited, and the write pole can be plated. The thickness of the side shield gaps is defined by the sum of the final thicknesses of the first and second alumina layers, while the thickness of the first magnetic layer defines the thickness of the trailing shield gap.

摘要翻译： 垂直写头，其具有围绕后屏蔽的卷绕，用于减少杂散场写入和相邻轨道干涉。 用于构造这样的写头的方法允许对侧屏蔽间隙厚度和后屏蔽间隙厚度的优良控制，并且允许侧间隙与后间隙厚度的比率根据需要保持在大约二对一。 该方法包括通过构成可包括双层硬掩模的掩模沉积形成写入极，然后进行离子铣削以形成写入极。 一旦形成了写极，就可以共形沉积一层氧化铝或其它非磁性材料。 可以执行反应离子磨（RIM）以打开写柱的顶部（去除氧化铝层的水平放置的部分）。 然后，可以沉积第二层氧化铝或一些其它非磁性材料，并且可以对写入极进行电镀。 侧屏蔽间隙的厚度由第一和第二氧化铝层的最终厚度之和限定，而第一磁性层的厚度限定了后屏蔽间隙的厚度。

公开(公告)号：US07554764B2

公开(公告)日：2009-06-30

申请号：US11399820

申请日：2006-04-07

申请人： Hamid Balamane ,  Jyh-Shuey Lo ,  Yi Zheng

发明人： Hamid Balamane ,  Jyh-Shuey Lo ,  Yi Zheng

IPC分类号： G11B5/147

CPC分类号： G11B5/3163 ,  G11B5/1278 ,  Y10T29/49043

摘要： A lift-off method for forming write pole of a magnetic write head and write pole formed thereby is disclosed. A write pole including a hard mask on a top portion of the write pole is formed. A layer of material for reinforcing sidewall fencing of the write pole is deposited. Portions of the layer of material on top of the write pole are removed while the layer of material at the sidewall fencing is left to provide support to the sidewall fencing.

摘要翻译： 公开了一种用于形成磁写头和由此形成的写磁极的写极的剥离方法。 形成在写入极的顶部包括硬掩模的写入极。 一层用于加强写柱的侧壁围栏的材料被沉积。 除去写磁极顶部的材料层的部分，同时留下侧壁围栏处的材料层以向侧壁围栏提供支撑。