MEMS DEVICE, MANUFACTURING METHOD THEREOF, AND ELECTRONIC APPARATUS

    公开(公告)号:US20250019224A1

    公开(公告)日:2025-01-16

    申请号:US18280724

    申请日:2022-10-27

    Abstract: A MEMS device includes: a dielectric substrate; a driving electrode, first and second reference electrodes on the dielectric substrate; a first dielectric layer covering the driving electrode; and a membrane bridge on a side of the first dielectric layer away from the dielectric substrate, where a first gap is between the first reference electrode and the driving electrode; a second gap is between the second reference electrode and the driving electrode; and a thickness of a part of the first dielectric layer at each of the first and second gaps is greater than a thickness of the driving electrode; and/or, a second dielectric layer is on a side of a bridge deck of the membrane bridge close to the dielectric substrate, and an orthographic projection of the second dielectric layer on the dielectric substrate covers at least an orthographic projection of the driving electrode on the dielectric substrate.

    PHASE MODULATION SURFACE UNIT, PHASE MODULATION SURFACE STRUCTURE, AND TERMINAL DEVICE

    公开(公告)号:US20240396499A1

    公开(公告)日:2024-11-28

    申请号:US18693671

    申请日:2022-08-23

    Abstract: Disclosed are a phase modulation surface unit, a phase modulation surface structure, and a terminal device. The phase modulation surface unit includes at least two phase-shifting layers which are stacked, where the phase-shifting layers each include: a first substrate; a second substrate; the first phase-shifting surface layer including at least one first electrode pattern extending in a first direction; the second phase-shifting surface layer including at least one second electrode pattern extending in a second direction and has one-to-one correspondence to the first electrode pattern, and the orthographic projection of the second electrode pattern on the first substrate intersecting with that of the corresponding first electrode pattern on the first substrate; and an tunable dielectric layer between the first phase-shifting surface layer and the second phase-shifting surface layer.

    PHASE SHIFTER, DRIVING METHOD THEREFOR, AND ANTENNA

    公开(公告)号:US20230352804A1

    公开(公告)日:2023-11-02

    申请号:US17638968

    申请日:2021-03-24

    CPC classification number: H01P1/18 H01Q3/36

    Abstract: Provided are a phase shifter, a driving method therefor and an antenna. The phase shifter includes a first substrate and a second substrate, which are disposed opposite to each other, and a first dielectric layer disposed therebetween; the first substrate includes: a first base, and a first reference electrode layer disposed on a side of the first base close to the first dielectric layer, and including first reference electrodes insulated and spaced apart from one another and each having a first opening; the second substrate includes a second base, first transmission lines on the second base and spaced apart from one another; the first transmission lines are in one-to-one correspondence with the first reference electrodes; an orthographic projection of a first transmission end of each first transmission line on the second base at least partially overlaps that of the first opening corresponding thereto on the second base.

Patent Agency Ranking