Silicon-based modulator with different transition zone thicknesses

    公开(公告)号:US12117678B2

    公开(公告)日:2024-10-15

    申请号:US18323309

    申请日:2023-05-24

    CPC classification number: G02F1/025 G02F1/0156 G02F2202/06 G02F2202/105

    Abstract: An optical modulator includes a waveguide core; a first transition zone located between a first side of the waveguide core and a first electrical contact region; and a second transition zone located between a second side of the waveguide core and a second electrical contact region, wherein one or more of the first transition zone and second transition zone has a variable thickness. The variable thickness is confined to the one or more of the first transition zone and second transition zone. The variable thickness removes a portion of the highly doped first transition zone and the highly doped second transition zone thereby reducing contact resistance.

    Providing a drive signal for optical modulator portions

    公开(公告)号:US11740533B2

    公开(公告)日:2023-08-29

    申请号:US17474105

    申请日:2021-09-14

    CPC classification number: G02F1/2255 G02F1/025 G02F2201/127

    Abstract: A first transmission line comprises a first pair of electrodes receiving an electrical drive comprising first and second drive signals, which are loaded by a first series of p-n junctions applying optical phase modulation to respective optical waves propagating over a first section of the first and second optical waveguide arms of an MZI. A second transmission line comprises a second pair of electrodes configured to receive the electrical drive after an electrical signal delay. The second pair of electrodes are loaded by a second series of p-n junctions applying optical phase modulation to the respective optical waves propagating over a second section of the first and second optical waveguide arms after propagation over the first section. An electrode extension structure provides the electrical drive to the second pair of electrodes, and comprises an unloaded transmission line portion imposing the electrical signal delay based on an optical signal delay.

    Silicon-based modulator with optimized longitudinal doping profiles

    公开(公告)号:US11422394B2

    公开(公告)日:2022-08-23

    申请号:US16609239

    申请日:2019-01-25

    Abstract: A silicon modulator where the doping profile varies along the lateral and/or longitudinal position in the transition zones to achieve improved performance in terms of optical attenuation or contact access resistance or both. A modulator includes a core; a first transition zone that is a P-side region adjacent to the waveguide core, the first transition zone has a first longitudinal doping profile; and a second transition zone that is an N-side region adjacent to the core on an opposite side as the first transition region, the second transition zone has a second longitudinal doping profile; the first longitudinal doping profile has a variation of doping concentration along a longitudinal direction in the first transition region to mimic a first lateral doping profile, and the second longitudinal doping profile has a variation of doping concentration along a longitudinal direction in the second transition region to mimic a second lateral doping profile.

    Free-carrier absorption variable optical attenuators and thermal phase shifters formed by an optical waveguide having multiple passes in an intrinsic region

    公开(公告)号:US11226504B2

    公开(公告)日:2022-01-18

    申请号:US16516381

    申请日:2019-07-19

    Abstract: The present disclosure provides a multi-pass free-carrier absorption variable optical attenuator device, including: a diode structure including a P-type doped region and an N-type doped region separated by an intrinsic region; and an optical waveguide including a plurality of optical waveguide sections aligned parallel to one another and disposed between the P-type doped region and the N-type doped region and within the intrinsic region of the diode structure. Further, the present disclosure provides a multi-pass thermal phase shifter device, including: a silicon structure including or coupled to one or more heater elements; and an optical waveguide including a plurality of optical waveguide sections aligned parallel to one another and disposed adjacent to the one or more heater elements. Optionally, at least two of the optical waveguide sections have different geometries and are separated by a predetermined gap.

    Managing mode transfer in asymmetric waveguide coupling structures

    公开(公告)号:US10955615B2

    公开(公告)日:2021-03-23

    申请号:US16511639

    申请日:2019-07-15

    Abstract: A waveguide coupling structure includes: a first section that supports a mode that has an associated first intensity profile that substantially overlaps with an intensity profile associated with a mode supported by a first waveguide portion at a first end of the waveguide coupling structure; a second section that supports a mode that has an associated second intensity profile that substantially overlaps with an intensity profile associated with a mode supported by a second waveguide portion at a second end of the waveguide coupling structure; and a third section, between the first section and the second section, comprising a core structure on a bottom cladding and a supporting structure on the bottom cladding. The supporting structure: (1) overlaps with at least a portion of an intensity profile associated with a guided mode of the third section, and (2) has a shape that is asymmetric with respect to a propagation axis of the guided mode in a plane parallel to a surface of the bottom cladding.

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