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公开(公告)号:US11803012B2
公开(公告)日:2023-10-31
申请号:US18055576
申请日:2022-11-15
Applicant: GlobalFoundries U.S. Inc.
Inventor: Michal Rakowski , Petar I. Todorov , Yusheng Bian , Won Suk Lee , Asif J. Chowdhury , Kenneth J. Giewont
CPC classification number: G02B6/125 , G02F1/0147 , G02B6/136 , G02B2006/12061 , G02B2006/12147
Abstract: Disclosed is a photonic structure and associated method. The structure includes a closed-curve waveguide having a first height, as measured from the top surface of an insulator layer, and an outer curved sidewall that extends essentially vertically the full first height (e.g., to minimize signal loss). The structure includes a closed-curve thermal coupler and a heating element. The closed-curve thermal coupler is thermally coupled to and laterally surrounded by the closed-curve waveguide and has a second height that is less than the first height. In some embodiments, the closed-curve waveguide and the closed-curve thermal coupler are continuous portions of the same semiconductor layer having different thicknesses. The heating element is thermally coupled to the closed-curve thermal coupler and thereby indirectly thermally coupled to the closed-curve waveguide. Thus, the heating element is usable for thermally tuning the closed-curve waveguide via the closed-curve thermal coupler to minimize any temperature-dependent resonance shift (TDRS).
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公开(公告)号:US11693184B2
公开(公告)日:2023-07-04
申请号:US17749487
申请日:2022-05-20
Applicant: GLOBALFOUNDRIES U.S. INC.
Inventor: Yusheng Bian , Won Suk Lee , Abdelsalam A. Aboketaf
CPC classification number: G02B6/26 , G02B6/1228 , G02B6/266 , G02B6/29331 , G02B2006/12126
Abstract: The present disclosure relates to semiconductor structures and, more particularly, to waveguide attenuators and methods of manufacture. The structure includes: a main bus waveguide structure; a first hybrid waveguide structure evanescently coupled to the main bus waveguide structure and comprising a first geometry of material; and a second hybrid waveguide structure evanescently coupled to the main bus waveguide structure and comprising a second geometry of the material.
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公开(公告)号:US11415744B1
公开(公告)日:2022-08-16
申请号:US17170203
申请日:2021-02-08
Applicant: GLOBALFOUNDRIES U.S. Inc.
Inventor: Alec Hammond , Yusheng Bian , Michal Rakowski , Won Suk Lee , Asif J. Chowdhury , Roderick A. Augur , Abdelsalam Aboketaf
Abstract: Structures for a wavelength-division multiplexing filter and methods of forming a structure for a wavelength-division multiplexing filter. The structure includes a first slab having a first perimeter, a first waveguide core coupled to the first slab, and a plurality of second waveguide cores coupled to the first slab. A second slab is positioned to overlap with the first slab. The second slab includes a second perimeter and openings that are distributed inside the second perimeter. The openings of the second slab penetrate through the second slab.
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公开(公告)号:US20220221714A1
公开(公告)日:2022-07-14
申请号:US17146509
申请日:2021-01-12
Applicant: GLOBALFOUNDRIES U.S. Inc.
Inventor: Won Suk Lee , Thomas G. Weeks, III , Michal Rakowski , Yusheng Bian , Roderick A. Augur , Alexander L. Martin , Petar I. Todorov
Abstract: Disclosed are a system, method, software tool, etc. for generating a layout indicating the paths for balanced optical waveguides (WGs) of a WG bus. A grid is used to route paths, which extend between corresponding first and second input/output nodes, respectively, and which are within boundaries of a defined area. The paths are automatically rerouted to balance for length and number of bends without overly increasing the lengths of or number of bends in those paths and further without moving the input/output nodes or falling outside the established boundaries. Automatic rerouting of the paths is performed iteratively based on results of various intersection operations related to different path-specific sets of points on the grid to determine when and where to insert additional linear segments and bends into the paths. Then, a layout indicating the balanced paths is generated. Also disclosed is a WG bus structure with balanced optical WGs.
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公开(公告)号:US11280961B1
公开(公告)日:2022-03-22
申请号:US17113567
申请日:2020-12-07
Applicant: GLOBALFOUNDRIES U.S. Inc.
Inventor: Alec Hammond , Yusheng Bian , Michal Rakowski , Won Suk Lee , Asif J. Chowdhury , Roderick A. Augur
Abstract: Structures for an optical power splitter and methods of forming a structure for an optical power splitter. A splitter body defines a multimode interference region of the optical power splitter. A first side element positioned adjacent to a first side surface of the splitter body, and a second side element positioned adjacent to a second side surface of the splitter body.
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公开(公告)号:US20210325603A1
公开(公告)日:2021-10-21
申请号:US16849355
申请日:2020-04-15
Applicant: GLOBALFOUNDRIES U.S. Inc.
Inventor: Yusheng Bian , Won Suk Lee
Abstract: Structures for a polarizer and methods of forming a structure for a polarizer. A polarizer includes a first waveguide core and a layer that is positioned adjacent to a side surface of the first waveguide core. The layer is composed of a first material having a permittivity with an imaginary part that ranges from 0 to about 15. A second waveguide core is positioned over the first waveguide core. The second waveguide core is composed of a second material that is different in composition from the first material.
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公开(公告)号:US11092743B2
公开(公告)日:2021-08-17
申请号:US16749363
申请日:2020-01-22
Applicant: GLOBALFOUNDRIES U.S. INC.
Inventor: Yusheng Bian , Ajey Poovannummoottil Jacob , Won Suk Lee
Abstract: The present disclosure relates to semiconductor structures and, more particularly, to waveguide absorbers and methods of manufacture. A structure includes: a photonics component; and a vanadate waveguide absorber adjacent to the photonics component.
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