公开(公告)号：US20060232867A1

公开(公告)日：2006-10-19

申请号：US11317851

申请日：2005-12-22

申请人： Hans-Jurgen Mann ,  David Shafer ,  Wilhelm Ulrich

发明人： Hans-Jurgen Mann ,  David Shafer ,  Wilhelm Ulrich

IPC分类号： G02B5/10

CPC分类号： G03F7/70233 ,  G02B13/143 ,  G02B17/061 ,  G02B17/0652 ,  G02B17/0657

摘要： In general, in one aspect, the invention features an objective arranged to image radiation from an object plane to an image plane, including a plurality of elements arranged to direct the radiation from the object plane to the image plane, wherein the objective has an image side numerical aperture of more than 0.55 and a maximum image side field dimension of more than 1 mm, and the objective is a catoptric objective.

摘要翻译： 通常，在一个方面，本发明的特征在于设置成将从物体平面到图像平面的辐射成像的目标，包括布置成将来自物体平面的辐射引导到图像平面的多个元件，其中物镜具有图像 侧面数值孔径大于0.55，最大像侧场尺寸大于1 mm，目标是一个反射目标。

公开(公告)号：US20060215272A1

公开(公告)日：2006-09-28

申请号：US11443077

申请日：2006-05-31

申请人： Toralf Gruner ,  Hans-Jurgen Mann

发明人： Toralf Gruner ,  Hans-Jurgen Mann

IPC分类号： G02B3/00

CPC分类号： G02B27/286 ,  G02B13/14 ,  G02B17/08 ,  G02B17/0892 ,  G03F7/70191 ,  G03F7/70225 ,  G03F7/70566

摘要： An objective in a microlithographic projection exposure apparatus has a first optical element that has polarization dependent properties causing intensity fluctuations in an image plane of the objective. These fluctuations may be produced by a second optical element that is arranged downstream of the first optical element. A gray filter disposed in the beam path reduces the intensity fluctuations.

摘要翻译： 微光刻投影曝光装置中的目的是具有第一光学元件，该第一光学元件具有导致物镜的图像平面中的强度波动的偏振相关特性。 这些波动可以由布置在第一光学元件的下游的第二光学元件产生。 布置在光束路径中的灰色滤光器减小了强度波动。

公开(公告)号：US20050180011A1

公开(公告)日：2005-08-18

申请号：US11102524

申请日：2005-04-08

申请人： Hans-Jurgen Mann ,  Wilhelm Ulrich

发明人： Hans-Jurgen Mann ,  Wilhelm Ulrich

IPC分类号： G02B17/00 ,  G02B13/14 ,  G02B13/18 ,  G02B13/24 ,  G02B17/06 ,  G02B17/08 ,  G03F7/20 ,  H01L21/027

CPC分类号： G03F7/70291 ,  G02B17/0652 ,  G03F7/70225 ,  G03F7/70233

摘要： An objective is configured with a first partial objective and a second partial objective. The first partial objective, which projects a first field plane onto an intermediate image, has a first, convex mirror and a second, concave mirror. The second partial objective, which projects the intermediate image onto a second field plane, has a third and a fourth mirror, both concave. All of the four mirrors have central mirror apertures. The axial distance between the first and second mirrors is in a ratio between 0.95 and 1.05 relative to the distance between the second mirror and the intermediate image. The axial distance ZM3-IM between the third mirror and the second field plane conforms to the relationship 0.03 · Du M3 + 5.0 ⁢   ⁢ mm

公开(公告)号：US20050036213A1

公开(公告)日：2005-02-17

申请号：US10639780

申请日：2003-08-12

申请人： Hans-Jurgen Mann ,  Russell Hudyma ,  Alexander Epple

发明人： Hans-Jurgen Mann ,  Russell Hudyma ,  Alexander Epple

IPC分类号： G02B17/08 ,  G03F7/20 ,  G02B17/00

CPC分类号： G02B17/0892 ,  G02B17/0844 ,  G02B17/0856 ,  G03F7/70225

摘要： According to one exemplary embodiment, a projection objective is provided and includes at least two non-planar (curved) mirrors, wherein an axial distance between a next to last non-planar mirror and a last non-planar mirror, as defined along a light path, is greater than an axial distance between the last non-planar mirror and a first refracting surface of lenses following in the light path. In one exemplary embodiment, the first refracting surface is associated with a single pass type lens. The present objectives form images with numerical apertures of at least about 0.80 or higher, e.g., 0.95. Preferably, the objective does not include folding mirrors and there is no intermediate image between the two mirrors, as well as the pupil of the objective being free of obscuration.

摘要翻译： 根据一个示例性实施例，提供了一种投影物镜，并且包括至少两个非平面（弯曲）反射镜，其中在沿着光线定义的下一个至最后的非平面镜与最后的非平面镜之间的轴向距离 路径大于最后的非平面镜与在光路中跟随的透镜的第一折射表面之间的轴向距离。 在一个示例性实施例中，第一折射表面与单遍型透镜相关联。 当前目标形成具有至少约0.80或更高（例如0.95）的数值孔径的图像。 优选地，该目的不包括折叠反射镜，并且在两个反射镜之间不存在中间图像，以及物镜的瞳孔没有遮蔽。