Micro mirror and method for fabricating the same
    21.
    发明授权
    Micro mirror and method for fabricating the same 有权
    微镜及其制造方法

    公开(公告)号:US07301692B2

    公开(公告)日:2007-11-27

    申请号:US11668713

    申请日:2007-01-30

    CPC分类号: G02B26/0833 G02B26/105

    摘要: Disclosed is a micro mirror having a structure improved to have an increased driving angle while being driven in high speed. The micro mirror comprises a rotatable mirror section that reflects light, a pair of spring sections for supporting the mirror section and serving as a rotational axis for the mirror section when the mirror section is rotationally driven, an oval adjoining section for connecting the mirror section and the pair of spring sections, and a driving section comprising mobile combs arranged on the adjoining section, and a fixed comb provided above and/or below the mobile combs to correspond to the mobile combs to generate electrostatic force. According to the present invention, by existence of the oval adjoining section, moment can be increased without increasing rotational inertia moment so largely. Therefore, a high-speed optical scanner with an increased driving angle can be provided, which is required for a high-resolution laser TV.

    摘要翻译: 公开了一种微镜,其具有改进以在高速驱动的同时具有增加的驱动角的结构。 微反射镜包括反射光的可旋转镜部分,用于支撑镜部分的一对弹簧部分,并且当镜部被旋转驱动时用作镜部分的旋转轴线,用于连接镜部分的椭圆形邻接部分和 一对弹簧部分,以及包括设置在相邻部分上的移动梳状部分的驱动部分,以及设置在移动梳状体上方和/或下方的固定梳齿,以对应于移动梳来产生静电力。 根据本发明,通过存在椭圆形相邻部分,可以大大提高力矩而不增加旋转惯性矩。 因此,可以提供具有增加的驱动角度的高速光学扫描仪,这是高分辨率激光电视所需要的。

    Micro mirror and method for fabricating the same
    22.
    发明申请
    Micro mirror and method for fabricating the same 有权
    微镜及其制造方法

    公开(公告)号:US20050117235A1

    公开(公告)日:2005-06-02

    申请号:US11000004

    申请日:2004-12-01

    CPC分类号: G02B26/0833 G02B26/105

    摘要: A micro mirror structure having an increased driving angle while being driven in high speed. The micro mirror includes a rotatable mirror section that reflects light, a pair of spring sections for supporting the mirror section and serving as a rotational axis for the mirror section when the mirror section is rotationally driven, an oval adjoining section for connecting the mirror section and the pair of spring sections, and a driving section including mobile combs arranged on the adjoining section. A fixed comb is provided above and/or below the mobile combs to correspond to the mobile combs to generate electrostatic force. According to the present invention, by existence of the oval adjoining section, moment can be increased without largely increasing rotational inertia moment. Therefore, a high-speed optical scanner with an increased driving angle can be provided, which is required for a high-resolution laser TV.

    摘要翻译: 微镜结构在高速驱动的同时具有增大的驱动角度。 微反射镜包括反射光的可旋转镜部分,用于支撑镜部分的一对弹簧部分,并且当镜部被旋转地驱动时用作镜部分的旋转轴线,用于连接镜部分的椭圆形邻接部分和 一对弹簧部分,以及包括设置在相邻部分上的移动梳状物的驱动部分。 在移动梳的上方和/或下方设置固定梳以对应于移动梳以产生静电力。 根据本发明,通过存在椭圆形邻接部分,可以在不大幅度增加旋转惯性力矩的情况下增加力矩。 因此,可以提供具有增加的驱动角度的高速光学扫描仪,这是高分辨率激光电视所需要的。

    MEMS device and fabrication method of the same
    23.
    发明授权
    MEMS device and fabrication method of the same 有权
    MEMS器件及其制造方法相同

    公开(公告)号:US07977207B2

    公开(公告)日:2011-07-12

    申请号:US12856308

    申请日:2010-08-13

    IPC分类号: H02N1/00

    摘要: A microelectromechanical systems (MEMS) device includes a frame, an actuator formed on the same layer as the frame and connected to the frame to be capable of performing a relative motion with respect to the frame, and at least one stopper restricting a displacement of the actuator in a direction along the height of the actuator. The MEMS device is fabricated by bonding a second substrate to a first substrate, forming the frame and the actuator by partially removing the first substrate, and forming the at least one stopper by partially removing the second substrate.

    摘要翻译: 微机电系统(MEMS)装置包括框架,致动器,其形成在与框架相同的层上并连接到框架以能够相对于框架执行相对运动;以及至少一个限制器 致动器沿着致动器高度的方向。 MEMS器件通过将第二衬底接合到第一衬底,通过部分去除第一衬底而形成框架和致动器,并且通过部分去除第二衬底来形成至少一个止动器来制造。

    ROTATIONAL MEMS DEVICE HAVING PIEZO-RESISTOR SENSOR
    24.
    发明申请
    ROTATIONAL MEMS DEVICE HAVING PIEZO-RESISTOR SENSOR 失效
    具有PIEZO电阻传感器的旋转MEMS器件

    公开(公告)号:US20080168670A1

    公开(公告)日:2008-07-17

    申请号:US11858183

    申请日:2007-09-20

    IPC分类号: G01B7/30

    摘要: A rotational micro-electromechanical system (MEMS) having a piezo-resistor sensor is provided. The rotational MEMS device includes a pair of torsion springs that support a stage, four resistors, at least one of the resistors being formed along a center axis of the torsion springs, and electrical signal cables connected to the four resistors, wherein at least one of the torsion springs is formed in a direction on an n-type silicon substrate having a (100) plane, and the resistors formed on the at least one of the torsion springs are formed in a group direction.

    摘要翻译: 提供了具有压电阻传感器的旋转微机电系统(MEMS)。 旋转MEMS装置包括一对扭转弹簧,其支撑一级,四个电阻器,至少一个电阻器沿扭转弹簧的中心轴线形成,以及连接到四个电阻器的电信号电缆,其中至少一个 在具有(100)面的n型硅衬底上沿<100>方向形成扭转弹簧,并且形成在至少一个扭转弹簧上的电阻器形成为<110>组方向。

    Actuator having vertical comb electrode structure
    25.
    发明申请
    Actuator having vertical comb electrode structure 审中-公开
    具有垂直梳状电极结构的致动器

    公开(公告)号:US20060284514A1

    公开(公告)日:2006-12-21

    申请号:US11341460

    申请日:2006-01-30

    IPC分类号: G02B26/08 G02B26/00 H02N1/00

    CPC分类号: H02N1/008 G02B26/0841

    摘要: An actuator having a vertical comb electrode structure is provided. The actuator includes: a stage seesawing in a first direction; a support unit supporting the seesawing motion of the stage; and a stage driving unit including vertical driving comb electrodes extending outward from opposite sides of the stage in the first direction, and vertical fixed comb electrodes disposed on a substrate to alternate with the driving comb electrodes, wherein the fixed comb electrodes include first fixed comb electrodes lower than the driving comb electrodes, insulation layers formed on the first fixed comb electrodes, and second fixed comb electrodes formed on the insulation layers to be higher than bottom surfaces of the driving comb electrodes.

    摘要翻译: 提供具有垂直梳状电极结构的致动器。 致动器包括:在第一方向上跷跷板的台阶; 支撑台架的跷跷板运动; 以及舞台驱动单元,其包括从第一方向的相对侧向外延伸的垂直驱动梳状电极,以及设置在基板上以与驱动梳状电极交替的垂直固定梳状电极,其中固定梳状电极包括第一固定梳状电极 低于驱动梳状电极,形成在第一固定梳状电极上的绝缘层,以及形成在绝缘层上的第二固定梳电极高于驱动梳状电极的底表面。

    Two-axis driving electromagnetic micro-actuator
    26.
    发明授权
    Two-axis driving electromagnetic micro-actuator 失效
    双轴驱动电磁微执行器

    公开(公告)号:US07880571B2

    公开(公告)日:2011-02-01

    申请号:US11862233

    申请日:2007-09-27

    摘要: Provided is a two-axis driving electromagnetic actuator that includes a stage that is operative to be actuated about a first axis; an inner frame that that is disposed outside the stage and supports the stage by the first axis; an external frame that is disposed outside the inner frame and supports the inner frame by a second axis which is perpendicular to the first axis; a magnet that provides an electric field between the first axis and the second axis; a first driving coil that is formed on the inner frame and to which a first signal that actuates the stage in a direction of the second axis is applied; and a second driving coil that is formed on the inner frame and to which a second signal that actuates the stage and the inner frame in a direction of the first axis is applied, wherein the first driving coil and the second driving coil are electrically separated from each other.

    摘要翻译: 提供了一种双轴驱动电磁致动器,其包括可围绕第一轴线致动的台架; 内框架,其设置在所述台架之外并且通过所述第一轴线支撑所述台架; 外部框架,其设置在所述内框架的外部并且通过垂直于所述第一轴线的第二轴线支撑所述内框架; 磁体,其在所述第一轴线和所述第二轴线之间提供电场; 第一驱动线圈,其形成在所述内框上,并且施加沿所述第二轴的方向致动所述台的第一信号; 以及第二驱动线圈,其形成在所述内框上,并且施加在所述第一轴的方向上致动所述台和所述内框架的第二信号,其中所述第一驱动线圈和所述第二驱动线圈与 彼此。

    Micro-electro mechanical system scanner having structure for correcting declined scan line
    27.
    发明申请
    Micro-electro mechanical system scanner having structure for correcting declined scan line 审中-公开
    微机电系统扫描器具有校正扫描线的结构

    公开(公告)号:US20070258120A1

    公开(公告)日:2007-11-08

    申请号:US11707956

    申请日:2007-02-20

    IPC分类号: B81B7/02

    CPC分类号: G02B26/105 G02B26/0833

    摘要: A micro-electro mechanical system (MEMS) scanner. The MEMS scanner includes a first frame rotationally vibrated about an axle according to a low-frequency vertical scan function, a second frame supported coaxially with and rotationally on the first frame, a vibration member disposed between the first frame and the second frame so as to vibrate the second frame with respect to the first frame according to a high-frequency vertical scan function. A MEMS mirror which receives a vertical scan motion of the second frame and simultaneously operates in a rotational vibration mode about an axle according to a high-frequency horizontal scan function so as to two-dimensionally scan a screen with incident light. Therefore, scan lines are uniformly produced in a scanning direction and, thus, pixels can be uniformed arranged across a screen, increasing the vertical resolution of the screen and providing high-quality images.

    摘要翻译: 微机电系统(MEMS)扫描仪。 MEMS扫描器包括:根据低频垂直扫描功能围绕轴旋转振动的第一框架,与第一框架同轴并且旋转地支撑在其上的第二框架;设置在第一框架和第二框架之间的振动构件,以便 根据高频垂直扫描功能,相对于第一帧振动第二帧。 MEMS反射镜,其接收第二帧的垂直扫描运动,并且根据高频水平扫描功能以围绕轴的旋转振动模式同时操作,以便二维扫描具有入射光的屏幕。 因此,扫描线在扫描方向上均匀地产生,因此像素可以被均匀地布置在屏幕上,增加屏幕的垂直分辨率并提供高质量的图像。

    Micro mirror and method for fabricating the same
    28.
    发明授权
    Micro mirror and method for fabricating the same 有权
    微镜及其制造方法

    公开(公告)号:US07185994B2

    公开(公告)日:2007-03-06

    申请号:US11000004

    申请日:2004-12-01

    IPC分类号: G02B7/182

    CPC分类号: G02B26/0833 G02B26/105

    摘要: A micro mirror structure having an increased driving angle while being driven in high speed. The micro mirror includes a rotatable mirror section that reflects light, a pair of spring sections for supporting the mirror section and serving as a rotational axis for the mirror section when the mirror section is rotationally driven, an oval adjoining section for connecting the mirror section and the pair of spring sections, and a driving section including mobile combs arranged on the adjoining section. A fixed comb is provided above and/or below the mobile combs to correspond to the mobile combs to generate electrostatic force. According to the present invention, by existence of the oval adjoining section, moment can be increased without largely increasing rotational inertia moment. Therefore, a high-speed optical scanner with an increased driving angle can be provided, which is required for a high-resolution laser TV.

    摘要翻译: 微镜结构在高速驱动的同时具有增大的驱动角度。 微反射镜包括反射光的可旋转镜部分,用于支撑镜部分的一对弹簧部分,并且当镜部被旋转地驱动时用作镜部分的旋转轴线,用于连接镜部分的椭圆形邻接部分和 一对弹簧部分,以及包括设置在相邻部分上的移动梳状物的驱动部分。 在移动梳的上方和/或下方设置固定梳以对应于移动梳以产生静电力。 根据本发明,通过存在椭圆形邻接部分,可以在不大幅度增加旋转惯性力矩的情况下增加力矩。 因此,可以提供具有增加的驱动角度的高速光学扫描仪,这是高分辨率激光电视所需要的。

    Micro-electro mechanical system having single anchor

    公开(公告)号:US06628183B2

    公开(公告)日:2003-09-30

    申请号:US10141920

    申请日:2002-05-10

    IPC分类号: H01P110

    CPC分类号: H01H59/0009 H01H1/20

    摘要: A micro-electro mechanical system (MEMS) switch having a single anchor is provided. The MEMS switch includes a substrate; grounding lines installed on the substrate to be distant away from each other; signal transmission lines positioned at predetermined intervals between the grounding lines; an anchor placed between the signal transmission lines; a driving electrode that encircles the anchor while not being in contact with the anchor, the signal transmission lines and the grounding lines; and a moving plate that is positioned on the driving electrode to be overlapped with portions of the signal transmission lines, and connected to the anchor elastically.