摘要:
Disclosed is a micro mirror having a structure improved to have an increased driving angle while being driven in high speed. The micro mirror comprises a rotatable mirror section that reflects light, a pair of spring sections for supporting the mirror section and serving as a rotational axis for the mirror section when the mirror section is rotationally driven, an oval adjoining section for connecting the mirror section and the pair of spring sections, and a driving section comprising mobile combs arranged on the adjoining section, and a fixed comb provided above and/or below the mobile combs to correspond to the mobile combs to generate electrostatic force. According to the present invention, by existence of the oval adjoining section, moment can be increased without increasing rotational inertia moment so largely. Therefore, a high-speed optical scanner with an increased driving angle can be provided, which is required for a high-resolution laser TV.
摘要:
A micro mirror structure having an increased driving angle while being driven in high speed. The micro mirror includes a rotatable mirror section that reflects light, a pair of spring sections for supporting the mirror section and serving as a rotational axis for the mirror section when the mirror section is rotationally driven, an oval adjoining section for connecting the mirror section and the pair of spring sections, and a driving section including mobile combs arranged on the adjoining section. A fixed comb is provided above and/or below the mobile combs to correspond to the mobile combs to generate electrostatic force. According to the present invention, by existence of the oval adjoining section, moment can be increased without largely increasing rotational inertia moment. Therefore, a high-speed optical scanner with an increased driving angle can be provided, which is required for a high-resolution laser TV.
摘要:
A microelectromechanical systems (MEMS) device includes a frame, an actuator formed on the same layer as the frame and connected to the frame to be capable of performing a relative motion with respect to the frame, and at least one stopper restricting a displacement of the actuator in a direction along the height of the actuator. The MEMS device is fabricated by bonding a second substrate to a first substrate, forming the frame and the actuator by partially removing the first substrate, and forming the at least one stopper by partially removing the second substrate.
摘要:
A rotational micro-electromechanical system (MEMS) having a piezo-resistor sensor is provided. The rotational MEMS device includes a pair of torsion springs that support a stage, four resistors, at least one of the resistors being formed along a center axis of the torsion springs, and electrical signal cables connected to the four resistors, wherein at least one of the torsion springs is formed in a direction on an n-type silicon substrate having a (100) plane, and the resistors formed on the at least one of the torsion springs are formed in a group direction.
摘要:
An actuator having a vertical comb electrode structure is provided. The actuator includes: a stage seesawing in a first direction; a support unit supporting the seesawing motion of the stage; and a stage driving unit including vertical driving comb electrodes extending outward from opposite sides of the stage in the first direction, and vertical fixed comb electrodes disposed on a substrate to alternate with the driving comb electrodes, wherein the fixed comb electrodes include first fixed comb electrodes lower than the driving comb electrodes, insulation layers formed on the first fixed comb electrodes, and second fixed comb electrodes formed on the insulation layers to be higher than bottom surfaces of the driving comb electrodes.
摘要:
Provided is a two-axis driving electromagnetic actuator that includes a stage that is operative to be actuated about a first axis; an inner frame that that is disposed outside the stage and supports the stage by the first axis; an external frame that is disposed outside the inner frame and supports the inner frame by a second axis which is perpendicular to the first axis; a magnet that provides an electric field between the first axis and the second axis; a first driving coil that is formed on the inner frame and to which a first signal that actuates the stage in a direction of the second axis is applied; and a second driving coil that is formed on the inner frame and to which a second signal that actuates the stage and the inner frame in a direction of the first axis is applied, wherein the first driving coil and the second driving coil are electrically separated from each other.
摘要:
A micro-electro mechanical system (MEMS) scanner. The MEMS scanner includes a first frame rotationally vibrated about an axle according to a low-frequency vertical scan function, a second frame supported coaxially with and rotationally on the first frame, a vibration member disposed between the first frame and the second frame so as to vibrate the second frame with respect to the first frame according to a high-frequency vertical scan function. A MEMS mirror which receives a vertical scan motion of the second frame and simultaneously operates in a rotational vibration mode about an axle according to a high-frequency horizontal scan function so as to two-dimensionally scan a screen with incident light. Therefore, scan lines are uniformly produced in a scanning direction and, thus, pixels can be uniformed arranged across a screen, increasing the vertical resolution of the screen and providing high-quality images.
摘要:
A micro mirror structure having an increased driving angle while being driven in high speed. The micro mirror includes a rotatable mirror section that reflects light, a pair of spring sections for supporting the mirror section and serving as a rotational axis for the mirror section when the mirror section is rotationally driven, an oval adjoining section for connecting the mirror section and the pair of spring sections, and a driving section including mobile combs arranged on the adjoining section. A fixed comb is provided above and/or below the mobile combs to correspond to the mobile combs to generate electrostatic force. According to the present invention, by existence of the oval adjoining section, moment can be increased without largely increasing rotational inertia moment. Therefore, a high-speed optical scanner with an increased driving angle can be provided, which is required for a high-resolution laser TV.
摘要:
A micro-electro mechanical system (MEMS) switch having a single anchor is provided. The MEMS switch includes a substrate; grounding lines installed on the substrate to be distant away from each other; signal transmission lines positioned at predetermined intervals between the grounding lines; an anchor placed between the signal transmission lines; a driving electrode that encircles the anchor while not being in contact with the anchor, the signal transmission lines and the grounding lines; and a moving plate that is positioned on the driving electrode to be overlapped with portions of the signal transmission lines, and connected to the anchor elastically.
摘要:
A slide opening/closing type mobile device includes a body section including a guide section that has a pair of long holes and is configured so that an interval between the pair of long holes becomes smaller at first, as it goes from one ends towards the other ends of the long holes, and then, becomes larger based on certain starting points; a slider provided with guide rollers movably inserted in the pair of long holes of the guide section in a state of being elastically biased to the outside; a rotation plate rotatably mounted on the slider; and a display section mounted on the rotation plate. The display section is slidable upward and downward with respect to the body section by the slider, and rotates at a predetermined angle by the rotation plate.