摘要:
A coupling oxide film is formed on a silicon substrate, a polysilicon film is further formed thereupon, and a low-temperature oxide film is deposited to a thickness of 10 nm, for example. Next, a silicon nitride film is formed on this low-temperature oxide film, and selectively removed by dry etching. At this time, the low-temperature oxide film serves as an etching stopper film, so the low-temperature oxide film and polysilicon film are not over-etched. Subsequently, the polysilicon film is dry-etched, forming a recess. A floating gate is then formed of the polysilicon film.
摘要:
Nonvolatile semiconductor memory devices and methods for manufacturing thereof, which provide inhibiting the shortcutting of the channel due to the creation of the bird's beak to promote the manufacturing of the devices with higher-density or higher-integration, lowering the operation voltage and improving the characteristics of maintaining the electric charge, without complicating the manufacturing process. Immediately after forming an ONO films comprising a first silicon oxide film, a second silicon nitride film and a third silicon oxide film on a silicon substrate, a silicon layer is formed, and then, arsenic ions are implanted over the silicon layer and/or ONO films to form a bit line, and a second electrical conductive layer is deposited while remaining the silicon layer to form a word line comprising a dual layer structure of two electrical conductive layers.
摘要:
A motor rotary shaft according to the present invention is constructed only at the surface layer of a journal portion with a hard nitride layer, so that the resultant motor rotary shaft is available at a low cost, not so heavy and excellent in durability in comparison with a case employing a hard material for the whole motor rotary shaft. Also, a method of manufacturing a motor rotary shaft according to the present invention employs fluorinating process prior to nitriding process to change a passive coat layer such as oxide layer on the surface of the journal portion to a fluoride layer, which protects the same surface. Therefore, even when there is space of time between formation of fluoride on the surface of the journal portion and nitriding process, the fluoride layer protects and keeps the surface of the journal portion in a favorable condition, resulting in that re-formation of oxide layer on that surface is prevented.
摘要:
The invention is composed of a non-aluminium metallic foil with a ceramic particle dotted layer formed on one side thereof, the non-aluminium metallic foil is wound on the peripheral surface of an inner shell of a duplex shell body in a state that the ceramic particle dotted layer is faced inwardly; the circumference of the multi-layeredly wound layer is covered with an outer shell of the duplex shell body, and a space between the inner shell and the outer shell is sealed and evacuated.
摘要:
This invention allows the surface of an austenitic stainless steel screw surface to be formed into a hard nitrided layer so as to harden and a part such as a screw head which is in contact with outside air is removed its own ultra hard surface layer in the hard nitrided layer by scouring or the like to be rust preventive. Even if the ultra hard surface layer is thus removed, an inner hard layer in the hard nitrided layer is present beneath the surface layer to be able to maintain a hard state of the screw surface. In the method for manufacturing the austenitic stainless steel screw according to the invention, upon forming said hard nitrided layer on the screw surface by nitriding, the austenitic stainless steel screw surface is cleaned with a fluorine- or fluoride-containing gas prior to nitriding. Thereby remained foreign matter, oxidized layer and the like on the screw surface are removed and at the same time the screw surface is activated and so N atoms easily penetrate and diffuse when nitriding to form a uniform nitrided layer.
摘要:
The apparatus comprises an oxygen gas production apparatus comprising an air compression means for compressing air from an outside source, a purification means for removing carbon dioxide gas and water vapor from the air compressed by said air compression means, a heat exchange means for chilling the compressed air from said purification means to a cryogenic temperature, a fractionation column for liquefying and fractionating the compressed air chilled to a cryogenic temperature by said heat exchange means and holding nitrogen in gaseous state and oxygen in liquid state, a liquid oxygen storage means for receiving liquid oxygen from an outside source and storing the same, a line for introducing into said fractionation column the liquid oxygen from said liquid oxygen storage means as the refrigerant for liquefaction of compressed air, a liquid level detection-control means for monitoring the liquid level of oxygen held in said fractionation column and controlling the amount of feed of liquid oxygen from said liquid oxygen storage means in response to changes in said liquid level, a second line for guiding gaseous nitrogen in said fractionation column to said heat exchange means as a refrigerant, an expansion means for cooling the gaseous nitrogen in said second line by the principle of adiabatic expansion, and an oxygen gas withdrawal line for guiding the liquid oxygen in said fractionation column to said heat exchange means as a refrigerant and withdrawing the gaseous oxygen produced by heat exchange as a product oxygen gas.
摘要:
There is disclosed high-purity nitrogen gas production equipment for production of ultra-high-purity nitrogen gas for use in the electronics and other industries, for example in connection with the production of silicon semiconductors. The conventional nitrogen gas production equipment of cryogenic air separation type tends to develop troubles and yields product nitrogen gas only at high cost and in comparatively low purity. The equipment according to the invention is such that a liquid nitrogen storage means (23) is connected via a first feeding pipeline (24a) to a distillation column (15) into which air is introduced from the outside via an air compression means (9) and heat exchange means (13), (14) while the above storage means (23) is also connected via a second feeding line (24b) to the above heat exchange means (13), (14). In this way, the raw material air is chilled to a cryogenic temperature as a result of absorption of the latent heat of evaporation by liquid nitrogen in the heat exchangers and the cryogenic compressed air is further chilled in the distillation column (15 ) by the heat of evaporation of liquid nitrogen. By taking advantage of the difference in boiling point, the nitrogen is withdrawn in gaseous state while oxygen is retained in liquid state. The resulting nitrogen gas is combined with the vaporized liquid nitrogen originating from the liquid nitrogen storage tank (23) to give product nitrogen gas. By these features, low-cost, high-purity nitrogen gas can be produced without machine troubles.
摘要:
Polyacetylene composite comprising a polyacetylene polymer being coated with at least one of the ionic organic compounds such as alkali metal alkoxide type compounds of 1,2-diol, semicarbonic ester derivatives of 1,2-diol, and ortho-ester derivatives; a process for the production of the above composite characterized by applying a solution of the above ionic organic compounds to the polyacetylene polymer; a process for the production of the above composite characterized by placing the polyacetylene polymer as an electrode in an electrolyte containing a cyclic carbonic ester compound and an alkali metal ion and electrochemically reducing the cyclic carbonic ester compound; and a process of using an n-doped polyacetylene composite as a negative electrode active substance for a secondary battery. The ionic organic compound provides a quite high stability to the n-doped polyacetylene and therefore the secondary battery using it as a negative electrode active substance amazingly excells in terms of protracted charge-discharge cycle property, self-discharge property, and voltage-maintaining property.
摘要:
A display apparatus comprises an obtaining unit that obtains information associated with a human body to be examined, a forming unit that forms, based on information on a radiographing range of a radiographing apparatus with respect to the human body to be examined included in the obtained information, a graphic showing the radiographing range of the radiographing apparatus onto a body diagram of the human body to be examined; and a display control unit that controls a display unit to display the formed graphic.
摘要:
There is provided a method of generating nitrogen which includes cryogenically separating compressed air introduced into a high-pressure column 11, storing liquid air 13 in a bottom portion of the high-pressure column 11 and taking nitrogen in gaseous form from an upper portion of the high-pressure column 11, introducing the liquid air 13 stored in the bottom portion of the high-pressure column 11 into a low-pressure column 12, cryogenically separating the liquid air 13 introduced into the low-pressure column 12 and storing oxygen-enriched liquid air 22 in a bottom portion of the low-pressure column 12 and taking nitrogen in gaseous form from an upper portion of the low-pressure column 12 as a product gas. Liquid air 13 taken through an extraction pipe 20 is introduced into a portion of a rectification part 12a of the low-pressure column 12 in which the number of theoretical plates from a column bottom side is set within the range of one to ten.