公开(公告)号：US10393718B2

公开(公告)日：2019-08-27

申请号：US15393265

申请日：2016-12-29

Applicant: Industrial Technology Research Institute

Inventor： Yu-Wen Hsu ,  Ying-Che Lo ,  Chao-Ta Huang ,  Li-Tao Teng

IPC: G01N33/00 ,  G01N27/12 ,  B81B7/00

Abstract: A MEMS apparatus for thermal energy control including a sensor and an IC chip is provided. The sensor includes a heating device for heating a sensing element and a detecting device for detecting a physical quantity. The IC chip includes a memory unit for storing a target value of the sensing element and a data processing unit for convert the physical quantity to a converted value, where a gap value is defined by subtracting the converted value from the target value. Besides, a control unit of the IC chip sets a parameter value according to the gap value, and a driving unit adjusts a quantity of thermal energy generated by the heating device according to the parameter value to reduce heating time and frequency of the heating device thereby reducing electrical power consumption. The MEMS apparatus is applicable to MEMS sensors requiring controlled operating temperature, such as a gas sensor.

公开(公告)号：US20180188123A1

公开(公告)日：2018-07-05

申请号：US15430555

申请日：2017-02-13

Applicant: Industrial Technology Research Institute

Inventor： Chung-Yuan Su ,  Chih-Yuan Chen ,  Chao-Ta Huang ,  Yu-Wen Hsu

IPC: G01L1/22

CPC classification number: G01L1/2206 ,  G01L1/22 ,  G01L1/2231 ,  G01L3/108 ,  G01L3/1457 ,  G01L5/0052 ,  G01L5/162

Abstract: An interaction force detection apparatus includes a sensor, a driving element, a moving element, and a connecting element. The connecting element is connected to the driving element and the sensor. The driving element is adapted to interact with the moving element, so as to generate a pair of forces. The pair of forces includes a first force and a second force, and a magnitude of the first force is equal to that of the second force. The sensor detects the first force exerted on the driving element, and the second force is exerted on the moving element to generate a movement.

公开(公告)号：US20180188115A1

公开(公告)日：2018-07-05

申请号：US15393254

申请日：2016-12-29

Applicant: Industrial Technology Research Institute

Inventor： Yu-Wen Hsu ,  Feng-Chia Hsu ,  Chao-Ta Huang ,  Shih-Ting Lin

IPC: G01K7/22 ,  B81B7/02

CPC classification number: G01K7/226 ,  B81B7/008 ,  B81B7/02 ,  G01K1/02 ,  G01K2219/00

Abstract: A MEMS apparatus having measuring range selector including a sensor and an IC chip is provided. The sensor includes a sensing device. The IC chip includes a voltage range selector, an analog front end, a control device and an A/D converter. The sensing device is configured to detect the physical quantity and generate a sensing voltage. The voltage range selector is configured to select a sub-voltage range having a first upper-bound and a first lower-bound. The analog front end is configured to receive the sensing voltage and output a first voltage. The A/D converter has a full scale voltage range having a second lower-bound and a second upper-bound. A ratio of the full scale voltage range to the sub-voltage range is defined as a gain factor. A difference obtained by subtracting the first lower-bound from the first voltage is defined as a shift factor. The control device is configured to adjust the first voltage to the second voltage according to the gain factor and the shift factor.

公开(公告)号：US09529012B2

公开(公告)日：2016-12-27

申请号：US14151843

申请日：2014-01-10

Applicant: Industrial Technology Research Institute

Inventor： Shih-Chieh Lin ,  Chao-Ta Huang ,  Chung-Yuan Su ,  Yu-Wen Hsu

IPC: G01P15/08 ,  G01P15/125

CPC classification number: G01P15/125 ,  G01P2015/0814 ,  G01P2015/0857

Abstract: A micro-electro mechanical apparatus with interdigitated spring including a substrate, at least one first mass, a movable electrode, a stationary electrode, an anchor and an interdigitated spring is provided. The movable electrode is disposed on the mass along an axial direction. The stationary electrode is disposed on the substrate along the axial direction, and the movable electrode and the stationary electrode have a critical gap there between. The interdigitated springs connects the mass and the anchor along the axial direction. The interdigitated spring includes first folded portions, first connecting portions, second folded portions, and second connecting portions. Each first folded portion includes two first spans and a first head portion. Each second folded portion includes two second spans and a second head portion. A width of the first span and a width of the second span are greater than the critical gap respectively.

Abstract translation: 提供了具有叉指弹簧的微机电装置，其包括基板，至少一个第一质量块，可动电极，固定电极，锚和叉指弹簧。 可移动电极沿轴向设置在质量块上。 固定电极沿着轴向设置在基板上，可动电极和固定电极之间具有临界间隙。 交叉弹簧沿着轴向连接质量块和锚固件。 叉指弹簧包括第一折叠部分，第一连接部分，第二折叠部分和第二连接部分。 每个第一折叠部分包括两个第一跨度和第一头部。 每个第二折叠部分包括两个第二跨度和第二头部。 第一跨度的宽度和第二跨度的宽度分别大于临界间隙。

公开(公告)号：US09238576B2

公开(公告)日：2016-01-19

申请号：US14149833

申请日：2014-01-08

Applicant: Industrial Technology Research Institute

Inventor： Chung-Yuan Su ,  Chao-Ta Huang ,  Tzung-Ching Lee ,  Yu-Wen Hsu

IPC: G01P15/097 ,  B81B3/00 ,  H03H3/007

CPC classification number: B81B3/0008 ,  B81B2201/0271 ,  G01P15/097 ,  H03H3/0072

Abstract: A MEMS apparatus comprising composite vibrating unit and the manufacturing method thereof are disclosed. The vibrating unit includes a stiffness element on which a first material is disposed. A second material being a conductive material is disposed on the first material and is extended to the stiffness element to remove electric charge on first material. When a temperature is changed, a variation direction of a Young's modulus of the first material is opposite to a variation direction of a Young's modulus of the stiffness element. The unique attributes above allow vibrating unit of the MEMS apparatus such as resonator and gyroscope to have stable resonance frequency against the change of temperature.

Abstract translation: 公开了一种包括复合振动单元的MEMS装置及其制造方法。 所述振动单元包括其上设置有第一材料的刚度元件。 作为导电材料的第二材料设置在第一材料上并延伸到刚度元件以去除第一材料上的电荷。 当温度变化时，第一材料的杨氏模量的变化方向与刚度元件的杨氏模量的变化方向相反。 上述独特的属性允许诸如谐振器和陀螺仪之类的MEMS装置的振动单元相对于温度变化具有稳定的共振频率。