公开(公告)号：US5463459A

公开(公告)日：1995-10-31

申请号：US46720

申请日：1993-04-16

申请人： Hiroshi Morioka ,  Minori Noguchi ,  Yoshimasa Ohshima ,  Yukio Kembo ,  Hidetoshi Nishiyama ,  Kazuhiko Matsuoka ,  Yoshiharu Shigyo

发明人： Hiroshi Morioka ,  Minori Noguchi ,  Yoshimasa Ohshima ,  Yukio Kembo ,  Hidetoshi Nishiyama ,  Kazuhiko Matsuoka ,  Yoshiharu Shigyo

IPC分类号： G01N21/00 ,  G01N21/94 ,  G01N21/95 ,  G01N21/956 ,  G01R31/308 ,  H01J37/00 ,  H01L21/00 ,  H01L21/66 ,  H01L21/68 ,  G01N21/89 ,  G02B27/46 ,  G06F15/46

CPC分类号： H01L21/681 ,  B82Y15/00 ,  G01N21/94 ,  G01N21/9501 ,  G01N21/95623 ,  G01R31/308 ,  H01J37/00 ,  H01L21/67253 ,  H01L21/67288 ,  G01N2021/8822 ,  H01J2237/022 ,  H01J2237/0225 ,  H01L22/12

摘要： A defect detecting apparatus including an illumination system for radiating a light of a plane wave linearly to a substrate having repetitive patterns of different pitches; a focusing optical system for focusing a light image reflected from the substrate thus illuminated by the illumination system; a spatial filter disposed intermediate the focusing optical system so as to shield a diffraction light from repetitive patterns of a small pitch on the substrate; a detector for detecting the light image formed by the focusing optical system; an erasing means for comparing and erasing signals which are generated on the basis of repetitive patterns of a large pitch and obtained through the spatial filter, out of signals detected by the detector; and a defect detecting means for detecting defects on the substrate in accordance with a signal detected by the detector, as well as a method applied to the said apparatus.

摘要翻译： 一种缺陷检测装置，包括用于将平面波的光线线性地发射到具有不同间距的重复图案的基板的照明系统; 聚焦光学系统，用于聚焦由照明系统照射的从基板反射的光图像; 设置在聚焦光学系统之间的空间滤光器，以便屏蔽来自基板上的小间距的重复图案的衍射光; 用于检测由聚焦光学系统形成的光图像的检测器; 擦除装置，用于根据由检测器检测到的信号，比较和擦除基于大间距的重复图案并通过空间滤波器获得的信号; 以及缺陷检测装置，用于根据由检测器检测的信号检测基板上的缺陷，以及应用于所述装置的方法。

公开(公告)号：US4667209A

公开(公告)日：1987-05-19

申请号：US807115

申请日：1985-12-10

申请人： Isao Hakamada ,  Kazuhiko Matsuoka

发明人： Isao Hakamada ,  Kazuhiko Matsuoka

IPC分类号： B41J2/44 ,  G03G15/04 ,  H04N1/036 ,  G01D15/06 ,  H04N1/23

CPC分类号： H04N1/036

摘要： In an image recording apparatus for recording images by modulating a light beam by information signals and applying the light beam to a recording medium, the longitudinal mode of the light beam is multiple, that is, comprises a plurality of oscillation wavelengths.

摘要翻译： 在用于通过信息信号调制光束并将光束施加到记录介质上来记录图像的图像记录装置中，光束的纵向模式是多个，即包括多个振荡波长。

公开(公告)号：US07963792B2

公开(公告)日：2011-06-21

申请号：US12785342

申请日：2010-05-21

申请人： Shigeru Sawada ,  Kazuhiko Matsuoka

发明人： Shigeru Sawada ,  Kazuhiko Matsuoka

IPC分类号： H01R13/625 ,  H01R4/50

CPC分类号： H01R13/6395 ,  H01R24/38

摘要： Provided is a plug detachment prevention structure, such that when a plug equipped with a plug terminal and a plug retaining section that covers a part of the plug terminal is connected to a jack provided inside a housing, the plug detachment prevention structure retains the plug retaining section to prevent the plug from detaching from the jack, wherein the plug detachment prevention structure is equipped with a ring-shaped elastic section composed of an elastic material in which the plug retaining section is pressure-inserted, and a frame section that is circularly mounted at an outer circumferential side of the elastic section, composed of a material harder than that of the elastic section and detachably attached on an outside of the housing.

摘要翻译： 本发明提供了一种插头防脱结构，使得当配备有插头端子和覆盖插头端子的一部分的插头保持部的插头连接到设置在壳体内部的插座时，插头防脱结构保持插头保持 以防止插头从千斤顶脱落，其中，防止插头脱落结构具有由弹性材料组成的环形弹性部分，其中插头保持部分被插入其中;框架部分被圆形地安装 在弹性部分的外周侧，由比弹性部分更硬的材料构成，并且可拆卸地安装在壳体的外部。

公开(公告)号：US20060273936A1

公开(公告)日：2006-12-07

申请号：US11441817

申请日：2006-05-27

申请人： Kazuhiko Matsuoka ,  Kazuo Kurahashi

发明人： Kazuhiko Matsuoka ,  Kazuo Kurahashi

IPC分类号： H03M7/00

CPC分类号： G10H1/368 ,  G10H1/0066 ,  G10H1/363 ,  G10H2210/295 ,  G10H2240/325

摘要： An electronic instrument includes an input device having a plurality of channels to each of which an audio signal is input. A demodulation device demodulates audio signals and converts the audio signals into digital signals that control the electronic instrument. The electronic instrument also includes a feeding device that feeds the digital signals to a sound source and a detection device that detects whether or not the audio signals in any of the plurality of channels are modulated by the digital signals. A controller controls the demodulation device, in cases where it has been detected that any of the audio signals are modulated by the digital signals, so as to demodulate the digital signals from the audio signals that have been input to the channels, such that another channel's audio signals that are not modulated by the digital signals are output to an audio output.

摘要翻译： 电子仪器包括具有多个通道的输入设备，每个通道输入音频信号。 解调装置对音频信号进行解调并将音频信号转换为控制电子乐器的数字信号。 电子仪器还包括将数字信号馈送到声源的馈送装置和检测多个通道中的任何一个中的音频信号是否被数字信号调制的检测装置。 在检测到任何音频信号被数字信号调制的情况下，控制器控制解调装置，以便解调来自已经被输入到频道的音频信号的数字信号，使得另一频道 未被数字信号调制的音频信号被输出到音频输出。

公开(公告)号：US20050206887A1

公开(公告)日：2005-09-22

申请号：US11128352

申请日：2005-05-13

申请人： Hiroshi Morioka ,  Minori Noguchi ,  Yoshimasa Ohshima ,  Yukio Kembo ,  Hidetoshi Nishiyama ,  Kazuhiko Matsuoka ,  Yoshiharu Shigyo

发明人： Hiroshi Morioka ,  Minori Noguchi ,  Yoshimasa Ohshima ,  Yukio Kembo ,  Hidetoshi Nishiyama ,  Kazuhiko Matsuoka ,  Yoshiharu Shigyo

IPC分类号： G01N21/00 ,  G01N21/94 ,  G01N21/95 ,  G01N21/956 ,  G01R31/308 ,  H01J37/00 ,  H01L21/00 ,  H01L21/66 ,  H01L21/68

CPC分类号： H01L21/681 ,  B82Y15/00 ,  G01N21/94 ,  G01N21/9501 ,  G01N21/95623 ,  G01N2021/8822 ,  G01R31/308 ,  H01J37/00 ,  H01J2237/022 ,  H01J2237/0225 ,  H01L21/67253 ,  H01L21/67288 ,  H01L22/12

摘要： An apparatus and method for detecting defects on a specimen includes an illumination optical unit which obliquely projects a laser onto a region which is longer in one direction on a surface of a specimen than in a transverse direction, a table unit which mounts the specimen and which is movable, a detection optical unit which detects light from the specimen illuminated by the laser with an image sensor while the table is moving, and a signal processor. The signal processor processes a signal outputted from the image sensor of the detection optical unit and converted to a digital signal and extracts defects of the specimen by comparing the converted digital signal with a reference digital signal. A display unit displays information of defects extracted by the signal processor.

摘要翻译： 用于检测试样缺陷的装置和方法包括照射光学单元，其将激光倾斜地突出到在一个方向上在一个方向上比在横向方向上更长的区域，安装样本的台单元， 可移动的检测光学单元，检测光学单元，其在桌子移动时利用图像传感器检测由激光照射的样本的光，以及信号处理器。 信号处理器处理从检测光学单元的图像传感器输出的信号并转换为数字信号，并通过将转换的数字信号与参考数字信号进行比较来提取样本的缺陷。 显示单元显示由信号处理器提取的缺陷的信息。

公开(公告)号：US06894773B2

公开(公告)日：2005-05-17

申请号：US09805188

申请日：2001-03-14

申请人： Hiroshi Morioka ,  Minori Noguchi ,  Yoshimasa Ohshima ,  Yukio Kembo ,  Hidetoshi Nishiyama ,  Kazuhiko Matsuoka ,  Yoshiharu Shigyo

发明人： Hiroshi Morioka ,  Minori Noguchi ,  Yoshimasa Ohshima ,  Yukio Kembo ,  Hidetoshi Nishiyama ,  Kazuhiko Matsuoka ,  Yoshiharu Shigyo

IPC分类号： G01N21/00 ,  G01N21/94 ,  G01N21/95 ,  G01N21/956 ,  G01R31/308 ,  H01J37/00 ,  H01L21/00 ,  H01L21/66 ,  H01L21/68

CPC分类号： H01L21/681 ,  B82Y15/00 ,  G01N21/94 ,  G01N21/9501 ,  G01N21/95623 ,  G01N2021/8822 ,  G01R31/308 ,  H01J37/00 ,  H01J2237/022 ,  H01J2237/0225 ,  H01L21/67253 ,  H01L21/67288 ,  H01L22/12

摘要： A processing method for semiconductor devices in a semiconductor fabrication line includes processing a substrate in a first processing apparatus, transferring the substrate processed in the first processing apparatus to a detecting apparatus without removal of the substrate from the semiconductor fabrication line while continuing fabrication of the semiconductor devices, detecting foreign particle defects on the substrate transferred to the detecting apparatus, and determining a foreign particle generation condition of the processing apparatus based on a data from the detecting.

摘要翻译： 半导体制造线中的半导体器件的处理方法包括在第一处理设备中处理衬底，将在第一处理设备中处理的衬底转移到检测设备，而不从半导体制造线移除衬底，同时继续制造半导体 检测转移到检测装置的基板上的异物缺陷，以及根据来自检测的数据确定处理装置的异物生成条件。

公开(公告)号：US06339653B1

公开(公告)日：2002-01-15

申请号：US09523380

申请日：2000-03-10

申请人： Seiji Ishikawa ,  Masao Sakata ,  Jun Nakazato ,  Sadao Shimoyashiro ,  Hiroto Nagatomo ,  Yuzo Taniguchi ,  Osamu Satou ,  Tsutomu Okabe ,  Yuzaburo Sakamoto ,  Kimio Muramatsu ,  Kazuhiko Matsuoka ,  Taizo Hashimoto ,  Yuichi Ohyama ,  Yutaka Ebara ,  Isao Miyazaki ,  Shuichi Hanashima

发明人： Seiji Ishikawa ,  Masao Sakata ,  Jun Nakazato ,  Sadao Shimoyashiro ,  Hiroto Nagatomo ,  Yuzo Taniguchi ,  Osamu Satou ,  Tsutomu Okabe ,  Yuzaburo Sakamoto ,  Kimio Muramatsu ,  Kazuhiko Matsuoka ,  Taizo Hashimoto ,  Yuichi Ohyama ,  Yutaka Ebara ,  Isao Miyazaki ,  Shuichi Hanashima

IPC分类号： G06K900

CPC分类号： G01N21/88 ,  G01N21/956 ,  H01L22/20 ,  H01L2924/0002 ,  H01L2924/00

摘要： The present invention provides data analysis stations respectively for a probing tester and an automatic particle inspection machine. And, in the data analysis station, the coordinates on which the disposition of the chips are described on a product basis are equal to those on which the locations of the defects are described. Further, the station provides a function of determining which of the chips each defect belongs to. These data analysis stations are connected through a communication line. The present invention is capable of analyzing the data on a chip basis, resulting in being able to grasp the relation between how the defects are caused on each chip and the product character of the chip.

摘要翻译： 本发明分别提供用于探测器和自动粒子检测机的数据分析台。 并且，在数据分析站中，以产品为基础描述芯片的配置的坐标与描述缺陷的位置的坐标相同。 此外，该站提供确定每个缺陷属于哪个芯片的功能。 这些数据分析站通过通信线连接。 本发明能够基于芯片分析数据，从而能够掌握每个芯片上的缺陷引起的芯片与芯片的产品特性之间的关系。

公开(公告)号：US06289134B1

公开(公告)日：2001-09-11

申请号：US08996302

申请日：1997-12-22

申请人： Kazuyuki Kondo ,  Kazuhiko Matsuoka

发明人： Kazuyuki Kondo ,  Kazuhiko Matsuoka

IPC分类号： G06K940

CPC分类号： H04N1/40006 ,  H04N1/401

摘要： In an image read apparatus which reads an image from a recording medium, such as a film, and outputs image data, and shading correction data is set. Time elapsed since the shading correction data is set is counted. Before performing main scanning, whether or not the elapsed time is longer than a predetermined period is determined, and if it is, the shading correction data is updated. The read image data is processed with shading correction using the shading correction data which is updated as time elapses.

摘要翻译： 在从诸如胶片的记录介质读取图像并输出图像数据和阴影校正数据的图像读取装置中，设置阴影校正数据。 对阴影校正数据设定后经过的时间进行计数。 在执行主扫描之前，确定经过时间是否长于预定时间段，并且如果是，则更新阴影校正数据。 使用随时间经过更新的阴影校正数据，用阴影校正处理读取的图像数据。

公开(公告)号：US5289313A

公开(公告)日：1994-02-22

申请号：US965624

申请日：1992-10-22

申请人： Kazuhiko Matsuoka

发明人： Kazuhiko Matsuoka

IPC分类号： G02B5/04 ,  G02B27/09 ,  G11B7/125 ,  G11B7/135 ,  G02B5/30

CPC分类号： G02B19/0057 ,  G02B19/0014 ,  G02B19/0085 ,  G02B27/09 ,  G02B27/0972 ,  G02B5/04 ,  G11B7/127 ,  G11B7/1356

摘要： An optical head using a semiconductor laser array as a light source comprises a semiconductor laser array in which a plurality of semiconductor lasers are linearly arrayed, a collimator lens, an objective lens and a beam shaping prism system. The beam shaping prism system is arranged between the collimator lens and the objective lens to convert a beam width of a beam emerged from the collimator lens. The junction surfaces of the semiconductor lasers are parallel with an array direction. A plane defined by incident and emerging beams on and from the beam shaping prism system is parallel with or overlapping the array direction of the semiconductor lasers.

摘要翻译： 使用半导体激光器阵列作为光源的光学头包括其中多个半导体激光器被线性排列的半导体激光器阵列，准直透镜，物镜和光束整形棱镜系统。 光束整形棱镜系统布置在准直透镜和物镜之间以转换从准直透镜出射的光束的光束宽度。 半导体激光器的结表面与阵列方向平行。 由射束成形棱镜系统上的入射光束和出射光束定义的平面与半导体激光器的阵列方向平行或重叠。

公开(公告)号：US4517589A

公开(公告)日：1985-05-14

申请号：US433223

申请日：1982-10-07

申请人： Takeshi Baba ,  Kazuhiko Matsuoka

发明人： Takeshi Baba ,  Kazuhiko Matsuoka

IPC分类号： H04N1/48 ,  H04N1/46

CPC分类号： H04N1/488

摘要： A colored image reading apparatus has a light source for illuminating the surface of an original, a transmitting optical system for dividing the light beam from the surface of the original into two beams of short wavelength zone and long wavelength zone and transmitting them to a light detector, a processing circuit for effecting an operation between the signals from the light detector and obtaining a plurality of electrical signals, and a converter circuit for converting the plurality of electrical signals into signals corresponding to respective colors, and is capable of well discriminating and reading four colors, black, blue, red and white, by selecting to predetermined values the wavelength .lambda.'b of the overall spectral characteristic on the short wavelength zone side including all of the spectral characteristics of the light source, the transmitting optical system and the light detector relative to the maximum value of the transmission factor and the wavelength .lambda.'r of the overall spectral characteristic on the long wavelength zone side relative to the maximum value of the transmission factor.

摘要翻译： 彩色图像读取装置具有用于照射原稿的表面的光源，用于将来自原稿的表面的光束分成两束短波长区域和长波长区域的发送光学系统，并将其发送到光检测器 ，用于进行来自光检测器的信号之间的操作并获得多个电信号的处理电路，以及用于将多个电信号转换成对应于各种颜色的信号的转换器电路，并且能够良好地识别和读取四个 颜色，黑色，蓝色，红色和白色，通过选择包括光源，发射光学系统和光检测器的所有光谱特性的短波长区侧的总光谱特性的波长λ'b的预定值 相对于透射因子的最大值和t的波长λ'r 他在长波段一侧的总光谱特性相对于传输系数的最大值。