公开(公告)号：US20140264470A1

公开(公告)日：2014-09-18

申请号：US14198382

申请日：2014-03-05

Applicant: LIFE TECHNOLOGIES CORPORATION

Inventor： Keith G. FIFE ,  Jordan OWENS ,  Shifeng LI ,  James BUSTILLO

IPC: G01N27/414

CPC classification number: G01N27/414 ,  B01L3/502761 ,  B01L2200/0668 ,  B01L2300/0636 ,  B01L2300/0877 ,  G01N27/4145 ,  G01N27/4148

Abstract: In one embodiment, a chemical sensor is described. The chemical sensor includes a chemically-sensitive field effect transistor including a floating gate conductor having an upper surface. A material defines an opening extending to the upper surface of the floating gate conductor. The material comprises a first dielectric underlying a second dielectric. A conductive element contacts the upper surface of the floating gate conductor and extends a distance along a sidewall of the opening, the distance defined by a thickness of the first dielectric.

Abstract translation: 在一个实施例中，描述了化学传感器。 化学传感器包括具有上表面的浮栅导体的化学敏感场效应晶体管。 材料限定了延伸到浮动栅极导体的上表面的开口。 该材料包括位于第二电介质下面的第一电介质。 导电元件接触浮动栅极导体的上表面并且沿着开口的侧壁延伸一定距离，该距离由第一电介质的厚度限定。

公开(公告)号：US20140264464A1

公开(公告)日：2014-09-18

申请号：US13801002

申请日：2013-03-13

Applicant: LIFE TECHNOLOGIES CORPORATION

Inventor： Keith G. FIFE ,  James BUSTILLO ,  Jordan OWENS

IPC: G01N27/414

CPC classification number: G01N27/414 ,  G01N27/4145

Abstract: In one implementation, a chemical sensor is described. The chemical sensor includes chemically-sensitive field effect transistor including a floating gate conductor having an upper surface. A dielectric material defines an opening extending to the upper surface of the floating gate conductor. A conductive sidewall spacer is on a sidewall of the opening and contacts the upper surface of the floating gate conductor.

Abstract translation: 在一个实施方式中，描述了化学传感器。 化学传感器包括具有上表面的浮栅导体的化学敏感场效应晶体管。 介电材料限定了延伸到浮动栅极导体的上表面的开口。 导电侧壁间隔物位于开口的侧壁上并与浮栅导体的上表面接触。