公开(公告)号：US20170153201A1

公开(公告)日：2017-06-01

申请号：US15428126

申请日：2017-02-08

Applicant: LIFE TECHNOLOGIES CORPORATION

Inventor： Shifeng LI ,  James BUSTILLO ,  Wolfgang HINZ

IPC: G01N27/414 ,  C12Q1/68

CPC classification number: G01N27/4145 ,  C12Q1/6869 ,  G01N27/414 ,  Y10T436/143333

Abstract: A system includes a sensor including a sensor pad and a well wall structure defining a well operatively coupled to the sensor pad. The well is further defined by a lower surface disposed over the sensor pad. The well wall structure defines an upper surface and defines a wall surface extending between the upper surface and the lower surface. The system further includes a conductive layer disposed over the lower surface and the wall surface.

公开(公告)号：US20170108464A1

公开(公告)日：2017-04-20

申请号：US15333023

申请日：2016-10-24

Applicant: LIFE TECHNOLOGIES CORPORATION

Inventor： Shifeng LI ,  Jordan OWENS

IPC: G01N27/414 ,  B01L3/00

CPC classification number: G01N27/4145 ,  B01L3/502707 ,  B01L3/502761 ,  B01L2200/0668 ,  B01L2200/12 ,  B01L2300/0636 ,  B01L2300/0645 ,  B01L2300/0663 ,  B01L2300/0877 ,  B01L2300/0887 ,  B01L2300/12 ,  H01L21/302

Abstract: A method of forming a sensor component includes forming a first layer over a sensor pad of a sensor of a sensor array. The first layer includes a first inorganic material. The method further includes forming a second layer over the first layer. The second layer includes a polymeric material. The method also includes forming a third layer over the second layer, the third layer comprising a second inorganic material; patterning the third layer; and etching the second layer to define a well over the sensor pad of the sensor array.

公开(公告)号：US20140264470A1

公开(公告)日：2014-09-18

申请号：US14198382

申请日：2014-03-05

Applicant: LIFE TECHNOLOGIES CORPORATION

Inventor： Keith G. FIFE ,  Jordan OWENS ,  Shifeng LI ,  James BUSTILLO

IPC: G01N27/414

CPC classification number: G01N27/414 ,  B01L3/502761 ,  B01L2200/0668 ,  B01L2300/0636 ,  B01L2300/0877 ,  G01N27/4145 ,  G01N27/4148

Abstract: In one embodiment, a chemical sensor is described. The chemical sensor includes a chemically-sensitive field effect transistor including a floating gate conductor having an upper surface. A material defines an opening extending to the upper surface of the floating gate conductor. The material comprises a first dielectric underlying a second dielectric. A conductive element contacts the upper surface of the floating gate conductor and extends a distance along a sidewall of the opening, the distance defined by a thickness of the first dielectric.

Abstract translation: 在一个实施例中，描述了化学传感器。 化学传感器包括具有上表面的浮栅导体的化学敏感场效应晶体管。 材料限定了延伸到浮动栅极导体的上表面的开口。 该材料包括位于第二电介质下面的第一电介质。 导电元件接触浮动栅极导体的上表面并且沿着开口的侧壁延伸一定距离，该距离由第一电介质的厚度限定。

公开(公告)号：US20180128773A1

公开(公告)日：2018-05-10

申请号：US15614589

申请日：2017-06-05

Applicant: Life Technologies Corporation

Inventor： Keith G. FIFE ,  Jordan OWENS ,  Shifeng LI ,  James BUSTILLO

IPC: G01N27/414 ,  B01L3/00 ,  H01L21/28

Abstract: A chemical sensor is described. The chemical sensor includes a chemically-sensitive field effect transistor including a floating gate conductor having an upper surface. A material defines an opening extending to the upper surface of the floating gate conductor, the material comprising a first dielectric underlying a second dielectric. A conductive element contacts the upper surface of the floating gate conductor and extending a distance along a sidewall of the opening.

公开(公告)号：US20160077045A1

公开(公告)日：2016-03-17

申请号：US14939101

申请日：2015-11-12

Applicant: LIFE TECHNOLOGIES CORPORATION

Inventor： Keith G. FIFE ,  Jordan OWENS ,  Shifeng LI ,  James BUSTILLO

IPC: G01N27/414 ,  H01L21/28

CPC classification number: G01N27/414 ,  B01L3/502761 ,  B01L2200/0668 ,  B01L2300/0636 ,  B01L2300/0877 ,  G01N27/4145 ,  G01N27/4148 ,  H01L21/28273

Abstract: A chemical sensor is described. The chemical sensor includes a chemically-sensitive field effect transistor including a floating gate conductor having an upper surface. A material defines an opening extending to the upper surface of the floating gate conductor, the material comprising a first dielectric underlying a second dielectric. A conductive element contacts the upper surface of the floating gate conductor and extending a distance along a sidewall of the opening.

Abstract translation: 描述了化学传感器。 化学传感器包括具有上表面的浮栅导体的化学敏感场效应晶体管。 材料限定了延伸到浮动栅极导体的上表面的开口，该材料包括位于第二电介质下面的第一电介质。 导电元件接触浮栅导体的上表面并沿着开口的侧壁延伸一段距离。

公开(公告)号：US20140264471A1

公开(公告)日：2014-09-18

申请号：US14198402

申请日：2014-03-05

Applicant: LIFE TECHNOLOGIES CORPORATION

Inventor： Keith G. FIFE ,  Jordan OWENS ,  Shifeng LI ,  James BUSTILLO

IPC: G01N27/414

CPC classification number: G01N27/414 ,  B01L3/502761 ,  B01L2200/0668 ,  B01L2300/0636 ,  B01L2300/0877 ,  G01N27/4145 ,  G01N27/4148

Abstract: In one implementation, a chemical device is described. The sensor includes a chemically-sensitive field effect transistor including a floating gate structure having a plurality of floating gate conductors electrically coupled to one another. A conductive element overlies and is in communication with an uppermost floating gate conductor in the plurality of floating gate conductors. The conductive element is wider and thinner than the uppermost floating gate conductor. A dielectric material defines an opening extending to an upper surface of the conductive element.

Abstract translation: 在一个实施方式中，描述了化学装置。 传感器包括化学敏感的场效应晶体管，其包括具有彼此电耦合的多个浮置栅极导体的浮动栅极结构。 导电元件覆盖并与多个浮置栅极导体中的最上面的浮动栅极导体连通。 导电元件比最上面的浮栅导体更宽和更薄。 介电材料限定了延伸到导电元件的上表面的开口。

公开(公告)号：US20140220697A1

公开(公告)日：2014-08-07

申请号：US14260818

申请日：2014-04-24

Applicant: LIFE TECHNOLOGIES CORPORATION

Inventor： Shifeng LI ,  James BUSTILLO ,  Wolfgang HINZ

IPC: G01N27/414

CPC classification number: G01N27/4145 ,  C12Q1/6869 ,  G01N27/414 ,  Y10T436/143333

Abstract: A system includes a sensor including a sensor pad and a well wall structure defining a well operatively coupled to the sensor pad. The well is further defined by a lower surface disposed over the sensor pad. The well wall structure defines an upper surface and defines a wall surface extending between the upper surface and the lower surface. The system further includes a conductive layer disposed over the lower surface and the wall surface.

Abstract translation: 一种系统包括传感器，其包括传感器垫和井壁结构，其限定了良好地操作地耦合到传感器垫的结构。 该井由设置在传感器垫上的下表面进一步限定。 井壁结构限定了上表面并且限定了在上表面和下表面之间延伸的壁表面。 该系统还包括设置在下表面和壁表面上的导电层。

公开(公告)号：US20140191293A1

公开(公告)日：2014-07-10

申请号：US13736566

申请日：2013-01-08

Applicant: LIFE TECHNOLOGIES CORPORATION

Inventor： James BUSTILLO ,  Shifeng LI

IPC: H01L29/66 ,  G01N27/414

CPC classification number: G01N27/414 ,  G01N27/4145 ,  G01N27/4148

Abstract: In one implementation, a method for manufacturing a chemical detection device is described. The method includes forming a chemical sensor having a sensing surface. A dielectric material is deposited on the sensing surface. A first etch process is performed to partially etch the dielectric material to define an opening over the sensing surface and leave remaining dielectric material on the sensing surface. An etch protect material is formed on a sidewall of the opening. A second etch process is then performed to selectively etch the remaining dielectric material using the etch protect material as an etch mask, thereby exposing the sensing surface.

Abstract translation: 在一个实施方式中，描述了用于制造化学检测装置的方法。 该方法包括形成具有感测表面的化学传感器。 电介质材料沉积在感测表面上。 执行第一蚀刻工艺以部分地蚀刻介电材料以在感测表面上限定开口，并将剩余的电介质材料留在感测表面上。 蚀刻保护材料形成在开口的侧壁上。 然后执行第二蚀刻工艺以使用蚀刻保护材料作为蚀刻掩模来选择性地蚀刻剩余的电介质材料，从而暴露感测表面。

公开(公告)号：US20180217091A1

公开(公告)日：2018-08-02

申请号：US15826627

申请日：2017-11-29

Applicant: LIFE TECHNOLOGIES CORPORATION

Inventor： Shifeng LI ,  James BUSTILLO

IPC: G01N27/414

CPC classification number: G01N27/414 ,  G01N27/4145 ,  G01N27/4148

Abstract: In one implementation, a method for manufacturing a chemical detection device is described. The method includes forming a chemical sensor having a sensing surface. A dielectric material is deposited on the sensing surface. A first etch process is performed to partially etch the dielectric material to define an opening over the sensing surface and leave remaining dielectric material on the sensing surface. An etch protect material is formed on a sidewall of the opening. A second etch process is then performed to selectively etch the remaining dielectric material using the etch protect material as an etch mask, thereby exposing the sensing surface.

公开(公告)号：US20170081712A1

公开(公告)日：2017-03-23

申请号：US15273200

申请日：2016-09-22

Applicant: LIFE TECHNOLOGIES CORPORATION

Inventor： Shifeng LI ,  Shoulian DONG ,  Theodore E. STRAUB ,  David N. KEYS

IPC: C12Q1/68 ,  G01N27/30 ,  G01N27/414

CPC classification number: C12Q1/6825 ,  C12Q1/6837 ,  C12Q1/6851 ,  G01N27/301 ,  G01N27/4145 ,  C12Q2531/113 ,  C12Q2563/116 ,  C12Q2563/159 ,  C12Q2565/607

Abstract: A system for detecting one or more target molecules includes a reaction device and a temperature controller. The reaction device comprises a plurality of reaction sites and plurality of field effect transistors corresponding to the plurality of reaction sites. At least two of the reaction sites may receive a reaction solution including two target molecules. The temperature controller is configured to control a temperature of at least one of the reaction sites or the reaction solution received by the at least one reaction site. At least some of the reaction sites may receive a reagent supporting an amplification reaction. When the reaction is subjected to an amplification assay, an amplified product is produced in the at least some of the reaction sites. The plurality of field effect transistors are configured to detect at least one of the amplified products.