公开(公告)号：US09740190B2

公开(公告)日：2017-08-22

申请号：US14511100

申请日：2014-10-09

Applicant: Mitutoyo Corporation

Inventor： Robert Kamil Bryll

IPC: G05B19/21

CPC classification number: G05B19/21 ,  G01B11/005 ,  G01B2210/50 ,  G02B21/0016 ,  G02B21/0064 ,  G05B2219/23182 ,  G05B2219/37208 ,  G05B2219/37449 ,  G05B2219/37553 ,  G06F9/00

Abstract: A method for programming a three-dimensional (3D) workpiece scan path for a metrology system comprising a 3D motion control system, a first type of Z-height sensing system, and a second type of Z-height sensing system that provides less precise surface Z-height measurements over a broader Z-height measuring range. The method comprises: placing a representative workpiece on a stage of the metrology system, defining at least a first workpiece scan path segment for the representative workpiece, determining preliminary actual surface Z-height measurements along the first workpiece scan path segment, and determining a precise 3D scan path for moving the first type of Z-height sensing system to perform precise surface Z-height measurements. The precise 3D scan path is based on the determined preliminary actual surface Z-height measurements. The precise 3D scan path may be used for performing precise surface Z-height measurements or stored to be used in an inspection program.

公开(公告)号：US20170078549A1

公开(公告)日：2017-03-16

申请号：US15360671

申请日：2016-11-23

Applicant: Mitutoyo Corporation

Inventor： Casey Edward Emtman ,  Robert Kamil Bryll

IPC: H04N5/235 ,  H04N5/225 ,  H04N9/04 ,  G06T7/00 ,  G02B21/36 ,  G06T5/20 ,  G02F1/33 ,  G02B27/00 ,  G02B21/24 ,  H04N5/232 ,  G06T5/00

CPC classification number: H04N5/2351 ,  G02B21/241 ,  G02B21/361 ,  G02B21/365 ,  G02B21/367 ,  G02B27/0075 ,  G02F1/33 ,  G02F2001/294 ,  G06T5/003 ,  G06T5/20 ,  G06T7/0004 ,  G06T2207/10056 ,  G06T2207/30164 ,  H04N5/2254 ,  H04N5/2256 ,  H04N5/23216 ,  H04N5/2356 ,  H04N9/04

Abstract: A method for providing an extended depth of field (EDOF) image includes: Periodically modulating an imaging system focus position at a high frequency; using an image exposure comprising discrete image exposure increments acquired at discrete focus positions during an image integration time comprising a plurality of modulation periods of the focus position; and using strobe operations having controlled timings configured to define a set of evenly spaced focus positions for the image exposure increments. The timings are configured so that adjacent focus positions in the set are acquired at times that are separated by at least one reversal of the direction of change of the focus position during its periodic modulation. This solves practical timing problems that may otherwise prevent obtaining closely spaced discrete image exposure increments during high frequency focus modulation. Deconvolution operations may be used to improve clarity in the resulting EDOF image.

Abstract translation: 用于提供扩展景深（EDOF）图像的方法包括：以高频周期性调制成像系统聚焦位置; 使用图像曝光，其包括在包括所述焦点位置的多个调制周期的图像积分时间期间在离散焦点位置处获取的离散图像曝光增量; 以及使用具有受控定时的选通操作，所述控制定时被配置为限定用于图像曝光增量的一组均匀间隔的焦点位置。 定时被配置为使得在周期性调制期间被聚焦位置的变化方向的至少一个反转分开的时间被采集在集合中的相邻焦点位置。 这解决了实际的计时问题，否则可能会妨碍在高频聚焦调制期间获得紧密间隔的离散图像曝光增量。 去卷积操作可以用于提高所得EDOF图像的清晰度。

公开(公告)号：US20140185910A1

公开(公告)日：2014-07-03

申请号：US13728842

申请日：2012-12-27

Applicant: MITUTOYO CORPORATION

Inventor： Robert Kamil Bryll ,  Yuhua Ding

IPC: G06K9/46

CPC classification number: G06K9/6204 ,  G06K9/50 ,  G06K2209/19

Abstract: A method for improving repeatability in edge location measurement results of a machine vision inspection system comprises: placing a workpiece in a field of view of the machine vision inspection system; providing an edge measurement video tool comprising an edge-referenced alignment compensation defining portion; operating the edge measurement video tool to define a region of interest of the video tool which includes an edge feature of the workpiece; operating the edge measurement video tool to automatically perform scan line direction alignment operations such that the scan line direction of the edge measurement video tool is aligned along a first direction relative to the edge feature, wherein the first direction is defined by predetermined alignment operations of the edge-referenced alignment compensation defining portion; and performing edge location measurement operations with the region of interest in that position.

Abstract translation: 一种用于提高机器视觉检查系统的边缘位置测量结果中的重复性的方法，包括：将工件放置在机器视觉检查系统的视野内; 提供包括边缘参考对准补偿限定部分的边缘测量视频工具; 操作边缘测量视频工具以定义包括工件的边缘特征的视频工具的感兴趣区域; 操作所述边缘测量视频工具以自动执行扫描线方向对准操作，使得所述边缘测量视频工具的扫描线方向相对于所述边缘特征沿着第一方向对准，其中所述第一方向由所述边缘测量视频工具的预定对准操作定义 边缘参考对准补偿定义部分; 并且与该位置的感兴趣区域执行边缘位置测量操作。

公开(公告)号：US20130162807A1

公开(公告)日：2013-06-27

申请号：US13725992

申请日：2012-12-21

Applicant: MITUTOYO CORPORATION

Inventor： Robert Kamil Bryll ,  Shannon Roy Campbell

IPC: H04N5/235

CPC classification number: H04N5/235 ,  H04N5/23212

Abstract: A method of automatically adjusting lighting conditions improves the results of points from focus (PFF) 3D reconstruction. Multiple lighting levels are automatically found based on brightness criteria and an image stack is taken at each lighting level. In some embodiments, the number of light levels and their respective light settings may be determined based on trial exposure images acquired at a single global focus height which is a best height for an entire region of interest, rather than the best focus height for just the darkest or brightest image pixels in a region of interest. The results of 3D reconstruction at each selected light level are combined using a Z-height quality metric. In one embodiment, the PFF data point Z-height value that is to be associated with an X-Y location is selected based on that PFF data point having the best corresponding Z-height quality metric value at that X-Y location.

Abstract translation: 自动调整照明条件的方法改善了聚焦点（PFF）3D重建的结果。 根据亮度标准自动找到多个照明级别，并在每个照明级别拍摄图像堆叠。 在一些实施例中，可以基于在单个全球焦点高度获取的试验曝光图像来确定光级数及其相应的光设置，该全景焦点高度是整个感兴趣区域的最佳高度，而不是仅针对 感兴趣区域中最暗或最亮的图像像素。 使用Z高度质量度量来组合每个选择的光级处的3D重建的结果。 在一个实施例中，基于在该X-Y位置处具有最佳对应Z高度质量度量值的PFF数据点来选择与X-Y位置相关联的PFF数据点Z高度值。

公开(公告)号：US20210390681A1

公开(公告)日：2021-12-16

申请号：US16902181

申请日：2020-06-15

Applicant: Mitutoyo Corporation

Inventor： William Todd Watson ,  Robert Kamil Bryll ,  Shannon Roy Campbell

IPC: G06T7/00

Abstract: A workpiece inspection and defect detection system includes a light source, a lens that inputs image light arising from a surface of a workpiece, and a camera that receives imaging light transmitted along an imaging optical path. The system utilizes images of workpieces acquired with the camera as training images to train a defect detection portion to detect defect images that include workpieces with defects. Anomaly detector classification characteristics are determined based on features of the training images. Run mode images of workpieces are acquired with the camera, and based on determined features from the images, the anomaly detector classification characteristics are utilized to determine if the images of the workpieces are classified as anomalous. In addition, the defect detection portion determines if images are defect images that include workpieces with defects and for which additional operations may be performed (e.g., metrology operations for measuring dimensions of the defects, etc.)

公开(公告)号：US10341646B2

公开(公告)日：2019-07-02

申请号：US15721112

申请日：2017-09-29

Applicant: Mitutoyo Corporation

Inventor： Paul Gerard Gladnick ,  Robert Kamil Bryll

IPC: G02F1/33 ,  H04N17/00 ,  H04N5/235

Abstract: A variable focal length (VFL) lens system is provided including a VFL lens, a VFL lens controller, an objective lens, a camera and an optical power monitoring configuration. During a standard workpiece imaging mode, the objective lens transmits workpiece light along an imaging optical path through the VFL lens to the camera, which provides a corresponding workpiece image exposure. During an optical power monitoring mode, the optical power monitoring configuration produces a monitored beam pattern which travels along at least a portion of the imaging optical path through the VFL lens to the camera, which provides a monitoring image exposure. Different monitoring image exposures are acquired at different phase timings of the periodic modulation of the VFL lens, and a dimension of the monitored beam pattern is measured in each monitoring image exposure as related to an optical power of the VFL lens at the corresponding phase timing.

公开(公告)号：US20190104302A1

公开(公告)日：2019-04-04

申请号：US15721112

申请日：2017-09-29

Applicant: Mitutoyo Corporation

Inventor： Paul Gerard Gladnick ,  Robert Kamil Bryll

IPC: H04N17/00 ,  H04N5/235 ,  G02F1/33

CPC classification number: H04N17/002 ,  G01N21/00 ,  G02B7/28 ,  G02B21/0016 ,  G02B21/365 ,  G02B27/16 ,  G02F1/33 ,  G03B13/36 ,  G03B43/00 ,  H04N5/23212 ,  H04N5/232133 ,  H04N5/23296 ,  H04N5/2353

Abstract: A variable focal length (VFL) lens system is provided including a VFL lens, a VFL lens controller, an objective lens, a camera and an optical power monitoring configuration. During a standard workpiece imaging mode, the objective lens transmits workpiece light along an imaging optical path through the VFL lens to the camera, which provides a corresponding workpiece image exposure. During an optical power monitoring mode, the optical power monitoring configuration produces a monitored beam pattern which travels along at least a portion of the imaging optical path through the VFL lens to the camera, which provides a monitoring image exposure. Different monitoring image exposures are acquired at different phase timings of the periodic modulation of the VFL lens, and a dimension of the monitored beam pattern is measured in each monitoring image exposure as related to an optical power of the VFL lens at the corresponding phase timing.

公开(公告)号：US10178321B2

公开(公告)日：2019-01-08

申请号：US15360671

申请日：2016-11-23

Applicant: Mitutoyo Corporation

Inventor： Casey Edward Emtman ,  Robert Kamil Bryll

IPC: H04N5/235 ,  H04N5/232 ,  H04N5/225 ,  H04N9/04 ,  G06T7/00 ,  G06T5/00 ,  G06T5/20 ,  G02F1/33 ,  G02B27/00 ,  G02B21/24 ,  G02B21/36 ,  G02F1/29

Abstract: A method for providing an extended depth of field (EDOF) image includes: Periodically modulating an imaging system focus position at a high frequency; using an image exposure comprising discrete image exposure increments acquired at discrete focus positions during an image integration time comprising a plurality of modulation periods of the focus position; and using strobe operations having controlled timings configured to define a set of evenly spaced focus positions for the image exposure increments. The timings are configured so that adjacent focus positions in the set are acquired at times that are separated by at least one reversal of the direction of change of the focus position during its periodic modulation. This solves practical timing problems that may otherwise prevent obtaining closely spaced discrete image exposure increments during high frequency focus modulation. Deconvolution operations may be used to improve clarity in the resulting EDOF image.

公开(公告)号：US10171725B1

公开(公告)日：2019-01-01

申请号：US15850149

申请日：2017-12-21

Applicant: Mitutoyo Corporation

Inventor： Michael Nahum ,  Robert Kamil Bryll ,  Paul Gerard Gladnick

IPC: H04N5/232 ,  H04N5/225 ,  H04N5/235 ,  G03B13/36

Abstract: A focus state reference subsystem comprising a focus state reference object (FSRO) and reference object optics (ROO) is for use in a variable focal length (VFL) lens system comprising a VFL lens, a controller that modulates its optical power, and a camera located along an imaging path including an objective lens and the VFL lens. The ROO transmits image light from the FSRO along a portion of the imaging path through the VFL lens to the camera. Respective FS reference regions (FSRRs) of the FSRO include a contrast pattern fixed at respective focus positions relative to the ROO. A camera image that includes a best-focus image of a particular FSRR defines a best-focus reference state associated with that FSRR, wherein that best-focus reference state comprises a VFL optical power and/or effective focus position of the VFL lens system through the objective lens.

公开(公告)号：US20170078532A1

公开(公告)日：2017-03-16

申请号：US14854624

申请日：2015-09-15

Applicant: Mitutoyo Corporation

Inventor： Robert Kamil Bryll ,  Mark Lawrence Delaney

IPC: H04N5/217 ,  H04N5/235 ,  G06T7/00 ,  G06T5/00 ,  G06T7/40 ,  G02B21/36 ,  H04N9/04

CPC classification number: H04N5/2178 ,  G02B21/365 ,  G06T5/005 ,  G06T7/0004 ,  G06T7/90 ,  G06T2207/10024 ,  G06T2207/10152 ,  H04N5/23212 ,  H04N5/2354 ,  H04N9/045 ,  H04N9/07

Abstract: An image acquisition system is operated to provide an image that is relatively free of the effect of longitudinal chromatic aberration. The system includes a variable focal length lens (e.g., a tunable acoustic gradient index of refraction lens) that is operated to periodically modulate a focus position. First, second, third, etc., wavelength image exposure contributions are provided by operating an illumination system to provide instances of strobed illumination of first, second, third, etc., wavelengths (e.g., green, blue, red, etc.) timed to correspond with respective phase timings of the periodically modulated focus position which focus the respective wavelength image exposure contributions at the same focus plane. The respective phase timings of the periodically modulated focus position compensate for longitudinal chromatic aberration of at least the variable focal length lens. An image is produced that is relatively free of the effect of longitudinal chromatic aberration by combining the image exposure contributions.

Abstract translation: 操作图像采集系统以提供相对没有纵向色差影响的图像。 该系统包括可操作以周期性地调制焦点位置的可变焦距透镜（例如，可调节的声学倾斜折射率折射率）。 第一，第二，第三等等，通过操作照明系统来提供波长图像曝光贡献，以提供定时的第一，第二，第三等等波长（例如，绿色，蓝色，红色等）的选通照明的实例 以对应于将相应波长图像曝光贡献聚焦在相同聚焦平面处的周期性调制的聚焦位置的相位定时。 周期调制的聚焦位置的各个相位定时补偿至少可变焦距透镜的纵向色差。 通过组合图像曝光贡献，产生相对不受纵向色差影响的图像。