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公开(公告)号：US12287655B2
公开(公告)日：2025-04-29
申请号：US18471278
申请日：2023-09-20
Applicant: MKS Instruments, Inc.
Inventor： Junhua Ding
IPC: G05D7/06 , G01F1/86 , F16K7/14 , F16K7/16 , F16K31/00 , G01F1/34 , G01F1/36 , G01F1/42 , G01F1/50 , G01F15/00 , G01F15/02
Abstract: Mass flow controller (MFC) devices capable of self-verification and methods of providing for self-verifying mass flow control are provided. An MFC includes a chamber configured to receive a fluid, an upstream valve disposed upstream of the chamber, and a downstream control valve disposed downstream of the chamber. The MFC further includes a pressure drop element disposed downstream of the downstream control valve and first and second pressure sensors. A controller of the MFC is configured to control actuation of the downstream control valve by toggling between flow-based feedback control and pressure-based feedback control. In flow-based feedback control, a flow is monitored based on a rate of decay of pressure in the chamber as detected by the first pressure sensor upon closure of the upstream control valve. In pressure-based feedback control, a pressure upstream of the pressure drop element, as detected by the second pressure sensor, is monitored.
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公开(公告)号：US12264950B2
公开(公告)日：2025-04-01
申请号：US17656177
申请日：2022-03-23
Applicant: MKS Instruments, Inc.
Inventor： Junhua Ding , Michael L'Bassi
Abstract: Devices and methods for mass flow verification are provided. A mass flow verifier includes a chamber configured to receive a fluid, a critical flow nozzle upstream of the chamber, a chamber valve, a downstream valve, and a bypass valve. The chamber valve is configured to selectively enable fluid flow from the critical flow nozzle to the chamber. The downstream valve is configured to selectively enable fluid flow from the chamber to a downstream location. The bypass valve is configured to selectively enable fluid flow from the critical flow nozzle to a dump location. The mass flow verifier further includes a controller configured to verify flow rate of the fluid based on a rate of rise in pressure of the fluid as detected by a pressure sensor in the chamber.
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公开(公告)号：US20240281007A1
公开(公告)日：2024-08-22
申请号：US18170964
申请日：2023-02-17
Applicant: MKS Instruments, Inc.
Inventor： Junhua Ding , Michael L'Bassi
IPC: G05D16/20
CPC classification number: G05D16/2013
Abstract: Pressure control methods and devices are provided. A pressure controller includes a control valve configured to control pressure of a fluid in a flow path, a flow restrictor disposed in the flow path, and distal and proximal pressure sensors. The distal pressure sensor detects fluid pressure at the flow restrictor at a location distal from the control valve, and the proximal pressure sensor detects fluid pressure at the flow restrictor at a location proximal to the control valve. The pressure controller further includes a controller configured to: 1) control actuation of the control valve based on pressure as detected by the distal pressure sensor and a pressure setpoint, and 2) determine a mass flow rate based on pressure as detected by the distal and proximal pressure sensors.
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公开(公告)号：US20230266156A1
公开(公告)日：2023-08-24
申请号：US17651751
申请日：2022-02-18
Applicant: MKS Instruments, Inc.
Inventor： Junhua Ding
CPC classification number: G01F1/88 , G01F15/005
Abstract: Mass flow controllers that can provide for improved bleeding time and can be manufactured with less complexity and cost are provided. A mass flow controller includes a body having a valve outlet bore defining a flow path and an adjustable valve configured to control flow of a gas through the flow path. A valve element includes an outlet orifice of the adjustable valve and is disposed within the bore. The mass flow controller further includes a pressure drop element disposed coaxially with the valve element within the bore. An upstream pressure sensor is configured to detect a pressure at a location in the flow path between the adjustable valve and the pressure drop element, and a controller is configured to determine a flow rate through the flow path based on pressure as detected by the upstream pressure sensor.
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公开(公告)号：US20210215655A1
公开(公告)日：2021-07-15
申请号：US16742172
申请日：2020-01-14
Applicant: MKS Instruments, Inc.
Inventor： Jim Ye , Vidi Saptari , Junhua Ding
Abstract: A system and method provides a more precise mole delivery amount of a process gas, for each pulse of a pulse gas delivery, by measuring a concentration of the process gas and controlling the amount of gas mixture delivered in a pulse of gas flow based on the received concentration of the process gas. The control of mole delivery amount for each pulse can be achieved by adjusting flow setpoint, pulse duration, or both.
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Patent Agency Ranking
公开(公告)号：US20200301455A1
公开(公告)日：2020-09-24
申请号：US16898016
申请日：2020-06-10
Applicant: MKS Instruments, Inc.
Inventor： Michael L'Bassi , Mark J. Quaratiello , Junhua Ding
Abstract: A fluid control system and associated method for pulse delivery of a fluid includes a shutoff valve and a mass flow controller (MFC) upstream of the shutoff valve. The MFC includes a flow channel, a control valve to control flow of fluid in the flow channel, a flow sensor to measure flow rate in the flow channel, and a controller having a valve input from the shutoff valve indicating opening of the shutoff valve. The controller is configured to respond to the valve input to control flow of fluid through the control valve to initiate and terminate a pulse of fluid from the flow channel to the shutoff valve to control a mass of fluid delivered during the pulse of fluid. The valve input can be a pressure signal, and the MFC can include a pressure sensor to sense the pressure signal.
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公开(公告)号：US10698426B2
公开(公告)日：2020-06-30
申请号：US15973190
申请日：2018-05-07
Applicant: MKS Instruments, Inc.
Inventor： Junhua Ding , Michael L'Bassi , Wayne Cole
Abstract: Fluid control systems, including mass flow control systems, mass flow ratio control systems, and mass flow and ratio control systems, as well as corresponding methods for fluid control are provided. These systems allow one shared pressure sensor to be used for multiple flow channels, and a controller which can accurately determine mass flow on the basis of fluid pressure detected by this shared pressure sensor.
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公开(公告)号：US10649471B2
公开(公告)日：2020-05-12
申请号：US15887447
申请日：2018-02-02
Applicant: MKS Instruments, Inc.
Inventor： Junhua Ding , Michael L'Bassi , Gordon Hill
Abstract: A fluid control system for pulse delivery of a fluid include a flow channel, an isolation valve to initiate and terminate a pulse of fluid from the flow channel, and a pulse mass flow controller (MFC). The MFC includes a control valve to control flow of fluid in the flow channel, a flow sensor to measure flow rate in the flow channel, and a controller to control flow of fluid through the control valve and switching of the isolation valve, to control a mass of fluid delivered during the pulse of fluid. Controlling the flow of fluid through the control valve can be based on feedback from the flow sensor during the pulse initiated and terminated by the isolation valve.
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29.发明授权公开(公告)号：US10514712B2
公开(公告)日：2019-12-24
申请号：US15244264
申请日：2016-08-23
Applicant: MKS INSTRUMENTS, INC.
Inventor： Junhua Ding , Michael L'Bassi
Abstract: Methods, systems, and apparatus for pressure-based flow measurement are provided. A processor receives, from the pressure-based mass flow controller (MFC), an upstream pressure value Pu. The processor computes, for the pressure-based mass flow controller (MFC), a downstream pressure value Pd based on the received upstream pressure value Pu. The processor computes, for the pressure-based mass flow controller (MFC), a flow rate Q based on the received upstream pressure value Pu and the computed downstream pressure value Pd. The processor controls a flow through the pressure-based mass flow controller (MFC) based on the computed flow rate Q. The methods, systems, and apparatus can be used for flow measurement in non-critical or un-choked flow conditions.
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公开(公告)号：US20190056755A1
公开(公告)日：2019-02-21
申请号：US16168812
申请日：2018-10-23
Applicant: MKS Instruments, Inc.
Inventor： Junhua Ding , Michael L'Bassi , Tseng-Chung Lee
IPC: G05D7/06
Abstract: A system for delivering pulses of a desired mass of gas to a tool, comprising: a mass flow controller including flow sensor, a control valve and a dedicated controller configured and arranged to receive a recipe of a sequence of steps for opening and closing the control valve so as to deliver as sequence of gas pulses as a function of the recipe. The mass flow controller is configured and arranged so as to operate in either one of at least two modes: as a traditional mass flow controller (MFC) mode or in a pulse gas delivery (PGD) mode. Further, the mass flow controller includes an input configured to receive an input signal; an output configured to provide an output signal; a communication port configured to receive program instructions; memory configured and arranged to receive programming data determining the programmed configuration of the mass flow controller as either a digital or analog configuration; and a processor/controller for operating the mass flow controller in accordance with the programmed configuration.
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