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公开(公告)号:US11327315B2
公开(公告)日:2022-05-10
申请号:US16930897
申请日:2020-07-16
Applicant: Magic Leap, Inc.
Inventor: Kang Luo , Vikramjit Singh , Nai-Wen Pi , Shuqiang Yang , Frank Y. Xu
Abstract: Blazed diffraction gratings provide optical elements in head-mounted display systems to, e.g., incouple light into or out-couple light out of a waveguide. These blazed diffraction gratings may be configured to have reduced polarization sensitivity. Such gratings may, for example, incouple or outcouple light of different polarizations with similar level of efficiency. The blazed diffraction gratings and waveguides may be formed in a high refractive index substrate such as lithium niobate. In some implementations, the blazed diffraction gratings may include diffractive features having a feature height of 40 nm to 120 nm, for example, 80 nm. The diffractive features may be etched into the high index substrate, e.g., lithium niobate.
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公开(公告)号:US10942306B2
公开(公告)日:2021-03-09
申请号:US16685505
申请日:2019-11-15
Applicant: Magic Leap, Inc.
Inventor: Shuqiang Yang , Vikramjit Singh , Kang Luo , Nai-Wen Pi , Frank Y. Xu, Jr.
Abstract: Embodiments of the present disclosure are directed to techniques for manufacturing an eyepiece (or eyepiece layer) by applying multiple, different diffraction gratings to a single side of an eyepiece substrate instead of applying different gratings to different sides (e.g., opposite surfaces) of the substrate. Embodiments are also directed to the eyepiece (or eyepiece layer) that is arranged to have multiple, different diffraction gratings on a single side of the eyepiece substrate. In some embodiments, two or more grating patterns are superimposed to create a combination pattern in a template (e.g., a master), which is then used to apply the combination pattern to a single side of the eyepiece substrate. In some embodiments, multiple layers of patterned material (e.g., with differing refraction indices) are applied to a single side of the substrate. In some examples, the combined grating patterns are orthogonal pupil expander and exit pupil expander grating patterns.
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公开(公告)号:US10823894B2
公开(公告)日:2020-11-03
申请号:US16596630
申请日:2019-10-08
Applicant: Magic Leap, Inc.
Inventor: Christophe Peroz , Mauro Melli , Vikramjit Singh , David Jurbergs , Jeffrey Dean Schmulen , Zongxing Wang , Shuqiang Yang , Frank Y. Xu , Kang Luo , Marlon Edward Menezes , Michael Nevin Miller
IPC: G02B5/18 , G02B6/00 , F21V8/00 , G06F3/01 , G06F3/147 , G09G3/00 , G09G3/20 , G02B27/01 , G02B7/00 , G02B5/30 , G02B27/00 , G02B27/28 , G02B27/10 , H04N9/31 , G02C5/16 , G02C11/00 , G06F1/16 , G06F1/20 , H05K7/20 , G02B6/34 , G02B6/293 , G02B27/30
Abstract: A method of manufacturing a waveguide having a combination of a binary grating structure and a blazed grating structure includes cutting a substrate off-axis, depositing a first layer on the substrate, and depositing a resist layer on the first layer. The resist layer includes a pattern. The method also includes etching the first layer in the pattern using the resist layer as a mask. The pattern includes a first region and a second region. The method further includes creating the binary grating structure in the substrate in the second region and creating the blazed grating structure in the substrate in the first region.
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公开(公告)号:US10481317B2
公开(公告)日:2019-11-19
申请号:US15683706
申请日:2017-08-22
Applicant: Magic Leap, Inc.
Inventor: Christophe Peroz , Mauro Melli , Vikramjit Singh , David Jurbergs , Jeffrey Dean Schmulen , Zongxing Wang , Shuqiang Yang , Frank Y. Xu , Kang Luo , Marlon Edward Menezes , Michael Nevin Miller
IPC: G02B5/18 , G02B6/00 , F21V8/00 , G02B5/30 , G02B27/00 , G02B27/01 , G02B27/28 , G02B27/10 , H04N9/31 , G02C5/16 , G02C11/00 , G06F1/16 , G06F1/20 , G09G3/00 , H05K7/20 , G06F3/01 , G06F3/147 , G09G3/20 , G02B7/00 , G02B27/30
Abstract: A method of manufacturing a waveguide having a combination of a binary grating structure and a blazed grating structure includes cutting a substrate off-axis, depositing a first layer on the substrate, and depositing a resist layer on the first layer. The resist layer includes a pattern. The method also includes etching the first layer in the pattern using the resist layer as a mask. The pattern includes a first region and a second region. The method further includes creating the binary grating structure in the substrate in the second region and creating the blazed grating structure in the substrate in the first region.
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公开(公告)号:US20190137777A1
公开(公告)日:2019-05-09
申请号:US16182309
申请日:2018-11-06
Applicant: Magic Leap, Inc.
Inventor: Shuqiang Yang , Vikramjit Singh , Kang Luo , Nai-Wen Pi , Frank Y. Xu
CPC classification number: G02B27/4255 , G02B5/1814 , G02B27/0081 , G02B27/0172 , G02B27/4272 , G02B2027/0125 , G02B2027/0174
Abstract: A method of fabricating a diffractive structure with varying diffractive element depth includes providing a shadow mask having a first region with a first aperture dimension to aperture periodicity ratio and a second region with a second aperture dimension to aperture periodicity ratio less than the first aperture dimension to aperture periodicity ratio. The method also includes positioning the shadow mask adjacent a substrate. The substrate comprises an etch mask corresponding to the diffractive structure. The method further includes exposing the substrate to an etchant, etching the substrate to form diffractive elements adjacent the first region having a first depth, and etching the substrate to form diffractive elements adjacent the second region having a second depth less than the first depth.
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公开(公告)号:US20180339437A1
公开(公告)日:2018-11-29
申请号:US15990155
申请日:2018-05-25
Applicant: Magic Leap, Inc.
Inventor: Roy Patterson , Charles Scott Carden , Satish Sadam , Ryan Christiansen , Matthew S. Shafran , Christopher John Fleckenstein , Vikramjit Singh , Michael Nevin Miller , Kang Luo
IPC: B29C43/30 , B29C43/58 , G03F7/00 , B29C43/22 , B29C43/28 , B29C43/52 , B29C43/34 , B29C43/48 , B29C43/50
Abstract: Systems, apparatus, and methods for double-sided imprinting are provided. An example system includes first rollers for moving a first web including a first template having a first imprinting feature, second rollers for moving a second web including a second template having a second imprinting feature, dispensers for dispensing resist, a locating system for locating reference marks on the first and second webs for aligning the first and second templates, a light source for curing the resist, such that a cured first resist has a first imprinted feature corresponding to the first imprinting feature on one side of the substrate and a cured second resist has a second imprinted feature corresponding to the second imprinting feature on the other side of the substrate, and a moving system for feeding in the substrate between the first and second templates and unloading the double-imprinted substrate from the first and second webs.
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公开(公告)号:US12044851B2
公开(公告)日:2024-07-23
申请号:US17416248
申请日:2019-12-20
Applicant: Magic Leap, Inc.
Inventor: Xiaopei Deng , Vikramjit Singh , Shuqiang Yang , Kang Luo , Nai-Wen Pi , Frank Y. Xu
CPC classification number: G02B27/0172 , G02B6/0011 , G02B6/1223 , G02B6/13 , G02B27/0081 , G02B6/10 , G02B2027/0174
Abstract: Recesses are formed on a front side and a rear side of a waveguide. A solid porogen material is spun onto the front side and the rear side and fills the recesses. First front and rear cap layers are then formed on raised formations of the waveguide and on the solid porogen material. The entire structure is then heated and the solid porogen material decomposes to a porogen gas. The first front and rear cap layers are porous to allow the porogen gas to escape and air to enter into the recesses. The air maximizes a difference in refractive indices between the high-index transparent material of the waveguide and the air to promote reflection in the waveguide from interfaces between the waveguide and the air.
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公开(公告)号:US20230204938A1
公开(公告)日:2023-06-29
申请号:US18172890
申请日:2023-02-22
Applicant: Magic Leap, Inc.
Inventor: Kang Luo , Vikramjit Singh , Nai-Wen Pi , Shuqiang Yang , Frank Y. Xu
CPC classification number: G02B25/001 , G02B6/2935 , G02B6/29334 , G02B6/29329
Abstract: An eyepiece includes a substrate and an in-coupling grating patterned on a single side of the substrate. A first grating coupler is patterned on the single side of the substrate and has a first grating pattern. The first grating coupler is optically coupled to the in-coupling grating. A second grating coupler is patterned on the single side of the substrate adjacent to the first grating coupler. The second grating coupler has a second grating pattern different from the first grating pattern. The second grating coupler is optically coupled to the in-coupling grating.
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公开(公告)号:US11668943B2
公开(公告)日:2023-06-06
申请号:US17716921
申请日:2022-04-08
Applicant: Magic Leap, Inc.
Inventor: Kang Luo , Vikramjit Singh , Nai-Wen Pi , Shuqiang Yang , Frank Y. Xu
CPC classification number: G02B27/0172 , G02B6/34 , G02B27/0176 , G02B2027/0178
Abstract: Blazed diffraction gratings provide optical elements in head-mounted display systems to, e.g., incouple light into or out-couple light out of a waveguide. These blazed diffraction gratings may be configured to have reduced polarization sensitivity. Such gratings may, for example, incouple or outcouple light of different polarizations with similar level of efficiency. The blazed diffraction gratings and waveguides may be formed in a high refractive index substrate such as lithium niobate. In some implementations, the blazed diffraction gratings may include diffractive features having a feature height of 40 nm to 120 nm, for example, 80 nm. The diffractive features may be etched into the high index substrate, e.g., lithium niobate.
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公开(公告)号:US11609418B2
公开(公告)日:2023-03-21
申请号:US17246936
申请日:2021-05-03
Applicant: Magic Leap, Inc.
Inventor: Kang Luo , Vikramjit Singh , Nai-Wen Pi , Shuqiang Yang , Frank Y. Xu
Abstract: An eyepiece includes a substrate and an in-coupling grating patterned on a single side of the substrate. A first grating coupler is patterned on the single side of the substrate and has a first grating pattern. The first grating coupler is optically coupled to the in-coupling grating. A second grating coupler is patterned on the single side of the substrate adjacent to the first grating coupler. The second grating coupler has a second grating pattern different from the first grating pattern. The second grating coupler is optically coupled to the in-coupling grating.
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