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    MEMS devices having overlying support structures
    21.
    发明授权
    MEMS devices having overlying support structures 有权
    具有上覆支撑结构的MEMS器件

    公开(公告)号：US08120125B2

    公开(公告)日：2012-02-21

    申请号：US13012538

    申请日：2011-01-24

    Applicant: Teruo Sasagawa ,  SuryaPrakash Ganti ,  Mark W. Miles ,  Clarence Chui ,  Manish Kothari ,  Ming-Hau Tung

    Inventor： Teruo Sasagawa ,  SuryaPrakash Ganti ,  Mark W. Miles ,  Clarence Chui ,  Manish Kothari ,  Ming-Hau Tung

    IPC: H01L29/82

    CPC classification number: G02B26/001 ,  B81B3/007 ,  B81B2201/047 ,  B81B2203/0307 ,  B81B2203/053

    Abstract: Embodiments of MEMS devices comprise a conductive movable layer spaced apart from a conductive fixed layer by a gap, and supported by rigid support structures, or rivets, overlying depressions in the conductive movable layer, or by posts underlying depressions in the conductive movable layer. In certain embodiments, portions of the rivet structures extend through the movable layer and contact underlying layers. In other embodiments, the material used to form the rigid support structures may also be used to passivate otherwise exposed electrical leads in electrical connection with the MEMS devices, protecting the electrical leads from damage or other interference.

    Abstract translation: MEMS器件的实施例包括通过间隙与导电固定层间隔开的导电可移动层，并且由导电可移动层中的上凹部的刚性支撑结构或铆钉支撑，或由导电可移动层中的凹陷下方的柱支撑。 在某些实施例中，铆钉结构的部分延伸穿过可移动层并接触下面的层。 在其他实施例中，用于形成刚性支撑结构的材料也可以用于钝化与MEMS装置电连接的其它暴露的电引线，保护电引线免受损坏或其他干扰。

    Method and device for selective adjustment of hysteresis window
    24.
    发明授权
    Method and device for selective adjustment of hysteresis window 有权
    用于选择性调整滞后窗的方法和装置

    公开(公告)号：US07952788B2

    公开(公告)日：2011-05-31

    申请号：US12499004

    申请日：2009-07-07

    Applicant: Clarence Chui ,  Manish Kothari

    Inventor： Clarence Chui ,  Manish Kothari

    IPC: G02B26/00 ,  H01L29/84

    CPC classification number: G02B26/001

    Abstract: The width and location of a hysteresis window of an interferometric modulator may be altered by adjusting various physical characteristics of the interferometric modulator. Thus, depending on the particular application for which the interferometric modulators are manufactured, the width and location of the hysteresis window may be altered. For example, in some applications, reducing the power required to operate an array of interferometric modulators may be an important consideration. In other applications, the speed of the interferometric modulators may be of more importance, where the speed of an interferometric modulator, as used herein, refers to the speed of actuating and relaxing the moveable mirror. In other applications, the cost and ease of manufacturing may be of most importance. Systems and methods are introduced that allow selection of a width and location of a hysteresis window by adjusting various physical characteristics.

    Abstract translation: 可以通过调整干涉式调制器的各种物理特性来改变干涉式调制器的滞后窗的宽度和位置。 因此，根据制造干涉式调制器的特定应用，可以改变滞后窗口的宽度和位置。 例如，在某些应用中，降低操作干涉式调制器阵列所需的功率可能是重要的考虑因素。 在其他应用中，干涉式调制器的速度可能更为重要，其中如本文所使用的干涉式调制器的速度是指致动和放松可移动反射镜的速度。 在其他应用中，制造的成本和易用性可能是最重要的。 引入了通过调整各种物理特性来选择滞后窗口的宽度和位置的系统和方法。

    MEMS device having deformable membrane characterized by mechanical persistence
    25.
    发明授权
    MEMS device having deformable membrane characterized by mechanical persistence 有权
    MEMS器件具有以机械持久性为特征的可变形膜

    公开(公告)号：US07936497B2

    公开(公告)日：2011-05-03

    申请号：US11192438

    申请日：2005-07-28

    Applicant: Clarence Chui ,  Manish Kothari

    Inventor： Clarence Chui ,  Manish Kothari

    IPC: G02B26/00

    CPC classification number: G02B26/001 ,  G09G3/3466

    Abstract: An interferometric modulator is provided having a faster deformation time constant on actuation than relaxation time constant upon release from actuation. In some embodiments, apertures are formed in a mechanical membrane to decrease pressure, including liquid and/or gas pressures, on the membrane when actuated. In other embodiments, a dampening layer is disposed in close proximity above the membrane to apply greater downward pressure on the membrane and therefore slow the motion of the membrane when released from an actuated state. Other embodiments comprise structures, such as a heating element or vacuum device, to manipulate pressures above and/or below the mechanical membrane to affect the mechanical persistence of the display device.

    Abstract translation: 提供了一种干涉式调制器，其在致动时具有更快的变形时间常数，而不是从致动释放时的松弛时间常数。 在一些实施例中，在机械膜中形成孔，以在致动时减小膜上的压力，包括液体和/或气体压力。 在其它实施例中，阻尼层设置在膜附近，以便在膜上施加更大的向下的压力，并且因此在从致动状态释放时减慢膜的运动。 其他实施例包括诸如加热元件或真空装置的结构，以操纵机械膜上方和/或下方的压力以影响显示装置的机械持久性。

    METHOD OF MAKING AN ELECTRONIC DEVICE WITH A CURVED BACKPLATE
    27.
    发明申请
    METHOD OF MAKING AN ELECTRONIC DEVICE WITH A CURVED BACKPLATE 有权
    制造具有弯曲背板的电子设备的方法

    公开(公告)号：US20110053304A1

    公开(公告)日：2011-03-03

    申请号：US12904825

    申请日：2010-10-14

    Applicant: Lauren Palmateer ,  Brian J. Gally ,  William J. Cummings ,  Manish Kothari ,  Clarence Chui

    Inventor： Lauren Palmateer ,  Brian J. Gally ,  William J. Cummings ,  Manish Kothari ,  Clarence Chui

    IPC: H01L21/00

    CPC classification number: G02B26/001

    Abstract: A package is made of a transparent substrate having an interferometric modulator and a back plate. A non-hermetic seal joins the back plate to the substrate to form a package, and a desiccant resides inside the package. A method of packaging an interferometric modulator includes providing a transparent substrate and manufacturing an interferometric modulator array on a backside of the substrate. A back plate includes a curved portion relative to the substrate. The curved portion is substantially throughout the back plate. The back plate is sealed to the backside of the substrate with a back seal in ambient conditions, thereby forming a package.

    Abstract translation: 封装由具有干涉式调制器和背板的透明基板制成。 非气密密封件将背板连接到基板以形成包装，并且干燥剂驻留在包装内。 封装干涉式调制器的方法包括提供透明衬底并在衬底的背面制造干涉式调制器阵列。 背板包括相对于基板的弯曲部分。 弯曲部分基本上遍及后板。 背板在环境条件下用背密封件密封到基板的背面，由此形成封装。

    APPARATUS AND METHODS FOR PROVIDING A STATIC INTERFEROMETRIC DISPLAY DEVICE
    30.
    发明申请
    APPARATUS AND METHODS FOR PROVIDING A STATIC INTERFEROMETRIC DISPLAY DEVICE 有权
    用于提供静态干涉显示装置的装置和方法

    公开(公告)号：US20090279173A1

    公开(公告)日：2009-11-12

    申请号：US12116524

    申请日：2008-05-07

    Applicant: Clarence Chui ,  Mark W. Miles ,  Manish Kothari

    Inventor： Clarence Chui ,  Mark W. Miles ,  Manish Kothari

    IPC: G02B27/00 ,  C23C14/34

    CPC classification number: G02B26/001 ,  G02B5/201 ,  G02B5/223 ,  Y10T428/249921

    Abstract: Disclosed are apparatus and methods for fabricating a static interferometric display device. A plurality of sputtering modules is used to form static interferometric elements on a substrate. These elements each have a plurality of interferometric sub-elements that each has an interferometric stack. A first sub-element of each element is formed so that an interferometric modulation of light due to the first element's stack transmits at a first color, and a second sub-element of each element is formed so that a second color is transmitted. The sub-elements of each element are arranged with respect to each other so that all of the elements appear as a third color to a user if all the sub-elements of each element are left unmasked. A printing system is then used to mask one or more sub-elements of one or more elements so as to form, with the elements, a static image having multiple colors.

    Abstract translation: 公开了用于制造静态干涉式显示装置的装置和方法。 多个溅射模块用于在衬底上形成静态干涉测量元件。 这些元件各自具有多个具有干涉式叠层的干涉子元件。 每个元件的第一子元件被形成为使得由于第一元件的堆叠而导致的光的干涉调制以第一颜色发送，并且每个元件的第二子元件被形成为使得第二颜色被传输。 每个元素的子元素相对于彼此布置，使得如果将每个元素的所有子元素保持未屏蔽，则所有元素在用户身上显示为第三种颜色。 然后使用打印系统来掩蔽一个或多个元件的一个或多个子元件，以便与元件形成具有多种颜色的静态图像。

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