公开(公告)号：US07806143B2

公开(公告)日：2010-10-05

申请号：US11761326

申请日：2007-06-11

申请人： Mark Taskar

发明人： Mark Taskar

IPC分类号： F16K11/10

CPC分类号： F16K27/003 ,  Y10T137/87249 ,  Y10T137/87885

摘要： A flexible gas delivery apparatus having a gas panel with a first extension block having a first section and second section, the first section positioned between a mixing valve and the substrate having an exit port in fluid communication with a pump/purge manifold, and a second extension block having a first section and a second section, the first section positioned between a purge valve and the substrate having a discharge port in fluid communication with a mixing manifold, wherein the second portion of the first and second extension blocks extend outwardly from the gas panel.

摘要翻译： 一种具有气体面板的柔性气体输送装置，其具有第一部分和第二部分，所述第一延伸部分具有第一部分和第二部分，所述第一部分位于混合阀和所述基底之间，所述第一部分具有与泵/清洗歧管流体连通的出口， 延伸块具有第一部分和第二部分，所述第一部分位于清洗阀和所述基板之间，所述基板具有与混合歧管流体连通的排出口，其中所述第一和第二延伸块的第二部分从气体向外延伸 面板。

公开(公告)号：US07784496B2

公开(公告)日：2010-08-31

申请号：US11761244

申请日：2007-06-11

申请人： Mark Taskar

发明人： Mark Taskar

IPC分类号： F16K11/10

CPC分类号： F16K27/003 ,  Y10T137/877 ,  Y10T137/87885

摘要： A gas delivery apparatus having a manifold block configured to create a fluid flow path, a horizontal inlet port coupled to the manifold block at a first side in fluid communication with the fluid flow path and configured to receive a supply gas, a pneumatic valve coupled to the manifold block at a first end configured to prevent unauthorized activation of fluid flow, the pneumatic valve in fluid communication with the fluid flow path and horizontal inlet port, a purge valve coupled to the manifold block in fluid communication with the fluid flow path positioned adjacent the pneumatic valve, and a vertical purge port coupled to the manifold block at a first end, the vertical purge port positioned between the purge valve and the pneumatic valve and having a purge gas input/output connection at a second end, wherein the horizontal inlet port is positioned perpendicular to the vertical purge port.

摘要翻译： 一种气体输送装置，其具有被配置为产生流体流动路径的歧管块，在第一侧与流体连通的第一侧连接到歧管块的水平入口端口，并且被配置为接收供应气体，气动阀连接到 所述歧管块在第一端被构造成防止流体流动的未经授权的激活，所述气动阀与所述流体流动路径和水平入口端口流体连通;联接到所述歧管块的净化阀，其与邻近的流体流动路径流体连通 所述气动阀和在第一端处联接到所述歧管块的垂直吹扫端口，所述垂直吹扫端口位于所述吹扫阀和所述气动阀之间，并且在第二端具有吹扫气体输入/输出连接，其中所述水平入口 端口垂直于垂直吹扫口定位。

公开(公告)号：US07628168B2

公开(公告)日：2009-12-08

申请号：US11165858

申请日：2005-06-24

申请人： Mark Taskar

发明人： Mark Taskar

IPC分类号： F16K35/00

CPC分类号： F16K35/06 ,  Y10T70/5637 ,  Y10T137/0491 ,  Y10T137/7069

摘要： An optimized activation prevention assembly for a gas delivery system is disclosed. The apparatus includes a pneumatically operated valve assembly. The apparatus also includes a toggle switch mechanically attached to the pneumatically operated valve assembly, the toggle switch includes a toggle arm, the toggle arm being positioned in one of an activation zone and a deactivation zone, wherein when the toggle arm is positioned in the activation zone, the pneumatically operated valve is activated, and wherein when the toggle arm is positioned in the deactivation zone, the pneumatically operated valve is deactivated. The apparatus further includes an activation prevention mechanism attached to the toggle switch, wherein when the activation prevention mechanism being configured for preventing the toggle arm from being repositioned from the deactivation zone to the activation zone without at least bypassing a lockout function of the optimized activation prevention mechanism.

摘要翻译： 公开了一种用于气体输送系统的优化的激活预防组件。 该装置包括气动阀组件。 该装置还包括机械连接到气动操作的阀组件上的拨动开关，该拨动开关包括肘节臂，肘节臂位于活动区域和失活区域中的一个中，其中当肘节臂位于激活状态时 气动阀被启动，并且其中当肘节臂位于停用区域中时，气动操作的阀被停用。 所述装置还包括附接到所述拨动开关的激活预防机构，其中当所述启动防止机构被配置为防止所述肘节臂从所述停用区域重新定位到所述激活区域，而不至少绕过所述优化的激活预防的锁定功能 机制。

公开(公告)号：US08202393B2

公开(公告)日：2012-06-19

申请号：US12230089

申请日：2008-08-22

申请人： Harry P. Wong ,  Vernon Wong ,  Christopher Charles Griffin ,  Mark Taskar

发明人： Harry P. Wong ,  Vernon Wong ,  Christopher Charles Griffin ,  Mark Taskar

IPC分类号： H01L21/00 ,  C23C16/00 ,  C23C14/00

CPC分类号： C23C16/45523 ,  C23C16/4412 ,  C23C16/45561 ,  C23C16/5096 ,  H01J37/3244 ,  H01J37/32449

摘要： A gas distribution system for supplying a gas mixture to a plasma process chamber is provided. A first valve arrangement is connected to upstream ends of a first gas line and a second gas line. A second valve arrangement is connected to downstream ends of the first gas line and the second gas line. A first gas distribution outlet line is connected between a gas supply and the first valve arrangement and a first chamber inlet line connected between the second valve arrangement and the plasma process chamber. A first evacuation line is connected to the first gas line at a location between the first valve arrangement and the second valve arrangement. A second evacuation line is connected to the second gas line at a location between the first valve arrangement and the second valve arrangement. The first evacuation line and second evacuation line are in fluid communication with a vacuum line. A controller is operable to actuate the first valve arrangement and second valve arrangement to selectively flow the gas mixture from the gas supply to the plasma process chamber through the first gas line while the second gas is selectively evacuated by the vacuum line; or to selectively flow the gas mixture from the gas supply to the plasma process chamber through the second gas line while the first gas line is selectively evacuated by the vacuum line.

摘要翻译： 提供了一种用于将气体混合物供应到等离子体处理室的气体分配系统。 第一阀装置连接到第一气体管线和第二气体管线的上游端。 第二阀装置连接到第一气体管线和第二气体管线的下游端。 第一气体分配出口管线连接在气体供应源和第一阀装置之间，连接在第二阀装置和等离子体处理室之间的第一室入口管线。 在第一阀装置和第二阀装置之间的位置处，第一排气管线连接到第一气体管线。 在第一阀装置和第二阀装置之间的位置处，第二排气管线连接到第二气体管线。 第一排气管线和第二排气管线与真空管线流体连通。 控制器可操作以致动第一阀装置和第二阀装置，以选择性地将气体混合物从气体供应通过第一气体管道流动到等离子体处理室，同时第二气体被真空管线选择性地抽真空; 或者通过第二气体管线将气体混合物从气体供给选择性地流动到等离子体处理室，同时第一气体管线被真空管线选择性抽真空。

公开(公告)号：US20080302434A1

公开(公告)日：2008-12-11

申请号：US11761326

申请日：2007-06-11

申请人： Mark Taskar

发明人： Mark Taskar

IPC分类号： F17D1/04

CPC分类号： F16K27/003 ,  Y10T137/87249 ,  Y10T137/87885

摘要： A flexible gas delivery apparatus having a gas panel with a first extension block having a first section and second section, the first section positioned between a mixing valve and the substrate having an exit port in fluid communication with a pump/purge manifold, and a second extension block having a first section and a second section, the first section positioned between a purge valve and the substrate having a discharge port in fluid communication with a mixing manifold, wherein the second portion of the first and second extension blocks extend outwardly from the gas panel.

摘要翻译： 一种具有气体面板的柔性气体输送装置，其具有第一部分和第二部分，所述第一延伸部分具有第一部分和第二部分，所述第一部分位于混合阀和所述基底之间，所述第一部分具有与泵/清洗歧管流体连通的出口， 延伸块具有第一部分和第二部分，所述第一部分位于清洗阀和所述基板之间，所述基板具有与混合歧管流体连通的排出口，其中所述第一和第二延伸块的第二部分从气体向外延伸 面板。