摘要:
A chemically amplified resist composition comprises a polymer comprising units having polarity to impart adhesion and acid labile units adapted to turn alkali soluble under the action of acid. The polymer comprises recurring units having formula (1) wherein R1 is H, F, CH3 or CF3, Rf is H, F, CF3 or CF2CF3, A is a divalent hydrocarbon group, R2, R3 and R4 are alkyl, alkenyl, oxoalkyl, aryl, aralkyl or aryloxoalkyl. Recurring units containing an aromatic ring structure are present in an amount ≧60 mol % and the recurring units having formula (1) are present in an amount
摘要:
Provided is a method of deprotecting a protected polymer, the method being capable of, in the deprotection reaction of a polymer comprising a unit structure having a phenolic hydroxyl group protected with an acyl group, deacylating the polymer in a short period of time while maintaining the other structure, and being capable of taking out the deacylated polymer while highly suppressing contamination of the deacylated polymer with a substance other than the polymer taking part in the reaction. More specifically, provided is a method of deprotecting a protected polymer comprising at least a step of dissolving in an organic solvent the protected polymer comprising at least a unit structure having a phenolic hydroxyl group protected with an acyl group and a deprotecting reagent selected from primary or secondary amine compounds each having a ClogP value of 1.00 or less with the proviso that in the secondary amine compound, neither of the two carbon atoms coupled to the nitrogen atom of the amino group is tertiary. The primary or secondary amine compounds are each represented preferably by HNR12-nR2n (1).
摘要:
There is disclosed a chemically amplified positive resist composition to form a chemically amplified resist film to be used in a lithography, wherein the chemically amplified positive resist composition comprises at least, (A) a base resin, insoluble or poorly soluble in an alkaline solution, having a repeating unit whose phenolic ydroxyl group is protected by a tertiary alkyl group, while soluble in an alkaline solution when the tertiary alkyl group is removed; (B) an acid generator; (C) a basic component; and (D) an organic solvent, and a solid component concentration is controlled so that the chemically amplified resist film having the film thickness of 10 to 100 nm is obtained by a spin coating method. There can be provided, in a lithography, a chemically amplified positive resist composition giving a high resolution with a suppressed LER deterioration caused by film-thinning at the time of forming a chemically amplified resist film with the film thickness of 10 to 100 nm, and a resist patterning process using the same.
摘要:
A rowing shoe includes a shoe sole and a shoe upper portion. The shoe sole has a cleat mounting portion configured so that a cleat structure is mountable thereto for releasably attaching to a binding structure of a rowing boat. The shoe upper portion includes at least one fixing strap configured to secure the shoe upper portion to a wearer's foot. The fixing strap has a proximal end fixed to the shoe upper portion and a free end having at least one aperture configured so that a pull rope can extend therethrough.
摘要:
A spectroscope includes an emitting portion from where light is output, a dispersive element which is disposed on a side of the light emitting portion, to which the light is output, an incidence portion on which, light dispersed by the dispersive element is incident, and a temperature-compensating element which is disposed between the emitting portion and the incidence portion, and which is such that, an angle of incidence of the light dispersed on the incidence portion becomes almost constant with respect to a change in temperature in an operating temperature range. Moreover, the optical apparatus has such spectroscope in which temperature is compensated.
摘要:
In an internal combustion engine, an NOx selective reduction catalyst is arranged in the engine exhaust passage and a urea aqueous solution stored in a urea aqueous solution tank is fed to the NOx selective reduction catalyst where the NOx is selectively reduced. Opening and closing of the urea aqueous solution refill port of the urea aqueous solution tank are detected and it is judged if the urea aqueous solution is refilled in the urea aqueous solution tank. When it is judged that the NOx purification rate has fallen to an allowable level or less at the time of engine operation right after the urea aqueous solution is refilled in the urea aqueous solution tank, it is judged that the refilled urea aqueous solution is abnormal.
摘要:
An image information transmission device includes a registration unit, a storage unit, a determination unit, and an image information transmission unit. The registration unit registers an image information transmission instruction describing a destination number specifying a destination of image information and an abbreviated number corresponding to the destination number. The storage unit stores the destination number and transmission setting information used for transmitting the image information to the destination specified by the destination number. The determination unit determines whether or not the destination number described in the image information transmission instruction is contained in the destination number. The image information transmission unit transmits the image information.
摘要:
An aroma diffuser includes a housing to include an accommodating part that accommodates at least an aromatic chip, and a lid to be attached to the housing detachably and to close the accommodating part. The aromatic chip is provided for the lid.
摘要:
A symmetric multiprocessing fault-tolerant computer system controls memory access in a symmetric multiprocessing computer system. To do so, virtual page structures are created, where the virtual page structures reflect physical page access privileges to shared memory for processors in a symmetric multiprocessing computer system. Access to shared memory is controlled based on physical page access privileges reflected in the virtual paging structures to coordinate deterministic shared memory access between processors in the symmetric multiprocessing computer system. A symmetric multiprocessing fault-tolerant computer system may use duplication or continuous replay.