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91 条记录 (耗时 0.044 秒)

    Dynamically balanced substrate carrier handler
    23.
    发明授权
    Dynamically balanced substrate carrier handler 失效
    动态平衡衬底载体处理器

    公开(公告)号：US07168553B2

    公开(公告)日：2007-01-30

    申请号：US10988190

    申请日：2004-11-12

    申请人： Michael R. Rice ,  Eric A. Englhardt ,  Robert B. Lowrance ,  Martin R. Elliott ,  Jeffrey C. Hudgens

    发明人： Michael R. Rice ,  Eric A. Englhardt ,  Robert B. Lowrance ,  Martin R. Elliott ,  Jeffrey C. Hudgens

    IPC分类号： B65G29/00

    CPC分类号： H01L21/67733 ,  H01J37/32743 ,  H01L21/67736 ,  H01L21/67766 ,  H01L21/67775

    摘要： In a first aspect, a substrate loading station is served by a conveyor which continuously transports substrate carriers. A substrate carrier handler that is part of the substrate loading station operates to exchange substrate carriers with the conveyor while the conveyor is in motion. A carrier exchange procedure may include moving an end effector of the substrate carrier handler at a velocity that substantially matches a velocity of the conveyor. A balancing mass is coupled directly or indirectly to a frame on which the substrate carrier handler is mounted and is adapted to accelerate in a direction opposite to the direction of end effector acceleration, as the end effector accelerates. Thus, inertial loads may be substantially balanced, and frame vibration reduced, despite potentially high rates of acceleration. Numerous other aspects are provided.

    摘要翻译： 在第一方面中，基板装载站由连续输送基板载体的输送机供给。 作为基板装载站的一部分的基板载体处理器在输送机运动的同时与输送机交换基板载体。 载体交换过程可以包括以基本匹配输送机速度的速度移动基底载体处理器的端部执行器。 平衡块直接或间接地耦合到其上安装有基底载体处理器的框架上，并且适于在端部执行器加速时沿与端部执行器加速度的方向相反的方向加速。 因此，惯性负载可以基本平衡，并且框架振动减小，尽管潜在的高加速率。 提供了许多其他方面。

    Stabilizing substrate carriers during overhead transport
    24.
    发明授权
    Stabilizing substrate carriers during overhead transport 有权
    架空运输过程中稳定底物载体

    公开(公告)号：US07798309B2

    公开(公告)日：2010-09-21

    申请号：US10988168

    申请日：2004-11-12

    申请人： Michael R. Rice ,  Eric A. Englhardt ,  Robert B. Lowrance ,  Martin R. Elliott ,  Jeffrey C. Hudgens

    发明人： Michael R. Rice ,  Eric A. Englhardt ,  Robert B. Lowrance ,  Martin R. Elliott ,  Jeffrey C. Hudgens

    IPC分类号： B65G43/08

    CPC分类号： B24B37/345 ,  H01L21/68707

    摘要： In a first aspect, a first apparatus is provided for inter-station overhead transport of a substrate carrier. The first apparatus includes (1) an overhead transport mechanism; (2) a substrate carrier support suspended from the overhead transport mechanism and adapted to receive and support a substrate carrier; and (3) a stabilization apparatus adapted to limit rocking of the substrate carrier and substrate carrier support relative to the overhead transport mechanism. Numerous other aspects are provided.

    摘要翻译： 在第一方面，提供了一种用于衬底载体的站间架空输送的第一装置。 第一装置包括（1）架空运输机构; （2）悬架在架空运输机构上并适于接收和支撑衬底载体的衬底载体支撑件; 以及（3）稳定装置，其适于限制衬底载体和衬底载体支撑件相对于架空输送机构的摆动。 提供了许多其他方面。

    Break-away positioning conveyor mount for accommodating conveyor belt bends
    25.
    发明授权
    Break-away positioning conveyor mount for accommodating conveyor belt bends 失效
    分离定位输送机支架，用于容纳输送带弯头

    公开(公告)号：US07455172B2

    公开(公告)日：2008-11-25

    申请号：US11495052

    申请日：2006-07-28

    申请人： Michael R. Rice ,  Eric A. Englhardt ,  Robert B. Lowrance ,  Martin R. Elliott ,  Jeffrey C. Hudgens

    发明人： Michael R. Rice ,  Eric A. Englhardt ,  Robert B. Lowrance ,  Martin R. Elliott ,  Jeffrey C. Hudgens

    IPC分类号： B65G17/20

    CPC分类号： H01L21/68707 ,  H01L21/6773 ,  H01L21/67733

    摘要： A break-away mounting system for a continuous-motion, high-speed position conveyor system is disclosed. A support cradle may be suspended from a conveyor belt such that the support cradle maintains a fixed position and orientation relative to at least one point on the conveyor belt without inducing appreciable stress on the conveyor belt, the support cradle, or the coupling between the conveyor belt and the support cradle. The mount may include a leading rotatable bearing attached to the support cradle which may releasably engage a first key attached to the conveyor belt, the rotatable bearing adapted to accommodate rotational forces applied to the support cradle by the conveyor belt. The mount may also include a slide bearing attached to the support cradle which may releasably engage a second key attached to the conveyor belt, the slide bearing adapted to accommodate longitudinal forces applied to the support cradle by the conveyor belt.

    摘要翻译： 公开了一种用于连续运动的高速位置传送器系统的分离安装系统。 支撑托架可以从传送带悬挂，使得支撑托架相对于传送带上的至少一个点保持固定的位置和方向，而不会在传送带，支撑架或传送带之间的联接中引起明显的应力 皮带和支撑架。 安装件可以包括附接到支撑架的前导可旋转轴承，其可释放地接合附接到传送带的第一键，该旋转轴承适于容纳由传送带施加到支撑支架的旋转力。 安装件还可以包括附接到支撑支架的滑动轴承，其可以可释放地接合附接到传送带的第二键，滑动轴承适于容纳由传送带施加到支撑支架的纵向力。

    Methods and apparatus for loading and unloading substrate carriers on moving conveyors using feedback
    29.
    发明授权
    Methods and apparatus for loading and unloading substrate carriers on moving conveyors using feedback 有权
    使用反馈装载和卸载移动输送机上的基板载体的方法和装置

    公开(公告)号：US07930061B2

    公开(公告)日：2011-04-19

    申请号：US11867584

    申请日：2007-10-04

    申请人： Michael R. Rice ,  Eric A. Englhardt ,  Jeffrey C. Hudgens ,  Kirk Van Katwyk

    发明人： Michael R. Rice ,  Eric A. Englhardt ,  Jeffrey C. Hudgens ,  Kirk Van Katwyk

    IPC分类号： G06F7/00 ,  G06F19/00 ,  G05B19/00 ,  H01L21/677 ,  B65G53/46 ,  B65G1/00 ,  E04H6/00

    CPC分类号： H01L21/67775 ,  H01L21/67724 ,  H01L21/6773 ,  H01L21/67733 ,  H01L21/67736 ,  H01L21/67769

    摘要： The present invention provides systems and methods for loading and unloading substrate carriers onto and off of a transport system. The invention includes a substrate carrier handler adapted to transfer a substrate carrier between a docking station and a transport system, the substrate carrier handler including an end effector adapted to support the substrate carrier; a controller coupled to the substrate carrier handler and operative to control the substrate carrier handler such that the end effector of the substrate carrier handler is operative to selectively engage and disengage the substrate carrier to and from the transport system while the substrate carrier is in motion; and a sensor coupled to the controller and operative to provide a signal to the controller indicative of information about the substrate carrier. The controller is operative to adjust operation of the substrate carrier handler based on the signal from the sensor if the adjustment may be performed within a load or unload stroke of the substrate carrier handler. Numerous other aspects are provided.

    摘要翻译： 本发明提供了用于将基板载体装载和卸载到运输系统上的系统和方法。 本发明包括适于在对接站和传输系统之间传送衬底载体的衬底载体处理器，衬底载体处理器包括适于支撑衬底载体的端部执行器; 控制器，其耦合到所述衬底载体处理器并且可操作以控制所述衬底载体处理器，使得所述衬底载体处理器的末端执行器可操作以在所述衬底载体运动时选择性地将所述衬底载体接合和脱离所述传输系统; 以及耦合到所述控制器并且可操作地向控制器提供指示关于衬底载体的信息的信号的传感器。 如果可以在衬底载体处理器的负载或卸载冲程中执行调整，则控制器可操作以基于来自传感器的信号来调整衬底载体处理器的操作。 提供了许多其他方面。

    System for transporting substrate carriers
    30.
    发明授权
    System for transporting substrate carriers 有权
    用于运输衬底载体的系统

    公开(公告)号：US07673735B2

    公开(公告)日：2010-03-09

    申请号：US11838306

    申请日：2007-08-14

    申请人： Michael Robert Rice ,  Robert B. Lowrance ,  Martin R. Elliott ,  Jeffrey C. Hudgens ,  Eric A. Englhardt

    发明人： Michael Robert Rice ,  Robert B. Lowrance ,  Martin R. Elliott ,  Jeffrey C. Hudgens ,  Eric A. Englhardt

    IPC分类号： B65G29/00

    CPC分类号： H01L21/67769 ,  H01L21/67724 ,  H01L21/6773 ,  H01L21/67733 ,  H01L21/67736

    摘要： In a semiconductor fabrication facility, a conveyor transports substrate carriers. The substrate carriers are unloaded from the conveyor and loaded onto the conveyor without stopping the conveyor. A load and/or unload mechanism lifts the substrate carriers from the conveyor during unloading operations, while matching the horizontal speed of the conveyor. Similarly, during loading operations, the load/unload mechanism lowers a substrate carrier into engagement with the conveyor while matching the horizontal speed of the conveyor. Individual substrates, without carriers, may be similarly loaded and/or unloaded from a conveyor.

    摘要翻译： 在半导体制造设备中，输送机输送基板载体。 基板载体从输送机卸载并装载到输送机上而不停止输送机。 在卸载操作期间，负载和/或卸载机构将基板载体从输送机提升，同时匹配输送机的水平速度。 类似地，在装载操作期间，装载/卸载机构降低了基板载体与输送机的接合，同时匹配输送机的水平速度。 没有载体的单个基底可以类似地从输送机装载和/或卸载。