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公开(公告)号:US20190089330A1
公开(公告)日:2019-03-21
申请号:US16125800
申请日:2018-09-10
Applicant: Murata Manufacturing Co., Ltd.
Inventor: Mari SAJI
Abstract: An elastic wave device includes a piezoelectric substrate mainly including lithium niobate, an interdigital transducer electrode provided on the piezoelectric substrate, and a dielectric film, provided on the piezoelectric substrate and covering the interdigital transducer electrode, and mainly including silicon oxide. The elastic wave device uses a Rayleigh wave. The interdigital transducer electrode includes main electrode layers that include one or more first main electrode layer made of a metal with a C112/C12 ratio greater than the C112/C12 ratio of the silicon oxide with regard to the elastic constants C11 and C12. The sum of the thicknesses of the one or more first main electrode layers is about 55% or more based on the thickness of the whole interdigital transducer electrode is about 100%.
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公开(公告)号:US20190052244A1
公开(公告)日:2019-02-14
申请号:US16159795
申请日:2018-10-15
Applicant: Murata Manufacturing Co., Ltd.
Inventor: Mari SAJI , Junpei YASUDA
CPC classification number: H03H9/14541 , H03H9/02559 , H03H9/02574 , H03H9/6406 , H03H9/6423 , H03H9/6476 , H03H9/6483 , H03H9/725 , H04B1/0057 , H04B1/18
Abstract: An elastic wave device includes a first filter including an elastic wave resonator and a second filter connected to an antenna common terminal via a common node. When a first pass band of the first filter and second pass bands of the second filters are F1 and F2, respectively, F1
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公开(公告)号:US20190007030A1
公开(公告)日:2019-01-03
申请号:US16125885
申请日:2018-09-10
Applicant: Murata Manufacturing Co., Ltd.
Inventor: Mari SAJI , Junpei YASUDA
Abstract: A composite filter device includes an antenna common terminal, a first band pass filter having a first pass band, and a second band pass filter having a second pass band located at higher frequencies than the first pass band. The first band pass filter includes an elastic wave resonator. The elastic wave resonator includes a LiNbO3 substrate, an IDT electrode on the LiNbO3 substrate, and a dielectric film that covers the IDT electrode and includes a silicon oxide as a main component. When f1′ is the frequency of a Sezawa wave of the first band pass filter and f2 is the center frequency of the second pass band, f1′ is located at a different position from f2.
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公开(公告)号:US20180375492A1
公开(公告)日:2018-12-27
申请号:US16052672
申请日:2018-08-02
Applicant: Murata Manufacturing Co., Ltd.
Inventor: Mari SAJI
Abstract: A composite filter device for use in carrier aggregation includes a first bandpass filter connected to an antenna common terminal and including a first pass band, and a second bandpass filter including a second pass band of a higher frequency than the first pass band. The first bandpass filter includes an LiNbO3 substrate, an IDT electrode which is provided on the LiNbO3 substrate and defines the first bandpass filter, and a dielectric film which covers the IDT electrode and includes silicon oxide as a main component. The first bandpass filter is defined by at least one elastic wave resonator, and a Rayleigh wave propagating in the LiNbO3 substrate is used and an acoustic velocity of a Sezawa wave in the elastic wave resonator is equal to or higher than about 4643.2 m/sec.
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公开(公告)号:US20180175282A1
公开(公告)日:2018-06-21
申请号:US15724569
申请日:2017-10-04
Applicant: Murata Manufacturing Co., Ltd.
Inventor: Mari SAJI
IPC: H01L41/277 , H03H9/25 , H03H9/02 , C30B29/30 , H01L41/187 , H01L41/08 , H01L41/253
CPC classification number: H01L41/277 , C30B29/30 , H01L41/081 , H01L41/1873 , H01L41/253 , H03H9/02559 , H03H9/02574 , H03H9/02834 , H03H9/14541 , H03H9/25
Abstract: An elastic wave device includes a piezoelectric substrate, an IDT electrode including a first electrode layer located on the piezoelectric substrate and including one of Mo and W as a main component and a second electrode layer laminated on the first electrode layer and including Cu as a main component, and a dielectric film located on the piezoelectric substrate and covering the IDT electrode. The piezoelectric substrate is made of lithium niobate. The dielectric film is made of silicon oxide. The elastic wave device utilizes Rayleigh waves propagating along the piezoelectric substrate.
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公开(公告)号:US20180091118A1
公开(公告)日:2018-03-29
申请号:US15633882
申请日:2017-06-27
Applicant: Murata Manufacturing Co., Ltd.
Inventor: Mari SAJI
CPC classification number: H03H9/6406 , H03H7/38 , H03H9/02559 , H03H9/02834 , H03H9/14541 , H03H9/14544 , H03H9/725 , H04B1/1036
Abstract: An elastic wave device includes a piezoelectric substrate that includes first and second main surfaces which face each other, an interdigital transducer electrode that is provided on the first main surface of the piezoelectric substrate and includes a first electrode layer containing molybdenum as a main component, and a dielectric film that is provided on the piezoelectric substrate and covers the interdigital transducer electrode. The piezoelectric substrate is made of lithium niobate. The dielectric film is made of silicon oxide. The elastic wave device utilizes Rayleigh waves propagating through the piezoelectric substrate. The duty ratio of the interdigital transducer electrode is equal to or more than about 0.55 and less than or equal to about 0.75.
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公开(公告)号:US20130069481A1
公开(公告)日:2013-03-21
申请号:US13674114
申请日:2012-11-12
Applicant: Murata Manufacturing Co., Ltd.
Inventor: Tetsuya KIMURA , Yasuyuki IDA , Mari SAJI
IPC: H01L41/107
CPC classification number: H01L41/107 , H03H9/14541
Abstract: A surface acoustic wave device includes a piezoelectric substrate including a groove located in a surface thereof, an IDT electrode, and a dielectric film. The IDT electrode includes a first electrode layer located in the groove and a second electrode layer located outside the groove. The dielectric film is arranged on the piezoelectric substrate so as to cover the IDT electrode. The second electrode layer is tapered toward a side opposite to the piezoelectric substrate.
Abstract translation: 表面声波装置包括压电基板,其包括位于其表面中的凹槽,IDT电极和电介质膜。 IDT电极包括位于槽中的第一电极层和位于槽外部的第二电极层。 电介质膜设置在压电基板上以覆盖IDT电极。 第二电极层朝向与压电基板相反的一侧逐渐变细。
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