公开(公告)号：US08375787B2

公开(公告)日：2013-02-19

申请号：US12637171

申请日：2009-12-14

Applicant: Robert Sattler ,  Daniel Christoph Meisel ,  Joerg Hauer

Inventor： Robert Sattler ,  Daniel Christoph Meisel ,  Joerg Hauer

IPC: G01C19/56

CPC classification number: G01C19/5755 ,  G01C19/574

Abstract: A rotation rate sensor includes a substrate having a main extension plane, and a Coriolis element movable relative to the substrate, the Coriolis element being provided to be excitable to perform an oscillation deflection substantially parallel to the main extension plane; and the Coriolis element further being provided to be deflectable, by way of a Coriolis force acting on the Coriolis element, to perform a detectable Coriolis deflection perpendicular to the main extension plane; and the rotation rate sensor further including at least one compensation electrode that is provided for at least partial compensation, as a function of the oscillation deflection, for a levitation force acting on the Coriolis element.

Abstract translation: 旋转速率传感器包括具有主延伸面的基板和可相对于基板移动的科里奥利元件，所述科里奥利元件被设置为可激发以执行基本上平行于主延伸平面的振荡偏转; 并且科里奥利元素进一步通过作用在科里奥利元件上的科里奥利力来提供偏转，以执行垂直于主延伸平面的可检测科里奥利偏转; 并且所述旋转速率传感器还包括至少一个补偿电极，所述至少一个补偿电极用于作为所述科里奥利元件的悬浮力的至少部分补偿作为所述振荡偏转的函数。

公开(公告)号：US20120125098A1

公开(公告)日：2012-05-24

申请号：US13293874

申请日：2011-11-10

Applicant: Torsten OHMS ,  Daniel Christoph Meisel

Inventor： Torsten OHMS ,  Daniel Christoph Meisel

IPC: G01C19/56

CPC classification number: G01C19/574

Abstract: A rotational rate sensor includes: a substrate having a main plane of extension; a first Coriolis element; and a second Coriolis element. The first Coriolis element and the second Coriolis element have a first and a second center of gravity, respectively, and the elements are drivable along a drive direction. In the idle state of the rotational rate sensor, (i) the distance between the first center of gravity and the second center of gravity along the detection direction is less than a first value, and (ii) the distance between the first center of gravity and the second center of gravity along the third direction is less than a second value.

Abstract translation: 旋转速率传感器包括：具有主平面延伸的基板; 第一个科里奥利元素; 和第二个科里奥利元素。 第一科里奥利元件和第二科里奥利元件分别具有第一和第二重心，元件沿驱动方向可驱动。 在转速传感器的空闲状态下，（i）第一重心与第二重心之间的距离沿检测方向小于第一值，（ii）第一重心之间的距离 并且所述第二重心沿着所述第三方向小于第二值。

公开(公告)号：US20110132087A1

公开(公告)日：2011-06-09

申请号：US12925750

申请日：2010-10-27

Applicant: Torsten Ohms ,  Burkhard Kuhlmann ,  Markus Heitz ,  Robert Sattler ,  Daniel Christoph Meisel ,  Thorsten Balslink

Inventor： Torsten Ohms ,  Burkhard Kuhlmann ,  Markus Heitz ,  Robert Sattler ,  Daniel Christoph Meisel ,  Thorsten Balslink

IPC: G01C19/56

CPC classification number: G01C19/5747

Abstract: A yaw rate sensor having a substrate, a first Coriolis element and a second Coriolis element is described, the first Coriolis element being excitable to a first vibration by first excitation means, and the second Coriolis element being excitable to a second vibration by second excitation means, and the first and second Coriolis elements being connected to one another by a spring structure, and the spring structure also including at least one rocker structure, the rocker structure being anchored on the substrate by at least one spring element.

Abstract translation: 描述了具有基板，第一科里奥利元件和第二科里奥利元件的偏航率传感器，第一科里奥利元件可由第一激励装置激发到第一振动，第二科里奥利元件可由第二激励装置激发到第二振动 并且所述第一和第二科里奥利元件通过弹簧结构彼此连接，并且所述弹簧结构还包括至少一个摇臂结构，所述摇臂结构通过至少一个弹簧元件锚固在所述基板上。

公开(公告)号：US20110023600A1

公开(公告)日：2011-02-03

申请号：US12834953

申请日：2010-07-13

Applicant: Martin WREDE ,  Johannes Classen ,  Torsten Ohms ,  Carsten Geckeler ,  Burkhard Kuhlmann ,  Jens Frey ,  Daniel Christoph Meisel ,  Joerg Hauer ,  Thorsten Balslink

Inventor： Martin WREDE ,  Johannes Classen ,  Torsten Ohms ,  Carsten Geckeler ,  Burkhard Kuhlmann ,  Jens Frey ,  Daniel Christoph Meisel ,  Joerg Hauer ,  Thorsten Balslink

IPC: G01C19/56

CPC classification number: G01C19/5712 ,  G01C19/5747

Abstract: A micromechanical yaw-rate sensor comprising a first yaw-rate sensor element, which outputs a first sensor signal, which contains information about a rotation around a first rotational axis, a second yaw-rate sensor element, which outputs a second sensor signal, which contains information about a rotation around a second rotational axis, which is perpendicular to the first rotational axis, a drive, which drives the first yaw-rate sensor element, and a coupling link, which mechanically couples the first yaw-rate sensor element and the second yaw-rate sensor element to one another, so that driving of the first yaw-rate sensor element also causes driving of the second yaw-rate sensor element.

Abstract translation: 一种微机械摆动速率传感器，包括第一偏转速率传感器元件，该第一偏转速率传感器元件输出包含关于围绕第一旋转轴线的旋转的信息的第一传感器信号，输出第二传感器信号的第二偏转速度传感器元件， 包含关于围绕垂直于第一旋转轴线的第二旋转轴线的旋转的信息，驱动第一偏转速率传感器元件的驱动器和耦合连杆，其将第一横摆速率传感器元件和 第二偏转速率传感器元件彼此之间，使得第一偏转速率传感器元件的驱动也引起第二偏转速率传感器元件的驱动。

公开(公告)号：US08997566B2

公开(公告)日：2015-04-07

申请号：US13116821

申请日：2011-05-26

Applicant: Torsten Ohms ,  Burkhard Kuhlmann ,  Daniel Christoph Meisel ,  Rolf Scheben

Inventor： Torsten Ohms ,  Burkhard Kuhlmann ,  Daniel Christoph Meisel ,  Rolf Scheben

IPC: G01C19/56 ,  G01C19/5747

CPC classification number: G01C19/5747

Abstract: A yaw rate sensor is described which includes a drive device, at least one Coriolis element, and a detection device having at least two detection elements which are coupled to one another with the aid of a coupling device, the drive device being connected to the Coriolis element for driving a vibration of the Coriolis element, and an additional coupling device which is connected to the detection device and to the Coriolis element for coupling a deflection in the plane of vibration of the Coriolis element to the detection device in a direction orthogonal to the vibration.

Abstract translation: 描述了一种横摆速度传感器，其包括驱动装置，至少一个科里奥利元件和具有至少两个检测元件的检测装置，该至少两个检测元件借助耦合装置相互耦合，驱动装置连接到科里奥利 用于驱动科里奥利元件的振动的元件，以及连接到检测装置和科里奥利斯元件的附加耦合装置，用于将Coriolis元件的振动平面中的偏转与检测装置沿垂直于 振动。

公开(公告)号：US08943891B2

公开(公告)日：2015-02-03

申请号：US13365740

申请日：2012-02-03

Applicant: Torsten Ohms ,  Burkhard Kuhlmann ,  Robert Sattler ,  Rolf Scheben ,  Daniel Christoph Meisel

Inventor： Torsten Ohms ,  Burkhard Kuhlmann ,  Robert Sattler ,  Rolf Scheben ,  Daniel Christoph Meisel

IPC: G01C19/56 ,  G01C19/5747

CPC classification number: G01C19/5747

Abstract: A yaw-rate sensor and a method for operating a yaw-rate sensor having a first Coriolis element and a second Coriolis element are proposed, the yaw-rate sensor having a substrate having a main plane of extension, the yaw-rate sensor having a first drive element for driving the first Coriolis element in parallel to a second axis, the yaw-rate sensor having a second drive element for driving the second Coriolis element in parallel to the second axis, the yaw-rate sensor having detection means for detecting deflections of the first Coriolis element and of the second Coriolis element in parallel to a first axis due to a Coriolis force, the second axis being situated perpendicularly to the first axis, the first and second axis being situated in parallel to the main plane of extension, the first and second drive elements being mechanically coupled to each other via a drive coupling element.

Abstract translation: 提出了一种摆动速率传感器和用于操作具有第一科里奥利元件和第二科里奥利元件的偏航率传感器的方法，所述偏航速率传感器具有具有主平面延伸的基板，偏航速率传感器具有 用于与第二轴平行地驱动第一科里奥利元件的第一驱动元件，所述偏航速率传感器具有用于平行于所述第二轴驱动所述第二科里奥利元件的第二驱动元件，所述偏航率传感器具有用于检测偏转的检测装置 的第一科里奥利元件和由于科里奥利力而与第一轴平行的第二科里奥利元件，第二轴线垂直于第一轴线定位，第一和第二轴线平行于主平面延伸， 所述第一和第二驱动元件经由驱动联接元件彼此机械耦合。

公开(公告)号：US20120125099A1

公开(公告)日：2012-05-24

申请号：US13294752

申请日：2011-11-11

Applicant: Rolf Scheben ,  Burkhard Kuhlmann ,  Thorsten Balslink ,  Daniel Christoph Meisel ,  Benjamin Schmidt

Inventor： Rolf Scheben ,  Burkhard Kuhlmann ,  Thorsten Balslink ,  Daniel Christoph Meisel ,  Benjamin Schmidt

IPC: G01C19/56

CPC classification number: G01C19/5747

Abstract: A yaw-rate sensor includes: a substrate having a main extension plane for detecting a yaw rate about a first axis extending parallel to the main extension plane; a first Coriolis element; a second Coriolis element; a third Coriolis element; and a fourth Coriolis element. The first Coriolis element and the fourth Coriolis element are drivable in the same direction parallel to a second axis extending parallel to the main extension plane and perpendicularly to the first axis. The first Coriolis element and the second Coriolis element are drivable in opposite directions parallel to the second axis. The first Coriolis element and the third Coriolis element are drivable in opposite directions parallel to the second axis.

Abstract translation: 偏航率传感器包括：具有用于检测围绕平行于主延伸平面延伸的第一轴线的横摆率的主延伸面的基板; 第一个科里奥利元素; 第二个科里奥利元素; 第三科里奥利元素; 和第四个科里奥利元素。 第一科里奥利元件和第四科里奥利元件可以在平行于平行于主延伸平面并垂直于第一轴线延伸的第二轴线的相同方向上驱动。 第一科里奥利元件和第二科里奥利元件可以在平行于第二轴线的相反方向上驱动。 第一科里奥利元件和第三科里奥利元件可以在平行于第二轴线的相反方向上驱动。

公开(公告)号：US20110283794A1

公开(公告)日：2011-11-24

申请号：US13120276

申请日：2009-08-05

Applicant: Robert Sattler ,  Daniel Christoph Meisel ,  Joerg Hauer

Inventor： Robert Sattler ,  Daniel Christoph Meisel ,  Joerg Hauer

IPC: G01C19/56 ,  B23P11/00

CPC classification number: G01C19/56 ,  Y10T29/49826

Abstract: A coupling structure for a rotation rate sensor apparatus, having at least one first oscillating mass; and having a first frame, surrounding the first oscillating mass, to which the first oscillating mass is coupled; the first frame encompassing four angle elements, each of which angle elements has at least one first limb and one second limb and is respectively coupled with the first limb and with the second limb to another adjacent angle element of the four angle elements. Also described is a further coupling structure for a rotation rate sensor apparatus, to a rotation rate sensor apparatus, to a manufacturing method for a coupling structure for a rotation rate sensor apparatus, and to a manufacturing method for a rotation rate sensor apparatus.

Abstract translation: 一种用于旋转速率传感器装置的联接结构，具有至少一个第一振荡块; 并且具有围绕所述第一振荡块的第一框架，所述第一振荡块被耦合到所述第一框架; 第一框架包括四个角度元件，每个角度元件具有至少一个第一分支和一个第二分支，并且分别与第一分支和第二分支耦合到四个角度元素的另一相邻角度元素。 还描述了用于旋转速率传感器装置，旋转速率传感器装置，用于旋转速率传感器装置的联接结构的制造方法以及旋转速率传感器装置的制造方法的另外的联接结构。

公开(公告)号：US20100186505A1

公开(公告)日：2010-07-29

申请号：US12637171

申请日：2009-12-14

Applicant: Robert SATTLER ,  Daniel Christoph Meisel ,  Joerg Hauer

Inventor： Robert SATTLER ,  Daniel Christoph Meisel ,  Joerg Hauer

IPC: G01C19/56

CPC classification number: G01C19/5755 ,  G01C19/574

Abstract: A rotation rate sensor includes a substrate having a main extension plane, and a Coriolis element movable relative to the substrate, the Coriolis element being provided to be excitable, by way of excitation means, to perform an oscillation deflection substantially parallel to the main extension plane; and the Coriolis element further being provided to be deflectable, by way of a Coriolis force acting on the Coriolis element, to perform a detectable Coriolis deflection perpendicular to the main extension plane; and the rotation rate sensor further including at least one compensation electrode that is provided for at least partial compensation, as a function of the oscillation deflection, for a levitation force acting on the Coriolis element.

Abstract translation: 旋转速率传感器包括具有主延伸面的基板和可相对于基板移动的科里奥利斯元件，科里奥利元件通过激励装置被设置为可激发的，以执行基本上平行于主延伸平面的振荡偏转 ; 并且科里奥利元素进一步通过作用在科里奥利元件上的科里奥利力来提供偏转，以执行垂直于主延伸平面的可检测科里奥利偏转; 并且所述旋转速率传感器还包括至少一个补偿电极，所述至少一个补偿电极用于作为所述科里奥利元件的悬浮力的至少部分补偿作为所述振荡偏转的函数。

公开(公告)号：US09266720B2

公开(公告)日：2016-02-23

申请号：US14059202

申请日：2013-10-21

Applicant: Johannes Classen ,  Axel Franke ,  Jens Frey ,  Heribert Weber ,  Frank Fischer ,  Patrick Wellner ,  Mirko Hattass ,  Daniel Christoph Meisel

Inventor： Johannes Classen ,  Axel Franke ,  Jens Frey ,  Heribert Weber ,  Frank Fischer ,  Patrick Wellner ,  Mirko Hattass ,  Daniel Christoph Meisel

IPC: B81C1/00

CPC classification number: B81C1/00246 ,  B81C1/0023 ,  B81C2203/075 ,  B81C2203/0771 ,  H01L2224/48463

Abstract: A component has at least one MEMS element and at least one cap made of a semiconductor material. The cap, in addition to its mechanical function as a terminus of a cavity and protection of the micromechanical structure, is provided with an electrical functionality. The micromechanical structure of the MEMS element of the component is situated in a cavity between a carrier and the cap, and includes at least one structural element which is deflectable out of the component plane within the cavity. The cap includes at least one section extending over the entire thickness of the cap, which is electrically insulated from the adjoining semiconductor material in such a way that it may be electrically contacted independently from the remaining sections of the cap.

Abstract translation: 元件具有至少一个MEMS元件和由半导体材料制成的至少一个盖。 盖子除了作为空腔的终端的机械功能以及微机械结构的保护之外，还具有电功能。 元件的MEMS元件的微机械结构位于载体和盖之间的空腔中，并且包括至少一个结构元件，其可在空腔内偏离组件平面。 该帽包括至少一个在盖的整个厚度上延伸的部分，其与相邻的半导体材料电绝缘，使得其可以独立于帽的其余部分电接触。