公开(公告)号：US20230273084A1

公开(公告)日：2023-08-31

申请号：US18171163

申请日：2023-02-17

Applicant: STMICROELECTRONICS S.r.l.

Inventor： Domenico GIUSTI ,  Enri DUQI

IPC: G01L9/00 ,  G01L19/14 ,  G01L27/00

CPC classification number: G01L9/0054 ,  G01L19/147 ,  G01L19/148 ,  G01L27/007

Abstract: A pressure sensor device has: a pressure detection structure provided in a first die of semiconductor material; a package, configured to internally accommodate the pressure detection structure in an impermeable manner, the package having a base structure and a body structure, arranged on the base structure, with an access opening in contact with an external environment and internally defining a housing cavity, in which the first die is arranged covered with a coating material. A piezoelectric transduction structure, of a ultrasonic type, is accommodated in the housing cavity, in order to allow detection of foreign material above the coating material and within the package. In particular, the piezoelectric transduction structure is integrated in the first die, which comprises a first portion, wherein the pressure detection structure is integrated, and a second portion, separate and distinct from the first portion, wherein the piezoelectric transduction structure is integrated.

公开(公告)号：US20230070307A1

公开(公告)日：2023-03-09

申请号：US17903473

申请日：2022-09-06

Applicant: STMicroelectronics S.r.l.

Inventor： Domenico GIUSTI ,  Carla Maria LAZZARI

IPC: F04B43/04

Abstract: A MEMS actuator includes a semiconductor body with a first surface defining a housing cavity facing the first surface and having a bottom surface, the semiconductor body further defining a fluidic channel in the semiconductor body with a first end across the bottom surface. A strainable structure extends into the housing cavity, is coupled to the semiconductor body at the bottom surface, and defines an internal space facing the first end of the fluidic channel and includes at least a first and a second internal subspace connected to each other and to the fluidic channel. When a fluid is pumped through the fluidic channel into the internal space, the first and second internal subspaces expand, thereby straining the strainable structure along the first axis and generating an actuation force exerted by the strainable structure along the first axis, in an opposite direction with respect to the housing cavity.

公开(公告)号：US20230024534A1

公开(公告)日：2023-01-26

申请号：US17958723

申请日：2022-10-03

Applicant: STMICROELECTRONICS S.r.l.

Inventor： Oriana Rita Antonia DI MARCO ,  Domenico GIUSTI

IPC: A61M11/04 ,  A61M15/06 ,  H05B3/42 ,  A24F40/30 ,  A24F40/46 ,  A24F40/485

Abstract: A microfluidic dispenser device of inhalable substances includes a casing, housed in which are a driving circuit and a microfluidic cartridge having a tank that contains a liquid to be delivered. The microfluidic cartridge is provided with at least one nebulizer controlled by the driving device. The nebulizer includes: a substrate; a plurality of chambers formed on the substrate and fluidically coupled to the tank for receiving the liquid to be delivered; and a plurality of heaters, which are formed on the substrate in positions corresponding to respective chambers, are thermally coupled to the respective chambers and are separated from the respective chambers by an insulating layer, and are controlled by the driving device. Each chamber is fluidically connected with the outside by at least one respective nozzle.

公开(公告)号：US20230019422A1

公开(公告)日：2023-01-19

申请号：US17949712

申请日：2022-09-21

Applicant: STMICROELECTRONICS S.r.l.

Inventor： Domenico GIUSTI ,  Marco FERRERA

IPC: G11B5/60 ,  G11B5/73 ,  H01L41/25 ,  G11B5/48 ,  H01L41/09

Abstract: Various embodiments of the present disclosure provide a read/write device for a hard-disk memory system. The read/write device includes a fixed structure; a membrane region including a first and a second membrane, which are constrained to the fixed structure, and a central portion, interposed between the first and second membranes; a first and a second piezoelectric actuator, mechanically coupled, respectively, to the first and second membranes; and a read/write head, which is fixed to the central portion of the membrane region. The first and second piezoelectric actuators can be controlled so as to cause corresponding deformations of the first and second membranes, said deformations of the first and second membranes causing corresponding movements of the read/write head with respect to the fixed structure.

公开(公告)号：US20210395075A1

公开(公告)日：2021-12-23

申请号：US17337296

申请日：2021-06-02

Applicant: STMICROELECTRONICS S.r.l.

Inventor： Domenico GIUSTI ,  Fabio QUAGLIA

IPC: B81B7/00 ,  B81C1/00 ,  F16F15/00

Abstract: A microelectromechanical membrane transducer includes: a supporting structure; a cavity formed in the supporting structure; a membrane coupled to the supporting structure so as to cover the cavity on one side; a cantilever damper, which is fixed to the supporting structure around the perimeter of the membrane and extends towards the inside of the membrane at a distance from the membrane; and a damper piezoelectric actuator set on the cantilever damper and configured so as to bend the cantilever damper towards the membrane in response to an electrical actuation signal.

公开(公告)号：US20200324545A1

公开(公告)日：2020-10-15

申请号：US16848549

申请日：2020-04-14

Applicant: STMICROELECTRONICS S.r.l.

Inventor： Domenico GIUSTI ,  Carlo Luigi PRELINI ,  Lorenzo TENTORI

IPC: B41J2/14 ,  B41J2/165

Abstract: Various embodiments provide an ejection device for a fluid. The ejection device includes a first semiconductor wafer, housing, on a first side thereof, a piezoelectric actuator and an outlet channel for the fluid alongside the piezoelectric actuator; a second semiconductor wafer having, on a first side thereof, a recess and, on a second side thereof opposite to the first side, at least one inlet channel for said fluid fluidically coupled to the recess; and a dry-film coupled to a second side, opposite to the first side, of the first wafer. The first and the second wafers are coupled together so that the piezoelectric actuator and the outlet channel are set directly facing, and completely contained in, the recess that forms a reservoir for the fluid. The dry-film has an ejection nozzle.

公开(公告)号：US20190330056A1

公开(公告)日：2019-10-31

申请号：US16509367

申请日：2019-07-11

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Enri DUQI ,  Lorenzo BALDO ,  Domenico GIUSTI

IPC: B81C1/00 ,  B81B7/00

Abstract: An integrated device includes: a first die; a second die coupled in a stacked way on the first die along a vertical axis; a coupling region arranged between facing surfaces of the first die and of the second die, which face one another along the vertical axis and lie in a horizontal plane orthogonal to the vertical axis, for mechanical coupling of the first and second dies; electrical-contact elements carried by the facing surfaces of the first and second dies, aligned in pairs along the vertical axis; and conductive regions arranged between the pairs of electrical-contact elements carried by the facing surfaces of the first and second dies, for their electrical coupling. Supporting elements are arranged at the facing surface of at least one of the first and second dies and elastically support respective electrical-contact elements.

公开(公告)号：US20190285196A1

公开(公告)日：2019-09-19

申请号：US16295410

申请日：2019-03-07

Applicant: STMicroelectronics S.r.l.

Inventor： Domenico GIUSTI ,  Oriana Rita Antonia DI MARCO ,  Igor VARISCO

IPC: F16K99/00 ,  B81C1/00 ,  B81B3/00 ,  A61M16/20

Abstract: A valve module includes a semiconductor body, cavities in the semiconductor body separated from each other by a distance, a cantilever structure suspended over each cavity to enable at least partial closing of the cavity, and a piezoelectric actuator for each cantilever structure. The piezoelectric actuator is configured for use to cause a positive bending of the respective cantilever structure and so modulate a rate of air flow through the valve module.

公开(公告)号：US20190217618A1

公开(公告)日：2019-07-18

申请号：US16249752

申请日：2019-01-16

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Domenico GIUSTI ,  Marco FERRERA ,  Carlo Luigi PRELINI ,  Mauro CATTANEO ,  Andrea NOMELLINI

IPC: B41J2/16 ,  B41J2/14 ,  B81C1/00

CPC classification number: B41J2/1626 ,  B41J2/14201 ,  B41J2/1606 ,  B41J2/1607 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1642 ,  B41J2002/14241 ,  B81C1/00087

Abstract: A method for manufacturing a device for ejecting a fluid, comprising the steps of: forming, in a first semiconductor wafer that houses a nozzle of the ejection device, a first structural layer; removing selective portions of the first structural layer to form a first portion of a chamber for containing the fluid; removing, in a second semiconductor wafer that houses an actuator of the ejection device, selective portions of a second structural layer to form a second portion of the chamber; and coupling together the first and second semiconductor wafers so that the first portion directly faces the second portion, thus forming the chamber. The first portion defines a part of volume of the chamber that is larger than a respective part of volume of the chamber defined by the second portion.

公开(公告)号：US20180036763A1

公开(公告)日：2018-02-08

申请号：US15470549

申请日：2017-03-27

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Domenico GIUSTI ,  Lorenzo TENTORI

IPC: B05D1/02 ,  B05B1/24

CPC classification number: B05D1/02 ,  B05B1/24 ,  B41J2/1404 ,  B41J2/14145 ,  B41J2202/12

Abstract: A microfluidic device for thermally spraying a liquid, comprising a plurality of chambers, a plurality of nozzles arranged over the chambers, a plurality of channel heaters in proximity of each chamber, a liquid access connected to the chambers, and a circulation channel integrated in the body and connected to the liquid access. A heater along the circulation channel maintains the liquid in motion during inactivity of the device, preventing deposition or aggregation of particles in the liquid.