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1.发明申请公开(公告)号：US20190259932A1
公开(公告)日：2019-08-22
申请号：US16277952
申请日：2019-02-15
发明人： Francesco PROCOPIO , Fabio QUAGLIA
IPC分类号： H01L41/047 , G10K11/02 , B06B1/06
摘要： A device for emitting an ultrasound acoustic wave in a propagation medium, comprising: a package including a base substrate and a cap coupled to the base substrate and defining therewith a chamber in the package; a semiconductor die, coupled to the base substrate in the chamber, comprising a semiconductor body; a micromachined ultrasonic transducer (MUT) integrated at least in part in the semiconductor body and including a cavity in the semiconductor body and a membrane suspended over the cavity; and an actuator, operatively coupled to the membrane, which can be operated for generating a deflection of the membrane. The membrane is designed in such a way that a resonance frequency thereof matches an acoustic resonance frequency that, during operation of the MUT, develops in said chamber of the package.
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公开(公告)号：US20220119246A1
公开(公告)日：2022-04-21
申请号：US17497538
申请日：2021-10-08
发明人： Domenico GIUSTI , Marco FERRERA , Fabio QUAGLIA
IPC分类号： B81B7/00 , H01L41/09 , H01L41/113 , B81B3/00 , B81C1/00
摘要： A PMUT device includes a membrane element adapted to generate and receive ultrasonic waves by oscillating, about an equilibrium position, at a corresponding resonance frequency. A piezoelectric element is located over the membrane element along a first direction and configured to cause the membrane element to oscillate when electric signals are applied to the piezoelectric element, and generate electric signals in response to oscillations of the membrane element. A damper is configured to reduce free oscillations of the membrane element, and the damper includes a damper cavity surrounding the membrane element, and a polymeric member having at least a portion over the damper cavity along the first direction.
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公开(公告)号：US20220102618A1
公开(公告)日：2022-03-31
申请号：US17485719
申请日：2021-09-27
发明人： Domenico GIUSTI , Irene MARTINI , Davide ASSANELLI , Paolo FERRARINI , Carlo Luigi PRELINI , Fabio QUAGLIA
IPC分类号： H01L41/08 , H01L41/047 , H01L41/277 , B81B7/02 , H01L41/113
摘要： A piezoelectric microelectromechanical structure is provided with a piezoelectric stack having a main extension in a horizontal plane and a variable section in a plane transverse to the horizontal plane. The stack is formed by a bottom-electrode region, a piezoelectric material region arranged on the bottom-electrode region, and a top-electrode region arranged on the piezoelectric material region. The piezoelectric material region has, as a result of the variable section, a first thickness along a vertical axis transverse to the horizontal plane at a first area, and a second thickness along the same vertical axis at a second area. The second thickness is smaller than the first thickness. The structure at the first and second areas can form piezoelectric detector and a piezoelectric actuator, respectively.
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公开(公告)号：US20240179475A1
公开(公告)日：2024-05-30
申请号：US18513248
申请日：2023-11-17
发明人： Domenico GIUSTI , Fabio QUAGLIA , Marco FERRERA , Carlo Luigi PRELINI , Alessandro Stuart SAVOIA
CPC分类号： H04R17/02 , H04R31/006 , H04R2201/003 , H04R2400/01
摘要： MEMS device comprising: a signal processing assembly; a transduction module comprising a plurality of transducer devices; a stiffening structure at least partially surrounding each transducer device; one or more coupling pillars for each transducer device, extending on the stiffening structure and configured to physically and electrically couple the transduction module to the signal processing assembly, to carry control signals of the transducer devices. Each conductive coupling element has a section having a shape such as to maximize the overlapping surface with the stiffening structure around the respective transducer device. This shape includes hypocycloid with a number of cusps equal to or greater than three; triangular; quadrangular.
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公开(公告)号：US20240034618A1
公开(公告)日：2024-02-01
申请号：US18487561
申请日：2023-10-16
发明人： Domenico GIUSTI , Fabio QUAGLIA
CPC分类号： B81B7/0016 , B81C1/00825 , F16F15/007 , B81B2203/0118 , B81B2203/0127 , B81B2203/0307 , B81B2207/03 , B81C2203/032 , F16F2226/042
摘要： A microelectromechanical membrane transducer includes: a supporting structure; a cavity formed in the supporting structure; a membrane coupled to the supporting structure so as to cover the cavity on one side; a cantilever damper, which is fixed to the supporting structure around the perimeter of the membrane and extends towards the inside of the membrane at a distance from the membrane; and a damper piezoelectric actuator set on the cantilever damper and configured so as to bend the cantilever damper towards the membrane in response to an electrical actuation signal.
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公开(公告)号：US20220169497A1
公开(公告)日：2022-06-02
申请号：US17538845
申请日：2021-11-30
IPC分类号： B81B3/00 , H01L41/047 , H01L41/083
摘要： A micromechanical device for transducing acoustic waves in a propagation medium, comprising: a body; a first electrode structure superimposed to the body and electrically insulated from the body, the first electrode structure and the body defining between them a first buried cavity; and a first piezoelectric element superimposed to the first electrode structure, wherein the body, the first electrode structure, and the buried cavity form a first capacitive ultrasonic transducer, and the first electrode structure and the first piezoelectric element form a first piezoelectric ultrasonic transducer.
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公开(公告)号：US20240230596A9
公开(公告)日：2024-07-11
申请号：US18489737
申请日：2023-10-18
发明人： Domenico GIUSTI , Marco DEL SARTO , Fabio QUAGLIA , Enri DUQI
CPC分类号： G01N29/04 , G01N29/2406 , G01N29/2437 , G01N2291/0231 , G01N2291/0289 , G01N2291/106
摘要： An integrated electronic system is provided with a package formed by a support base and a coating region arranged on the support base and having at least a first system die, including semiconductor material, coupled to the support base and arranged in the coating region. The integrated electronic system also has, within the package, a monitoring system configured to determine the onset of defects within the coating region, through the emission of acoustic detection waves and the acquisition of corresponding received acoustic waves, whose characteristics are affected by, and therefore are indicative of, the aforementioned defects.
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公开(公告)号：US20240133843A1
公开(公告)日：2024-04-25
申请号：US18489737
申请日：2023-10-17
发明人： Domenico GIUSTI , Marco DEL SARTO , Fabio QUAGLIA , Enri DUQI
CPC分类号： G01N29/04 , G01N29/2406 , G01N29/2437 , G01N2291/0231 , G01N2291/0289 , G01N2291/106
摘要： An integrated electronic system is provided with a package formed by a support base and a coating region arranged on the support base and having at least a first system die, including semiconductor material, coupled to the support base and arranged in the coating region. The integrated electronic system also has, within the package, a monitoring system configured to determine the onset of defects within the coating region, through the emission of acoustic detection waves and the acquisition of corresponding received acoustic waves, whose characteristics are affected by, and therefore are indicative of, the aforementioned defects.
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公开(公告)号：US20230129720A1
公开(公告)日：2023-04-27
申请号：US17966344
申请日：2022-10-14
摘要： PMUT acoustic transducer formed in a body of semiconductor material having a face and accommodating a plurality of first buried cavities, having an annular shape, arranged concentrically with each other and extending at a distance from the face of the body. The first buried cavities delimit from below a plurality of first membranes formed by the body so that each first membrane extends between a respective first buried cavity of the plurality of first buried cavities and the face of the body. A plurality of piezoelectric elements extend on the face of the body, each piezoelectric element extending above a respective first membrane of the plurality of first membranes. The first membranes have different widths, variable between a minimum value and a maximum value.
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公开(公告)号：US20220118480A1
公开(公告)日：2022-04-21
申请号：US17497542
申请日：2021-10-08
发明人： Domenico GIUSTI , Fabio QUAGLIA , Marco FERRERA
摘要： A PMUT device includes a membrane element extending perpendicularly to a first direction and configured to generate and receive ultrasonic waves by oscillating about an equilibrium position. At least two piezoelectric elements are included, with each one located over the membrane element along the first direction and configured to cause the membrane element to oscillate when electric signals are applied to the piezoelectric element, and generate electric signals in response to oscillations of the membrane element. The membrane element has a lobed shape along a plane perpendicular to the first direction, with the lobed shape including at least two lobes. The membrane element includes for each piezoelectric member a corresponding membrane portion including a corresponding lobe, with each piezoelectric member being located over its corresponding membrane portion.
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