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公开(公告)号：US10440481B2
公开(公告)日：2019-10-08
申请号：US15753521
申请日：2017-01-31
Applicant: OMRON Corporation
Inventor： Takashi Kasai , Koji Momotani , Mariko Terasaka
Abstract: A capacitive transducer includes a substrate having an opening in a surface thereof, a back plate facing the opening in the substrate, a vibration electrode film facing the back plate across a space, the vibration electrode film being deformable to have a deformation converted into a change in capacitance between the vibration electrode film and the back plate, the vibration electrode film having a through-hole as a pressure relief hole, and a protrusion integral with and formed from the same member as the back plate, the protrusion being placeable in the pressure relief hole before the vibration electrode film deforms. The protrusion and the pressure relief hole have a gap therebetween defining an airflow channel as a pressure relief channel.
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公开(公告)号：US09599648B2
公开(公告)日：2017-03-21
申请号：US14367716
申请日：2012-11-14
Applicant: OMRON Corporation
Inventor： Takashi Kasai , Inoue Tadashi
CPC classification number: G01R27/2605 , B81B2201/0257 , B81B2201/0264 , B81C1/00873 , G01H11/06 , H04R19/005 , H04R19/04
Abstract: Diaphragm 33 is provided on a top surface of silicon substrate 32, and plate unit 39 is fixed to the top surface of silicon substrate 32 so as to cover the movable electrode film with a gap. Plate unit 39 is made of an insulating material. Fixed electrode film 40 is formed on a bottom surface of plate unit 39, and diaphragm 33 and fixed electrode film 40 constitute a capacitor. In an area around plate unit 39, a whole outer peripheral edge of the top surface of silicon substrate 32 is exposed from plate unit 39. On the top surface of the substrate 32, insulating sheet 47 made of the insulating material is formed in a part of an area exposed from plate unit 39, and electrode pad 48 electrically connected to diaphragm 33 and electrode pad 49 electrically connected to fixed electrode film 40 are provided on a top surface of insulating sheet 47.
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公开(公告)号：US20150293160A1
公开(公告)日：2015-10-15
申请号：US14367716
申请日：2012-11-14
Applicant: OMRON Corporation
Inventor： Takashi Kasai , Inoue Tadashi
CPC classification number: G01R27/2605 , B81B2201/0257 , B81B2201/0264 , B81C1/00873 , G01H11/06 , H04R19/005 , H04R19/04
Abstract: Diaphragm 33 is provided on a top surface of silicon substrate 32, and plate unit 39 is fixed to the top surface of silicon substrate 32 so as to cover the movable electrode film with a gap. Plate unit 39 is made of an insulating material. Fixed electrode film 40 is formed on a bottom surface of plate unit 39, and diaphragm 33 and fixed electrode film 40 constitute a capacitor. In an area around plate unit 39, a whole outer peripheral edge of the top surface of silicon substrate 32 is exposed from plate unit 39. On the top surface of the substrate 32, insulating sheet 47 made of the insulating material is formed in a part of an area exposed from plate unit 39, and electrode pad 48 electrically connected to diaphragm 33 and electrode pad 49 electrically connected to fixed electrode film 40 are provided on a top surface of insulating sheet 47.
Abstract translation: 膜片33设置在硅基板32的上表面，板单元39固定在硅基板32的上表面上，以便间隙地覆盖可动电极膜。 平板单元39由绝缘材料制成。 固定电极膜40形成在板单元39的底面上，隔膜33和固定电极膜40构成电容器。 在板单元39周围的区域中，硅基板32的上表面的整个外周边缘从板单元39暴露。在基板32的顶表面上，由绝缘材料制成的绝缘片47形成在 在绝缘片47的上表面上设置从板单元39暴露的区域，电连接到隔膜33的电极焊盘48和与固定电极膜40电连接的电极焊盘49。
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公开(公告)号：US20150230011A1
公开(公告)日：2015-08-13
申请号：US14425641
申请日：2013-08-12
Applicant: OMRON Corporation
Inventor： Tadashi Inoue , Takashi Kasai
IPC: H04R1/00
CPC classification number: H04R1/00 , H04R19/005 , H04R2201/003
Abstract: An acoustic transducer has a substrate having a cavity that is open at a top of the substrate, a vibration electrode film provided above the substrate so as to cover the cavity, and a fixed electrode film provided a distance above the vibration electrode film. A gap is formed between an upper surface of the substrate and a lower surface of the vibration electrode film around the cavity. In the gap across which the upper surface of the substrate and the lower surface of the vibration electrode film face each other, a narrow portion of the gap that is narrower than another portion of the gap is disposed. The narrow portion of the gap extends linearly.
Abstract translation: 声换能器具有基板，该基板在基板的顶部开口，在该基板上设置以覆盖该空腔的振动电极膜，以及设置在振动电极膜上方的距离的固定电极膜。 在基板的上表面和周围的振动电极膜的下表面之间形成间隙。 在基板的上表面和振动电极膜的下表面彼此面对的间隙中，设置比间隙的另一部分窄的间隙的狭窄部分。 间隙的狭窄部分线性延伸。
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公开(公告)号：US09843868B2
公开(公告)日：2017-12-12
申请号：US15017514
申请日：2016-02-05
Applicant: Omron Corporation , STMICROELECTRONICS S.R.L.
Inventor： Takashi Kasai , Shobu Sato , Yuki Uchida , Igino Padovani , Filippo David , Sebastiano Conti
CPC classification number: H04R19/04 , B81B3/0021 , H04R1/023 , H04R1/086 , H04R3/00 , H04R3/005 , H04R19/005 , H04R19/016 , H04R31/00 , H04R2201/003 , H04R2499/11
Abstract: Provided is an acoustic transducer including: a semiconductor substrate; a vibrating membrane provided above the semiconductor substrate, including a vibrating electrode; and a fixed membrane provided above the semiconductor substrate, including a fixed electrode, the acoustic transducer detecting a sound wave according to changes in capacitances between the vibrating electrode and the fixed electrode, converting the sound wave into electrical signals, and outputting the electrical signals. At least one of the vibrating electrode and the fixed electrode is divided into a plurality of divided electrodes, and the plurality of divided electrodes outputting the electrical signals.
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Patent Agency Ranking
公开(公告)号：US09641939B2
公开(公告)日：2017-05-02
申请号：US14859474
申请日：2015-09-21
Applicant: OMRON Corporation
Inventor： Yuki Uchida , Koji Momotani , Takashi Kasai
CPC classification number: H04R19/005 , H04R19/013 , H04R19/016 , H04R2201/003
Abstract: An acoustic transducer includes a slit having higher passage resistance than in conventional structures and having a lower rate of decrease in the passage resistance than in conventional structures when, for example, the vibration electrode plate warps. The acoustic transducer includes a stationary electrode plate, and a vibration electrode plate facing the stationary electrode plate with a space between the electrode plates. The vibration electrode plate includes a slit that allows sound to pass through. The vibration electrode plate includes a resistance increasing section including at least one pair of high-resistance surfaces that constitute side surfaces of the slit in a width direction thereof, and are thicker than a middle portion of the vibration electrode plate.
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公开(公告)号：US09493338B2
公开(公告)日：2016-11-15
申请号：US14373547
申请日：2012-11-14
Applicant: OMRON Corporation
Inventor： Yusuke Nakagawa , Takashi Kasai , Yoshitaka Tatara
CPC classification number: B81B3/0021 , B81B3/0056 , B81B2201/0264 , B81B2203/0127 , B81C1/00158 , G01H11/06 , G01L9/12 , H04R19/005 , H04R19/04 , H04R31/00
Abstract: A capacitance type sensor has a semiconductor substrate having a vertically opened penetration hole, a movable electrode film arranged above the penetration hole such that a periphery portion opposes to a top surface of the semiconductor substrate with a gap provided, and a fixed electrode film arranged above the movable electrode film with a gap with respect to the movable electrode film. A concave portion having at least a part thereof formed by an inclined surface is provided in the top surface of the semiconductor substrate in a region of the top surface of the semiconductor substrate which overlaps the periphery portion of the movable electrode film.
Abstract translation: 电容式传感器具有具有垂直开口的通孔的半导体基板，布置在贯通孔的上方的可动电极膜，使得周边部分与设置有间隙的半导体基板的上表面相对，并且设置在上方的固定电极膜 相对于可动电极膜具有间隙的可动电极膜。 在半导体衬底的顶表面与可动电极膜的周边部分重叠的区域中，在半导体衬底的顶表面中设置至少部分由倾斜表面形成的凹部。
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公开(公告)号：US09380380B2
公开(公告)日：2016-06-28
申请号：US13936110
申请日：2013-07-05
Applicant: Omron Corporation , STMICROELECTRONICS S.R.L.
Inventor： Takashi Kasai , Shobu Sato , Yuki Uchida , Igino Padovani , Filippo David , Sebastiano Conti , Martino Zerbini , Luca Molinari
CPC classification number: H04R3/00 , H01L2224/48137 , H01L2924/16152 , H04R1/086 , H04R19/005 , H04R19/016 , H04R31/00
Abstract: The present disclosure is directed to an acoustic transducer configured to detect a sound wave according to changes in capacitances between a vibrating electrode and a fixed electrode. At least one of the vibrating electrode and the fixed electrode being divided into a plurality of divided electrodes, and the plurality of divided electrodes outputting electrical signals. The disclosure includes a digital interface circuit coupled to the divided electrodes. The circuit includes a recombination stage, which supplies a mixed signal by combining the first digital processed signal and the second digital processed signal with a respective weight that is a function of a first level value of the first processed signal. An output stage is included, which supplies, selectively and alternatively, a first processed signal, a second processed signal, or a mixed signal.
Abstract translation: 本公开涉及一种被配置为根据振动电极和固定电极之间的电容的变化来检测声波的声学换能器。 振动电极和固定电极中的至少一个分为多个分割电极，多个分割电极输出电信号。 本公开包括耦合到分割电极的数字接口电路。 电路包括复合级，其通过将第一数字处理信号和第二数字处理信号组合为具有作为第一处理信号的第一电平值的函数的相应权重来提供混合信号。 包括输出级，其选择性地或替代地提供第一处理信号，第二处理信号或混合信号。
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公开(公告)号：US09374644B2
公开(公告)日：2016-06-21
申请号：US14481249
申请日：2014-09-09
Applicant: OMRON Corporation
Inventor： Takashi Kasai
CPC classification number: H04R19/04 , H04R1/086 , H04R1/245 , H04R19/005 , H04R31/00
Abstract: An acoustic transducer has a vibrating film and a fixed film formed above an opening portion of a substrate, and at least a first sensing portion and a second sensing portion that detect sound waves using change in capacitance between a vibrating electrode provided in the vibrating film and a fixed electrode provided in the fixed film, convert the sound waves into electrical signals, and output the electrical signals. In the first sensing portion and the second sensing portion, the fixed film is used in common, and the vibrating electrode is divided into a first sensing region and a second sensing region that respectively correspond to the first sensing portion and the second sensing portion. In the first sensing portion, a protrusion portion that protrudes toward the vibrating electrode is provided on a region of the fixed film that opposes the first sensing region.
Abstract translation: 声换能器具有形成在基板的开口部分上方的振动膜和固定膜，至少第一感测部分和第二感测部分使用设置在振动膜中的振动电极之间的电容变化来检测声波， 设置在固定膜中的固定电极将声波转换成电信号，并输出电信号。 在第一感测部分和第二感测部分中，固定膜被共同使用，并且振动电极被分成分别对应于第一感测部分和第二感测部分的第一感测区域和第二感测区域。 在第一感测部分中，朝向振动电极突出的突出部分设置在与第一感测区域相对的固定膜的区域上。
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公开(公告)号：US09260292B2
公开(公告)日：2016-02-16
申请号：US14376945
申请日：2013-02-26
Applicant: OMRON Corporation
Inventor： Takashi Kasai
CPC classification number: B81B7/0058 , B81B7/0064 , B81B2201/0257 , B81B2201/0292 , B81B2207/115 , B81C1/00246 , H04R1/04 , H04R1/06 , H04R19/005 , H04R19/04 , H04R31/006
Abstract: A sensor device has a substrate, a sensor section provided on an upper surface of the substrate, a circuit section provided on the upper surface of the substrate, a plurality of connection pads that electrically conduct with the sensor section or the circuit section, and a metal protective film covering at least a part of the circuit section from above.
Abstract translation: 传感器装置具有衬底，设置在衬底的上表面上的传感器部分，设置在衬底的上表面上的电路部分，与传感器部分或电路部分导电的多个连接焊盘，以及 金属保护膜从上方覆盖电路部分的至少一部分。
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